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H01J37/32642
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
Current Industry
H01J37/32642
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Patents Grants
last 30 patents
Information
Patent Grant
Plasma processing apparatus and substrate support of plasma process...
Patent number
11,972,933
Issue date
Apr 30, 2024
Tokyo Electron Limited
Masahiro Dogome
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
11,961,718
Issue date
Apr 16, 2024
Tokyo Electron Limited
Shojiro Yahata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate support and substrate processing apparatus
Patent number
11,961,755
Issue date
Apr 16, 2024
Tokyo Electron Limited
Shinya Ishikawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Calibration jig and calibration method
Patent number
11,935,773
Issue date
Mar 19, 2024
Applied Materials, Inc.
Andrew Myles
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method
Patent number
11,935,727
Issue date
Mar 19, 2024
Tokyo Electron Limited
Jun Yamawaku
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate support and plasma processing apparatus
Patent number
11,935,729
Issue date
Mar 19, 2024
Tokyo Electron Limited
Hajime Tamura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatically clamped edge ring
Patent number
11,935,776
Issue date
Mar 19, 2024
Lam Research Corporation
Christopher Kimball
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for cleaning an edge ring pocket
Patent number
11,935,730
Issue date
Mar 19, 2024
Lam Research Corporation
Eric Hudson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate support, substrate processing apparatus, and substrate pr...
Patent number
11,929,240
Issue date
Mar 12, 2024
Tokyo Electron Limited
Takehiro Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and semiconductor device manufacturing...
Patent number
11,929,239
Issue date
Mar 12, 2024
Samsung Electronics Co., Ltd.
Sejin Oh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus for minimizing the effect of a filli...
Patent number
11,923,181
Issue date
Mar 5, 2024
ASM IP Holding B.V.
HyungChul Moon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
11,923,171
Issue date
Mar 5, 2024
Tokyo Electron Limited
Junichi Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage and plasma processing apparatus
Patent number
11,923,228
Issue date
Mar 5, 2024
Tokyo Electron Limited
Takehiro Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Positioning apparatus, processing system, and positioning method
Patent number
11,923,232
Issue date
Mar 5, 2024
Tokyo Electron Limited
Toshiaki Toyomaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and method
Patent number
11,923,179
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Company Limited
Pei-Yu Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Detector for process kit ring wear
Patent number
11,913,777
Issue date
Feb 27, 2024
Applied Materials, Inc.
Yogananda Sarode Vishwanath
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-zone semiconductor substrate supports
Patent number
11,915,950
Issue date
Feb 27, 2024
Applied Materials, Inc.
Mehmet Tugrul Samir
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and measurement method
Patent number
11,908,665
Issue date
Feb 20, 2024
Tokyo Electron Limited
Chishio Koshimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and methods for manipulating power at an edge ring in pla...
Patent number
11,908,661
Issue date
Feb 20, 2024
Applied Materials, Inc.
Linying Cui
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stage and plasma processing apparatus
Patent number
11,908,666
Issue date
Feb 20, 2024
Tokyo Electron Limited
Yasuharu Sasaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing system and edge ring replacement method
Patent number
11,901,163
Issue date
Feb 13, 2024
Tokyo Electron Limited
Shin Matsuura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic chuck, support platform, and plasma processing apparatus
Patent number
11,894,218
Issue date
Feb 6, 2024
Tokyo Electron Limited
Masato Takayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sheath and temperature control of process kit
Patent number
11,894,255
Issue date
Feb 6, 2024
Applied Materials, Inc.
Jaeyong Cho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for processing substrate
Patent number
11,894,219
Issue date
Feb 6, 2024
Semes Co., Ltd.
Je Ho Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Edge ring, plasma processing apparatus, and manufacturing method of...
Patent number
11,887,821
Issue date
Jan 30, 2024
Tokyo Electron Limited
Masato Kon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of cleaning plasma processing apparatus and plasma processin...
Patent number
11,887,824
Issue date
Jan 30, 2024
Tokyo Electron Limited
Yasutaka Hama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Edge ring and etching apparatus
Patent number
11,887,822
Issue date
Jan 30, 2024
Tokyo Electron Limited
Toshifumi Ishida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Common substrate and shadow ring lift apparatus
Patent number
11,881,375
Issue date
Jan 23, 2024
Applied Materials, Inc.
Abhishek Chowdhury
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
11,875,977
Issue date
Jan 16, 2024
Tokyo Electron Limited
Chishio Koshimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,869,753
Issue date
Jan 9, 2024
Tokyo Electron Limited
Takahiro Senda
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
Publication number
20240153135
Publication date
May 9, 2024
SEMES CO., LTD.
Ho Hun LEE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
STAGE AND PLASMA PROCESSING APPARATUS
Publication number
20240153749
Publication date
May 9, 2024
TOKYO ELECTRON LIMITED
Yasuharu SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORTING UNIT, APPARATUS FOR TREATING SUBSTRATE INCLUDI...
Publication number
20240153747
Publication date
May 9, 2024
SEMES CO., LTD.
Jae-Won SHIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SINTERED BODY AND PARTS INCLUDING SAME
Publication number
20240140875
Publication date
May 2, 2024
SK enpulse Co., Ltd.
Kyung yeol MIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING SYSTEM AND EDGE RING REPLACEMENT METHOD
Publication number
20240136158
Publication date
Apr 25, 2024
TOKYO ELECTRON LIMITED
Shin MATSUURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER PLACEMENT TABLE
Publication number
20240128063
Publication date
Apr 18, 2024
NGK Insulators, Ltd.
Masaki ISHIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA CONTROL APPARATUS AND METHOD USING THE SAME
Publication number
20240128054
Publication date
Apr 18, 2024
Samsung Electronics Co., Ltd.
Changho Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240112891
Publication date
Apr 4, 2024
TOKYO ELECTRON LIMITED
Masaru ISAGO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20240112895
Publication date
Apr 4, 2024
TOKYO ELECTRON LIMITED
Chishio Koshimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH POWER CABLE FOR HEATED COMPONENTS IN RF ENVIRONMENT
Publication number
20240105429
Publication date
Mar 28, 2024
Lam Reseach Corporation
Seyed Jafar JAFARIAN-TEHRANI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
Publication number
20240096637
Publication date
Mar 21, 2024
Samsung Electronics Co., Ltd.
Hyungsik KO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM FOR ETCHING WITH A PLASMA
Publication number
20240096594
Publication date
Mar 21, 2024
Adaptive Plasma Technology Corp.
Woo Hyung CHOI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FOCUS RING, APPARATUS AND METHOD FOR PROCESSING SEMICONDUCTOR WAFER
Publication number
20240096686
Publication date
Mar 21, 2024
Hon Young Semiconductor Corporation
Chia-Jen CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS, CALCULATION METHOD, AND CALCULATION PR...
Publication number
20240087855
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Shinsuke OKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240079219
Publication date
Mar 7, 2024
TOKYO ELECTRON LIMITED
Masanori ASAHARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR MEASURING DEGREE OF...
Publication number
20240079221
Publication date
Mar 7, 2024
SEMES CO., LTD.
Chul Ho WON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE
Publication number
20240071733
Publication date
Feb 29, 2024
SEMES CO., LTD.
Su Hyung LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA APPARATUS AND METHODS FOR PROCESSING FEED MATERIAL UTIZILING...
Publication number
20240071725
Publication date
Feb 29, 2024
6K Inc.
Michael C. Kozlowski
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR MEASURING DEGREE OF...
Publication number
20240071736
Publication date
Feb 29, 2024
SEMES CO., LTD.
Chul Ho WON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND SYSTEMS FOR DRY ETCHING
Publication number
20240071803
Publication date
Feb 29, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Fu-Yi Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EDGE RING, DRY ETCHING APPARATUS HAVING THE SAME, AND OPERATION MET...
Publication number
20240071732
Publication date
Feb 29, 2024
Samsung Electronics Co., Ltd.
Hyun-Sik HWANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA RESISTANT YTTRIUM ALUMINUM OXIDE CHAMBER COMPONENTS
Publication number
20240059616
Publication date
Feb 22, 2024
Heraeus Conamic North America LLC
Matthew Joseph DONELON
C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information
Patent Application
METHOD OF CLEANING PLASMA PROCESSING APPARATUS AND PLASMA PROCESSIN...
Publication number
20240063000
Publication date
Feb 22, 2024
TOKYO ELECTRON LIMITED
Yasutaka HAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FOCUS RING AND PLASMA ETCHING APPARATUS COMPRISING THE SAME
Publication number
20240055238
Publication date
Feb 15, 2024
SK enpulse Co., Ltd.
Kyungyeol MIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF CONTROLLING PLASMA PROCESSING APPARATUS AND PLASMA PROCES...
Publication number
20240055229
Publication date
Feb 15, 2024
SEMES CO., LTD.
Aixian Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CARRIER RING DESIGNS FOR CONTROLLING DEPOSITION ON WAFER BEVEL/EDGE
Publication number
20240055293
Publication date
Feb 15, 2024
LAM RESEARCH CORPORATION
Michael John Janicki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20240047181
Publication date
Feb 8, 2024
Hitachi High-Tech Corporation
Shintarou Nakatani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND ELECTROSTATIC CHUCK
Publication number
20240047182
Publication date
Feb 8, 2024
TOKYO ELECTRON LIMITED
Makoto KATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FOCUS RING AND METHOD FOR MANUFACTURING THE SAME
Publication number
20240038503
Publication date
Feb 1, 2024
HANA MATERIALS INC.
Je Guen YU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Measurement Apparatus for Alternating Currents and Voltages of Phys...
Publication number
20240038512
Publication date
Feb 1, 2024
Mario Hesse
H01 - BASIC ELECTRIC ELEMENTS