For controlling internal stress or strain in moving or flexible elements

Industry

CPC
B81B3/0072

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B3/00Devices comprising flexible or deformable elements

Current Industry

B81B3/0072For controlling internal stress or strain in moving or flexible elements

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Arched membrane structure for MEMS device
- Patent number 12,209,013
- Issue date Jan 28, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jhao-Yi Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS structure
- Patent number 12,207,052
- Issue date Jan 21, 2025
- FORTEMEDIA, INC.
- Chun-Kai Mao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices with support structures and associated production methods
- Patent number 12,195,325
- Issue date Jan 14, 2025
- Infineon Technologies AG
- Florian Brandl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Light reflecting element and spatial light modulator
- Patent number 12,181,659
- Issue date Dec 31, 2024
- SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Naoki Kakoiyama
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric mems device with a suspended membrane having high mec...
- Patent number 12,185,633
- Issue date Dec 31, 2024
- STMicroelectronics S.r.l.
- Domenico Giusti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Curved cantilever design to reduce stress in MEMS actuator
- Patent number 12,180,064
- Issue date Dec 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fixed-fixed membrane for microelectromechanical system microphone
- Patent number 12,170,869
- Issue date Dec 17, 2024
- Invensense, Inc.
- Joseph Seeger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Venting device, manufacturing method of venting device, venting met...
- Patent number 12,157,663
- Issue date Dec 3, 2024
- xMEMS Labs, Inc.
- Chun-I Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device and method of equalizing low frequency roll off for wearable...
- Patent number 12,151,934
- Issue date Nov 26, 2024
- xMEMS Labs, Inc.
- Yanchen Lu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
3-axis angular accelerometer
- Patent number 12,153,065
- Issue date Nov 26, 2024
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical sensor device with improved stability to stress
- Patent number 12,139,396
- Issue date Nov 12, 2024
- STMicroelectronics S.r.l.
- Francesco Rizzini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Arched membrane structure for MEMS device
- Patent number 12,134,557
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jhao-Yi Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated circuit packages having stress-relieving features
- Patent number 12,091,310
- Issue date Sep 17, 2024
- Apogee Semiconductor, Inc.
- David A. Grant
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having an improved stress distribution and manufacturin...
- Patent number 12,084,341
- Issue date Sep 10, 2024
- STMicroelectronics S.r.l.
- Nicolo' Boni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microstructure and method of producing a microstructure
- Patent number 12,071,341
- Issue date Aug 27, 2024
- ams International AG
- Peter Heeb
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical device with a shock-protected tiltable str...
- Patent number 12,043,540
- Issue date Jul 23, 2024
- STMicroelectronics S.r.l.
- Nicolo' Boni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibrator device, oscillator, gyro sensor, electronic apparatus, and...
- Patent number 12,034,433
- Issue date Jul 9, 2024
- Seiko Epson Corporation
- Tetsuya Otsuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Damascene interconnect structure, actuator device, and method of ma...
- Patent number 11,987,493
- Issue date May 21, 2024
- Hamamatsu Photonics K.K.
- Daiki Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Flexible electrode and preparation method thereof
- Patent number 11,970,391
- Issue date Apr 30, 2024
- SHENZHEN INSTITUTES OF ADVANCED TECHNOLOGY
- Tianzhun Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for controlling stress variation in a material...
- Patent number 11,961,722
- Issue date Apr 16, 2024
- SPTS Technologies Limited
- Anthony Wilby
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Engineered substrates, free-standing semiconductor microstructures,...
- Patent number 11,952,268
- Issue date Apr 9, 2024
- Lawrence Semiconductor Research Laboratory, Inc.
- Chantal Arena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone
- Patent number 11,943,584
- Issue date Mar 26, 2024
- FORTEMEDIA, INC.
- Chih-Yuan Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device manufacturing method, MEMS device, and shutter apparatu...
- Patent number 11,932,535
- Issue date Mar 19, 2024
- Sumitomo Precision Products Co., LTD
- Gen Matsuoka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Curved cantilever design to reduce stress in MEMS actuator
- Patent number 11,932,531
- Issue date Mar 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component and method for manufacturing a micromecha...
- Patent number 11,912,563
- Issue date Feb 27, 2024
- Robert Bosch GmbH
- Hans Artmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS acoustic sensor
- Patent number 11,910,160
- Issue date Feb 20, 2024
- SHINSUNG SOUNDMOTION CO., LTD.
- Sangwoo Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Motion control structure and actuator
- Patent number 11,891,297
- Issue date Feb 6, 2024
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Ze Tao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device, package structure and manufacturing method of device
- Patent number 11,884,535
- Issue date Jan 30, 2024
- xMEMS Labs, Inc.
- Jemm Yue Liang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High-range semiconductor load sensor device
- Patent number 11,851,319
- Issue date Dec 26, 2023
- STMicroelectronics S.r.l.
- Anna Angela Pomarico
- B60 - VEHICLES IN GENERAL
Information Patent Grant
MEMS microphone
- Patent number 11,838,725
- Issue date Dec 5, 2023
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Zhengyu Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS microphone
- Publication number 20250042722
- Publication date Feb 6, 2025
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Zhuanzhuan Zhao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANCHOR STRUCTURE
- Publication number 20250033951
- Publication date Jan 30, 2025
- Bishnu Prasanna Gogoi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE AND MICROELECTROMECHANICAL LOUDSPEAKER
- Publication number 20240425358
- Publication date Dec 26, 2024
- ROBERT BOSCH GmbH
- Anton Melnikov
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURIN...
- Publication number 20240425359
- Publication date Dec 26, 2024
- STMicroelectronics S.r.l
- Nicolo' BONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE
- Publication number 20240383744
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jhao-Yi Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE
- Publication number 20240343558
- Publication date Oct 17, 2024
- Murata Manufacturing Co., Ltd.
- Petteri KILPINEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL REFLECTIVE DEVICE
- Publication number 20240317576
- Publication date Sep 26, 2024
- Panasonic Intellectual Property Management Co., Ltd.
- Kensuke MIHARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DIAPHRAGM AND MEMS SENSOR
- Publication number 20240300806
- Publication date Sep 12, 2024
- AAC TECHNOLOGIES PTE. LTD
- Anup Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRESS ISOLATION TECHNOLOGY WITH BACKSIDE ETCHED ISOLATION TRE...
- Publication number 20240300808
- Publication date Sep 12, 2024
- Analog Devices, Inc.
- Kemiao Jia
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DOUBLE LAYER MEMS DEVICES
- Publication number 20240286890
- Publication date Aug 29, 2024
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SWITCH DEVICE AND ELECTRONIC APPARATUS
- Publication number 20240279050
- Publication date Aug 22, 2024
- BOE TECHNOLOGY GROUP CO., LTD.
- Zibo CAO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DAMASCENE INTERCONNECT STRUCTURE, ACTUATOR DEVICE, AND METHOD OF MA...
- Publication number 20240279051
- Publication date Aug 22, 2024
- HAMAMATSU PHOTONICS K. K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VENTING DEVICE, MANUFACTURING METHOD OF VENTING DEVICE, VENTING MET...
- Publication number 20240262679
- Publication date Aug 8, 2024
- xMEMS Labs, Inc.
- Chun-I Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DECOUPLING METHOD FOR SEMICONDUCTOR DEVICE
- Publication number 20240228264
- Publication date Jul 11, 2024
- STMicroelectronics International N.V.
- Roseanne DUCA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...
- Publication number 20240208805
- Publication date Jun 27, 2024
- Lawrence Semiconductor Research Laboratory, Inc.
- Chantal Arena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR
- Publication number 20240182292
- Publication date Jun 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FAILURE DETECTION METHOD, FAILURE DETECTION SYSTEM, AND ELECTROSPRA...
- Publication number 20240182291
- Publication date Jun 6, 2024
- Hitachi, Ltd
- Shun Kumano
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Device and Method of Equalizing Low Frequency Roll Off for Wearable...
- Publication number 20240174508
- Publication date May 30, 2024
- xMEMS Labs, Inc.
- Yanchen Lu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240171918
- Publication date May 23, 2024
- Nisshinbo Micro Devices Inc.
- Takao FUKUTOME
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM DEVICE
- Publication number 20240140781
- Publication date May 2, 2024
- Vanguard International Semiconductor Corporation
- JIA JIE XIA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DECOUPLING METHOD FOR SEMICONDUCTOR DEVICE
- Publication number 20240132340
- Publication date Apr 25, 2024
- STMicroelectronics (Malta) Ltd.
- Roseanne DUCA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Support Device for One or More MEMS Components
- Publication number 20240101412
- Publication date Mar 28, 2024
- ROBERT BOSCH GmbH
- Joachim Friedl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FIXED-FIXED MEMBRANE FOR MICROELECTROMECHANICAL SYSTEM MICROPHONE
- Publication number 20240089668
- Publication date Mar 14, 2024
- InvenSense, Inc.
- Joseph Seeger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND APPARATUS FOR MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) D...
- Publication number 20240067519
- Publication date Feb 29, 2024
- TEXAS INSTRUMENTS INCORPORATED
- John Wesley Hamlin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Anchor Structure
- Publication number 20240017987
- Publication date Jan 18, 2024
- SensorTek technology Corp.
- Shih-Wei Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE
- Publication number 20240017988
- Publication date Jan 18, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jhao-Yi Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SCANNING MIRROR SYSTEMS AND METHODS OF MANUFACTURE
- Publication number 20240012237
- Publication date Jan 11, 2024
- Magic Leap, Inc.
- Julien Gamet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS PROCESS POWER
- Publication number 20230422623
- Publication date Dec 28, 2023
- QUALCOMM TECHNOLOGIES INC.
- Robert John LITTRELL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND ELECTRO-ACOUSTIC TRANSDUCER
- Publication number 20230331543
- Publication date Oct 19, 2023
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Yannick Pierre Kervran
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC MEMS DEVICE WITH A SUSPENDED MEMBRANE HAVING HIGH MEC...
- Publication number 20230320222
- Publication date Oct 5, 2023
- STMicroelectronics S.r.l.
- Domenico GIUSTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY

For controlling internal stress or strain in moving or flexible elements

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Arched membrane structure for MEMS device

MEMS structure

MEMS devices with support structures and associated production methods

Light reflecting element and spatial light modulator

Piezoelectric mems device with a suspended membrane having high mec...

Curved cantilever design to reduce stress in MEMS actuator

Fixed-fixed membrane for microelectromechanical system microphone

Venting device, manufacturing method of venting device, venting met...

Device and method of equalizing low frequency roll off for wearable...

3-axis angular accelerometer

Microelectromechanical sensor device with improved stability to stress

Arched membrane structure for MEMS device

Integrated circuit packages having stress-relieving features

MEMS device having an improved stress distribution and manufacturin...

Microstructure and method of producing a microstructure

Micro-electro-mechanical device with a shock-protected tiltable str...

Vibrator device, oscillator, gyro sensor, electronic apparatus, and...

Damascene interconnect structure, actuator device, and method of ma...

Flexible electrode and preparation method thereof

Method and apparatus for controlling stress variation in a material...

Engineered substrates, free-standing semiconductor microstructures,...

MEMS microphone

MEMS device manufacturing method, MEMS device, and shutter apparatu...

Curved cantilever design to reduce stress in MEMS actuator

Micromechanical component and method for manufacturing a micromecha...

MEMS acoustic sensor

Motion control structure and actuator

Device, package structure and manufacturing method of device

High-range semiconductor load sensor device

MEMS microphone

Patents Applicationslast 30 patents

MEMS microphone

ANCHOR STRUCTURE

MICROELECTROMECHANICAL DEVICE AND MICROELECTROMECHANICAL LOUDSPEAKER

MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURIN...

ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE

DOUBLE LAYER MEMS DEVICES AND METHOD OF MANUFACTURE

OPTICAL REFLECTIVE DEVICE

MEMS DIAPHRAGM AND MEMS SENSOR

MEMS STRESS ISOLATION TECHNOLOGY WITH BACKSIDE ETCHED ISOLATION TRE...

DOUBLE LAYER MEMS DEVICES

MEMS SWITCH DEVICE AND ELECTRONIC APPARATUS

DAMASCENE INTERCONNECT STRUCTURE, ACTUATOR DEVICE, AND METHOD OF MA...

VENTING DEVICE, MANUFACTURING METHOD OF VENTING DEVICE, VENTING MET...

DECOUPLING METHOD FOR SEMICONDUCTOR DEVICE

ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...

CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR

FAILURE DETECTION METHOD, FAILURE DETECTION SYSTEM, AND ELECTROSPRA...

Device and Method of Equalizing Low Frequency Roll Off for Wearable...

MEMS ELEMENT AND METHOD OF MANUFACTURING THE SAME

MICRO-ELECTRO-MECHANICAL SYSTEM DEVICE

DECOUPLING METHOD FOR SEMICONDUCTOR DEVICE

Support Device for One or More MEMS Components

FIXED-FIXED MEMBRANE FOR MICROELECTROMECHANICAL SYSTEM MICROPHONE

METHODS AND APPARATUS FOR MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) D...

Anchor Structure

ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE

SCANNING MIRROR SYSTEMS AND METHODS OF MANUFACTURE

MEMS PROCESS POWER

MEMS DEVICE AND ELECTRO-ACOUSTIC TRANSDUCER

PIEZOELECTRIC MEMS DEVICE WITH A SUSPENDED MEMBRANE HAVING HIGH MEC...