Flexible or deformable structures not provided for in groups B81C1/00142 - B81C1/00182

Industry

CPC
B81C1/0019

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/0019Flexible or deformable structures not provided for in groups B81C1/00142 - B81C1/00182

Industries

Patents Grantslast 30 patents

Information Patent Grant
MEMS device having an improved stress distribution and manufacturin...
- Patent number 12,084,341
- Issue date Sep 10, 2024
- STMicroelectronics S.r.l.
- Nicolo' Boni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Composite spring structure to reinforce mechanical robustness of a...
- Patent number 11,993,510
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods, apparatus, and systems for fabricating solution-based cond...
- Patent number 11,926,524
- Issue date Mar 12, 2024
- Iowa State University Research Foundation, Inc.
- Metin Uz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nano-electro-mechanical tags for identification and authentication
- Patent number 11,873,214
- Issue date Jan 16, 2024
- University of Florida Research Foundation, Incorporated
- Roozbeh Tabrizian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices comprising spring element and comb drive and associate...
- Patent number 11,703,681
- Issue date Jul 18, 2023
- Infineon Technologies AG
- Stephan Gerhard Albert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
3D-structured sensors having stretchable multi-functional tactile e...
- Patent number 11,572,270
- Issue date Feb 7, 2023
- Nanyang Technological University
- Zhiyuan Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing at least one three-dimensional component for t...
- Patent number 11,467,226
- Issue date Oct 11, 2022
- Leibniz-Institut für Festkörper-und Werkstoffforschung Dresden e.V.
- Daniil Karnaushenko
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator and manufacture method thereof, operation method thereof,...
- Patent number 11,434,128
- Issue date Sep 6, 2022
- Hefei Xinsheng Optoelectronics Technology Co., Ltd.
- Suwei Zeng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Composite spring structure to reinforce mechanical robustness of a...
- Patent number 11,420,866
- Issue date Aug 23, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical device having two buried cavities and manu...
- Patent number 11,358,862
- Issue date Jun 14, 2022
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High-volume millimeter scale manufacturing
- Patent number 11,325,828
- Issue date May 10, 2022
- Vibrant Composites Inc.
- Pratheev S. Sreetharan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three-dimensional micro devices and method for their production
- Patent number 11,208,321
- Issue date Dec 28, 2021
- Leibniz-Institut fuer Festkoerper-und Werkstoffforschung Dresden e.V.
- Daniil Karnaushenko
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachined mirror assembly having reflective layers on both sides
- Patent number 11,209,641
- Issue date Dec 28, 2021
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Sae Won Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods, apparatus, and systems for fabricating solution-based cond...
- Patent number 11,066,296
- Issue date Jul 20, 2021
- Iowa State University Research Foundation, Inc.
- Metin Uz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical z-inertial sensor
- Patent number 10,899,603
- Issue date Jan 26, 2021
- Robert Bosch GmbH
- Ralf Boessendoerfer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Deposition of protective material at wafer level in front end for e...
- Patent number 10,858,245
- Issue date Dec 8, 2020
- Infineon Technologies AG
- Florian Brandl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Suspended microelectromechanical system (MEMS) devices
- Patent number 10,843,920
- Issue date Nov 24, 2020
- Analog Devices International Unlimited Company
- Kotlanka Rama Krishna
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a MEMS element
- Patent number 10,775,170
- Issue date Sep 15, 2020
- Robert Bosch GmbH
- Joerg Braeuer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatically actuated oscillating structure with oscillation s...
- Patent number 10,746,982
- Issue date Aug 18, 2020
- STMicroelectronics S.r.l.
- Benedetto Vigna
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication method of functional micro/nano structures over large-a...
- Patent number 10,704,167
- Issue date Jul 7, 2020
- Ecole Polytechnique Federale de Lausanne (EPFL)
- Fabien Sorin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical device having two buried cavities and manu...
- Patent number 10,676,347
- Issue date Jun 9, 2020
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing microelectromechanical system structure ha...
- Patent number 10,654,713
- Issue date May 19, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chin-Han Meng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication process for a symmetrical MEMS accelerometer
- Patent number 10,647,570
- Issue date May 12, 2020
- Chinese Academy of Sciences Institute of Geology and Geophysics
- Lianzhong Yu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Assembly processes for three-dimensional microstructures
- Patent number 10,612,925
- Issue date Apr 7, 2020
- The Regents of the University of Michigan
- Khalil Najafi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Flexible strip for horology and method for manufacturing the same
- Patent number 10,579,020
- Issue date Mar 3, 2020
- The Swatch Group Research and Development Ltd.
- Gianni Di Domenico
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Proof mass and polysilicon electrode integrated thereon
- Patent number 10,505,006
- Issue date Dec 10, 2019
- Invensense, Inc.
- Bongsang Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inertia sensor and method of manufacturing the same
- Patent number 10,502,758
- Issue date Dec 10, 2019
- Hitachi, Ltd.
- Takashi Shiota
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication process for a symmetrical MEMS accelerometer
- Patent number 10,392,247
- Issue date Aug 27, 2019
- Chinese Academy of Sciences Institute of Geology and Geophysics
- Lianzhong Yu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Scanning mirror device and a method for manufacturing it
- Patent number 10,377,625
- Issue date Aug 13, 2019
- Murata Manufacturing Co., Ltd.
- Altti Torkkeli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Deposition of protective material at wafer level in front end for e...
- Patent number 10,370,244
- Issue date Aug 6, 2019
- Infineon Technologies AG
- Florian Brandl
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURIN...
- Publication number 20240425359
- Publication date Dec 26, 2024
- STMicroelectronics S.r.l
- Nicolo' BONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACCELEROMETER WITH VERTICAL STOPS
- Publication number 20240329076
- Publication date Oct 3, 2024
- NXP USA, Inc.
- Jun Tang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPOSITE SPRING STRUCTURE TO REINFORCE MECHANICAL ROBUSTNESS OF A...
- Publication number 20240270565
- Publication date Aug 15, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20240092632
- Publication date Mar 21, 2024
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD FOR GRAPHITE SLIDER ARRAYS
- Publication number 20240043266
- Publication date Feb 8, 2024
- RESEARCH INSTITUTE OF TSINGHUA UNIVERSITY IN SHENZHEN
- Quanshui ZHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DETECTION STRUCTURE FOR A MEMS ACCELEROMETER HAVING IMPROVED PERFOR...
- Publication number 20240010490
- Publication date Jan 11, 2024
- STMicroelectronics S.r.l.
- Gabriele GATTERE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE AND NOISE CANCELLATIO...
- Publication number 20230365401
- Publication date Nov 16, 2023
- Huawei Technologies Co., Ltd
- Ulrich HOFMANN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS with cover drive and method of operating the same
- Publication number 20230322546
- Publication date Oct 12, 2023
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Sergiu LANGA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE SENSOR AND MANUFACTURING METHOD FOR THE SAME
- Publication number 20230296461
- Publication date Sep 21, 2023
- InvenSense, Inc.
- Yoshitaka Sasaki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LIGHT SCANNER PACKAGE AND METHOD FOR MANUFACTURING SAME
- Publication number 20230127991
- Publication date Apr 27, 2023
- WEMEMS CO.,LTD.
- Jonghyun LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ROTOR WITH COATED BOTTOM SURFACE
- Publication number 20220340411
- Publication date Oct 27, 2022
- Murata Manufacturing Co., Ltd.
- Petteri KILPINEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPOSITE SPRING STRUCTURE TO REINFORCE MECHANICAL ROBUSTNESS OF A...
- Publication number 20220306454
- Publication date Sep 29, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH-VOLUME MILLIMETER SCALE MANUFACTURING
- Publication number 20220259038
- Publication date Aug 18, 2022
- Vibrant Composites Inc.
- Pratheev S. SREETHARAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURIN...
- Publication number 20220119245
- Publication date Apr 21, 2022
- STMicroelectronics S.r.l
- Nicolo' BONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMACHINED MIRROR ASSEMBLY HAVING REFLECTIVE LAYERS ON BOTH SIDES
- Publication number 20210405347
- Publication date Dec 30, 2021
- Beijing Voyager Technology Co., Ltd.
- Sae Won Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICES COMPRISING SPRING ELEMENT AND COMB DRIVE AND ASSOCIATE...
- Publication number 20210373322
- Publication date Dec 2, 2021
- INFINEON TECHNOLOGIES AG
- Stephan Gerhard ALBERT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD FOR BONDED SUBSTRATE
- Publication number 20210375628
- Publication date Dec 2, 2021
- Murata Manufacturing Co., Ltd.
- Ryunosuke Hino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPOSITE SPRING STRUCTURE TO REINFORCE MECHANICAL ROBUSTNESS OF A...
- Publication number 20210292157
- Publication date Sep 23, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Actuator and Manufacture Method Thereof, Operation Method Thereof,...
- Publication number 20210221672
- Publication date Jul 22, 2021
- HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Suwei Zeng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Nano-Electro-Mechanical Tags for Identification and Authentication
- Publication number 20210221675
- Publication date Jul 22, 2021
- University of Florida Research Foundation, Incorporated
- Roozbeh Tabrizian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
3D-STRUCTURED SENSORS HAVING STRETCHABLE MULTI-FUNCTIONAL TACTILE E...
- Publication number 20200277184
- Publication date Sep 3, 2020
- Nanyang Technological University
- Zhiyuan LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE HAVING TWO BURIED CAVITIES AND MANU...
- Publication number 20200262699
- Publication date Aug 20, 2020
- STMicroelectronics S.r.l.
- Enri DUQI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING AT LEAST ONE THREE-DIMENSIONAL COMPONENT FOR T...
- Publication number 20200025839
- Publication date Jan 23, 2020
- Leibniz-Institut fuer Festkoerper-und Werkstoffforschung Dresden E.V.
- Daniil KARNAUSHENKO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FABRICATION PROCESS FOR A SYMMETRICAL MEMS ACCELEROMETER
- Publication number 20190382264
- Publication date Dec 19, 2019
- Chinese Academy of Sciences Institute of Geology and Geophysics
- Lianzhong YU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEPOSITION OF PROTECTIVE MATERIAL AT WAFER LEVEL IN FRONT END FOR E...
- Publication number 20190300362
- Publication date Oct 3, 2019
- INFINEON TECHNOLOGIES AG
- Florian BRANDL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH-VOLUME MILLIMETER SCALE MANUFACTURING
- Publication number 20190256353
- Publication date Aug 22, 2019
- VIBRANT COMPOSITES, INC.
- Pratheev S. SREETHARAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MICROELECTROMECHANICAL SYSTEM STRUCTURE
- Publication number 20190256350
- Publication date Aug 22, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chin-Han MENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE HAVING TWO BURIED CAVITIES AND MANU...
- Publication number 20190210868
- Publication date Jul 11, 2019
- STMicroelectronics S.r.l.
- Enri DUQI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEPOSITION OF PROTECTIVE MATERIAL AT WAFER LEVEL IN FRONT END FOR E...
- Publication number 20190161345
- Publication date May 30, 2019
- INFINEON TECHNOLOGIES AG
- Florian BRANDL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL Z-INERTIAL SENSOR
- Publication number 20190135612
- Publication date May 9, 2019
- ROBERT BOSCH GmbH
- Ralf Boessendoerfer
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Flexible or deformable structures not provided for in groups B81C1/00142 - B81C1/00182

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS device having an improved stress distribution and manufacturin...

Composite spring structure to reinforce mechanical robustness of a...

Methods, apparatus, and systems for fabricating solution-based cond...

Nano-electro-mechanical tags for identification and authentication

MEMS devices comprising spring element and comb drive and associate...

3D-structured sensors having stretchable multi-functional tactile e...

Method for producing at least one three-dimensional component for t...

Actuator and manufacture method thereof, operation method thereof,...

Composite spring structure to reinforce mechanical robustness of a...

Micro-electro-mechanical device having two buried cavities and manu...

High-volume millimeter scale manufacturing

Three-dimensional micro devices and method for their production

Micromachined mirror assembly having reflective layers on both sides

Methods, apparatus, and systems for fabricating solution-based cond...

Micromechanical z-inertial sensor

Deposition of protective material at wafer level in front end for e...

Suspended microelectromechanical system (MEMS) devices

Method for manufacturing a MEMS element

Electrostatically actuated oscillating structure with oscillation s...

Fabrication method of functional micro/nano structures over large-a...

Micro-electro-mechanical device having two buried cavities and manu...

Method for manufacturing microelectromechanical system structure ha...

Fabrication process for a symmetrical MEMS accelerometer

Assembly processes for three-dimensional microstructures

Flexible strip for horology and method for manufacturing the same

Proof mass and polysilicon electrode integrated thereon

Inertia sensor and method of manufacturing the same

Fabrication process for a symmetrical MEMS accelerometer

Scanning mirror device and a method for manufacturing it

Deposition of protective material at wafer level in front end for e...

Patents Applicationslast 30 patents

MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURIN...

MEMS ACCELEROMETER WITH VERTICAL STOPS

COMPOSITE SPRING STRUCTURE TO REINFORCE MECHANICAL ROBUSTNESS OF A...

MEMS DEVICE AND MANUFACTURING METHOD THEREOF

MANUFACTURING METHOD FOR GRAPHITE SLIDER ARRAYS

DETECTION STRUCTURE FOR A MEMS ACCELEROMETER HAVING IMPROVED PERFOR...

MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE AND NOISE CANCELLATIO...

MEMS with cover drive and method of operating the same

PRESSURE SENSOR AND MANUFACTURING METHOD FOR THE SAME

LIGHT SCANNER PACKAGE AND METHOD FOR MANUFACTURING SAME

MEMS ROTOR WITH COATED BOTTOM SURFACE

COMPOSITE SPRING STRUCTURE TO REINFORCE MECHANICAL ROBUSTNESS OF A...

HIGH-VOLUME MILLIMETER SCALE MANUFACTURING

MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURIN...

MICROMACHINED MIRROR ASSEMBLY HAVING REFLECTIVE LAYERS ON BOTH SIDES

MEMS DEVICES COMPRISING SPRING ELEMENT AND COMB DRIVE AND ASSOCIATE...

MANUFACTURING METHOD FOR BONDED SUBSTRATE

COMPOSITE SPRING STRUCTURE TO REINFORCE MECHANICAL ROBUSTNESS OF A...

Actuator and Manufacture Method Thereof, Operation Method Thereof,...

Nano-Electro-Mechanical Tags for Identification and Authentication

3D-STRUCTURED SENSORS HAVING STRETCHABLE MULTI-FUNCTIONAL TACTILE E...

MICRO-ELECTRO-MECHANICAL DEVICE HAVING TWO BURIED CAVITIES AND MANU...

METHOD FOR PRODUCING AT LEAST ONE THREE-DIMENSIONAL COMPONENT FOR T...

FABRICATION PROCESS FOR A SYMMETRICAL MEMS ACCELEROMETER

DEPOSITION OF PROTECTIVE MATERIAL AT WAFER LEVEL IN FRONT END FOR E...

HIGH-VOLUME MILLIMETER SCALE MANUFACTURING

METHOD FOR MANUFACTURING MICROELECTROMECHANICAL SYSTEM STRUCTURE

MICRO-ELECTRO-MECHANICAL DEVICE HAVING TWO BURIED CAVITIES AND MANU...

DEPOSITION OF PROTECTIVE MATERIAL AT WAFER LEVEL IN FRONT END FOR E...

MICROMECHANICAL Z-INERTIAL SENSOR