Membership
Tour
Register
Log in
for manufacturing micro-systems
Follow
Industry
CPC
B81C1/00015
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
B
PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C1/00
Manufacture or treatment of devices or systems in or on a substrate
Current Industry
B81C1/00015
for manufacturing micro-systems
Industries
Overview
Organizations
People
Information
Impact
Please log in for detailed analytics
Patents Grants
last 30 patents
Information
Patent Grant
Method of manufacturing a microstructure
Patent number
12,358,784
Issue date
Jul 15, 2025
MEMSSTAR LIMITED
Anthony O'Hara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device, manufacturing method of the same, and integrated MEMS...
Patent number
11,939,212
Issue date
Mar 26, 2024
Industrial Technology Research Institute
Heng-chung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a micromechanical structure and micromecha...
Patent number
11,787,687
Issue date
Oct 17, 2023
Robert Bosch GmbH
Andrea Urban
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for coating microstructured components
Patent number
11,701,478
Issue date
Jul 18, 2023
Boehringer Ingelheim International GmbH
Daniel Frache
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Transfer system for microelements
Patent number
11,618,673
Issue date
Apr 4, 2023
XIAMEN SAN'AN OPTOELECTRONICS CO., LTD.
Chenke Hsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
High quality factor mems silicon flower-of-life vibratory gyroscope
Patent number
11,561,095
Issue date
Jan 24, 2023
HRL Laboratories, LLC
Lian X. Huang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Transfer system and transfer method for microelements, manufacturin...
Patent number
11,142,452
Issue date
Oct 12, 2021
XIAMEN SAN'AN OPTOELECTRONICS CO., LTD.
Chenke Hsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS microphone and method of manufacturing the same
Patent number
10,785,557
Issue date
Sep 22, 2020
DB HITEK CO., LTD.
Dong Chun Park
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing an optical element comprising micro-optical st...
Patent number
10,534,152
Issue date
Jan 14, 2020
Jenoptik Optical Systems GmbH
Christian Ziener
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Hierarchical micro assembler system
Patent number
10,308,504
Issue date
Jun 4, 2019
Palo Alto Research Center Incorporated
Jeng Ping Lu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Combined magnetometer accelerometer MEMS devices and methods
Patent number
10,197,590
Issue date
Feb 5, 2019
The Royal Institution for the Advancement of Learning/McGill University
Mourad El-Gamal
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
System and method for forming a buried lower electrode in conjuncti...
Patent number
10,160,632
Issue date
Dec 25, 2018
Robert Bosch GmbH
Andrew Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Multi-sensor system and method of forming same
Patent number
10,082,438
Issue date
Sep 25, 2018
NXP USA, INC.
Qing Zhang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical pressure sensor including reference capacitor
Patent number
10,065,851
Issue date
Sep 4, 2018
FAIRCHILD SEMICONDUCTOR CORPORATION
Janusz Bryzek
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microdevices and methods of manufacture
Patent number
9,890,259
Issue date
Feb 13, 2018
Auburn University
William Robert Ashurst
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for making a suspended membrane structure with buried electrode
Patent number
9,783,407
Issue date
Oct 10, 2017
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Sophie Giroud
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optomechanical accelerometer
Patent number
9,618,531
Issue date
Apr 11, 2017
California Institute of Technology
Oskar Painter
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of forming a micro-electro-mechanical system (MEMS) structure
Patent number
9,593,007
Issue date
Mar 14, 2017
International Business Machines Corporation
Christopher V. Jahnes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Detecting failure of scanning mirror
Patent number
9,523,625
Issue date
Dec 20, 2016
Apple Inc.
Alexander Shpunt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microdevices and methods of manufacture
Patent number
9,353,313
Issue date
May 31, 2016
Auburn University
William Robert Ashurst
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device and method for manufacturing the same
Patent number
9,171,783
Issue date
Oct 27, 2015
Dongbu HiTek Co., Ltd.
Ki Jun Yun
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device and method for manufacturing the same
Patent number
9,156,681
Issue date
Oct 13, 2015
Dongbu HiTek Co., Ltd.
Chung Kyung Jung
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods of forming buried electromechanical structures coupled with...
Patent number
9,061,890
Issue date
Jun 23, 2015
Intel Corporation
Rajashree Baskaran
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a cap for a MEMS component, and hybrid int...
Patent number
9,040,336
Issue date
May 26, 2015
Robert Bosch GmbH
Johannes Classen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods of manufacturing a micro-electro-mechanical system (MEMS) s...
Patent number
8,973,250
Issue date
Mar 10, 2015
International Business Machines Corporation
Christopher V. Jahnes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of fabricating MEMS device having release etch stop layer
Patent number
8,932,893
Issue date
Jan 13, 2015
FREESCALE SEMICONDUCTOR, INC.
Matthieu Lagouge
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical component and method for the manufacture of same
Patent number
8,928,099
Issue date
Jan 6, 2015
Robert Bosch GmbH
Johannes Classen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Hybrid MEMS bump design to prevent in-process and in-use stiction
Patent number
8,921,145
Issue date
Dec 30, 2014
Taiwan Semiconductor Manufacturing Co., Ltd.
Chia-Pao Shu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical system devices having crack resistant membra...
Patent number
8,921,952
Issue date
Dec 30, 2014
Freescale Semiconductor Inc.
Chad S Dawson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Registered structure formation via the application of directed ther...
Patent number
8,753,738
Issue date
Jun 17, 2014
Micron Technology, Inc.
Dan B. Millward
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
PIEZOELECTRIC SINGLE-CRYSTAL ELEMENT, MEMS DEVICE USING SAME, AND M...
Publication number
20230120240
Publication date
Apr 20, 2023
IBULE PHOTONICS
Sang Goo LEE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CHARGE TRANSFER CIRCUITRY FOR MEMS DEVICES
Publication number
20230061174
Publication date
Mar 2, 2023
Obsidian Sensors, Inc.
John HONG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTROMECHANICAL SYSTEM PUMP
Publication number
20220397110
Publication date
Dec 15, 2022
Microjet Technology Co., Ltd.
Hao-Jan MOU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF MANUFACTURING A MICROSTRUCTURE
Publication number
20220388837
Publication date
Dec 8, 2022
MEMSSTAR LIMITED
Anthony O'HARA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Transfer system for microelements
Publication number
20220002146
Publication date
Jan 6, 2022
Xiamen San'An Optoelectronics Co., Ltd.
Chenke HSU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE, MANUFACTURING METHOD OF THE SAME, AND INTEGRATED MEMS...
Publication number
20210380404
Publication date
Dec 9, 2021
Industrial Technology Research Institute
Heng-chung CHANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A MICROMECHANICAL STRUCTURE AND MICROMECHA...
Publication number
20210331916
Publication date
Oct 28, 2021
ROBERT BOSCH GmbH
Andrea Urban
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TRANSFER SYSTEM AND TRANSFER METHOD FOR MICROELEMENTS, MANUFACTURIN...
Publication number
20190276308
Publication date
Sep 12, 2019
Xiamen San'An Optoelectronics Co., Ltd.
Chenke HSU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
HIERARCHICAL MICRO ASSEMBLER SYSTEM
Publication number
20180282150
Publication date
Oct 4, 2018
Palo Alto Research Center Incorporated
Jeng Ping Lu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
HIERARCHICAL MICRO ASSEMBLER SYSTEM
Publication number
20180282151
Publication date
Oct 4, 2018
Palo Alto Research Center Incorporated
Jeng Ping Lu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
Publication number
20170359648
Publication date
Dec 14, 2017
DONGBU HITEK CO., LTD.
Dong Chun Park
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMBINED MAGNETOMETER ACCELEROMETER MEMS DEVICES AND METHODS
Publication number
20160139173
Publication date
May 19, 2016
Mourad El-Gamal
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
HIERARCHICAL STRUCTURED SURFACES
Publication number
20150375997
Publication date
Dec 31, 2015
Kuang-Han Chu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DETECTING FAILURE OF SCANNING MIRROR
Publication number
20150276547
Publication date
Oct 1, 2015
Alexander Shpunt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND MANUFACTURING METHOD OF THE SAME
Publication number
20150170997
Publication date
Jun 18, 2015
Kabushiki Kaisha Toshiba
Naofumi NAKAMURA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
OPTOMECHANICAL ACCELEROMETER
Publication number
20150020590
Publication date
Jan 22, 2015
Oskar Painter
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-POSTS HAVING IMPROVED UNIFORMITY AND A METHOD OF MANUFACTURE...
Publication number
20140322918
Publication date
Oct 30, 2014
Cristian A. Bolle
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHODS OF FORMING BURIED ELECTROMECHANICAL STRUCTURES COUPLED WITH...
Publication number
20140264643
Publication date
Sep 18, 2014
Rajashree Baskaran
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL SYSTEM DEVICES HAVING CRACK RESISTANT MEMBRA...
Publication number
20140210018
Publication date
Jul 31, 2014
Chad S. Dawson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
HYBRID MEMS BUMP DESIGN TO PREVENT IN-PROCESS AND IN-USE STICTION
Publication number
20140186986
Publication date
Jul 3, 2014
Taiwan Semiconductor Manufacturing Co., LTD
Chia-Pao Shu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for manufacturing a cap for a mems component, and hybrid int...
Publication number
20140110800
Publication date
Apr 24, 2014
ROBERT BOSCH GmbH
Johannes CLASSEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20140070336
Publication date
Mar 13, 2014
Dongbu HiTek Co., Ltd.
Chung Kyung JUNG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Semiconductor Device and Method for Manufacturing the Same
Publication number
20140070412
Publication date
Mar 13, 2014
Ki Jun YUN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEM AND METHOD FOR FORMING A BURIED LOWER ELECTRODE IN CONJUNCTI...
Publication number
20140054730
Publication date
Feb 27, 2014
ROBERT BOSCH GmbH
Andrew Graham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Microdevices and Methods of Manufacture
Publication number
20140044937
Publication date
Feb 13, 2014
William Robert Ashurst
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
HYBRID MEMS BUMP DESIGN TO PREVENT IN-PROCESS AND IN-USE STICTION
Publication number
20140035072
Publication date
Feb 6, 2014
Taiwan Semiconductor Manufacturing Co., LTD
Chia-Pao Shu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Biochip and fabrication thereof
Publication number
20130315782
Publication date
Nov 28, 2013
JUNG-TANG HUANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL PRESSURE SENSOR INCLUDING REFERENCE CAPACITOR
Publication number
20130277772
Publication date
Oct 24, 2013
Fairchild Semiconductor Corporation
Janusz Bryzek
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR THE MANUFACTURE OF SAME
Publication number
20130200473
Publication date
Aug 8, 2013
ROBERT BOSCH GmbH
Johannes CLASSEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
REGISTERED STRUCTURE FORMATION VIA THE APPLICATION OF DIRECTED THER...
Publication number
20130189492
Publication date
Jul 25, 2013
Micron Technology, Inc.
Dan B. Millward
B81 - MICRO-STRUCTURAL TECHNOLOGY