Electron guns using field emission, photo emission, or secondary emission electron sources

Industry

CPC
H01J37/073

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/073Electron guns using field emission, photo emission, or secondary emission electron sources

Industries

Patents Grantslast 30 patents

Information Patent Grant
Electron gun and charged particle beam device equipped with electro...
- Patent number 11,978,609
- Issue date May 7, 2024
- HITACHI HIGH-TECH CORPORATION
- Minoru Kaneda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron source and charged particle beam device
- Patent number 11,929,230
- Issue date Mar 12, 2024
- HITACHI HIGH-TECH CORPORATION
- Keigo Kasuya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High throughput multi-electron beam system
- Patent number 11,869,743
- Issue date Jan 9, 2024
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun, electron gun component, electron beam applicator, and...
- Patent number 11,842,879
- Issue date Dec 12, 2023
- Photo electron Soul Inc.
- Tomohiro Nishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cold-field-emitter electron gun with self-cleaning extractor using...
- Patent number 11,830,699
- Issue date Nov 28, 2023
- KLA Corporation
- Luca Grella
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam source for optical device fabrication using a segmented io...
- Patent number 11,810,755
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Ludovic Godet
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Electron beam apparatus
- Patent number 11,784,022
- Issue date Oct 10, 2023
- HITACHI HIGH-TECH CORPORATION
- Takashi Ohshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mechanically-stable electron source
- Patent number 11,749,492
- Issue date Sep 5, 2023
- FEI Company
- Kun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam writing apparatus and cathode life span prediction me...
- Patent number 11,749,491
- Issue date Sep 5, 2023
- NuFlare Technology, Inc.
- Satoshi Nakahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultrafast electron diffraction apparatus
- Patent number 11,728,125
- Issue date Aug 15, 2023
- Korea Atomic Energy Research Institute
- Young Uk Jeong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Emitter, electron gun using same, and electronic device
- Patent number 11,721,516
- Issue date Aug 8, 2023
- National Institute for Materials Science
- Han Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light modulated electron source
- Patent number 11,715,615
- Issue date Aug 1, 2023
- KLA Corporation
- Edgardo Garcia Berrios
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Schottky thermal field emitter with integrated beam splitter
- Patent number 11,699,564
- Issue date Jul 11, 2023
- NUFLARE TECHNOLOGY, INC.
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron emitter and method of fabricating same
- Patent number 11,688,579
- Issue date Jun 27, 2023
- ASML Netherlands B.V.
- Juying Dou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of electron beam comprising pinnacle limiting plate and m...
- Patent number 11,664,186
- Issue date May 30, 2023
- BORRIES PTE. LTD.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam device and image acquisition method
- Patent number 11,664,190
- Issue date May 30, 2023
- Kioxia Corporation
- Ryoji Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of producing microrods for electron emitters, and associated...
- Patent number 11,651,924
- Issue date May 16, 2023
- FEI Company
- Kun Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle source and charged particle beam device
- Patent number 11,651,929
- Issue date May 16, 2023
- HITACHI HIGH-TECH CORPORATION
- Masahiro Fukuta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spatially phase-modulated electron wave generation device
- Patent number 11,651,930
- Issue date May 16, 2023
- HITACHI HIGH-TECH CORPORATION
- Makoto Kuwahara
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Method and apparatus for Schottky TFE inspection
- Patent number 11,640,896
- Issue date May 2, 2023
- NUFLARE TECHNOLOGY, INC.
- Victor Katsap
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of optical device fabrication using an ion beam source
- Patent number 11,640,898
- Issue date May 2, 2023
- Applied Materials, Inc.
- Ludovic Godet
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for controlling operation of electron emission source, elect...
- Patent number 11,562,878
- Issue date Jan 24, 2023
- NuFlare Technology, Inc.
- Nobuo Miyamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermoelectric field emission electron source and electron beam app...
- Patent number 11,508,544
- Issue date Nov 22, 2022
- HITACHI HIGH-TECH CORPORATION
- Soichiro Matsunaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam gun control systems and methods
- Patent number 11,478,664
- Issue date Oct 25, 2022
- Varian Medical Systems, Inc.
- Mark Everett Trail
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Electron beam apparatus for optical device fabrication
- Patent number 11,462,386
- Issue date Oct 4, 2022
- Applied Materials, Inc.
- Kartik Ramaswamy
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Transition-metal oxides-coated hydrogen-terminated diamond surface...
- Patent number 11,450,744
- Issue date Sep 20, 2022
- Technion Research and Development Foundation Ltd.
- Rafi Kalish
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Electron source operating method
- Patent number 11,430,625
- Issue date Aug 30, 2022
- 38th Research Institute, China Electronics Technology Group Corporation
- Huarong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of optical device fabrication using an electron beam apparatus
- Patent number 11,430,634
- Issue date Aug 30, 2022
- Applied Materials, Inc.
- Ludovic Godet
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Light modulated electron source
- Patent number 11,417,492
- Issue date Aug 16, 2022
- KLA Corporation
- Edgardo Garcia Berrios
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Incident axis alignment method for electron gun equipped with photo...
- Patent number 11,417,494
- Issue date Aug 16, 2022
- Photo electron Soul Inc.
- Reiki Watanabe
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EMITTER AND DEVICE PROVIDED WITH SAME
- Publication number 20240153730
- Publication date May 9, 2024
- Denka Company Limited
- Daisuke ISHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN AND ELECTRON BEAM APPLICATION APPARATUS
- Publication number 20240120168
- Publication date Apr 11, 2024
- Hitachi High-Tech Corporation
- Takashi Ohshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGING, PROCESSING, AND/OR ANALYZING AN OBJECT USING A PARTICLE BE...
- Publication number 20240038481
- Publication date Feb 1, 2024
- CARL ZEISS MICROSCOPY GMBH
- Josef Biberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN AND ELECTRON BEAM APPLICATION DEVICE
- Publication number 20230402246
- Publication date Dec 14, 2023
- HITACHI HIGH-TECH CORPORATION
- Hideo MORISHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Creating Multiple Electron Beams with a Photocathode Film
- Publication number 20230395349
- Publication date Dec 7, 2023
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SOURCE, ELECTRON GUN, AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20230352262
- Publication date Nov 2, 2023
- HITACHI HIGH-TECH CORPORATION
- Keigo KASUYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Source, Method of Manufacturing the Same, And Electron Bea...
- Publication number 20230317401
- Publication date Oct 5, 2023
- Hitachi High-Tech Corporation
- Toshiaki KUSUNOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN AND ELECTRON MICROSCOPE
- Publication number 20230298847
- Publication date Sep 21, 2023
- KLA Corporation
- Yung-Ho Alex Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SCHOTTKY TFE INSPECTION
- Publication number 20230253178
- Publication date Aug 10, 2023
- NUFLARE TECHNOLOGY, INC.
- Victor KATSAP
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Source and Charged Particle Beam Device
- Publication number 20230238205
- Publication date Jul 27, 2023
- HITACHI HIGH-TECH CORPORATION
- Masahiro FUKUTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN, ELECTRON RAY APPLYING DEVICE, AND ELECTRON BEAM PROJE...
- Publication number 20230230794
- Publication date Jul 20, 2023
- PHOTO ELECTRON SOUL INC.
- Tomohiro Nishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN, ELECTRON GUN COMPONENT, ELECTRON BEAM APPLICATION DEV...
- Publication number 20230207249
- Publication date Jun 29, 2023
- PHOTO ELECTRON SOUL INC.
- Tomohiro Nishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON MICROSCOPE, ELECTRON SOURCE FOR ELECTRON MICROSCOPE, AND M...
- Publication number 20230197399
- Publication date Jun 22, 2023
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Pavel ADAMEC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ESTIMATING CATHODE LIFETIME OF ELECTRON GUN, AND ELECTRO...
- Publication number 20230154720
- Publication date May 18, 2023
- NuFlare Technology, Inc.
- Nobuo MIYAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ELECTRON CRYOMICROSCOPY
- Publication number 20230135352
- Publication date May 4, 2023
- United Kingdom Research and Innovation
- Greg MCMULLAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
QUASI-MACROSCOPIC COLD CATHODE FIELD EMISSION ELECTRON GUN AND MANU...
- Publication number 20230133255
- Publication date May 4, 2023
- Zhengzhou University of Aeronautics
- Fanguang ZENG
- B22 - CASTING POWDER METALLURGY
Information Patent Application
Electron Gun, Electron Beam Applicator, and Method for Controlling...
- Publication number 20230131413
- Publication date Apr 27, 2023
- PHOTO ELECTRON SOUL INC.
- Atsushi KOIZUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dielectric Coated Plasmonic Photoemitter
- Publication number 20230103140
- Publication date Mar 30, 2023
- Board of Trustees of Michigan State University
- Peng ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM WITH MULTI-SOURCE SYSTEM AND MULTI-BEAM PARTIC...
- Publication number 20230065475
- Publication date Mar 2, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM GUN CONTROL SYSTEMS AND METHODS
- Publication number 20230040534
- Publication date Feb 9, 2023
- Varian Medical Systems, Inc.
- Mark Everett Trail
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
BEAM CURRENT ADJUSTMENT FOR CHARGED-PARTICLE INSPECTION SYSTEM
- Publication number 20230028799
- Publication date Jan 26, 2023
- ASML NETHERLANDS B.V.
- Wei FANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cold-Field-Emitter Electron Gun with Self-Cleaning Extractor Using...
- Publication number 20230010176
- Publication date Jan 12, 2023
- KLA Corporation
- Luca Grella
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SOURCE BASED ON FIELD EMISSION AND PRODUCTION PROCESS FOR...
- Publication number 20230005695
- Publication date Jan 5, 2023
- Centre National de la Recherche Scientifique
- Alain DEGIOVANNI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Gun and Charged Particle Beam Device
- Publication number 20220415602
- Publication date Dec 29, 2022
- Hitachi High-Tech Corporation
- Tomoyo SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN AND ELECTRON MICROSCOPE
- Publication number 20220406558
- Publication date Dec 22, 2022
- HITACHI HIGH-TECH CORPORATION
- Hideo MORISHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SCHOTTKY TFE INSPECTION
- Publication number 20220367145
- Publication date Nov 17, 2022
- NUFLARE TECHNOLOGY, INC.
- Victor KATSAP
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PULSED GENERATOR OF ELECTRICALLY CHARGED PARTICLES AND METHOD FOR U...
- Publication number 20220367139
- Publication date Nov 17, 2022
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Marie GELEOC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH THROUGHPUT MULTI-ELECTRON BEAM SYSTEM
- Publication number 20220367140
- Publication date Nov 17, 2022
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transmission Electron Microscope and Imaging Method
- Publication number 20220359153
- Publication date Nov 10, 2022
- Hitachi High-Tech Corporation
- Hiroki KAWAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Light Modulated Electron Source
- Publication number 20220336180
- Publication date Oct 20, 2022
- KLA Corporation
- Edgardo Garcia Berrios
- H01 - BASIC ELECTRIC ELEMENTS

Electron guns using field emission, photo emission, or secondary emission electron sources

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electron gun and charged particle beam device equipped with electro...

Electron source and charged particle beam device

High throughput multi-electron beam system

Electron gun, electron gun component, electron beam applicator, and...

Cold-field-emitter electron gun with self-cleaning extractor using...

Ion beam source for optical device fabrication using a segmented io...

Electron beam apparatus

Mechanically-stable electron source

Electron beam writing apparatus and cathode life span prediction me...

Ultrafast electron diffraction apparatus

Emitter, electron gun using same, and electronic device

Light modulated electron source

Schottky thermal field emitter with integrated beam splitter

Electron emitter and method of fabricating same

Apparatus of electron beam comprising pinnacle limiting plate and m...

Electron beam device and image acquisition method

Method of producing microrods for electron emitters, and associated...

Charged particle source and charged particle beam device

Spatially phase-modulated electron wave generation device

Method and apparatus for Schottky TFE inspection

Methods of optical device fabrication using an ion beam source

Method for controlling operation of electron emission source, elect...

Thermoelectric field emission electron source and electron beam app...

Particle beam gun control systems and methods

Electron beam apparatus for optical device fabrication

Transition-metal oxides-coated hydrogen-terminated diamond surface...

Electron source operating method

Methods of optical device fabrication using an electron beam apparatus

Light modulated electron source

Incident axis alignment method for electron gun equipped with photo...

Patents Applicationslast 30 patents

EMITTER AND DEVICE PROVIDED WITH SAME

ELECTRON GUN AND ELECTRON BEAM APPLICATION APPARATUS

IMAGING, PROCESSING, AND/OR ANALYZING AN OBJECT USING A PARTICLE BE...

ELECTRON GUN AND ELECTRON BEAM APPLICATION DEVICE

Creating Multiple Electron Beams with a Photocathode Film

ELECTRON SOURCE, ELECTRON GUN, AND CHARGED PARTICLE BEAM DEVICE

Electron Source, Method of Manufacturing the Same, And Electron Bea...

ELECTRON GUN AND ELECTRON MICROSCOPE

METHOD AND APPARATUS FOR SCHOTTKY TFE INSPECTION

Charged Particle Source and Charged Particle Beam Device

ELECTRON GUN, ELECTRON RAY APPLYING DEVICE, AND ELECTRON BEAM PROJE...

ELECTRON GUN, ELECTRON GUN COMPONENT, ELECTRON BEAM APPLICATION DEV...

ELECTRON MICROSCOPE, ELECTRON SOURCE FOR ELECTRON MICROSCOPE, AND M...

METHOD FOR ESTIMATING CATHODE LIFETIME OF ELECTRON GUN, AND ELECTRO...

SYSTEM AND METHOD FOR ELECTRON CRYOMICROSCOPY

QUASI-MACROSCOPIC COLD CATHODE FIELD EMISSION ELECTRON GUN AND MANU...

Electron Gun, Electron Beam Applicator, and Method for Controlling...

Dielectric Coated Plasmonic Photoemitter

PARTICLE BEAM SYSTEM WITH MULTI-SOURCE SYSTEM AND MULTI-BEAM PARTIC...

PARTICLE BEAM GUN CONTROL SYSTEMS AND METHODS

BEAM CURRENT ADJUSTMENT FOR CHARGED-PARTICLE INSPECTION SYSTEM

Cold-Field-Emitter Electron Gun with Self-Cleaning Extractor Using...

ELECTRON SOURCE BASED ON FIELD EMISSION AND PRODUCTION PROCESS FOR...

Charged Particle Gun and Charged Particle Beam Device

ELECTRON GUN AND ELECTRON MICROSCOPE

METHOD AND APPARATUS FOR SCHOTTKY TFE INSPECTION

PULSED GENERATOR OF ELECTRICALLY CHARGED PARTICLES AND METHOD FOR U...

HIGH THROUGHPUT MULTI-ELECTRON BEAM SYSTEM

Transmission Electron Microscope and Imaging Method

Light Modulated Electron Source