Doping materials

Industry

CPC
B81C2201/0171

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0171Doping materials

Industries

Patents Grantslast 30 patents

Information Patent Grant
MEMS resonator with colocated temperature sensor
- Patent number 12,095,447
- Issue date Sep 17, 2024
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator
- Patent number 11,975,965
- Issue date May 7, 2024
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bipolar transistor type MEMS pressure sensor and preparation method...
- Patent number 11,965,797
- Issue date Apr 23, 2024
- Wuxi Sencoch Semiconductor Co., Ltd.
- Tongqing Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micromachined ultrasonic transducer and method of fabric...
- Patent number 11,944,998
- Issue date Apr 2, 2024
- Korea Institute of Science and Technology
- Byung Chul Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator
- Patent number 11,724,934
- Issue date Aug 15, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical structure with bonded cover
- Patent number 11,685,650
- Issue date Jun 27, 2023
- SiTime Corporation
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator
- Patent number 11,584,642
- Issue date Feb 21, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Encapsulated microelectromechanical structure
- Patent number 10,766,768
- Issue date Sep 8, 2020
- SiTime Corporation
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing methods to apply stress engineering to self-aligned m...
- Patent number 10,734,228
- Issue date Aug 4, 2020
- Tokyo Electron Limited
- Eric Chih-Fang Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator
- Patent number 10,676,349
- Issue date Jun 9, 2020
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Encapsulated microelectromechanical structure
- Patent number 10,450,190
- Issue date Oct 22, 2019
- SiTime Corporation
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micro electro-mechanical system
- Patent number 10,167,191
- Issue date Jan 1, 2019
- Kionix, Inc.
- Martin Heller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pseudo SOI process
- Patent number 10,053,360
- Issue date Aug 21, 2018
- Kionix, Inc.
- Martin Heller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for making vias using a doped substrate
- Patent number 9,950,923
- Issue date Apr 24, 2018
- Innovative Micro Technology
- Christopher S. Gudeman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure
- Patent number 9,908,770
- Issue date Mar 6, 2018
- Robert Bosch GmbH
- David Bendes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with constant capacitance
- Patent number 9,659,717
- Issue date May 23, 2017
- Analog Devices Global
- Check F. Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low-stress doped ultrananocrystalline diamond
- Patent number 9,475,690
- Issue date Oct 25, 2016
- UChicago Argonne, LLC
- Anirudha V. Sumant
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Encapsulated microelectromechanical structure
- Patent number 9,440,845
- Issue date Sep 13, 2016
- SiTime Corporation
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Temperature compensation in a semiconductor micromechanical resonat...
- Patent number 9,319,020
- Issue date Apr 19, 2016
- Georgia Tech Research Corporation
- Farrokh Ayazi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nanostructures and methods of making the same
- Patent number 9,272,900
- Issue date Mar 1, 2016
- Hewlett Packard Enterprise Development LP
- Shih-Yuan Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS ELEMENT AND PIEZOELECTRIC ACOUSTIC DEVICE
- Publication number 20250026631
- Publication date Jan 23, 2025
- Murata Manufacturing Co., Ltd.
- Hiroshi MATSUBARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR COMPONENT AND METHOD FOR MANUFACTURING A SEMICONDUCTO...
- Publication number 20240190702
- Publication date Jun 13, 2024
- ROBERT BOSCH GmbH
- Gregor Schuermann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL STRUCTURE WITH BONDED COVER
- Publication number 20240002218
- Publication date Jan 4, 2024
- SiTime Corporation
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS RESONATOR
- Publication number 20230416081
- Publication date Dec 28, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS RESONATOR
- Publication number 20230183060
- Publication date Jun 15, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENCAPSULATED MICROELECTROMECHANICAL STRUCTURE
- Publication number 20210221678
- Publication date Jul 22, 2021
- SiTime Corporation
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF FABRIC...
- Publication number 20200298275
- Publication date Sep 24, 2020
- Korea Institute of Science and Technology
- Byung Chul LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENCAPSULATED MICROELECTROMECHANICAL STRUCTURE
- Publication number 20200079646
- Publication date Mar 12, 2020
- SiTime Corporation
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENCAPSULATED MICROELECTROMECHANICAL STRUCTURE
- Publication number 20190055121
- Publication date Feb 21, 2019
- SiTime Corporation
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND SYSTEMS FOR CHEMICALLY ENCODING HIGH-RESOLUTION SHAPES...
- Publication number 20190027559
- Publication date Jan 24, 2019
- The University of North Carolina at Chapel Hill
- James F. Cahoon
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A MICRO ELECTRO-MECHANICAL SYSTEM
- Publication number 20180282154
- Publication date Oct 4, 2018
- Kionix, Inc.
- Martin Heller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL STRUCTURE
- Publication number 20170225943
- Publication date Aug 10, 2017
- David Bendes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND SYSTEMS FOR CHEMICALLY ENCODING HIGH-RESOLUTION SHAPES...
- Publication number 20160190245
- Publication date Jun 30, 2016
- THE UNIVERSITY OF NORTH CAROLINA AT CHAPEL HILL
- James F. Cahoon
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENCAPSULATED MICROELECTROMECHANICAL STRUCTURE
- Publication number 20160167950
- Publication date Jun 16, 2016
- SiTime Corporation
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW-STRESS DOPED ULTRANANOCRYSTALLINE DIAMOND
- Publication number 20160101974
- Publication date Apr 14, 2016
- UChicago Argonne, LLC
- Anirudha V. Sumant
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device with Constant Capacitance
- Publication number 20150235779
- Publication date Aug 20, 2015
- ANALOG DEVICES GLOBAL
- Check F. Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Temperature Compensation in a Semiconductor Micromechanical Resonat...
- Publication number 20130099629
- Publication date Apr 25, 2013
- Farrokh Ayazi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NANOSTRUCTURES AND METHODS OF MAKING THE SAME
- Publication number 20100295018
- Publication date Nov 25, 2010
- Shih-Yuan Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF DOPING AND APPARATUS FOR DOPING
- Publication number 20100266768
- Publication date Oct 21, 2010
- Abu Samah Zuruzi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Wafer encapsulated microelectromechanical structure and method of m...
- Publication number 20070181962
- Publication date Aug 9, 2007
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Wafer encapsulated microelectromechanical structure and method of m...
- Publication number 20070170530
- Publication date Jul 26, 2007
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Wafer encapsulated microelectromechanical structure and method of m...
- Publication number 20070170532
- Publication date Jul 26, 2007
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Wafer encapsulated microelectromechanical structure and method of m...
- Publication number 20070170440
- Publication date Jul 26, 2007
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Wafer encapsulated microelectromechanical structure and method of m...
- Publication number 20070170439
- Publication date Jul 26, 2007
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Wafer encapsulated microelectromechanical structure and method of m...
- Publication number 20070170528
- Publication date Jul 26, 2007
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Wafer encapsulated microelectromechanical structure and method of m...
- Publication number 20070170531
- Publication date Jul 26, 2007
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Wafer encapsulated microelectromechanical structure and method of m...
- Publication number 20070170529
- Publication date Jul 26, 2007
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Wafer encapsulated microelectromechanical structure and method of m...
- Publication number 20070170438
- Publication date Jul 26, 2007
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Wafer encapsulated microelectromechanical structure and method of m...
- Publication number 20070172976
- Publication date Jul 26, 2007
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Doping materials

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS resonator with colocated temperature sensor

MEMS resonator

Bipolar transistor type MEMS pressure sensor and preparation method...

Capacitive micromachined ultrasonic transducer and method of fabric...

MEMS resonator

Microelectromechanical structure with bonded cover

MEMS resonator

Encapsulated microelectromechanical structure

Manufacturing methods to apply stress engineering to self-aligned m...

MEMS resonator

Encapsulated microelectromechanical structure

Method for manufacturing a micro electro-mechanical system

Pseudo SOI process

Method for making vias using a doped substrate

Micromechanical structure

MEMS device with constant capacitance

Low-stress doped ultrananocrystalline diamond

Encapsulated microelectromechanical structure

Temperature compensation in a semiconductor micromechanical resonat...

Nanostructures and methods of making the same

Patents Applicationslast 30 patents

MEMS ELEMENT AND PIEZOELECTRIC ACOUSTIC DEVICE

SEMICONDUCTOR COMPONENT AND METHOD FOR MANUFACTURING A SEMICONDUCTO...

MICROMECHANICAL STRUCTURE WITH BONDED COVER

MEMS RESONATOR

MEMS RESONATOR

ENCAPSULATED MICROELECTROMECHANICAL STRUCTURE

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AND METHOD OF FABRIC...

ENCAPSULATED MICROELECTROMECHANICAL STRUCTURE

ENCAPSULATED MICROELECTROMECHANICAL STRUCTURE

METHODS AND SYSTEMS FOR CHEMICALLY ENCODING HIGH-RESOLUTION SHAPES...

METHOD FOR MANUFACTURING A MICRO ELECTRO-MECHANICAL SYSTEM

MICROMECHANICAL STRUCTURE

METHODS AND SYSTEMS FOR CHEMICALLY ENCODING HIGH-RESOLUTION SHAPES...

ENCAPSULATED MICROELECTROMECHANICAL STRUCTURE

LOW-STRESS DOPED ULTRANANOCRYSTALLINE DIAMOND

MEMS Device with Constant Capacitance

Temperature Compensation in a Semiconductor Micromechanical Resonat...

NANOSTRUCTURES AND METHODS OF MAKING THE SAME

METHOD OF DOPING AND APPARATUS FOR DOPING

Wafer encapsulated microelectromechanical structure and method of m...

Wafer encapsulated microelectromechanical structure and method of m...

Wafer encapsulated microelectromechanical structure and method of m...

Wafer encapsulated microelectromechanical structure and method of m...

Wafer encapsulated microelectromechanical structure and method of m...

Wafer encapsulated microelectromechanical structure and method of m...

Wafer encapsulated microelectromechanical structure and method of m...

Wafer encapsulated microelectromechanical structure and method of m...

Wafer encapsulated microelectromechanical structure and method of m...

Wafer encapsulated microelectromechanical structure and method of m...