Dry etching

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CPC
B81C2201/0132

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0132Dry etching

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for fabricating a MEMS device
- Patent number 12,180,069
- Issue date Dec 31, 2024
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sharp, vertically aligned nanowire electrode arrays, high-yield fab...
- Patent number 12,157,666
- Issue date Dec 3, 2024
- The Regents of the University of California
- Shadi Dayeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multiple layer electrode transducers
- Patent number 12,139,394
- Issue date Nov 12, 2024
- Soundskrit Inc.
- Wan-Thai Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor with high stability
- Patent number 12,139,398
- Issue date Nov 12, 2024
- Invensense, Inc.
- Weng Shen Su
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
- Patent number 12,134,555
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Formation of antireflective surfaces
- Patent number 12,122,668
- Issue date Oct 22, 2024
- Brookhaven Science Associates, LLC
- Charles T. Black
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating display device having patterned lithium-based...
- Patent number 12,117,630
- Issue date Oct 15, 2024
- Magic Leap, Inc.
- Mauro Melli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon MEMS gyroscopes with upper and lower sense plates
- Patent number 12,092,460
- Issue date Sep 17, 2024
- The Charles Stark Draper Laboratory, Inc.
- Eugene H. Cook
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thin-film crystalline structure with surfaces having selected plane...
- Patent number 12,057,147
- Issue date Aug 6, 2024
- Seagate Technology LLC
- Tong Zhao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
On-chip integrated silicon carbide pressure and temperature sensors
- Patent number 12,044,585
- Issue date Jul 23, 2024
- United States Government Administrator of NASA
- Robert S. Okojie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Precision fabrication of nanosieves
- Patent number 12,042,770
- Issue date Jul 23, 2024
- International Business Machines Corporation
- Joshua T. Smith
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etching method
- Patent number 12,020,942
- Issue date Jun 25, 2024
- ULVAC, Inc.
- Taichi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Composite spring structure to reinforce mechanical robustness of a...
- Patent number 11,993,510
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual micro-electro mechanical system and manufacturing method thereof
- Patent number 11,993,512
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yang-Che Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system (MEMS) structure and method of formation
- Patent number 11,953,674
- Issue date Apr 9, 2024
- Texas Instruments Incorporated
- Jose A. Martinez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Engineered substrates, free-standing semiconductor microstructures,...
- Patent number 11,952,268
- Issue date Apr 9, 2024
- Lawrence Semiconductor Research Laboratory, Inc.
- Chantal Arena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method with stealth dicing process for fabricating MEMS semiconduct...
- Patent number 11,939,216
- Issue date Mar 26, 2024
- Infineon Technologies AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having a metallization structure embedded in a dielectr...
- Patent number 11,932,534
- Issue date Mar 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hung-Hua Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for scanning MEMS cantilevers
- Patent number 11,912,566
- Issue date Feb 27, 2024
- Magic Leap, Inc.
- Steven Alexander-Boyd Hickman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Production method for a micromechanical component
- Patent number 11,905,166
- Issue date Feb 20, 2024
- Robert Bosch GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing an integrated MEMS transducer device and i...
- Patent number 11,878,906
- Issue date Jan 23, 2024
- Sciosense B.V.
- Kailash Vijayakumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Chip package and manufacturing method thereof
- Patent number 11,873,212
- Issue date Jan 16, 2024
- Xintec Inc.
- Wei-Luen Suen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of depositing nanotwinned nickel-molybdenum-tungsten alloys
- Patent number 11,851,320
- Issue date Dec 26, 2023
- The Johns Hopkins University
- Gi-Dong Sim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dielectric comb for MEMS device
- Patent number 11,825,266
- Issue date Nov 21, 2023
- Knowles Electronics, LLC
- Mohsin Nawaz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Package structure of micro speaker and method for forming the same
- Patent number 11,818,563
- Issue date Nov 14, 2023
- FORTEMEDIA, INC.
- Li-Jen Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of forming MEMS diaphragms including corrugations
- Patent number 11,787,688
- Issue date Oct 17, 2023
- Knowles Electronics, LLC
- Sung Bok Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with particle filter and method of manufacture
- Patent number 11,787,689
- Issue date Oct 17, 2023
- TDK Corporation
- Wolfgang Pahl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Calcite channel structures with heterogeneous wettability
- Patent number 11,774,437
- Issue date Oct 3, 2023
- Saudi Arabian Oil Company
- Dong Kyu Cha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Deep reactive ion etching process for fluid ejection heads
- Patent number 11,746,005
- Issue date Sep 5, 2023
- FUNAI ELECTRIC CO. LTD
- David L. Bernard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon substrate having cavity and cavity SOI substrate including...
- Patent number 11,738,993
- Issue date Aug 29, 2023
- Murata Manufacturing Co., Ltd.
- Yutaka Kishimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
DIE STACKING WITH CONTROLLED ANGULAR ALIGNMENT
- Publication number 20240425367
- Publication date Dec 26, 2024
- NXP USA, Inc.
- Chayathorn Saklang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...
- Publication number 20240425365
- Publication date Dec 26, 2024
- SENSONICS TRANSDUCERS PRIVATE LIMITED
- Brishbhan Singh PANWAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FABRICATING DISPLAY DEVICE HAVING PATTERNED LITHIUM-BASED...
- Publication number 20240418915
- Publication date Dec 19, 2024
- Magic Leap, Inc.
- Mauro Melli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD FOR MANUFACTURING MEMS DEVICE
- Publication number 20240400374
- Publication date Dec 5, 2024
- Rohm Co., Ltd.
- Toma FUJITA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR AND METHOD FOR FORMING THE SAME
- Publication number 20240391756
- Publication date Nov 28, 2024
- AAC TECHNOLOGIES PTE. LTD
- ZaiXiang Pua
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TOP NOTCH SLIT PROFILE FOR MEMS DEVICE
- Publication number 20240381034
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device and Fabrication Process with Reduced Z-Axis Stiction
- Publication number 20240375937
- Publication date Nov 14, 2024
- NXP USA, Inc.
- Lianjun Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-LEVEL MEMS PROCESS
- Publication number 20240351864
- Publication date Oct 24, 2024
- InvenSense, Inc.
- Roberto Martini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE
- Publication number 20240343558
- Publication date Oct 17, 2024
- Murata Manufacturing Co., Ltd.
- Petteri KILPINEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20240336474
- Publication date Oct 10, 2024
- AAC TECHNOLOGIES PTE. LTD
- Houming Chong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THIN-FILM CRYSTALLINE STRUCTURE WITH SURFACES HAVING SELECTED PLANE...
- Publication number 20240339125
- Publication date Oct 10, 2024
- SEAGATE TECHNOLOGY LLC
- Tong Zhao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE SENSING MODULE AND MANUFACTURING METHOD THEREOF
- Publication number 20240327205
- Publication date Oct 3, 2024
- Coretronic MEMS Corporation
- Mei-Ling Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT, OPTICAL SCANNING DEVICE, AND DISTANCE MEASURING DEVICE
- Publication number 20240317577
- Publication date Sep 26, 2024
- Mitsubishi Electric Corporation
- Yusuke SHIRAYANAGI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ETCHING METHOD
- Publication number 20240304453
- Publication date Sep 12, 2024
- Ulvac, Inc.
- Taichi SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LENS AND EYEWEAR
- Publication number 20240286891
- Publication date Aug 29, 2024
- HS Vision Ltd.
- Alexander MacDonald
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BIOMATERIAL DETECTION SENSOR AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240280513
- Publication date Aug 22, 2024
- Samsung Electronics Co., Ltd.
- Jae Hong LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPOSITE SPRING STRUCTURE TO REINFORCE MECHANICAL ROBUSTNESS OF A...
- Publication number 20240270565
- Publication date Aug 15, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE, METHOD FOR MANUFACTURING MEMS DEVICE AND ELECTRONIC DE...
- Publication number 20240262678
- Publication date Aug 8, 2024
- Beijing BOE Technology Development Co., Ltd.
- Jingwen GUO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROMECHANICAL DEVICE COMPRISING A CAVITY H...
- Publication number 20240262682
- Publication date Aug 8, 2024
- ROBERT BOSCH GmbH
- Raphael Schuler
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20240262681
- Publication date Aug 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yang-Che CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ULTRATHIN FREE-STANDING SOLID STATE MEMBRANE CHIPS AND METHODS OF M...
- Publication number 20240246812
- Publication date Jul 25, 2024
- University of Washington
- Bo Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...
- Publication number 20240208805
- Publication date Jun 27, 2024
- Lawrence Semiconductor Research Laboratory, Inc.
- Chantal Arena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NANOSTRUCTURED SYSTEM FOR PHOTOTHERMAL HEATING AND METHODS OF MANUF...
- Publication number 20240198346
- Publication date Jun 20, 2024
- Samsung Electronics Co., Ltd.
- Vinayak Narasimhan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
EMBEDDED PERMEABLE POLYSILICON LAYER IN MEMS DEVICE FOR MULTIPLE CA...
- Publication number 20240199415
- Publication date Jun 20, 2024
- STMicroelectronics International N.V.
- Federico VERCESI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL ENVIRONMENTAL BARRIER DEVICE
- Publication number 20240182297
- Publication date Jun 6, 2024
- INFINEON TECHNOLOGIES AG
- Hutomo Suryo Wasisto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT
- Publication number 20240182298
- Publication date Jun 6, 2024
- ROBERT BOSCH GmbH
- Johannes CLASSEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20240158225
- Publication date May 16, 2024
- UNITED MICROELECTRONICS CORP.
- Jung-Hao Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CHIP PACKAGE AND MANUFACTURING METHOD THEREOF
- Publication number 20240109769
- Publication date Apr 4, 2024
- XINTEC INC.
- Wei-Luen SUEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Vibration-Driven Energy Harvesting Element and Method for Manufactu...
- Publication number 20240106357
- Publication date Mar 28, 2024
- Saginomiya Seisakusho, Inc.
- Noriko Shimomura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20240092632
- Publication date Mar 21, 2024
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Dry etching

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and system for fabricating a MEMS device

Sharp, vertically aligned nanowire electrode arrays, high-yield fab...

Multiple layer electrode transducers

Pressure sensor with high stability

Method and structure for CMOS-MEMS thin film encapsulation

Formation of antireflective surfaces

Method of fabricating display device having patterned lithium-based...

Silicon MEMS gyroscopes with upper and lower sense plates

Thin-film crystalline structure with surfaces having selected plane...

On-chip integrated silicon carbide pressure and temperature sensors

Precision fabrication of nanosieves

Etching method

Composite spring structure to reinforce mechanical robustness of a...

Dual micro-electro mechanical system and manufacturing method thereof

Microelectromechanical system (MEMS) structure and method of formation

Engineered substrates, free-standing semiconductor microstructures,...

Method with stealth dicing process for fabricating MEMS semiconduct...

MEMS device having a metallization structure embedded in a dielectr...

Method and system for scanning MEMS cantilevers

Production method for a micromechanical component

Method for manufacturing an integrated MEMS transducer device and i...

Chip package and manufacturing method thereof

Method of depositing nanotwinned nickel-molybdenum-tungsten alloys

Dielectric comb for MEMS device

Package structure of micro speaker and method for forming the same

Methods of forming MEMS diaphragms including corrugations

MEMS device with particle filter and method of manufacture

Calcite channel structures with heterogeneous wettability

Deep reactive ion etching process for fluid ejection heads

Silicon substrate having cavity and cavity SOI substrate including...

Patents Applicationslast 30 patents

DIE STACKING WITH CONTROLLED ANGULAR ALIGNMENT

LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...

METHOD OF FABRICATING DISPLAY DEVICE HAVING PATTERNED LITHIUM-BASED...

MEMS DEVICE AND METHOD FOR MANUFACTURING MEMS DEVICE

MEMS SENSOR AND METHOD FOR FORMING THE SAME

TOP NOTCH SLIT PROFILE FOR MEMS DEVICE

MEMS Device and Fabrication Process with Reduced Z-Axis Stiction

MULTI-LEVEL MEMS PROCESS

DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE

MEMS DEVICE AND MANUFACTURING METHOD THEREOF

THIN-FILM CRYSTALLINE STRUCTURE WITH SURFACES HAVING SELECTED PLANE...

PRESSURE SENSING MODULE AND MANUFACTURING METHOD THEREOF

MEMS ELEMENT, OPTICAL SCANNING DEVICE, AND DISTANCE MEASURING DEVICE

ETCHING METHOD

LENS AND EYEWEAR

BIOMATERIAL DETECTION SENSOR AND METHOD OF MANUFACTURING THE SAME

COMPOSITE SPRING STRUCTURE TO REINFORCE MECHANICAL ROBUSTNESS OF A...

MEMS DEVICE, METHOD FOR MANUFACTURING MEMS DEVICE AND ELECTRONIC DE...

METHOD FOR PRODUCING A MICROMECHANICAL DEVICE COMPRISING A CAVITY H...

DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

ULTRATHIN FREE-STANDING SOLID STATE MEMBRANE CHIPS AND METHODS OF M...

ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...

NANOSTRUCTURED SYSTEM FOR PHOTOTHERMAL HEATING AND METHODS OF MANUF...

EMBEDDED PERMEABLE POLYSILICON LAYER IN MEMS DEVICE FOR MULTIPLE CA...

MICROMECHANICAL ENVIRONMENTAL BARRIER DEVICE

METHOD FOR PRODUCING A MICROELECTROMECHANICAL COMPONENT

MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME

CHIP PACKAGE AND MANUFACTURING METHOD THEREOF

Vibration-Driven Energy Harvesting Element and Method for Manufactu...

MEMS DEVICE AND MANUFACTURING METHOD THEREOF