For avoiding stiction when the device is in use

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B81C1/0096

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/0096For avoiding stiction when the device is in use

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Anti-stiction enhancement of ruthenium contact
- Patent number 12,172,888
- Issue date Dec 24, 2024
- Qorvo US, Inc.
- James D. Huffman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 12,157,667
- Issue date Dec 3, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mems inertial sensor with high resistance to stiction
- Patent number 12,117,464
- Issue date Oct 15, 2024
- STMicroelectronics S.r.l.
- Gabriele Gattere
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Roughness selectivity for MEMS movement stiction reduction
- Patent number 12,054,382
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsi-Cheng Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro mechanical system device containing a bump stopper an...
- Patent number 11,970,387
- Issue date Apr 30, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Chun-wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device and method for making the same
- Patent number 11,851,318
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Chuan Teng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor including a diaphragm and method for manufacturing a ME...
- Patent number 11,840,445
- Issue date Dec 12, 2023
- Robert Bosch GmbH
- Christoph Hermes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric anti-stiction structure for microelectromechanical sy...
- Patent number 11,834,325
- Issue date Dec 5, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Fan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator layer patterning with polysilicon and etch stop layer
- Patent number 11,731,871
- Issue date Aug 22, 2023
- Invensense, Inc.
- Ashfaque Uddin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of semiconductor structure
- Patent number 11,708,262
- Issue date Jul 25, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stiction reduction system and method thereof
- Patent number 11,661,332
- Issue date May 30, 2023
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Roughness selectivity for MEMS movement stiction reduction
- Patent number 11,655,138
- Issue date May 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsi-Cheng Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS apparatus with anti-stiction layer
- Patent number 11,542,151
- Issue date Jan 3, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual back-plate and diaphragm microphone
- Patent number 11,533,565
- Issue date Dec 20, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro check valve and system with multiple micro check valves and m...
- Patent number 11,428,345
- Issue date Aug 30, 2022
- MICROFAB SERVICE GMBH
- Marco Cordelair
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing MEMS microphone
- Patent number 11,405,737
- Issue date Aug 2, 2022
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Zhenkui Meng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for uniform target erosion magnetic assemblies
- Patent number 11,390,520
- Issue date Jul 19, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Fang Chung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric anti-stiction structure for microelectromechanical sy...
- Patent number 11,365,115
- Issue date Jun 21, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Fan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method to form a rough crystalline surface
- Patent number 11,312,615
- Issue date Apr 26, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction process for MEMS device
- Patent number 11,305,980
- Issue date Apr 19, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for preparing silicon wafer with rough surface and silicon w...
- Patent number 11,305,988
- Issue date Apr 19, 2022
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Wooicheang Goh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro mechanical system device containing a bump stopper an...
- Patent number 11,279,611
- Issue date Mar 22, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Chun-wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of semiconductor structure
- Patent number 11,267,693
- Issue date Mar 8, 2022
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for preparing silicon wafer with rough surface and silicon w...
- Patent number 11,192,782
- Issue date Dec 7, 2021
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Wooicheang Goh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical sensor
- Patent number 11,111,137
- Issue date Sep 7, 2021
- Robert Bosch GmbH
- Johannes Classen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual back-plate and diaphragm microphone
- Patent number 11,051,109
- Issue date Jun 29, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with reduced electric charge, cavity volume and stiction
- Patent number 10,988,372
- Issue date Apr 27, 2021
- Invensense, Inc.
- Dongyang Kang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for reducing in-process and in-use stiction fo...
- Patent number 10,870,574
- Issue date Dec 22, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and method of manufacturing the same
- Patent number 10,841,711
- Issue date Nov 17, 2020
- DB HITEK CO., LTD.
- Jong Won Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and manufacture thereof
- Patent number 10,633,247
- Issue date Apr 28, 2020
- Semiconductor Manufacturing International (Shanghai) Corporation
- GuangCai Fu
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS DEVICE AND METHOD FOR MANUFACTURING MEMS DEVICE
- Publication number 20240400374
- Publication date Dec 5, 2024
- Rohm Co., Ltd.
- Toma FUJITA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device and Fabrication Process with Reduced Z-Axis Stiction
- Publication number 20240375937
- Publication date Nov 14, 2024
- NXP USA, Inc.
- Lianjun Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE
- Publication number 20240343558
- Publication date Oct 17, 2024
- Murata Manufacturing Co., Ltd.
- Petteri KILPINEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS CAPACITANCE MICROPHONE AND MANUFACTURING METHOD THEREOF
- Publication number 20230403514
- Publication date Dec 14, 2023
- Qsensing Microelectronics Co., Ltd
- Chien-Hsing Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SY...
- Publication number 20230373780
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20230345185
- Publication date Oct 26, 2023
- DB HiTek Co., Ltd.
- Seok Young LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ROUGHNESS SELECTIVITY FOR MEMS MOVEMENT STICTION REDUCTION
- Publication number 20230264945
- Publication date Aug 24, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsi-Cheng HSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND MANUFACTURING METHOD FOR A MICROMECHA...
- Publication number 20230242393
- Publication date Aug 3, 2023
- ROBERT BOSCH GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR STRUCTURAL LAYER FABRICATION IN MICROMECHANICAL DEVICES
- Publication number 20230192480
- Publication date Jun 22, 2023
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR LAYER PATTERNING WITH POLYSILICON AND ETCH STOP LAYER
- Publication number 20220380209
- Publication date Dec 1, 2022
- InvenSense, Inc.
- Ashfaque Uddin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD FOR MAKING THE SAME
- Publication number 20220340407
- Publication date Oct 27, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Chuan TENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SY...
- Publication number 20220306452
- Publication date Sep 29, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION ENHANCEMENT OF RUTHENIUM CONTACT
- Publication number 20220289566
- Publication date Sep 15, 2022
- Qorvo US, Inc.
- James D. HUFFMAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION PROCESS FOR MEMS DEVICE
- Publication number 20220242724
- Publication date Aug 4, 2022
- Taiwan Semiconductor Manufacturing Co.,Ltd
- Jui-Chun WENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO MECHANICAL SYSTEM DEVICE CONTAINING A BUMP STOPPER AN...
- Publication number 20220212917
- Publication date Jul 7, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Chun-wen CHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE
- Publication number 20220185656
- Publication date Jun 16, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- YI-HSIEN CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ROUGHNESS SELECTIVITY FOR MEMS MOVEMENT STICTION REDUCTION
- Publication number 20220135397
- Publication date May 5, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Hsi-Cheng HSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PREPARING SILICON WAFER WITH ROUGH SURFACE AND SILICON W...
- Publication number 20220063995
- Publication date Mar 3, 2022
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Wooicheang Goh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR INCLUDING A DIAPHRAGM AND METHOD FOR MANUFACTURING A ME...
- Publication number 20220041428
- Publication date Feb 10, 2022
- ROBERT BOSCH GmbH
- Christoph Hermes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD TO FORM A ROUGH CRYSTALLINE SURFACE
- Publication number 20220033246
- Publication date Feb 3, 2022
- Taiwan Semiconductor Manufacturing Co., LTD
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORMATION OF SELF-ASSEMBLED MONOLAYER FOR ULTRASONIC TRANSDUCERS
- Publication number 20210403321
- Publication date Dec 30, 2021
- Butterfly Network, Inc.
- Jianwei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DUAL BACK-PLATE AND DIAPHRAGM MICROPHONE
- Publication number 20210314707
- Publication date Oct 7, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO MECHANICAL SYSTEM DEVICE CONTAINING A BUMP STOPPER AN...
- Publication number 20210179419
- Publication date Jun 17, 2021
- Taiwan Semiconductor Manufacturing Company Limited
- Chun-wen CHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH REDUCED ELECTRIC CHARGE, CAVITY VOLUME AND STICTION
- Publication number 20210070608
- Publication date Mar 11, 2021
- InvenSense, Inc.
- Dongyang Kang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SY...
- Publication number 20210061641
- Publication date Mar 4, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Fan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STICTION REDUCTION SYSTEM AND METHOD THEREOF
- Publication number 20200262697
- Publication date Aug 20, 2020
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Manufacturing MEMS Microphone
- Publication number 20200213797
- Publication date Jul 2, 2020
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Zhenkui Meng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO CHECK VALVE AND SYSTEM WITH MULTIPLE MICRO CHECK VALVES AND M...
- Publication number 20200166156
- Publication date May 28, 2020
- MICROFAB SERVICE GMBH
- Marco CORDELAIR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION PROCESS FOR MEMS DEVICE
- Publication number 20200123003
- Publication date Apr 23, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Jui-Chun Weng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DUAL BACK-PLATE AND DIAPHRAGM MICROPHONE
- Publication number 20200107130
- Publication date Apr 2, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY

For avoiding stiction when the device is in use

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Anti-stiction enhancement of ruthenium contact

Anti-stiction process for MEMS device

Mems inertial sensor with high resistance to stiction

Roughness selectivity for MEMS movement stiction reduction

Micro-electro mechanical system device containing a bump stopper an...

MEMS device and method for making the same

MEMS sensor including a diaphragm and method for manufacturing a ME...

Piezoelectric anti-stiction structure for microelectromechanical sy...

Actuator layer patterning with polysilicon and etch stop layer

Manufacturing method of semiconductor structure

Stiction reduction system and method thereof

Roughness selectivity for MEMS movement stiction reduction

MEMS apparatus with anti-stiction layer

Dual back-plate and diaphragm microphone

Micro check valve and system with multiple micro check valves and m...

Method for manufacturing MEMS microphone

Systems and methods for uniform target erosion magnetic assemblies

Piezoelectric anti-stiction structure for microelectromechanical sy...

Method to form a rough crystalline surface

Anti-stiction process for MEMS device

Method for preparing silicon wafer with rough surface and silicon w...

Micro-electro mechanical system device containing a bump stopper an...

Manufacturing method of semiconductor structure

Method for preparing silicon wafer with rough surface and silicon w...

Method for manufacturing a micromechanical sensor

Dual back-plate and diaphragm microphone

MEMS device with reduced electric charge, cavity volume and stiction

Method and apparatus for reducing in-process and in-use stiction fo...

MEMS microphone and method of manufacturing the same

Semiconductor device and manufacture thereof

Patents Applicationslast 30 patents

MEMS DEVICE AND METHOD FOR MANUFACTURING MEMS DEVICE

MEMS Device and Fabrication Process with Reduced Z-Axis Stiction

DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE

MEMS CAPACITANCE MICROPHONE AND MANUFACTURING METHOD THEREOF

PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SY...

MEMS MICROPHONE STRUCTURE AND MANUFACTURING METHOD THEREOF

ROUGHNESS SELECTIVITY FOR MEMS MOVEMENT STICTION REDUCTION

MICROMECHANICAL COMPONENT AND MANUFACTURING METHOD FOR A MICROMECHA...

METHOD FOR STRUCTURAL LAYER FABRICATION IN MICROMECHANICAL DEVICES

ACTUATOR LAYER PATTERNING WITH POLYSILICON AND ETCH STOP LAYER

MEMS DEVICE AND METHOD FOR MAKING THE SAME

PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SY...

ANTI-STICTION ENHANCEMENT OF RUTHENIUM CONTACT

ANTI-STICTION PROCESS FOR MEMS DEVICE

MICRO-ELECTRO MECHANICAL SYSTEM DEVICE CONTAINING A BUMP STOPPER AN...

MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE

ROUGHNESS SELECTIVITY FOR MEMS MOVEMENT STICTION REDUCTION

METHOD FOR PREPARING SILICON WAFER WITH ROUGH SURFACE AND SILICON W...

MEMS SENSOR INCLUDING A DIAPHRAGM AND METHOD FOR MANUFACTURING A ME...

METHOD TO FORM A ROUGH CRYSTALLINE SURFACE

FORMATION OF SELF-ASSEMBLED MONOLAYER FOR ULTRASONIC TRANSDUCERS

DUAL BACK-PLATE AND DIAPHRAGM MICROPHONE

MICRO-ELECTRO MECHANICAL SYSTEM DEVICE CONTAINING A BUMP STOPPER AN...

MEMS DEVICE WITH REDUCED ELECTRIC CHARGE, CAVITY VOLUME AND STICTION

PIEZOELECTRIC ANTI-STICTION STRUCTURE FOR MICROELECTROMECHANICAL SY...

STICTION REDUCTION SYSTEM AND METHOD THEREOF

Method for Manufacturing MEMS Microphone

MICRO CHECK VALVE AND SYSTEM WITH MULTIPLE MICRO CHECK VALVES AND M...

ANTI-STICTION PROCESS FOR MEMS DEVICE

DUAL BACK-PLATE AND DIAPHRAGM MICROPHONE