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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00523Etching material

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Manufacture of surface relief structures
- Patent number 12,169,359
- Issue date Dec 17, 2024
- Snap Inc.
- Ian Sturland
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer level packaging of MEMS
- Patent number 12,091,311
- Issue date Sep 17, 2024
- Texas Instruments Incorporated
- Stuart M. Jacobsen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having decreased contact resistance
- Patent number 12,077,431
- Issue date Sep 3, 2024
- Qorvo US, Inc.
- Shibajyoti Ghosh Dastider
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hermetically sealed MEMS mirror and method of manufacture
- Patent number 12,078,799
- Issue date Sep 3, 2024
- STMicroelectron S.r.l.
- Giorgio Allegato
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system device including a precision proof m...
- Patent number 12,006,208
- Issue date Jun 11, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-device structures with etch holes
- Patent number 11,952,266
- Issue date Apr 9, 2024
- X-CELEPRINT LIMITED
- Pierluigi Rubino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mirror assembly for light steering with reduced finger thickness
- Patent number 11,815,627
- Issue date Nov 14, 2023
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating a microscale canopy wick structure having enh...
- Patent number 11,712,766
- Issue date Aug 1, 2023
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Gaohua Zhu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Hermetically sealed MEMS mirror and method of manufacture
- Patent number 11,675,186
- Issue date Jun 13, 2023
- STMicroelectronics S.r.l.
- Giorgio Allegato
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Copper-alloy capping layers for metallization in touch-panel displays
- Patent number 11,640,222
- Issue date May 2, 2023
- Materion Newton, Inc.
- Shuwei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system device including a precision proof m...
- Patent number 11,634,320
- Issue date Apr 25, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for fabricating pressure sensors with non-silicon diaphragms
- Patent number 11,624,668
- Issue date Apr 11, 2023
- ZHEJIANG DUNAN ARTIFICIAL ENVIRONMENT CO., LTD.
- Tom Kwa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for producing thin-film layers and microsystems having thin...
- Patent number 11,414,320
- Issue date Aug 16, 2022
- Infineon Technologies AG
- Alfred Sigl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Copper-alloy capping layers for metallization in touch-panel displays
- Patent number 11,392,257
- Issue date Jul 19, 2022
- MATERION NEWTON INC.
- Shuwei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Combined physical and chemical etch to reduce magnetic tunnel junct...
- Patent number 11,316,103
- Issue date Apr 26, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Dongna Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and device for a carrier proximity mask
- Patent number 11,232,930
- Issue date Jan 25, 2022
- Applied Materials, Inc.
- Morgan Evans
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for a mems transducer
- Patent number 11,225,408
- Issue date Jan 18, 2022
- Infineon Technologies AG
- Andreas Wiesbauer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for forming a MEMS device layer on an active device layer a...
- Patent number 11,180,366
- Issue date Nov 23, 2021
- General Electric Company
- Marco Francesco Aimi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stress compensation for piezoelectric optical MEMS devices
- Patent number 11,148,939
- Issue date Oct 19, 2021
- Texas Instruments Incorporated
- YungShan Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for tuning plasma potential using variable mode plasma chamber
- Patent number 11,049,692
- Issue date Jun 29, 2021
- Mattson Technology, Inc.
- Stephen E. Savas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device comprising a micro-electro-mechanical system substrate with...
- Patent number 11,040,871
- Issue date Jun 22, 2021
- Invensense, Inc.
- Jongwoo Shin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and device for a carrier proximity mask
- Patent number 10,991,547
- Issue date Apr 27, 2021
- Applied Materials, Inc.
- Morgan Evans
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a microelectromechanical device having a...
- Patent number 10,961,117
- Issue date Mar 30, 2021
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing MEMS switches with reduced switching voltage
- Patent number 10,941,036
- Issue date Mar 9, 2021
- International Business Machines Corporation
- Stephen E. Luce
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thin-film transistor and method of forming an electrode of a thin-f...
- Patent number 10,916,569
- Issue date Feb 9, 2021
- H.C. Starck Inc.
- Shuwei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator layer patterning with topography
- Patent number 10,906,802
- Issue date Feb 2, 2021
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for producing thin-film layers and microsystems having thin...
- Patent number 10,889,492
- Issue date Jan 12, 2021
- Infineon Technologies AG
- Alfred Sigl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing MEMS switches with reduced switching voltage
- Patent number 10,836,632
- Issue date Nov 17, 2020
- International Business Machines Corporation
- Stephen E. Luce
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing low contact resistance semiconductor struc...
- Patent number 10,815,120
- Issue date Oct 27, 2020
- Semiconductor Manufacturing International (Shanghai) Corporation
- Chao Zheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of etching microelectronic mechanical system features in a s...
- Patent number 10,784,115
- Issue date Sep 22, 2020
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Feng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICRO-DEVICE STRUCTURES WITH ETCH HOLES
- Publication number 20240199413
- Publication date Jun 20, 2024
- X-Celprint Limited
- Pierluigi Rubino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELF-ALIGNED AIR GAP FORMATION IN MICROELECTRONICS PACKAGES
- Publication number 20240101413
- Publication date Mar 28, 2024
- Intel Corporation
- Jeremy D. Ecton
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CHIP ASSEMBLY AND METHOD OF MAKING A CHIP ASSEMBLY
- Publication number 20230400788
- Publication date Dec 14, 2023
- NPL Management Limited
- Alastair SINCLAIR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A MICROMECHANICAL SENSOR
- Publication number 20230339745
- Publication date Oct 26, 2023
- ROBERT BOSCH GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HERMETICALLY SEALED MEMS MIRROR AND METHOD OF MANUFACTURE
- Publication number 20230324678
- Publication date Oct 12, 2023
- STMicroelectronics S.r.l
- Giorgio Allegato
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE INCLUDING A PRECISION PROOF...
- Publication number 20230249963
- Publication date Aug 10, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Ting-Jung CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-LEVEL MICROELECTROMECHANICAL SYSTEM STRUCTURE WITH NON-PHOTOD...
- Publication number 20230127477
- Publication date Apr 27, 2023
- TEXAS INSTRUMENTS INCORPORATED
- Christopher Murray BEARD
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MODULE AND METHOD OF MANUFACTURING MEMS MODULE
- Publication number 20230016416
- Publication date Jan 19, 2023
- Rohm Co., Ltd.
- Toru HIGUCHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COPPER-ALLOY CAPPING LAYERS FOR METALLIZATION IN TOUCH-PANEL DISPLAYS
- Publication number 20220308705
- Publication date Sep 29, 2022
- Shuwei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE HAVING DECREASED CONTACT RESISTANCE
- Publication number 20220289565
- Publication date Sep 15, 2022
- Qorvo US, Inc.
- Shibajyoti Ghosh Dastider
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE INCLUDING A PRECISION PROOF M...
- Publication number 20220267145
- Publication date Aug 25, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Ting-Jung CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-DEVICE STRUCTURES WITH ETCH HOLES
- Publication number 20220112078
- Publication date Apr 14, 2022
- X-CELEPRINT LIMITED
- Pierluigi Rubino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MIRROR ASSEMBLY FOR LIGHT STEERING WITH REDUCED FINGER THICKNESS
- Publication number 20210396850
- Publication date Dec 23, 2021
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FABRICATING A MICROSCALE CANOPY WICK STRUCTURE HAVING ENH...
- Publication number 20210370449
- Publication date Dec 2, 2021
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Gaohua Zhu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS FOR FORMING A MEMS DEVICE LAYER ON AN ACTIVE DEVICE LAYER A...
- Publication number 20210292161
- Publication date Sep 23, 2021
- GENERAL ELECTRIC COMPANY
- Marco Francesco Aimi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COPPER-ALLOY CAPPING LAYERS FOR METALLIZATION IN TOUCH-PANEL DISPLAYS
- Publication number 20210208738
- Publication date Jul 8, 2021
- Shuwei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND DEVICE FOR A CARRIER PROXIMITY MASK
- Publication number 20210210308
- Publication date Jul 8, 2021
- Applied Materials, Inc.
- Morgan Evans
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods for Producing Thin-Film Layers and Microsystems Having Thin...
- Publication number 20210017019
- Publication date Jan 21, 2021
- INFINEON TECHNOLOGIES AG
- Alfred Sigl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR A MEMS TRANSDUCER
- Publication number 20200148531
- Publication date May 14, 2020
- INFINEON TECHNOLOGIES AG
- Andreas Wiesbauer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMBINED PHYSICAL AND CHEMICAL ETCH TO REDUCE MAGNETIC TUNNEL JUNCT...
- Publication number 20200144492
- Publication date May 7, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Dongna Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR LAYER PATTERNING WITH TOPOGRAPHY
- Publication number 20200131033
- Publication date Apr 30, 2020
- InvenSense, Inc.
- Daesung LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SIDEWALL STOPPER FOR MEMS DEVICE
- Publication number 20200102209
- Publication date Apr 2, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Shih-Wei Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MICROELECTROMECHANICAL DEVICE HAVING A...
- Publication number 20190375629
- Publication date Dec 12, 2019
- STMicroelectronics S.r.l.
- Enri DUQI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING LOW CONTACT RESISTANCE SEMICONDUCTOR STRUC...
- Publication number 20190345025
- Publication date Nov 14, 2019
- Semiconductor Manufacturing International (Shanghai) Corporation
- Chao ZHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF ETCHING MICROELECTRONIC MECHANICAL SYSTEM FEATURES IN A S...
- Publication number 20190333773
- Publication date Oct 31, 2019
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Feng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR FABRICATING PRESSURE SENSORS WITH NON-SILICON DIAPHRAGMS
- Publication number 20190310153
- Publication date Oct 10, 2019
- DunAn Sensing, LLC
- TOM KWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF ETCHING MICROELECTRONIC MECHANICAL SYSTEM FEATURES IN A S...
- Publication number 20190287810
- Publication date Sep 19, 2019
- Toyota Motor Engineering & Manufacturing North America, Inc.
- Feng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR PRODUCING THIN-FILM LAYERS AND MICROSYSTEMS HAVING THIN...
- Publication number 20190241431
- Publication date Aug 8, 2019
- INFINEON TECHNOLOGIES AG
- Alfred Sigl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE COMPRISING A MICRO-ELECTRO-MECHANICAL SYSTEM SUBSTRATE WITH...
- Publication number 20190185317
- Publication date Jun 20, 2019
- InvenSense, Inc.
- Jongwoo Shin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Combined Physical and Chemical Etch to Reduce Magnetic Tunnel Junct...
- Publication number 20180331279
- Publication date Nov 15, 2018
- HEADWAY TECHNOLOGIES, INC.
- Dongna Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Etching material

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Manufacture of surface relief structures

Wafer level packaging of MEMS

MEMS device having decreased contact resistance

Hermetically sealed MEMS mirror and method of manufacture

Micro-electromechanical system device including a precision proof m...

Micro-device structures with etch holes

Mirror assembly for light steering with reduced finger thickness

Method of fabricating a microscale canopy wick structure having enh...

Hermetically sealed MEMS mirror and method of manufacture

Copper-alloy capping layers for metallization in touch-panel displays

Micro-electromechanical system device including a precision proof m...

Methods for fabricating pressure sensors with non-silicon diaphragms

Methods for producing thin-film layers and microsystems having thin...

Copper-alloy capping layers for metallization in touch-panel displays

Combined physical and chemical etch to reduce magnetic tunnel junct...

Method and device for a carrier proximity mask

System and method for a mems transducer

Methods for forming a MEMS device layer on an active device layer a...

Stress compensation for piezoelectric optical MEMS devices

Methods for tuning plasma potential using variable mode plasma chamber

Device comprising a micro-electro-mechanical system substrate with...

Method and device for a carrier proximity mask

Process for manufacturing a microelectromechanical device having a...

Method of manufacturing MEMS switches with reduced switching voltage

Thin-film transistor and method of forming an electrode of a thin-f...

Actuator layer patterning with topography

Methods for producing thin-film layers and microsystems having thin...

Method of manufacturing MEMS switches with reduced switching voltage

Method for manufacturing low contact resistance semiconductor struc...

Method of etching microelectronic mechanical system features in a s...

Patents Applicationslast 30 patents

MICRO-DEVICE STRUCTURES WITH ETCH HOLES

SELF-ALIGNED AIR GAP FORMATION IN MICROELECTRONICS PACKAGES

CHIP ASSEMBLY AND METHOD OF MAKING A CHIP ASSEMBLY

METHOD FOR MANUFACTURING A MICROMECHANICAL SENSOR

HERMETICALLY SEALED MEMS MIRROR AND METHOD OF MANUFACTURE

MICRO-ELECTROMECHANICAL SYSTEM DEVICE INCLUDING A PRECISION PROOF...

MULTI-LEVEL MICROELECTROMECHANICAL SYSTEM STRUCTURE WITH NON-PHOTOD...

MEMS MODULE AND METHOD OF MANUFACTURING MEMS MODULE

COPPER-ALLOY CAPPING LAYERS FOR METALLIZATION IN TOUCH-PANEL DISPLAYS

MEMS DEVICE HAVING DECREASED CONTACT RESISTANCE

MICRO-ELECTROMECHANICAL SYSTEM DEVICE INCLUDING A PRECISION PROOF M...

MICRO-DEVICE STRUCTURES WITH ETCH HOLES

MIRROR ASSEMBLY FOR LIGHT STEERING WITH REDUCED FINGER THICKNESS

METHOD OF FABRICATING A MICROSCALE CANOPY WICK STRUCTURE HAVING ENH...

METHODS FOR FORMING A MEMS DEVICE LAYER ON AN ACTIVE DEVICE LAYER A...

COPPER-ALLOY CAPPING LAYERS FOR METALLIZATION IN TOUCH-PANEL DISPLAYS

METHOD AND DEVICE FOR A CARRIER PROXIMITY MASK

Methods for Producing Thin-Film Layers and Microsystems Having Thin...

SYSTEM AND METHOD FOR A MEMS TRANSDUCER

COMBINED PHYSICAL AND CHEMICAL ETCH TO REDUCE MAGNETIC TUNNEL JUNCT...

ACTUATOR LAYER PATTERNING WITH TOPOGRAPHY

SIDEWALL STOPPER FOR MEMS DEVICE

PROCESS FOR MANUFACTURING A MICROELECTROMECHANICAL DEVICE HAVING A...

METHOD FOR MANUFACTURING LOW CONTACT RESISTANCE SEMICONDUCTOR STRUC...

METHOD OF ETCHING MICROELECTRONIC MECHANICAL SYSTEM FEATURES IN A S...

METHODS FOR FABRICATING PRESSURE SENSORS WITH NON-SILICON DIAPHRAGMS

METHOD OF ETCHING MICROELECTRONIC MECHANICAL SYSTEM FEATURES IN A S...

METHODS FOR PRODUCING THIN-FILM LAYERS AND MICROSYSTEMS HAVING THIN...

DEVICE COMPRISING A MICRO-ELECTRO-MECHANICAL SYSTEM SUBSTRATE WITH...

Combined Physical and Chemical Etch to Reduce Magnetic Tunnel Junct...