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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C2201/00
Manufacture or treatment of micro-structural devices or systems
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B81C2201/0132
Dry etching
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Patents Grants
last 30 patents
Information
Patent Grant
Microelectromechanical system (MEMS) structure and method of formation
Patent number
11,953,674
Issue date
Apr 9, 2024
Texas Instruments Incorporated
Jose A. Martinez
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Engineered substrates, free-standing semiconductor microstructures,...
Patent number
11,952,268
Issue date
Apr 9, 2024
Lawrence Semiconductor Research Laboratory, Inc.
Chantal Arena
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method with stealth dicing process for fabricating MEMS semiconduct...
Patent number
11,939,216
Issue date
Mar 26, 2024
Infineon Technologies AG
Andre Brockmeier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device having a metallization structure embedded in a dielectr...
Patent number
11,932,534
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Hung-Hua Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and system for scanning MEMS cantilevers
Patent number
11,912,566
Issue date
Feb 27, 2024
Magic Leap, Inc.
Steven Alexander-Boyd Hickman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Production method for a micromechanical component
Patent number
11,905,166
Issue date
Feb 20, 2024
Robert Bosch GmbH
Heribert Weber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing an integrated MEMS transducer device and i...
Patent number
11,878,906
Issue date
Jan 23, 2024
Sciosense B.V.
Kailash Vijayakumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Chip package and manufacturing method thereof
Patent number
11,873,212
Issue date
Jan 16, 2024
Xintec Inc.
Wei-Luen Suen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of depositing nanotwinned nickel-molybdenum-tungsten alloys
Patent number
11,851,320
Issue date
Dec 26, 2023
The Johns Hopkins University
Gi-Dong Sim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dielectric comb for MEMS device
Patent number
11,825,266
Issue date
Nov 21, 2023
Knowles Electronics, LLC
Mohsin Nawaz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Package structure of micro speaker and method for forming the same
Patent number
11,818,563
Issue date
Nov 14, 2023
FORTEMEDIA, INC.
Li-Jen Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods of forming MEMS diaphragms including corrugations
Patent number
11,787,688
Issue date
Oct 17, 2023
Knowles Electronics, LLC
Sung Bok Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device with particle filter and method of manufacture
Patent number
11,787,689
Issue date
Oct 17, 2023
TDK Corporation
Wolfgang Pahl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Calcite channel structures with heterogeneous wettability
Patent number
11,774,437
Issue date
Oct 3, 2023
Saudi Arabian Oil Company
Dong Kyu Cha
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Deep reactive ion etching process for fluid ejection heads
Patent number
11,746,005
Issue date
Sep 5, 2023
FUNAI ELECTRIC CO. LTD
David L. Bernard
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Silicon substrate having cavity and cavity SOI substrate including...
Patent number
11,738,993
Issue date
Aug 29, 2023
Murata Manufacturing Co., Ltd.
Yutaka Kishimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Actuator layer patterning with polysilicon and etch stop layer
Patent number
11,731,871
Issue date
Aug 22, 2023
Invensense, Inc.
Ashfaque Uddin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Packaging method and associated packaging structure
Patent number
11,713,241
Issue date
Aug 1, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Chih-Ming Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fabrication of a nanochannel for DNA sequencing using electrical pl...
Patent number
11,714,061
Issue date
Aug 1, 2023
Seagate Technology LLC
David S. Kuo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a membrane component and a membrane component
Patent number
11,708,265
Issue date
Jul 25, 2023
X-FAB Global Services GmbH
Steffen Leopold
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Surface micromechanical element and method for manufacturing the same
Patent number
11,697,586
Issue date
Jul 11, 2023
Teknologian tutkimuskeskus VTT Oy
Aarne Oja
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device including a microelectromechanical structure a...
Patent number
11,691,870
Issue date
Jul 4, 2023
STMicroelectronics S.r.l.
Alessandro Tocchio
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Mechanical microsystem and associated manufacturing method
Patent number
11,679,974
Issue date
Jun 20, 2023
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Thierry Hilt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Structure forming method and device
Patent number
11,679,976
Issue date
Jun 20, 2023
Seiko Epson Corporation
Shogo Inaba
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfluidic devices with electrodes formed as physically separated...
Patent number
11,673,798
Issue date
Jun 13, 2023
International Business Machines Corporation
Gabriel Fernando Puebla Hellmann
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
Patent number
11,667,517
Issue date
Jun 6, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Chia Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device including a microelectromechanical structure a...
Patent number
11,667,519
Issue date
Jun 6, 2023
STMicroelectronics S.r.l.
Alessandro Tocchio
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and system for scanning MEMS cantilevers
Patent number
11,661,335
Issue date
May 30, 2023
Magic Leap, Inc.
Steven Alexander-Boyd Hickman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for preparing micro-cavity array surface product with inclin...
Patent number
11,655,144
Issue date
May 23, 2023
JIANGSU UNIVERSITY
Jian Li
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of fabricating a micro machined channel
Patent number
11,629,048
Issue date
Apr 18, 2023
Berkin B.V.
Yiyuan Zhao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20240158225
Publication date
May 16, 2024
UNITED MICROELECTRONICS CORP.
Jung-Hao Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CHIP PACKAGE AND MANUFACTURING METHOD THEREOF
Publication number
20240109769
Publication date
Apr 4, 2024
XINTEC INC.
Wei-Luen SUEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Vibration-Driven Energy Harvesting Element and Method for Manufactu...
Publication number
20240106357
Publication date
Mar 28, 2024
Saginomiya Seisakusho, Inc.
Noriko Shimomura
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20240092632
Publication date
Mar 21, 2024
Rohm Co., Ltd.
Martin Wilfried HELLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING MIRROR DEVICE
Publication number
20240092634
Publication date
Mar 21, 2024
Hamamatsu Photonics K.K.
Daiki SUZUKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF MANUFACTURING MIRROR DEVICE
Publication number
20240059555
Publication date
Feb 22, 2024
Hamamatsu Photonics K.K.
Daiki SUZUKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING MEMS DEVICE AND MEMS DEVICE
Publication number
20240051819
Publication date
Feb 15, 2024
AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
Ping-He Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTROMECHANICAL MICROSYSTEM
Publication number
20240034616
Publication date
Feb 1, 2024
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Laurent MOLLARD
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INERTIAL SENSOR AND FORMATION METHOD THEREFOR
Publication number
20240027488
Publication date
Jan 25, 2024
SEMICONDUCTOR MANUFACTURING ELECTRONICS (SHAOXING) CORPORATION
Zhaolin ZHANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE
Publication number
20240017989
Publication date
Jan 18, 2024
Rohm Co., Ltd.
Martin Wilfried HELLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL SYSTEM (MEMS) MICROPHONE AND FABRICATION MET...
Publication number
20230406692
Publication date
Dec 21, 2023
UNITED MICROELECTRONICS CORP.
Jung-Hao Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
A Method of Manufacturing a Micro-Fluid Probe
Publication number
20230391613
Publication date
Dec 7, 2023
CYTOSURGE AG
Edin Sarajlic
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SENSOR AND MEMS SENSOR MANUFACTURING METHOD
Publication number
20230382717
Publication date
Nov 30, 2023
Rohm Co., Ltd.
Martin Wilfried HELLER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS ACTUATOR, IN PARTICULAR A MICROMIRROR, WITH INCREASED DEFLECTA...
Publication number
20230373781
Publication date
Nov 23, 2023
HAHN-SCHICKARD-GESELLSCHAFT FUR ANGEWANDTE FORSCHUNG E.V.
Jan Rockstroh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Self-Aligned Acoustic Hole Formation in Piezoelectrical MEMS Microp...
Publication number
20230357000
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Ting-Jung Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE and fabrication metho...
Publication number
20230348259
Publication date
Nov 2, 2023
Vanguard International Semiconductor Corporation
WAI MUN CHONG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE MANUFACTURING METHOD
Publication number
20230348262
Publication date
Nov 2, 2023
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Audrey Berthelot
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE WITH INTEGRATED CMOS CIRCUIT
Publication number
20230312337
Publication date
Oct 5, 2023
3C PROJECT MANAGEMENT LIMITED
Gregory John MCAVOY
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PRESSURE SENSOR AND MANUFACTURING METHOD FOR THE SAME
Publication number
20230296461
Publication date
Sep 21, 2023
InvenSense, Inc.
Yoshitaka Sasaki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and Structure for CMOS-MEMS Thin Film Encapsulation
Publication number
20230278856
Publication date
Sep 7, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Chia Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ATOMIC-SMOOTH DEVICE WITH MICROSTRUCTURE, AND METHOD FOR PREPARING...
Publication number
20230271825
Publication date
Aug 31, 2023
RESEARCH INSTITUTE OF TSINGHUA UNIVERSITY IN SHENZHEN
Quanshui ZHENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MICROPHONE WITH AN ANCHOR
Publication number
20230234837
Publication date
Jul 27, 2023
SKYWORKS GLOBAL PTE. LTD.
Guofeng Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGE STRUCTURE OF MICRO SPEAKER AND METHOD FOR FORMING THE SAME
Publication number
20230239628
Publication date
Jul 27, 2023
Fortemedia, Inc.
Li-Jen CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF MAKING MEMS MICROPHONE WITH AN ANCHOR
Publication number
20230239641
Publication date
Jul 27, 2023
Skyworks Solutions, Inc.
Guofeng Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TOP NOTCH SLIT PROFILE FOR MEMS DEVICE
Publication number
20230232159
Publication date
Jul 20, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Jung Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING A BONDING PAD FOR A MICROMECHANICAL SENSOR ELE...
Publication number
20230219808
Publication date
Jul 13, 2023
ROBERT BOSCH GmbH
Andreas Prinzen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LIGHT SCANNER PACKAGE AND METHOD FOR MANUFACTURING SAME
Publication number
20230127991
Publication date
Apr 27, 2023
WEMEMS CO.,LTD.
Jonghyun LEE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL MICROPHONE WITH MEMBRANE TRENCH REINFORCEMEN...
Publication number
20230118429
Publication date
Apr 20, 2023
TDK Electronics AG
Pirmin Rombach
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PIEZOELECTRIC MEMS MICROPHONE WITH SPRING REGION
Publication number
20230105699
Publication date
Apr 6, 2023
Skyworks Solutions, Inc.
Guofeng Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE FROM A...
Publication number
20230107094
Publication date
Apr 6, 2023
STMicroelectronics S.r.l.
Gianluca LONGONI
B81 - MICRO-STRUCTURAL TECHNOLOGY