For controlling internal stress or strain in moving or flexible elements

Industry

CPC
B81B3/0072

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B3/00Devices comprising flexible or deformable elements

Current Industry

B81B3/0072For controlling internal stress or strain in moving or flexible elements

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for controlling stress variation in a material...
- Patent number 11,961,722
- Issue date Apr 16, 2024
- SPTS Technologies Limited
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Engineered substrates, free-standing semiconductor microstructures,...
- Patent number 11,952,268
- Issue date Apr 9, 2024
- Lawrence Semiconductor Research Laboratory, Inc.
- Chantal Arena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone
- Patent number 11,943,584
- Issue date Mar 26, 2024
- FORTEMEDIA, INC.
- Chih-Yuan Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device manufacturing method, MEMS device, and shutter apparatu...
- Patent number 11,932,535
- Issue date Mar 19, 2024
- Sumitomo Precision Products Co., LTD
- Gen Matsuoka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Curved cantilever design to reduce stress in MEMS actuator
- Patent number 11,932,531
- Issue date Mar 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component and method for manufacturing a micromecha...
- Patent number 11,912,563
- Issue date Feb 27, 2024
- Robert Bosch GmbH
- Hans Artmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS acoustic sensor
- Patent number 11,910,160
- Issue date Feb 20, 2024
- SHINSUNG SOUNDMOTION CO., LTD.
- Sangwoo Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Motion control structure and actuator
- Patent number 11,891,297
- Issue date Feb 6, 2024
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Ze Tao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device, package structure and manufacturing method of device
- Patent number 11,884,535
- Issue date Jan 30, 2024
- xMEMS Labs, Inc.
- Jemm Yue Liang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High-range semiconductor load sensor device
- Patent number 11,851,319
- Issue date Dec 26, 2023
- STMicroelectronics S.r.l.
- Anna Angela Pomarico
- B60 - VEHICLES IN GENERAL
Information Patent Grant
MEMS microphone
- Patent number 11,838,725
- Issue date Dec 5, 2023
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Zhengyu Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated piezoresistive and piezoelectric fusion force sensor
- Patent number 11,808,644
- Issue date Nov 7, 2023
- Qorvo US, Inc.
- Julius Minglin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated piezoresistive and piezoelectric fusion force sensor
- Patent number 11,754,451
- Issue date Sep 12, 2023
- Qorvo US, Inc.
- Julius Minglin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS process power
- Patent number 11,716,906
- Issue date Aug 1, 2023
- QUALCOMM Technologies, Inc.
- Robert J. Littrell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of semiconductor structure
- Patent number 11,708,262
- Issue date Jul 25, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Slotted MEMS force sensor
- Patent number 11,698,310
- Issue date Jul 11, 2023
- NEXTINPUT, INC.
- Mehrnaz Rouhi Youssefi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric MEMS device with a suspended membrane having high mec...
- Patent number 11,696,507
- Issue date Jul 4, 2023
- STMicroelectronics S.r.l.
- Domenico Giusti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Support structure and method of forming a support structure
- Patent number 11,679,461
- Issue date Jun 20, 2023
- Infineon Technologies AG
- Alfons Dehe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Microphone device with ingress protection
- Patent number 11,671,766
- Issue date Jun 6, 2023
- KNOWLES ELECTRONICS, LLC.
- Sung Bok Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical infrared sensing device and fabrication meth...
- Patent number 11,656,128
- Issue date May 23, 2023
- Industrial Technology Research Institute
- Chin-Jou Kuo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical device with a shock-protected tiltable str...
- Patent number 11,655,140
- Issue date May 23, 2023
- STMicroelectronics S.r.l.
- Nicolo' Boni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon carbide structure, device, and method
- Patent number 11,649,159
- Issue date May 16, 2023
- Francis J. Kub
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated piezoresistive and piezoelectric fusion force sensor
- Patent number 11,604,104
- Issue date Mar 14, 2023
- Qorvo US, Inc.
- Julius Minglin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of making a piezoelectric MEMS diaphragm microphone
- Patent number 11,606,646
- Issue date Mar 14, 2023
- Skyworks Solutions, Inc.
- Yu Hui
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for a transducer assembly with a standoff
- Patent number 11,591,210
- Issue date Feb 28, 2023
- Knowles Electronics, LLC
- Timothy Pachla
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hinge offering a reduced sensitivity to internal stresses
- Patent number 11,584,636
- Issue date Feb 21, 2023
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Patrice Rey
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Intrinsic-stress self-compensated microelectromechanical systems tr...
- Patent number 11,575,996
- Issue date Feb 7, 2023
- Knowles Electronics, LLC
- Mohsin Nawaz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical pressure sensor with two cavities and diaphragms an...
- Patent number 11,560,302
- Issue date Jan 24, 2023
- Robert Bosch GmbH
- Friedjof Heuck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric MEMS diaphragm microphone
- Patent number 11,553,280
- Issue date Jan 10, 2023
- Skyworks Global Pte. Ltd.
- Yu Hui
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microscale metallic CNT templated devices and related methods
- Patent number 11,542,156
- Issue date Jan 3, 2023
- CNT Holdings, LLC
- Robert C. Davis
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Support Device for One or More MEMS Components
- Publication number 20240101412
- Publication date Mar 28, 2024
- ROBERT BOSCH GmbH
- Joachim Friedl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FIXED-FIXED MEMBRANE FOR MICROELECTROMECHANICAL SYSTEM MICROPHONE
- Publication number 20240089668
- Publication date Mar 14, 2024
- InvenSense, Inc.
- Joseph Seeger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND APPARATUS FOR MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) D...
- Publication number 20240067519
- Publication date Feb 29, 2024
- TEXAS INSTRUMENTS INCORPORATED
- John Wesley Hamlin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Anchor Structure
- Publication number 20240017987
- Publication date Jan 18, 2024
- SensorTek technology Corp.
- Shih-Wei Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE
- Publication number 20240017988
- Publication date Jan 18, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jhao-Yi Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SCANNING MIRROR SYSTEMS AND METHODS OF MANUFACTURE
- Publication number 20240012237
- Publication date Jan 11, 2024
- Magic Leap, Inc.
- Julien Gamet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS PROCESS POWER
- Publication number 20230422623
- Publication date Dec 28, 2023
- QUALCOMM TECHNOLOGIES INC.
- Robert John LITTRELL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND ELECTRO-ACOUSTIC TRANSDUCER
- Publication number 20230331543
- Publication date Oct 19, 2023
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Yannick Pierre Kervran
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC MEMS DEVICE WITH A SUSPENDED MEMBRANE HAVING HIGH MEC...
- Publication number 20230320222
- Publication date Oct 5, 2023
- STMicroelectronics S.r.l.
- Domenico GIUSTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURE
- Publication number 20230319486
- Publication date Oct 5, 2023
- Fortemedia, Inc.
- Chun-Kai MAO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SLOTTED MEMS FORCE SENSOR
- Publication number 20230296454
- Publication date Sep 21, 2023
- Qorvo US, Inc.
- Mehrnaz Rouhi Youssefi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Device
- Publication number 20230294976
- Publication date Sep 21, 2023
- INFINEON TECHNOLOGIES AG
- Abhiraj Basavanna
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MAKING A PIEZOELECTRIC MEMS DIAPHRAGM MICROPHONE
- Publication number 20230283962
- Publication date Sep 7, 2023
- Skyworks Solutions, Inc.
- Yu Hui
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR MEMS DEVICES
- Publication number 20230273423
- Publication date Aug 31, 2023
- TEXAS INSTRUMENTS INCORPORATED
- Toby Linder
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE WITH A SHOCK-PROTECTED TILTABLE STR...
- Publication number 20230249960
- Publication date Aug 10, 2023
- STMicroelectronics S.r.l
- Nicolo' BONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW-IMPACT OUT-OF-PLANE MOTION LIMITER MEMS DEVICE
- Publication number 20230234834
- Publication date Jul 27, 2023
- Murata Manufacturing Co., Ltd.
- Mikko PARTANEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MAKING MEMS MICROPHONE WITH AN ANCHOR
- Publication number 20230239641
- Publication date Jul 27, 2023
- Skyworks Solutions, Inc.
- Guofeng Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE SENSOR CHIP AND PRESSURE SENSOR
- Publication number 20230228639
- Publication date Jul 20, 2023
- Murata Manufacturing Co., Ltd.
- Daiki TSUJI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR
- Publication number 20230219806
- Publication date Jul 13, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICES HAVING A MEMBRANE LAYER WITH SMOOTH STRESS-RE...
- Publication number 20230224657
- Publication date Jul 13, 2023
- INFINEON TECHNOLOGIES AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Microphone
- Publication number 20230212003
- Publication date Jul 6, 2023
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Zhuanzhuan Zhao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED PIEZORESISTIVE AND PIEZOELECTRIC FUSION FORCE SENSOR
- Publication number 20230184601
- Publication date Jun 15, 2023
- NextInput, Inc.
- Julius Minglin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Microphone
- Publication number 20230171550
- Publication date Jun 1, 2023
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Zhengyu Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR AND MEMS SENSOR MANUFACTURING METHOD
- Publication number 20230166964
- Publication date Jun 1, 2023
- Rohm Co., Ltd.
- Nobuhisa YAMASHITA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL DEVICE
- Publication number 20230152572
- Publication date May 18, 2023
- ROBERT BOSCH GmbH
- Frank Schatz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC MEMS DEVICE WITH THERMAL COMPENSATION FROM DIFFERENT...
- Publication number 20230112443
- Publication date Apr 13, 2023
- SKYWORKS GLOBAL PTE. LTD.
- Siarhei Dmitrievich Barsukou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Apparatus for Controlling Stress Variation in a Material...
- Publication number 20230094699
- Publication date Mar 30, 2023
- SPTS Technologies Ltd.
- Anthony WILBY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WAFER LEVEL PROCESSING FOR MICROELECTRONIC DEVICE PACKAGE WITH CAVITY
- Publication number 20230092132
- Publication date Mar 23, 2023
- TEXAS INSTRUMENTS INCORPORATED
- Hau Nguyen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE
- Publication number 20230063234
- Publication date Mar 2, 2023
- Fortemedia, Inc.
- Chih-Yuan CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FABRICATION OF MEMS STRUCTURES FROM FUSED SILICA FOR INERTIAL SENSORS
- Publication number 20230067030
- Publication date Mar 2, 2023
- Atlantic Inertial Systems Limited
- Christopher Paul Fell
- B81 - MICRO-STRUCTURAL TECHNOLOGY

For controlling internal stress or strain in moving or flexible elements

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and apparatus for controlling stress variation in a material...

Engineered substrates, free-standing semiconductor microstructures,...

MEMS microphone

MEMS device manufacturing method, MEMS device, and shutter apparatu...

Curved cantilever design to reduce stress in MEMS actuator

Micromechanical component and method for manufacturing a micromecha...

MEMS acoustic sensor

Motion control structure and actuator

Device, package structure and manufacturing method of device

High-range semiconductor load sensor device

MEMS microphone

Integrated piezoresistive and piezoelectric fusion force sensor

Integrated piezoresistive and piezoelectric fusion force sensor

MEMS process power

Manufacturing method of semiconductor structure

Slotted MEMS force sensor

Piezoelectric MEMS device with a suspended membrane having high mec...

Support structure and method of forming a support structure

Microphone device with ingress protection

Microelectromechanical infrared sensing device and fabrication meth...

Micro-electro-mechanical device with a shock-protected tiltable str...

Silicon carbide structure, device, and method

Integrated piezoresistive and piezoelectric fusion force sensor

Method of making a piezoelectric MEMS diaphragm microphone

Method and apparatus for a transducer assembly with a standoff

Hinge offering a reduced sensitivity to internal stresses

Intrinsic-stress self-compensated microelectromechanical systems tr...

Micromechanical pressure sensor with two cavities and diaphragms an...

Piezoelectric MEMS diaphragm microphone

Microscale metallic CNT templated devices and related methods

Patents Applicationslast 30 patents

Support Device for One or More MEMS Components

FIXED-FIXED MEMBRANE FOR MICROELECTROMECHANICAL SYSTEM MICROPHONE

METHODS AND APPARATUS FOR MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) D...

Anchor Structure

ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE

SCANNING MIRROR SYSTEMS AND METHODS OF MANUFACTURE

MEMS PROCESS POWER

MEMS DEVICE AND ELECTRO-ACOUSTIC TRANSDUCER

PIEZOELECTRIC MEMS DEVICE WITH A SUSPENDED MEMBRANE HAVING HIGH MEC...

MEMS STRUCTURE

SLOTTED MEMS FORCE SENSOR

Semiconductor Device

METHOD OF MAKING A PIEZOELECTRIC MEMS DIAPHRAGM MICROPHONE

SYSTEM AND METHOD FOR MEMS DEVICES

MICRO-ELECTRO-MECHANICAL DEVICE WITH A SHOCK-PROTECTED TILTABLE STR...

LOW-IMPACT OUT-OF-PLANE MOTION LIMITER MEMS DEVICE

METHOD OF MAKING MEMS MICROPHONE WITH AN ANCHOR

PRESSURE SENSOR CHIP AND PRESSURE SENSOR

CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR

SEMICONDUCTOR DEVICES HAVING A MEMBRANE LAYER WITH SMOOTH STRESS-RE...

MEMS Microphone

INTEGRATED PIEZORESISTIVE AND PIEZOELECTRIC FUSION FORCE SENSOR

MEMS Microphone

MEMS SENSOR AND MEMS SENSOR MANUFACTURING METHOD

MICROMECHANICAL DEVICE

PIEZOELECTRIC MEMS DEVICE WITH THERMAL COMPENSATION FROM DIFFERENT...

Method and Apparatus for Controlling Stress Variation in a Material...

WAFER LEVEL PROCESSING FOR MICROELECTRONIC DEVICE PACKAGE WITH CAVITY

MEMS MICROPHONE

FABRICATION OF MEMS STRUCTURES FROM FUSED SILICA FOR INERTIAL SENSORS