Membership
Tour
Register
Log in
for maintaining a controlled atmosphere inside of the chamber containing the MEMS
Follow
Industry
CPC
B81B7/0035
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
B
PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B7/00
Micro-structural systems; Auxiliary parts of micro-structural devices or systems
Current Industry
B81B7/0035
for maintaining a controlled atmosphere inside of the chamber containing the MEMS
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor device and method for manufacturing the same
Patent number
11,915,924
Issue date
Feb 27, 2024
Denso Corporation
Megumi Suzuki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor structure and method for manufacturing thereof
Patent number
11,807,520
Issue date
Nov 7, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Yi-Chuan Teng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical structure with bonded cover
Patent number
11,685,650
Issue date
Jun 27, 2023
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Particle filter for MEMS device
Patent number
11,649,162
Issue date
May 16, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chia-Hua Chu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Miniaturized vacuum package and methods of making same
Patent number
11,551,921
Issue date
Jan 10, 2023
National Technology & Engineering Solutions of Sandia, LLC
Hayden James Evans McGuinness
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated MEMS cavity seal
Patent number
11,174,151
Issue date
Nov 16, 2021
Invensense, Inc.
Ian Flader
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Over-under sensor packaging with sensor spaced apart from control chip
Patent number
11,174,152
Issue date
Nov 16, 2021
Infineon Technologies AG
Sook Woon Chan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device for suppressing stray radiation
Patent number
11,136,237
Issue date
Oct 5, 2021
Infineon Technologies AG
Werner Simbuerger
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Encapsulated microelectromechanical structure
Patent number
10,766,768
Issue date
Sep 8, 2020
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Transducer package with integrated sealing
Patent number
10,519,030
Issue date
Dec 31, 2019
Infineon Technologies AG
Klaus Elian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Over-under sensor packaging with sensor spaced apart from control chip
Patent number
10,501,312
Issue date
Dec 10, 2019
Infineon Technologies AG
Sook Woon Chan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Proof mass and polysilicon electrode integrated thereon
Patent number
10,505,006
Issue date
Dec 10, 2019
Invensense, Inc.
Bongsang Kim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for forming a micro-electro mechanical system (MEMS) includi...
Patent number
10,486,964
Issue date
Nov 26, 2019
Taiwan Semiconductor Manufacturing Co., Ltd
Chia-Hua Chu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Encapsulated microelectromechanical structure
Patent number
10,450,190
Issue date
Oct 22, 2019
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical system microphone
Patent number
10,315,912
Issue date
Jun 11, 2019
Knowles Electronics, LLC
Mohsin Nawaz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dual-sealed MEMS package with cavity pressure monitoring
Patent number
10,209,157
Issue date
Feb 19, 2019
Invensense, Inc.
Luca Coronato
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Vacuum package, electronic device, and vehicle
Patent number
10,199,515
Issue date
Feb 5, 2019
Seiko Epson Corporation
Hiromu Kawai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS component and method for encapsulating MEMS components
Patent number
10,164,166
Issue date
Dec 25, 2018
Snaptrack, Inc.
Hans Krüger
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Encapsulated microelectromechanical structure
Patent number
10,099,917
Issue date
Oct 16, 2018
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Structures for reducing and preventing stress and tensions during p...
Patent number
10,017,375
Issue date
Jul 10, 2018
Robert Bosch GmbH
Frank Reichenbach
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods for mounting a MEMS sensor for in-stream measurements
Patent number
9,969,608
Issue date
May 15, 2018
DunAn Sensing, LLC
Tom Kwa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for packaging a microelectronic device in a hermetically sea...
Patent number
9,908,773
Issue date
Mar 6, 2018
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Damien Saint-Patrice
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMs device with outgassing shield
Patent number
9,764,946
Issue date
Sep 19, 2017
Analog Devices, Inc.
Li Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Encapsulated microelectromechanical structure
Patent number
9,758,371
Issue date
Sep 12, 2017
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical component having hermetic through-contacting, and m...
Patent number
9,725,311
Issue date
Aug 8, 2017
Robert Bosch GmbH
Jochen Franz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro mechanical system (MEMS) device having a blocking lay...
Patent number
9,617,150
Issue date
Apr 11, 2017
Taiwan Semiconductor Manufacturing Co., Ltd
Chia-Hua Chu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor protective coating
Patent number
9,425,382
Issue date
Aug 23, 2016
FREESCALE SEMICONDUCTOR, INC.
Dubravka Bilic
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wafer level packaged infrared (IR) focal plane array (FPA) with eva...
Patent number
9,227,839
Issue date
Jan 5, 2016
Raytheon Company
Roland W. Gooch
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electrical component and method of manufacturing the same
Patent number
9,181,081
Issue date
Nov 10, 2015
Kabushiki Kaisha Toshiba
Kei Obara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Implantation of gaseous chemicals into cavities formed in intermedi...
Patent number
9,171,966
Issue date
Oct 27, 2015
Cavendish Kinetics, Inc.
Willibrordus Gerardus Van Den Hoek
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MICROMECHANICAL STRUCTURE WITH BONDED COVER
Publication number
20240002218
Publication date
Jan 4, 2024
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE
Publication number
20230382718
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing company Ltd.
YI-CHUAN TENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING THEREOF
Publication number
20220411260
Publication date
Dec 29, 2022
Taiwan Semiconductor Manufacturing company Ltd.
YI-CHUAN TENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING A SEMICONDUCTOR D...
Publication number
20220169498
Publication date
Jun 2, 2022
STMicroelectronics S.r.l.
Enri DUQI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ENCAPSULATED MICROELECTROMECHANICAL STRUCTURE
Publication number
20210221678
Publication date
Jul 22, 2021
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PARTICLE FILTER FOR MEMS DEVICE
Publication number
20210188627
Publication date
Jun 24, 2021
Taiwan Semiconductor Manufacturing Co., LTD
Chia-Hua Chu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATED MEMS CAVITY SEAL
Publication number
20210147218
Publication date
May 20, 2021
InvenSense, Inc.
Ian Flader
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEVICE FOR SUPPRESSING STRAY RADIATION
Publication number
20200095118
Publication date
Mar 26, 2020
INFINEON TECHNOLOGIES AG
WERNER SIMBUERGER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ENCAPSULATED MICROELECTROMECHANICAL STRUCTURE
Publication number
20200079646
Publication date
Mar 12, 2020
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Over-Under Sensor Packaging with Sensor Spaced Apart from Control Chip
Publication number
20200048075
Publication date
Feb 13, 2020
INFINEON TECHNOLOGIES AG
Sook Woon Chan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ENCAPSULATED MICROELECTROMECHANICAL STRUCTURE
Publication number
20190055121
Publication date
Feb 21, 2019
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEM AND METHOD FOR OVER UNDER SENSOR PACKAGING
Publication number
20190023561
Publication date
Jan 24, 2019
INFINEON TECHNOLOGIES AG
Sook Woon Chan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE PACKAGE AND METHOD FOR PACKAGING MEMS DEVICE
Publication number
20180297836
Publication date
Oct 18, 2018
Shanghai Huahong Grace Semiconductor Manufacturing Corporation
WaiSoon Liew
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ENCAPSULATED MICROELECTROMECHANICAL STRUCTURE
Publication number
20180044176
Publication date
Feb 15, 2018
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
VACUUM PACKAGE, ELECTRONIC DEVICE, AND VEHICLE
Publication number
20170365723
Publication date
Dec 21, 2017
SEIKO EPSON CORPORATION
Hiromu KAWAI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Transducer package with integrated sealing
Publication number
20170283246
Publication date
Oct 5, 2017
INFINEON TECHNOLOGIES AG
Klaus ELIAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHODS FOR MOUNTING A MEMS SENSOR FOR IN-STREAM MEASUREMENTS
Publication number
20170190570
Publication date
Jul 6, 2017
DunAn Sensing, LLC
TOM KWA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LASER RESEAL INCLUDING DIFFERENT CAP MATERIALS
Publication number
20170158495
Publication date
Jun 8, 2017
ROBERT BOSCH GmbH
Achim Breitling
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STRUCTURES FOR REDUCING AND PREVENTING STRESS AND TENSIONS DURING P...
Publication number
20170113919
Publication date
Apr 27, 2017
ROBERT BOSCH GmbH
Frank Reichenbach
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ENCAPSULATED MICROELECTROMECHANICAL STRUCTURE
Publication number
20170101310
Publication date
Apr 13, 2017
SiTime Corporation
Aaron Partridge
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PACKAGING A MICROELECTRONIC DEVICE IN A HERMETICALLY SEA...
Publication number
20160304338
Publication date
Oct 20, 2016
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Damiel SAINT-PATRICE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PHYSICAL QUANTITY SENSOR, METHOD FOR MANUFACTURING PHYSICAL QUANTIT...
Publication number
20160130135
Publication date
May 12, 2016
SEIKO EPSON CORPORATION
Shinichi KAMISUKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Microelectromechanical system and method for manufacturing a microe...
Publication number
20150360934
Publication date
Dec 17, 2015
ROBERT BOSCH GmbH
Florian Grabmaier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
WAFER LEVEL PACKAGED INFRARED (IR) FOCAL PLANE ARRAY (FPA) WITH EVA...
Publication number
20150321905
Publication date
Nov 12, 2015
Raytheon Company
Roland W. Gooch
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Micromechanical component having hermetic through-contacting, and m...
Publication number
20150232330
Publication date
Aug 20, 2015
ROBERT BOSCH GmbH
Jochen FRANZ
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Device with Outgassing Shield
Publication number
20150115376
Publication date
Apr 30, 2015
Analog Devices, Inc.
Li Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTRICAL COMPONENT AND METHOD OF MANUFACTURING THE SAME
Publication number
20140284729
Publication date
Sep 25, 2014
Kei OBARA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
IMPLANTATION OF GASEOUS CHEMICALS INTO CAVITIES FORMED IN INTERMEDI...
Publication number
20140246740
Publication date
Sep 4, 2014
CAVENDISH KINETICS, INC. a Corporation
Willibrordus Gerardus Van Den Hoek
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTRICAL COMPONENT AND METHOD OF MANUFACTURING THE SAME
Publication number
20140231934
Publication date
Aug 21, 2014
Tomohiro SAITO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL MODULE, OPTICAL AN...
Publication number
20130038876
Publication date
Feb 14, 2013
SEIKO EPSON CORPORATION
Katsuji ARAKAWA
B81 - MICRO-STRUCTURAL TECHNOLOGY