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Elements or methods for movement independent of sample stage for influencing or moving or contacting or transferring the sample or parts thereof
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Industry
CPC
H01J2237/208
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Parent Industries
H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
Current Industry
H01J2237/208
Elements or methods for movement independent of sample stage for influencing or moving or contacting or transferring the sample or parts thereof
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