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Specific applications of micro-electromechanical systems
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Electrical rotating micro-machines
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Patents Grants
last 30 patents
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Patent Grant
MEMS actuator package architecture
Patent number
12,132,420
Issue date
Oct 29, 2024
MEMS DRIVE (NANJING) CO., LTD.
Xiaolei Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Anchor and cavity configuration for MEMS-based cooling systems
Patent number
11,978,690
Issue date
May 7, 2024
Frore Systems Inc.
Vikram Mukundan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device with a three-layer comb actuator structure and a two-la...
Patent number
11,892,619
Issue date
Feb 6, 2024
Lumentum Operations LLC
Wenlin Jin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Multidirectional translating and tilting platform using bending act...
Patent number
11,697,584
Issue date
Jul 11, 2023
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
Matthieu Gaudet
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a device having a three-dimensional magnet...
Patent number
11,417,448
Issue date
Aug 16, 2022
Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
Thomas Lisec
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Molecular machine
Patent number
11,352,254
Issue date
Jun 7, 2022
Technische Universitat Munchen
Enzo Kopperger
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Three-dimensional micro devices and method for their production
Patent number
11,208,321
Issue date
Dec 28, 2021
Leibniz-Institut fuer Festkoerper-und Werkstoffforschung Dresden e.V.
Daniil Karnaushenko
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and apparatus for harvesting energy based on the random occu...
Patent number
10,655,611
Issue date
May 19, 2020
AT&T Intellectual Property I, L.P.
David Michael Britz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Levitated motor-actuator with parallel dipole line trap system
Patent number
10,593,456
Issue date
Mar 17, 2020
International Business Machines Corporation
Oki Gunawan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS actuator package architecture
Patent number
10,516,348
Issue date
Dec 24, 2019
MEMS Drive Inc.
Xiaolei Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Kinetic energy atom-powered engine
Patent number
10,443,384
Issue date
Oct 15, 2019
Lee Ervin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Actuator
Patent number
10,331,217
Issue date
Jun 25, 2019
Korea Institute of Science and Technology
Youngsu Cha
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Camera modules using MEMS micro electrostatic pistontube actuators...
Patent number
10,122,924
Issue date
Nov 6, 2018
Faez Ba-Tis
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS actuator package architecture
Patent number
10,033,303
Issue date
Jul 24, 2018
MEMS Drive, Inc.
Xiaolei Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electrical tuning of resonant scanning
Patent number
9,869,858
Issue date
Jan 16, 2018
Apple Inc.
Yuval Gerson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS hinges with enhanced rotatability
Patent number
9,810,258
Issue date
Nov 7, 2017
Raviv Erlich
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and apparatus for harvesting energy based on the random occu...
Patent number
9,726,156
Issue date
Aug 8, 2017
AT&T Intellectual Property I, L.P.
David Michael Britz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS rotary fuze architecture for out-of-line applications
Patent number
9,441,931
Issue date
Sep 13, 2016
The United States of America as represented by the Secretary of the Navy
Troy Caruso
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro transport machine and methods for using same
Patent number
9,156,674
Issue date
Oct 13, 2015
MicroZeus, LLC
Harold Stalford
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device and methods for manufacturing and using same
Patent number
9,148,075
Issue date
Sep 29, 2015
STMicroelectronics International N.V.
Sason Sourani
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro rotary machine and methods for using same
Patent number
8,933,596
Issue date
Jan 13, 2015
MicroZeus, LLC
Harold Stalford
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro electro mechanical device and manufacturing method thereof
Patent number
8,759,887
Issue date
Jun 24, 2014
Semiconductor Energy Laboratory Co., Ltd.
Mayumi Yamaguchi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and apparatus for harvesting energy based on the random occu...
Patent number
8,742,648
Issue date
Jun 3, 2014
AT&T Intellectual Property I, L.P.
David Britz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of fabricating an electromechanical component using graphene
Patent number
8,656,584
Issue date
Feb 25, 2014
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Jean-Christophe Gabriel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro electro mechanical device and manufacturing method thereof
Patent number
8,455,928
Issue date
Jun 4, 2013
Semiconductor Energy Laboratory Co., Ltd.
Mayumi Yamaguchi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Rotary nanotube bearing structure and methods for manufacturing and...
Patent number
8,337,141
Issue date
Dec 25, 2012
The Charles Stark Draper Laboratory, Inc.
David J. Carter
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro rotary machine and methods for using same
Patent number
8,159,107
Issue date
Apr 17, 2012
MicroZeus LLC
Harold L. Stalford
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro electro mechanical device and manufacturing method thereof
Patent number
8,030,651
Issue date
Oct 4, 2011
Semiconductor Energy Laboratory Co., Ltd.
Mayumi Yamaguchi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromachine switch, filter circuit, duplexer circuit, and communic...
Patent number
8,022,794
Issue date
Sep 20, 2011
Panasonic Corporation
Hiroshi Nakatsuka
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Actuator using comb-tooth
Patent number
7,982,361
Issue date
Jul 19, 2011
Pioneer Corporation
Takanori Maeda
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
ANCHOR AND CAVITY CONFIGURATION FOR MEMS-BASED COOLING SYSTEMS
Publication number
20240243035
Publication date
Jul 18, 2024
Frore Systems Inc.
Vikram Mukundan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
A SCANNING MEMS MIRROR DEVICE
Publication number
20230257255
Publication date
Aug 17, 2023
Hendrikus Wilhelmus Leonardus Antonius Maria VAN LIEROP
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LOW-IMPACT OUT-OF-PLANE MOTION LIMITER MEMS DEVICE
Publication number
20230234834
Publication date
Jul 27, 2023
Murata Manufacturing Co., Ltd.
Mikko PARTANEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ANCHOR AND CAVITY CONFIGURATION FOR MEMS-BASED COOLING SYSTEMS
Publication number
20230030322
Publication date
Feb 2, 2023
Frore Systems Inc.
Vikram Mukundan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL DRIVE FOR MOVING OBJECTS
Publication number
20220380201
Publication date
Dec 1, 2022
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
Bert KAISER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
OUT-OF-PLANE MOTION MOTOR FOR CARRYING REFLECTOR AND MANUFACTURING...
Publication number
20210141214
Publication date
May 13, 2021
Innovative Interface Laboratory Corp.
Yu-Wen HSU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE WITH A THREE-LAYER COMB ACTUATOR STRUCTURE AND A TWO-LA...
Publication number
20210063727
Publication date
Mar 4, 2021
Lumentum Operations LLC
Wenlin JIN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MULTIDIRECTIONAL TRANSLATING AND TILTING PLATFORM USING BENDING ACT...
Publication number
20200189907
Publication date
Jun 18, 2020
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
Matthieu GAUDET
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS ACTUATOR PACKAGE ARCHITECTURE
Publication number
20200144936
Publication date
May 7, 2020
MEMS DRIVE, INC.
Xiaolei Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MOLECULAR MACHINE
Publication number
20200031663
Publication date
Jan 30, 2020
Enzo KOPPERGER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Levitated Motor-Actuator with Parallel Dipole Line Trap System
Publication number
20190115132
Publication date
Apr 18, 2019
International Business Machines Corporation
Oki Gunawan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
THREE-DIMENSIONAL MICRO DEVICES AND METHOD FOR THEIR PRODUCTION
Publication number
20190062154
Publication date
Feb 28, 2019
Leibniz-Institut fuer Festkoerper-und Werkstoffforschung Dresden E.V.
Daniil KARNAUSHENKO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAMERA MODULES USING MEMS MICRO ELECTROSTATIC PISTONTUBE ACTUATORS...
Publication number
20180213154
Publication date
Jul 26, 2018
Faez BA-TIS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND APPARATUS FOR HARVESTING ENERGY BASED ON THE RANDOM OCCU...
Publication number
20170356428
Publication date
Dec 14, 2017
AT&T INTELLECTUAL PROPERTY I, L.P.
DAVID MICHAEL BRITZ
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Electrical tuning of resonant scanning
Publication number
20170153445
Publication date
Jun 1, 2017
Apple Inc.
Yuval Gerson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS hinges with enhanced rotatability
Publication number
20170152887
Publication date
Jun 1, 2017
Raviv Erlich
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS ACTUATOR PACKAGE ARCHITECTURE
Publication number
20170133951
Publication date
May 11, 2017
MEMS Drive, Inc.
Xiaolei Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
KINETIC ENERGY ATOM-POWERED ENGINE
Publication number
20170022814
Publication date
Jan 26, 2017
Lee Ervin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND METHODS FOR MANUFACTURING AND USING SAME
Publication number
20150002916
Publication date
Jan 1, 2015
STMicroelectronics International N.V
Sason Sourani
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND APPARATUS FOR HARVESTING ENERGY BASED ON THE RANDOM OCCU...
Publication number
20140265351
Publication date
Sep 18, 2014
AT&T INTELLECTUAL PROPERTY I, L.P.
DAVID MICHAEL BRITZ
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO ELECTRO MECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20130307030
Publication date
Nov 21, 2013
Semiconductor Energy Laboratory Co., Ltd.
Mayumi Yamaguchi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND APPARATUS FOR HARVESTING ENERGY BASED ON THE RANDOM OCCU...
Publication number
20130134718
Publication date
May 30, 2013
DAVID BRITZ
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ROTARY NANOTUBE BEARING STRUCTURE AND METHODS FOR MANUFACTURING AND...
Publication number
20130098866
Publication date
Apr 25, 2013
The Charles Stark Draper Laboratory, Inc.
David J. Carter
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Micro Rotary Machine and Methods for Using Same
Publication number
20130005955
Publication date
Jan 3, 2013
MicroZeus LLC
Harold Stalford
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Device and Methods for Manufacturing and Using Same
Publication number
20120206785
Publication date
Aug 16, 2012
Sason SOURANI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO ELECTRO MECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20120080727
Publication date
Apr 5, 2012
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Mayumi Yamaguchi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CONCEPTION OF AN ELECTRO-MECHANICAL COMPONENT FOR A MICRO- OR NANO-...
Publication number
20110067985
Publication date
Mar 24, 2011
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE. ALT.
Jean-Christophe GABRIEL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO ELECTRO MECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20100133537
Publication date
Jun 3, 2010
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Mayumi Yamaguchi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ROTARY NANOTUBE BEARING STRUCTURE AND METHODS FOR MANUFACTURING AND...
Publication number
20090317233
Publication date
Dec 24, 2009
The Charles Stark Draper Laboratory, Inc.
David J. Carter
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMACHINE SWITCH, FILTER CIRCUIT, DUPLEXER CIRCUIT, AND COMMUNIC...
Publication number
20090277762
Publication date
Nov 12, 2009
Hiroshi Nakatsuka
B81 - MICRO-STRUCTURAL TECHNOLOGY