Dry etching

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CPC
B81C2201/0132

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0132Dry etching

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing a microstructure
- Patent number 12,358,784
- Issue date Jul 15, 2025
- MEMSSTAR LIMITED
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of MEMS structures from fused silica for inertial sensors
- Patent number 12,351,451
- Issue date Jul 8, 2025
- Atlantic Inertial Systems Limited
- Christopher Paul Fell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micromachined ultrasonic transducer and method of manufa...
- Patent number 12,350,710
- Issue date Jul 8, 2025
- Vermon S.A.
- Dominique Gross
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Embedded permeable polysilicon layer in MEMS device for multiple ca...
- Patent number 12,330,934
- Issue date Jun 17, 2025
- STMICROELECTRONICS INTERNATIONAL N.V.
- Federico Vercesi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS display device with an etch-stop-layer
- Patent number 12,298,493
- Issue date May 13, 2025
- IGNITE, Inc.
- Fusao Ishii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a micro-fluid probe
- Patent number 12,286,344
- Issue date Apr 29, 2025
- CYTOSURGE AG
- Edin Sarajlic
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical microphone with membrane trench reinforcemen...
- Patent number 12,269,734
- Issue date Apr 8, 2025
- TDK Corporation
- Pirmin Rombach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing mirror device
- Patent number 12,264,065
- Issue date Apr 1, 2025
- Hamamatsu Photonics K.K.
- Daiki Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for fabricating a MEMS device
- Patent number 12,258,266
- Issue date Mar 25, 2025
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Top notch slit profile for MEMS device
- Patent number 12,238,478
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing semiconductor substrate, method for manufa...
- Patent number 12,187,607
- Issue date Jan 7, 2025
- Hamamatsu Photonics K.K.
- Nao Inoue
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for fabricating a MEMS device
- Patent number 12,180,069
- Issue date Dec 31, 2024
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sharp, vertically aligned nanowire electrode arrays, high-yield fab...
- Patent number 12,157,666
- Issue date Dec 3, 2024
- The Regents of the University of California
- Shadi Dayeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multiple layer electrode transducers
- Patent number 12,139,394
- Issue date Nov 12, 2024
- Soundskrit Inc.
- Wan-Thai Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor with high stability
- Patent number 12,139,398
- Issue date Nov 12, 2024
- Invensense, Inc.
- Weng Shen Su
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
- Patent number 12,134,555
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Formation of antireflective surfaces
- Patent number 12,122,668
- Issue date Oct 22, 2024
- Brookhaven Science Associates, LLC
- Charles T. Black
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating display device having patterned lithium-based...
- Patent number 12,117,630
- Issue date Oct 15, 2024
- Magic Leap, Inc.
- Mauro Melli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon MEMS gyroscopes with upper and lower sense plates
- Patent number 12,092,460
- Issue date Sep 17, 2024
- The Charles Stark Draper Laboratory, Inc.
- Eugene H. Cook
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thin-film crystalline structure with surfaces having selected plane...
- Patent number 12,057,147
- Issue date Aug 6, 2024
- Seagate Technology LLC
- Tong Zhao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
On-chip integrated silicon carbide pressure and temperature sensors
- Patent number 12,044,585
- Issue date Jul 23, 2024
- United States Government Administrator of NASA
- Robert S. Okojie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Precision fabrication of nanosieves
- Patent number 12,042,770
- Issue date Jul 23, 2024
- International Business Machines Corporation
- Joshua T. Smith
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etching method
- Patent number 12,020,942
- Issue date Jun 25, 2024
- ULVAC, Inc.
- Taichi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Composite spring structure to reinforce mechanical robustness of a...
- Patent number 11,993,510
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual micro-electro mechanical system and manufacturing method thereof
- Patent number 11,993,512
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yang-Che Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system (MEMS) structure and method of formation
- Patent number 11,953,674
- Issue date Apr 9, 2024
- Texas Instruments Incorporated
- Jose A. Martinez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Engineered substrates, free-standing semiconductor microstructures,...
- Patent number 11,952,268
- Issue date Apr 9, 2024
- Lawrence Semiconductor Research Laboratory, Inc.
- Chantal Arena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method with stealth dicing process for fabricating MEMS semiconduct...
- Patent number 11,939,216
- Issue date Mar 26, 2024
- Infineon Technologies AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having a metallization structure embedded in a dielectr...
- Patent number 11,932,534
- Issue date Mar 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hung-Hua Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for scanning MEMS cantilevers
- Patent number 11,912,566
- Issue date Feb 27, 2024
- Magic Leap, Inc.
- Steven Alexander-Boyd Hickman
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF
- Publication number 20250230037
- Publication date Jul 17, 2025
- Vanguard International Semiconductor Corporation
- ROHIT PULIKKAL KIZHAKKEYIL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ARM FOR MICROELECTROMECHANICAL SYSTEM
- Publication number 20250230039
- Publication date Jul 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Yu Liao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20250197195
- Publication date Jun 19, 2025
- AAC TECHNOLOGIES PTE. LTD
- Veronica Tan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) HAVING VERTICAL STOPS AND A...
- Publication number 20250187901
- Publication date Jun 12, 2025
- Lawrence Semiconductor Research Laboratory, Inc.
- Bishnu Prasanna Gogoi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT, AND MICROE...
- Publication number 20250171298
- Publication date May 29, 2025
- ROBERT BOSCH GmbH
- Andreas Winden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELECTRIC FIELD SENSOR USING RESONANT TORSIONAL SHUTTER AND MET...
- Publication number 20250171296
- Publication date May 29, 2025
- Industry-Academic Cooperation Foundation, Yonsei University
- Jongbaeg KIM
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
- Publication number 20250145456
- Publication date May 8, 2025
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE HAVING CONTACT PADS THAT ARE PROTEC...
- Publication number 20250145453
- Publication date May 8, 2025
- STMicroelectronics International N.V.
- Lorenzo CORSO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BLACK SILICON-BASED NANOPATTERNED ELECTRODES
- Publication number 20250134407
- Publication date May 1, 2025
- Ecate LLC
- Alessandro MAGGI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Membrane Device Fabrication
- Publication number 20250136437
- Publication date May 1, 2025
- X-FAB Global Services GmbH
- Yves Dufour
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURES WITH GAPS
- Publication number 20250109012
- Publication date Apr 3, 2025
- Murata Manufacturing Co., Ltd.
- Mikko PARTANEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE FOR NANOSCALE THERMAL MEASUREMENTS AND ASSOCIATED METHOD FOR...
- Publication number 20250093212
- Publication date Mar 20, 2025
- Centre National de la Recherche Scientifique
- Olivier BOURGEOIS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
- Publication number 20250074766
- Publication date Mar 6, 2025
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20250074764
- Publication date Mar 6, 2025
- Beijing BOE Technology Development Co., Ltd.
- Wenbo LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FOUNDRY-COMPATIBLE THROUGH SILICON VIA PROCESS FOR INTEGRATED MICRO...
- Publication number 20250059023
- Publication date Feb 20, 2025
- Vibrant Microsystems Inc.
- Joseph Doll
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS COMPONENT WITH A MEMBRANE SPRING AND METHOD FOR PRODUCING A ME...
- Publication number 20250042721
- Publication date Feb 6, 2025
- ROBERT BOSCH GmbH
- Stefan Pinter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PROCESSING SILICON SUBSTRATE AND METHOD FOR PROCESSING L...
- Publication number 20250033956
- Publication date Jan 30, 2025
- Canon Kabushiki Kaisha
- Atsunori Terasaki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORMATION OF ANTIREFLECTIVE SURFACES
- Publication number 20250033955
- Publication date Jan 30, 2025
- Brookhaven Science Associates, LLC
- Charles T. Black
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANCHOR STRUCTURE
- Publication number 20250033951
- Publication date Jan 30, 2025
- Bishnu Prasanna Gogoi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE, MICROELECTROMECHANICAL MICROPHONE AN...
- Publication number 20250030987
- Publication date Jan 23, 2025
- ROBERT BOSCH GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Array Structures for Gyroscopes with High Resonant Frequencies
- Publication number 20250026629
- Publication date Jan 23, 2025
- NXP USA, Inc.
- Jun Tang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FOUNDRY-COMPATIBLE PROCESS FOR INTEGRATED MICRO-SPEAKER AND MICROPHONE
- Publication number 20250030998
- Publication date Jan 23, 2025
- Vibrant Microsystems Inc.
- Joseph Doll
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT AND PIEZOELECTRIC ACOUSTIC DEVICE
- Publication number 20250026631
- Publication date Jan 23, 2025
- Murata Manufacturing Co., Ltd.
- Hiroshi MATSUBARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS
- Publication number 20250019224
- Publication date Jan 16, 2025
- BOE TECHNOLOGY GROUP CO., LTD.
- Jianxing LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF
- Publication number 20250011165
- Publication date Jan 9, 2025
- Vanguard International Semiconductor Corporation
- JIA JIE XIA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DIE STACKING WITH CONTROLLED ANGULAR ALIGNMENT
- Publication number 20240425367
- Publication date Dec 26, 2024
- NXP USA, Inc.
- Chayathorn Saklang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...
- Publication number 20240425365
- Publication date Dec 26, 2024
- SENSONICS TRANSDUCERS PRIVATE LIMITED
- Brishbhan Singh PANWAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FABRICATING DISPLAY DEVICE HAVING PATTERNED LITHIUM-BASED...
- Publication number 20240418915
- Publication date Dec 19, 2024
- Magic Leap, Inc.
- Mauro Melli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD FOR MANUFACTURING MEMS DEVICE
- Publication number 20240400374
- Publication date Dec 5, 2024
- Rohm Co., Ltd.
- Toma FUJITA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR AND METHOD FOR FORMING THE SAME
- Publication number 20240391756
- Publication date Nov 28, 2024
- AAC TECHNOLOGIES PTE. LTD
- ZaiXiang Pua
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Dry etching

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of manufacturing a microstructure

Fabrication of MEMS structures from fused silica for inertial sensors

Capacitive micromachined ultrasonic transducer and method of manufa...

Embedded permeable polysilicon layer in MEMS device for multiple ca...

MEMS display device with an etch-stop-layer

Method of manufacturing a micro-fluid probe

Microelectromechanical microphone with membrane trench reinforcemen...

Method for manufacturing mirror device

Method and system for fabricating a MEMS device

Top notch slit profile for MEMS device

Method for manufacturing semiconductor substrate, method for manufa...

Method and system for fabricating a MEMS device

Sharp, vertically aligned nanowire electrode arrays, high-yield fab...

Multiple layer electrode transducers

Pressure sensor with high stability

Method and structure for CMOS-MEMS thin film encapsulation

Formation of antireflective surfaces

Method of fabricating display device having patterned lithium-based...

Silicon MEMS gyroscopes with upper and lower sense plates

Thin-film crystalline structure with surfaces having selected plane...

On-chip integrated silicon carbide pressure and temperature sensors

Precision fabrication of nanosieves

Etching method

Composite spring structure to reinforce mechanical robustness of a...

Dual micro-electro mechanical system and manufacturing method thereof

Microelectromechanical system (MEMS) structure and method of formation

Engineered substrates, free-standing semiconductor microstructures,...

Method with stealth dicing process for fabricating MEMS semiconduct...

MEMS device having a metallization structure embedded in a dielectr...

Method and system for scanning MEMS cantilevers

Patents Applicationslast 30 patents

MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF

MEMS ARM FOR MICROELECTROMECHANICAL SYSTEM

MEMS DEVICE AND MANUFACTURING METHOD THEREOF

MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) HAVING VERTICAL STOPS AND A...

METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT, AND MICROE...

MEMS ELECTRIC FIELD SENSOR USING RESONANT TORSIONAL SHUTTER AND MET...

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE

MICRO-ELECTRO-MECHANICAL DEVICE HAVING CONTACT PADS THAT ARE PROTEC...

BLACK SILICON-BASED NANOPATTERNED ELECTRODES

Membrane Device Fabrication

MEMS STRUCTURES WITH GAPS

DEVICE FOR NANOSCALE THERMAL MEASUREMENTS AND ASSOCIATED METHOD FOR...

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE

MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

FOUNDRY-COMPATIBLE THROUGH SILICON VIA PROCESS FOR INTEGRATED MICRO...

MEMS COMPONENT WITH A MEMBRANE SPRING AND METHOD FOR PRODUCING A ME...

METHOD FOR PROCESSING SILICON SUBSTRATE AND METHOD FOR PROCESSING L...

FORMATION OF ANTIREFLECTIVE SURFACES

ANCHOR STRUCTURE

MICROELECTROMECHANICAL DEVICE, MICROELECTROMECHANICAL MICROPHONE AN...

MEMS Array Structures for Gyroscopes with High Resonant Frequencies

FOUNDRY-COMPATIBLE PROCESS FOR INTEGRATED MICRO-SPEAKER AND MICROPHONE

MEMS ELEMENT AND PIEZOELECTRIC ACOUSTIC DEVICE

MEMS DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS

MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF

DIE STACKING WITH CONTROLLED ANGULAR ALIGNMENT

LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...

METHOD OF FABRICATING DISPLAY DEVICE HAVING PATTERNED LITHIUM-BASED...

MEMS DEVICE AND METHOD FOR MANUFACTURING MEMS DEVICE

MEMS SENSOR AND METHOD FOR FORMING THE SAME