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Micro-structural technology
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Patents Grants
last 30 patents
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Patent Grant
Testing apparatus and testing method thereof
Patent number
11,368,804
Issue date
Jun 21, 2022
xMEMS Labs, Inc.
Yuan-Shuang Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device and method for a threshold sensor
Patent number
10,793,424
Issue date
Oct 6, 2020
Invensense, Inc.
Matthew Julian Thompson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Cover based adhesion force measurement system for microelectromecha...
Patent number
10,717,641
Issue date
Jul 21, 2020
Invensense, Inc.
Alexander Castro
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Apparatus and methods for integrated MEMS devices
Patent number
10,479,676
Issue date
Nov 19, 2019
MCube, Inc.
Ben Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device and method for a threshold sensor
Patent number
10,399,849
Issue date
Sep 3, 2019
Invensense, Inc.
Matthew Julian Thompson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Controlled pulse generation methods and apparatuses for evaluating...
Patent number
10,393,618
Issue date
Aug 27, 2019
NXP USA, INC.
Peter T. Jones
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor structure with cavity spacing monitoring functions
Patent number
10,202,278
Issue date
Feb 12, 2019
Taiwan Semiconductor Manufacturing Company Ltd.
Jung-Huei Peng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for detecting a perturbation by hysteretic cycle using a non...
Patent number
10,119,856
Issue date
Nov 6, 2018
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Sebastien Hentz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Apparatus and methods for integrated MEMS devices
Patent number
10,046,966
Issue date
Aug 14, 2018
MCube, Inc.
Ben Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of detecting whether microelectromechanical system device is...
Patent number
9,915,679
Issue date
Mar 13, 2018
Sensortek Technology Corp.
Hsin-Hung Huang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Inertial angular sensor of balanced MEMS type and method for balanc...
Patent number
9,869,551
Issue date
Jan 16, 2018
Sagem Defense Securite
Alain Jeanroy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Packaged MEMS device comprising adjustable ventilation opening
Patent number
9,673,785
Issue date
Jun 6, 2017
Infineon Technologies AG
Christian Herzum
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for testing signal-to-noise ratio using a film frame
Patent number
9,491,558
Issue date
Nov 8, 2016
Robert Bosch GmbH
Andrew J. Doller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Testing for defective manufacturing of microphones and ultralow pre...
Patent number
9,400,262
Issue date
Jul 26, 2016
Robert Bosch GmbH
Andrew J. Doller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical component and method for testing a microelec...
Patent number
9,399,572
Issue date
Jul 26, 2016
Elmos Semiconductor AG
Bernd Burchard
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device testing using acoustic port obstruction
Patent number
9,326,080
Issue date
Apr 26, 2016
Robert Bosch GmbH
Andrew J. Doller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Tester and method for testing a strip of devices
Patent number
9,285,422
Issue date
Mar 15, 2016
Freescale Semiconductor Inc.
Chad S. Dawson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing a sensor
Patent number
9,278,854
Issue date
Mar 8, 2016
Epcos AG
Wolfgang Pahl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Packaged MEMS device and method of calibrating a packaged MEMS device
Patent number
9,210,516
Issue date
Dec 8, 2015
Infineon Technologies AG
Christian Herzum
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of testing of MEMS devices on a wafer level
Patent number
9,034,666
Issue date
May 19, 2015
Vladimir Vaganov
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing hollow nanoparticle comprising deposition on/i...
Patent number
8,999,225
Issue date
Apr 7, 2015
National University Corporation Nagoya University
Tsukasa Torimoto
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information
Patent Grant
MEMS vacuum level monitor in sealed package
Patent number
8,887,573
Issue date
Nov 18, 2014
Taiwan Semiconductor Manufacturing Co., Ltd.
Tung-Tsun Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Measurement and apparatus for electrical measurement of electrical...
Patent number
8,775,107
Issue date
Jul 8, 2014
QUALCOMM MEMS Technologies, Inc.
Alok Govil
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical component having a test structure for determining t...
Patent number
8,695,427
Issue date
Apr 15, 2014
Robert Bosch GmbH
Jochen Reinmuth
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Detection and mitigation of particle contaminants in MEMS devices
Patent number
8,598,891
Issue date
Dec 3, 2013
Analog Devices, Inc.
Vineet Kumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device structures and their fabrication
Patent number
8,530,984
Issue date
Sep 10, 2013
Texas Instruments Incorporated
Clayton Lee Stevenson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Detection and mitigation of particle contaminants in MEMS devices
Patent number
8,421,481
Issue date
Apr 16, 2013
Analog Devices, Inc.
Vineet Kumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods for measurement and characterization of interferometric mod...
Patent number
8,386,201
Issue date
Feb 26, 2013
QUALCOMM MEMS Technologies, Inc.
Alok Govil
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Measurement and apparatus for electrical measurement of electrical...
Patent number
8,355,883
Issue date
Jan 15, 2013
QUALCOMM MEMS Technologies, Inc.
Alok Govil
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Mems device and fabrication method
Patent number
8,343,805
Issue date
Jan 1, 2013
Texas Instruments Incorporated
Clayton Lee Stevenson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
SEMI-FINISHED PRODUCT OF ELECTRONIC DEVICE AND ELECTRONIC DEVICE
Publication number
20220298010
Publication date
Sep 22, 2022
Merry Electronics Co., Ltd.
Jen-Yi Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEVICE AND METHOD FOR A THRESHOLD SENSOR
Publication number
20190382259
Publication date
Dec 19, 2019
InvenSense, Inc.
MATTHEW JULIAN THOMPSON
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
APPARATUS AND METHODS FOR INTEGRATED MEMS DEVICES
Publication number
20180346328
Publication date
Dec 6, 2018
MCUBE, INC.
Ben LEE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
APPARATUS AND METHODS FOR INTEGRATED MEMS DEVICES
Publication number
20170283256
Publication date
Oct 5, 2017
MCUBE, INC.
Ben LEE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEM FOR WAFER-LEVEL TESTING OF MEMS PRESSURE SENSORS
Publication number
20160116361
Publication date
Apr 28, 2016
FREESCALE SEMICONDUCTOR, INC.
BRUNO J. DEBEURRE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL SYSTEM AND METHODS OF USE
Publication number
20150177272
Publication date
Jun 25, 2015
Jason V. Clark
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF MANUFACTURING MEMS DEVICES WITH RELIABLE HERMETIC SEAL
Publication number
20140356989
Publication date
Dec 4, 2014
Analog Devices, Inc.
Li Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INERTIAL ANGULAR SENSOR OF BALANCED MEMS TYPE AND METHOD FOR BALANC...
Publication number
20140299947
Publication date
Oct 9, 2014
Sagem Defense Securite
Alain Jeanroy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TESTING FOR DEFECTIVE MANUFACTURING OF MICROPHONES AND ULTRALOW PRE...
Publication number
20140076052
Publication date
Mar 20, 2014
ROBERT BOSCH GmbH
Andrew J. Doller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEVICE TESTING USING ACOUSTIC PORT OBSTRUCTION
Publication number
20140079229
Publication date
Mar 20, 2014
ROBERT BOSCH GmbH
Andrew J. Doller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL COMPONENT AND METHOD FOR TESTING A MICROELEC...
Publication number
20130305804
Publication date
Nov 21, 2013
Silicon Microstructures, Inc.
Bernd Burchard
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TESTER AND METHOD FOR TESTING A STRIP OF DEVICES
Publication number
20130297248
Publication date
Nov 7, 2013
FREESCALE SEMICONDUCTOR, INC.
Chad S. Dawson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Packaged MEMS Device and Method of Calibrating a Packaged MEMS Device
Publication number
20130277776
Publication date
Oct 24, 2013
INFINEON TECHNOLOGIES AG
Christian Herzum
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS VACUUM LEVEL MONITOR IN SEALED PACKAGE
Publication number
20130213139
Publication date
Aug 22, 2013
Taiwan Semiconductor Manufacturing Co., LTD
Tung-Tsun CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Detection and Mitigation of Particle Contaminants in MEMS Devices
Publication number
20130168675
Publication date
Jul 4, 2013
Analog Devices, Inc.
Vineet Kumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE STRUCTURES AND THEIR FABRICATION
Publication number
20130105995
Publication date
May 2, 2013
TEXAS INSTRUMENTS INCORPORATED
Clayton Lee Stevenson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
HERMETICALLY SEALED MEMS DEVICE WITH A PORTION EXPOSED TO THE ENVIR...
Publication number
20130001550
Publication date
Jan 3, 2013
INVENSENSE, INC.
Joseph SEEGER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND FABRICATION METHOD
Publication number
20120329180
Publication date
Dec 27, 2012
TEXAS INSTRUMENTS INCORPORATED
Clayton Lee Stevenson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEASUREMENT AND APPARATUS FOR ELECTRICAL MEASUREMENT OF ELECTRICAL...
Publication number
20120256615
Publication date
Oct 11, 2012
QUALCOMM MEMS TECHNOLOGIES, INC.
Alok Govil
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEASUREMENT AND APPARATUS FOR ELECTRICAL MEASUREMENT OF ELECTRICAL...
Publication number
20120249122
Publication date
Oct 4, 2012
QUALCOMM MEMS TECHNOLOGIES, INC.
Alok Govil
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING HOLLOW NANOPARTICLE, HOLLOW NANOPARTICLE, AND...
Publication number
20120219800
Publication date
Aug 30, 2012
OSAKA UNIVERSITY
Tsukasa Torimoto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND SYSTEM FOR TESTING OF MEMS DEVICES
Publication number
20120194207
Publication date
Aug 2, 2012
Vladimir Vaganov
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Device and Fabrication Method
Publication number
20120038019
Publication date
Feb 16, 2012
Clayton Lee Stevenson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL COMPONENT HAVING A TEST STRUCTURE FOR DETERMINING T...
Publication number
20110296917
Publication date
Dec 8, 2011
Jochen Reinmuth
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Detection and Mitigation of Particle Contaminants in MEMS Devices
Publication number
20110115498
Publication date
May 19, 2011
Analog Devices, Inc.
Vineet Kumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR CARRYING OUT A SELF-TEST FOR A MICROMECHANICAL SENSOR DE...
Publication number
20110067506
Publication date
Mar 24, 2011
Stefan KIMMERLE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTRONIC DEVICE
Publication number
20110061449
Publication date
Mar 17, 2011
Kabushiki Kaisha Toshiba
Hitoshi YAGI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DYNAMIC QUANTITY SENSOR AND METHOD OF MANUFACTURING THE SAME
Publication number
20100307242
Publication date
Dec 9, 2010
DENSO CORPORATION
Minekazu SAKAI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Apparatus and Method of Detecting Microchip Hermeticity
Publication number
20100154517
Publication date
Jun 24, 2010
Analog Devices, Inc.
Firas Sammoura
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF CHECKING THE HERMETICITY OF A CLOSED CAVITY OF A MICROMET...
Publication number
20100064779
Publication date
Mar 18, 2010
Asulab S.A.
Francois Gueissaz
B81 - MICRO-STRUCTURAL TECHNOLOGY