Electrodes

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CPC
B81C1/00166

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

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B81C1/00166Electrodes

Industries

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Patents Grantslast 30 patents

Information Patent Grant
MEMS device built on substrate with ruthenium based contact surface...
- Patent number 12,148,580
- Issue date Nov 19, 2024
- Menlo Microsystems, Inc.
- Andrew Minnick
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multiple layer electrode transducers
- Patent number 12,139,394
- Issue date Nov 12, 2024
- Soundskrit Inc.
- Wan-Thai Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon MEMS gyroscopes with upper and lower sense plates
- Patent number 12,092,460
- Issue date Sep 17, 2024
- The Charles Stark Draper Laboratory, Inc.
- Eugene H. Cook
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bottom electrode material stack for micromachined ultrasonic transd...
- Patent number 11,988,640
- Issue date May 21, 2024
- BFLY OPERATIONS, INC.
- Jianwei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Flexible electrode and preparation method thereof
- Patent number 11,970,391
- Issue date Apr 30, 2024
- SHENZHEN INSTITUTES OF ADVANCED TECHNOLOGY
- Tianzhun Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Modification to rough polysilicon using ion implantation and silicide
- Patent number 11,952,267
- Issue date Apr 9, 2024
- Invensense, Inc.
- Alan Cuthbertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of miniature fluid actuator
- Patent number 11,905,168
- Issue date Feb 20, 2024
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatic-type transducer and manufacturing method thereof
- Patent number 11,873,213
- Issue date Jan 16, 2024
- Sumitomo Riko Company Limited
- Koichi Hasegawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vehicle key and method of manufacturing the same
- Patent number 11,845,401
- Issue date Dec 19, 2023
- Hyundai Motor Company
- Ji Hyun Woo
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Pizoelectric MEMS device with electrodes having low surface roughness
- Patent number 11,812,664
- Issue date Nov 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Ren Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with electrodes and a dielectric
- Patent number 11,753,295
- Issue date Sep 12, 2023
- Knowles Electronics, LLC
- Peter V. Loeppert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low-parasitic capacitance MEMS inertial sensors and related methods
- Patent number 11,746,004
- Issue date Sep 5, 2023
- Analog Devices, Inc.
- Charles Blackmer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pulse train excitation for capacitive micromachined ultrasonic tran...
- Patent number 11,731,164
- Issue date Aug 22, 2023
- The Board of Trustees of the Leland Stanford Junior University
- Bo Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Cellular array electrostatic actuator
- Patent number 11,713,240
- Issue date Aug 1, 2023
- Board of Regents, The University of Texas System
- Siavash Pourkamali
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nanosheet MEMs sensor device and method of manufacture
- Patent number 11,685,647
- Issue date Jun 27, 2023
- NXP B.V.
- Mark Douglas Hall
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having a tiltable suspended structure controlled by ele...
- Patent number 11,681,141
- Issue date Jun 20, 2023
- STMicroelectronics S.r.l.
- Roberto Carminati
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor structure and manufacturing method thereof
- Patent number 11,661,333
- Issue date May 30, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Wei-Jhih Mao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Comb electrode release process for MEMS structure
- Patent number 11,661,337
- Issue date May 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device manufacturing method and mems device
- Patent number 11,597,648
- Issue date Mar 7, 2023
- Murata Manufacturing Co., Ltd.
- Masakazu Fukumitsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical (MEM) power relay
- Patent number 11,584,643
- Issue date Feb 21, 2023
- Massachusetts Institute of Technology
- Prashant Patil
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with electrodes and a dielectric
- Patent number 11,554,953
- Issue date Jan 17, 2023
- Knowles Electronics, LLC
- Peter V. Loeppert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro fluid actuator
- Patent number 11,536,394
- Issue date Dec 27, 2022
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of making ohmic contact on low doped bulk silicon for optica...
- Patent number 11,530,130
- Issue date Dec 20, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for fabricating silicon MEMS gyroscopes with upper and lowe...
- Patent number 11,530,917
- Issue date Dec 20, 2022
- The Charles Stark Draper Laboratory, Inc.
- Eugene H. Cook
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing MEMS vibration element and MEMS vibration e...
- Patent number 11,527,968
- Issue date Dec 13, 2022
- NATIONAL UNIVERSITY CORPORATION SHIZUOKA UNIVERSITY
- Gen Hashiguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device built on substrate with ruthenium based contact surface...
- Patent number 11,501,928
- Issue date Nov 15, 2022
- Menlo Microsystems, Inc.
- Andrew Minnick
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Structure of micro-electro-mechanical-system microphone and method...
- Patent number 11,498,830
- Issue date Nov 15, 2022
- Solid State System Co., Ltd.
- Cheng-Wei Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical sensor and methods for producing a micromechanical...
- Patent number 11,493,532
- Issue date Nov 8, 2022
- Infineon Technologies Dresden GmbH & Co. KG
- Erhard Landgraf
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of making ohmic contact on low doped bulk silicon for optica...
- Patent number 11,485,631
- Issue date Nov 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS package, MEMS microphone and method of manufacturing the MEMS...
- Patent number 11,447,388
- Issue date Sep 20, 2022
- SAE Magnetics (H. K.) Ltd.
- Hiroshi Take
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
INERTIAL SENSOR AND METHOD FOR FORMING THE SAME
- Publication number 20240418510
- Publication date Dec 19, 2024
- AAC TECHNOLOGIES PTE. LTD
- Houming Chong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR AND METHOD FOR FORMING THE SAME
- Publication number 20240391756
- Publication date Nov 28, 2024
- AAC TECHNOLOGIES PTE. LTD
- ZaiXiang Pua
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20240336474
- Publication date Oct 10, 2024
- AAC TECHNOLOGIES PTE. LTD
- Houming Chong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING CURVED SURFACE SUPPORT STRUCTURE, AND HEMI...
- Publication number 20240199414
- Publication date Jun 20, 2024
- TOKYO KEIKI INC.
- Takayoshi Yamaguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PULSE TRAIN EXCITATION FOR CAPACITIVE MICROMACHINED ULTRASONIC TRAN...
- Publication number 20240165663
- Publication date May 23, 2024
- The Board of Trustees of the Leland Stanford Junior University
- Bo Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Vibration-Driven Energy Harvesting Element and Method for Manufactu...
- Publication number 20240106357
- Publication date Mar 28, 2024
- Saginomiya Seisakusho, Inc.
- Noriko Shimomura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INERTIAL SENSOR AND FORMATION METHOD THEREFOR
- Publication number 20240027488
- Publication date Jan 25, 2024
- SEMICONDUCTOR MANUFACTURING ELECTRONICS (SHAOXING) CORPORATION
- Zhaolin ZHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE
- Publication number 20240017989
- Publication date Jan 18, 2024
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TWO-LAYER OPTICAL BEAM STEERING DEVICE, SYSTEM, METHOD OF UTILIZATI...
- Publication number 20230418049
- Publication date Dec 28, 2023
- Carillon Technologies Management Corporation
- John R. Sanford
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT FOR A SENSOR AND/OR MICROPHONE DEVICE
- Publication number 20230416079
- Publication date Dec 28, 2023
- ROBERT BOSCH GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD TO PROTECT ELECTRODES FROM OXIDATION IN A MEMS DEVICE
- Publication number 20230371383
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Ren Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMB ELECTRODE RELEASE PROCESS FOR MEMS STRUCTURE
- Publication number 20230249964
- Publication date Aug 10, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH ELECTRODES AND A DIELECTRIC
- Publication number 20230166966
- Publication date Jun 1, 2023
- KNOWLES ELECTRONICS, LLC
- Peter V. Loeppert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MODIFYING A RESONANT FREQUENCY IN CANTILEVER SENSORS
- Publication number 20230136347
- Publication date May 4, 2023
- Skyworks Solutions, Inc.
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR FABRICATING SILICON MEMS GYROSCOPES WITH UPPER AND LOWE...
- Publication number 20230076161
- Publication date Mar 9, 2023
- The Charles Stark Draper Laboratory, Inc.
- Eugene H. Cook
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MODULE AND METHOD OF MANUFACTURING MEMS MODULE
- Publication number 20230016416
- Publication date Jan 19, 2023
- Rohm Co., Ltd.
- Toru HIGUCHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC MICROPHONE WITH ENHANCED ANCHOR
- Publication number 20230011561
- Publication date Jan 12, 2023
- Skyworks Solutions, Inc.
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PREPARING A MEMS MICRO MIRROR WITH ELCTRODES ON BOTH SIDES
- Publication number 20220371883
- Publication date Nov 24, 2022
- Anhui China Science MW Electronic Technology Co., Ltd.
- Wei LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PHOTOCURRENT NOISE SUPPRESSION FOR MIRROR ASSEMBLY
- Publication number 20220324698
- Publication date Oct 13, 2022
- Sergio Fabien Almeida Loya
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS AND PREPARATION METHOD THEREOF
- Publication number 20220324699
- Publication date Oct 13, 2022
- Huawei Technologies Co., Ltd
- Fengpei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Nanosheet MEMS Sensor Device and Method of Manufacture
- Publication number 20220274828
- Publication date Sep 1, 2022
- NXP B.V.
- Mark Douglas Hall
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FLEXIBLE ELECTRODE AND PREPARATION METHOD THEREOF
- Publication number 20220234885
- Publication date Jul 28, 2022
- SHENZHEN INSTITUTES OF ADVANCED TECHNOLOGY
- Tianzhun WU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH ELECTRODES AND A DIELECTRIC
- Publication number 20220177301
- Publication date Jun 9, 2022
- KNOWLES ELECTRONICS, LLC
- Peter V. Loeppert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW-PARASITIC CAPACITANCE MEMS INERTIAL SENSORS AND RELATED METHODS
- Publication number 20220162059
- Publication date May 26, 2022
- Analog Devices, Inc.
- Charles Blackmer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PULSE TRAIN EXCITATION FOR CAPACITIVE MICROMACHINED ULTRASONIC TRAN...
- Publication number 20220152651
- Publication date May 19, 2022
- The Board of Trustees of the Leland Stanford Junior University
- Bo Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE
- Publication number 20220144628
- Publication date May 12, 2022
- InvenSense, Inc.
- Alan Cuthbertson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMB ELECTRODE RELEASE PROCESS FOR MEMS STRUCTURE
- Publication number 20220119247
- Publication date Apr 21, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20220112074
- Publication date Apr 14, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- WEI-JHIH MAO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM SILICON ON INSULATOR PRESSURE SENSO...
- Publication number 20220033247
- Publication date Feb 3, 2022
- SOUTHEAST UNIVERSITY
- Xiaodong Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of Manufacturing MEMS Vibration Element and MEMS Vibration E...
- Publication number 20210376767
- Publication date Dec 2, 2021
- NATIONAL UNIVERSITY CORPORATION SHIZUOKA UNIVERSITY
- Gen HASHIGUCHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS device built on substrate with ruthenium based contact surface...

Multiple layer electrode transducers

Silicon MEMS gyroscopes with upper and lower sense plates

Bottom electrode material stack for micromachined ultrasonic transd...

Flexible electrode and preparation method thereof

Modification to rough polysilicon using ion implantation and silicide

Manufacturing method of miniature fluid actuator

Electrostatic-type transducer and manufacturing method thereof

Vehicle key and method of manufacturing the same

Pizoelectric MEMS device with electrodes having low surface roughness

MEMS device with electrodes and a dielectric

Low-parasitic capacitance MEMS inertial sensors and related methods

Pulse train excitation for capacitive micromachined ultrasonic tran...

Cellular array electrostatic actuator

Nanosheet MEMs sensor device and method of manufacture

MEMS device having a tiltable suspended structure controlled by ele...

Semiconductor structure and manufacturing method thereof

Comb electrode release process for MEMS structure

MEMS device manufacturing method and mems device

Micro-electromechanical (MEM) power relay

MEMS device with electrodes and a dielectric

Micro fluid actuator

Method of making ohmic contact on low doped bulk silicon for optica...

Methods for fabricating silicon MEMS gyroscopes with upper and lowe...

Method of manufacturing MEMS vibration element and MEMS vibration e...

MEMS device built on substrate with ruthenium based contact surface...

Structure of micro-electro-mechanical-system microphone and method...

Micromechanical sensor and methods for producing a micromechanical...

Method of making ohmic contact on low doped bulk silicon for optica...

MEMS package, MEMS microphone and method of manufacturing the MEMS...

Patents Applicationslast 30 patents

INERTIAL SENSOR AND METHOD FOR FORMING THE SAME

MEMS SENSOR AND METHOD FOR FORMING THE SAME

MEMS DEVICE AND MANUFACTURING METHOD THEREOF

METHOD FOR MANUFACTURING CURVED SURFACE SUPPORT STRUCTURE, AND HEMI...

PULSE TRAIN EXCITATION FOR CAPACITIVE MICROMACHINED ULTRASONIC TRAN...

Vibration-Driven Energy Harvesting Element and Method for Manufactu...

INERTIAL SENSOR AND FORMATION METHOD THEREFOR

MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE

TWO-LAYER OPTICAL BEAM STEERING DEVICE, SYSTEM, METHOD OF UTILIZATI...

MICROMECHANICAL COMPONENT FOR A SENSOR AND/OR MICROPHONE DEVICE

METHOD TO PROTECT ELECTRODES FROM OXIDATION IN A MEMS DEVICE

COMB ELECTRODE RELEASE PROCESS FOR MEMS STRUCTURE

MEMS DEVICE WITH ELECTRODES AND A DIELECTRIC

METHOD OF MODIFYING A RESONANT FREQUENCY IN CANTILEVER SENSORS

METHODS FOR FABRICATING SILICON MEMS GYROSCOPES WITH UPPER AND LOWE...

MEMS MODULE AND METHOD OF MANUFACTURING MEMS MODULE

PIEZOELECTRIC MICROPHONE WITH ENHANCED ANCHOR

METHOD FOR PREPARING A MEMS MICRO MIRROR WITH ELCTRODES ON BOTH SIDES

PHOTOCURRENT NOISE SUPPRESSION FOR MIRROR ASSEMBLY

MICRO-ELECTRO-MECHANICAL SYSTEMS AND PREPARATION METHOD THEREOF

Nanosheet MEMS Sensor Device and Method of Manufacture

FLEXIBLE ELECTRODE AND PREPARATION METHOD THEREOF

MEMS DEVICE WITH ELECTRODES AND A DIELECTRIC

LOW-PARASITIC CAPACITANCE MEMS INERTIAL SENSORS AND RELATED METHODS

PULSE TRAIN EXCITATION FOR CAPACITIVE MICROMACHINED ULTRASONIC TRAN...

MODIFICATION TO ROUGH POLYSILICON USING ION IMPLANTATION AND SILICIDE

COMB ELECTRODE RELEASE PROCESS FOR MEMS STRUCTURE

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF

MICRO-ELECTRO-MECHANICAL SYSTEM SILICON ON INSULATOR PRESSURE SENSO...

Method of Manufacturing MEMS Vibration Element and MEMS Vibration E...