for manufacturing micro-systems

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B81C1/00015

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00015for manufacturing micro-systems

Industries

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Patents Grantslast 30 patents

Information Patent Grant
MEMS device, manufacturing method of the same, and integrated MEMS...
- Patent number 11,939,212
- Issue date Mar 26, 2024
- Industrial Technology Research Institute
- Heng-chung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical structure and micromecha...
- Patent number 11,787,687
- Issue date Oct 17, 2023
- Robert Bosch GmbH
- Andrea Urban
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for coating microstructured components
- Patent number 11,701,478
- Issue date Jul 18, 2023
- Boehringer Ingelheim International GmbH
- Daniel Frache
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Transfer system for microelements
- Patent number 11,618,673
- Issue date Apr 4, 2023
- XIAMEN SAN'AN OPTOELECTRONICS CO., LTD.
- Chenke Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High quality factor mems silicon flower-of-life vibratory gyroscope
- Patent number 11,561,095
- Issue date Jan 24, 2023
- HRL Laboratories, LLC
- Lian X. Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Transfer system and transfer method for microelements, manufacturin...
- Patent number 11,142,452
- Issue date Oct 12, 2021
- XIAMEN SAN'AN OPTOELECTRONICS CO., LTD.
- Chenke Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and method of manufacturing the same
- Patent number 10,785,557
- Issue date Sep 22, 2020
- DB HITEK CO., LTD.
- Dong Chun Park
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing an optical element comprising micro-optical st...
- Patent number 10,534,152
- Issue date Jan 14, 2020
- Jenoptik Optical Systems GmbH
- Christian Ziener
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hierarchical micro assembler system
- Patent number 10,308,504
- Issue date Jun 4, 2019
- Palo Alto Research Center Incorporated
- Jeng Ping Lu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Combined magnetometer accelerometer MEMS devices and methods
- Patent number 10,197,590
- Issue date Feb 5, 2019
- The Royal Institution for the Advancement of Learning/McGill University
- Mourad El-Gamal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for forming a buried lower electrode in conjuncti...
- Patent number 10,160,632
- Issue date Dec 25, 2018
- Robert Bosch GmbH
- Andrew Graham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-sensor system and method of forming same
- Patent number 10,082,438
- Issue date Sep 25, 2018
- NXP USA, INC.
- Qing Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical pressure sensor including reference capacitor
- Patent number 10,065,851
- Issue date Sep 4, 2018
- FAIRCHILD SEMICONDUCTOR CORPORATION
- Janusz Bryzek
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microdevices and methods of manufacture
- Patent number 9,890,259
- Issue date Feb 13, 2018
- Auburn University
- William Robert Ashurst
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for making a suspended membrane structure with buried electrode
- Patent number 9,783,407
- Issue date Oct 10, 2017
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Sophie Giroud
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optomechanical accelerometer
- Patent number 9,618,531
- Issue date Apr 11, 2017
- California Institute of Technology
- Oskar Painter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming a micro-electro-mechanical system (MEMS) structure
- Patent number 9,593,007
- Issue date Mar 14, 2017
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Detecting failure of scanning mirror
- Patent number 9,523,625
- Issue date Dec 20, 2016
- Apple Inc.
- Alexander Shpunt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microdevices and methods of manufacture
- Patent number 9,353,313
- Issue date May 31, 2016
- Auburn University
- William Robert Ashurst
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and method for manufacturing the same
- Patent number 9,171,783
- Issue date Oct 27, 2015
- Dongbu HiTek Co., Ltd.
- Ki Jun Yun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and method for manufacturing the same
- Patent number 9,156,681
- Issue date Oct 13, 2015
- Dongbu HiTek Co., Ltd.
- Chung Kyung Jung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of forming buried electromechanical structures coupled with...
- Patent number 9,061,890
- Issue date Jun 23, 2015
- Intel Corporation
- Rajashree Baskaran
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a cap for a MEMS component, and hybrid int...
- Patent number 9,040,336
- Issue date May 26, 2015
- Robert Bosch GmbH
- Johannes Classen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of manufacturing a micro-electro-mechanical system (MEMS) s...
- Patent number 8,973,250
- Issue date Mar 10, 2015
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating MEMS device having release etch stop layer
- Patent number 8,932,893
- Issue date Jan 13, 2015
- FREESCALE SEMICONDUCTOR, INC.
- Matthieu Lagouge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component and method for the manufacture of same
- Patent number 8,928,099
- Issue date Jan 6, 2015
- Robert Bosch GmbH
- Johannes Classen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hybrid MEMS bump design to prevent in-process and in-use stiction
- Patent number 8,921,145
- Issue date Dec 30, 2014
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Pao Shu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system devices having crack resistant membra...
- Patent number 8,921,952
- Issue date Dec 30, 2014
- Freescale Semiconductor Inc.
- Chad S Dawson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Registered structure formation via the application of directed ther...
- Patent number 8,753,738
- Issue date Jun 17, 2014
- Micron Technology, Inc.
- Dan B. Millward
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hybrid MEMS bump design to prevent in-process and in-use stiction
- Patent number 8,723,280
- Issue date May 13, 2014
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Pao Shu
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
PIEZOELECTRIC SINGLE-CRYSTAL ELEMENT, MEMS DEVICE USING SAME, AND M...
- Publication number 20230120240
- Publication date Apr 20, 2023
- IBULE PHOTONICS
- Sang Goo LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CHARGE TRANSFER CIRCUITRY FOR MEMS DEVICES
- Publication number 20230061174
- Publication date Mar 2, 2023
- Obsidian Sensors, Inc.
- John HONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM PUMP
- Publication number 20220397110
- Publication date Dec 15, 2022
- Microjet Technology Co., Ltd.
- Hao-Jan MOU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING A MICROSTRUCTURE
- Publication number 20220388837
- Publication date Dec 8, 2022
- MEMSSTAR LIMITED
- Anthony O'HARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Transfer system for microelements
- Publication number 20220002146
- Publication date Jan 6, 2022
- Xiamen San'An Optoelectronics Co., Ltd.
- Chenke HSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE, MANUFACTURING METHOD OF THE SAME, AND INTEGRATED MEMS...
- Publication number 20210380404
- Publication date Dec 9, 2021
- Industrial Technology Research Institute
- Heng-chung CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A MICROMECHANICAL STRUCTURE AND MICROMECHA...
- Publication number 20210331916
- Publication date Oct 28, 2021
- ROBERT BOSCH GmbH
- Andrea Urban
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TRANSFER SYSTEM AND TRANSFER METHOD FOR MICROELEMENTS, MANUFACTURIN...
- Publication number 20190276308
- Publication date Sep 12, 2019
- Xiamen San'An Optoelectronics Co., Ltd.
- Chenke HSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIERARCHICAL MICRO ASSEMBLER SYSTEM
- Publication number 20180282150
- Publication date Oct 4, 2018
- Palo Alto Research Center Incorporated
- Jeng Ping Lu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIERARCHICAL MICRO ASSEMBLER SYSTEM
- Publication number 20180282151
- Publication date Oct 4, 2018
- Palo Alto Research Center Incorporated
- Jeng Ping Lu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20170359648
- Publication date Dec 14, 2017
- DONGBU HITEK CO., LTD.
- Dong Chun Park
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMBINED MAGNETOMETER ACCELEROMETER MEMS DEVICES AND METHODS
- Publication number 20160139173
- Publication date May 19, 2016
- Mourad El-Gamal
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIERARCHICAL STRUCTURED SURFACES
- Publication number 20150375997
- Publication date Dec 31, 2015
- Kuang-Han Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DETECTING FAILURE OF SCANNING MIRROR
- Publication number 20150276547
- Publication date Oct 1, 2015
- Alexander Shpunt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND MANUFACTURING METHOD OF THE SAME
- Publication number 20150170997
- Publication date Jun 18, 2015
- Kabushiki Kaisha Toshiba
- Naofumi NAKAMURA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTOMECHANICAL ACCELEROMETER
- Publication number 20150020590
- Publication date Jan 22, 2015
- Oskar Painter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-POSTS HAVING IMPROVED UNIFORMITY AND A METHOD OF MANUFACTURE...
- Publication number 20140322918
- Publication date Oct 30, 2014
- Cristian A. Bolle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF FORMING BURIED ELECTROMECHANICAL STRUCTURES COUPLED WITH...
- Publication number 20140264643
- Publication date Sep 18, 2014
- Rajashree Baskaran
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM DEVICES HAVING CRACK RESISTANT MEMBRA...
- Publication number 20140210018
- Publication date Jul 31, 2014
- Chad S. Dawson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HYBRID MEMS BUMP DESIGN TO PREVENT IN-PROCESS AND IN-USE STICTION
- Publication number 20140186986
- Publication date Jul 3, 2014
- Taiwan Semiconductor Manufacturing Co., LTD
- Chia-Pao Shu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing a cap for a mems component, and hybrid int...
- Publication number 20140110800
- Publication date Apr 24, 2014
- ROBERT BOSCH GmbH
- Johannes CLASSEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20140070336
- Publication date Mar 13, 2014
- Dongbu HiTek Co., Ltd.
- Chung Kyung JUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Device and Method for Manufacturing the Same
- Publication number 20140070412
- Publication date Mar 13, 2014
- Ki Jun YUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR FORMING A BURIED LOWER ELECTRODE IN CONJUNCTI...
- Publication number 20140054730
- Publication date Feb 27, 2014
- ROBERT BOSCH GmbH
- Andrew Graham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microdevices and Methods of Manufacture
- Publication number 20140044937
- Publication date Feb 13, 2014
- William Robert Ashurst
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HYBRID MEMS BUMP DESIGN TO PREVENT IN-PROCESS AND IN-USE STICTION
- Publication number 20140035072
- Publication date Feb 6, 2014
- Taiwan Semiconductor Manufacturing Co., LTD
- Chia-Pao Shu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Biochip and fabrication thereof
- Publication number 20130315782
- Publication date Nov 28, 2013
- JUNG-TANG HUANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL PRESSURE SENSOR INCLUDING REFERENCE CAPACITOR
- Publication number 20130277772
- Publication date Oct 24, 2013
- Fairchild Semiconductor Corporation
- Janusz Bryzek
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR THE MANUFACTURE OF SAME
- Publication number 20130200473
- Publication date Aug 8, 2013
- ROBERT BOSCH GmbH
- Johannes CLASSEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
REGISTERED STRUCTURE FORMATION VIA THE APPLICATION OF DIRECTED THER...
- Publication number 20130189492
- Publication date Jul 25, 2013
- Micron Technology, Inc.
- Dan B. Millward
- B81 - MICRO-STRUCTURAL TECHNOLOGY

for manufacturing micro-systems

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS device, manufacturing method of the same, and integrated MEMS...

Method for manufacturing a micromechanical structure and micromecha...

Method for coating microstructured components

Transfer system for microelements

High quality factor mems silicon flower-of-life vibratory gyroscope

Transfer system and transfer method for microelements, manufacturin...

MEMS microphone and method of manufacturing the same

Method for producing an optical element comprising micro-optical st...

Hierarchical micro assembler system

Combined magnetometer accelerometer MEMS devices and methods

System and method for forming a buried lower electrode in conjuncti...

Multi-sensor system and method of forming same

Microelectromechanical pressure sensor including reference capacitor

Microdevices and methods of manufacture

Method for making a suspended membrane structure with buried electrode

Optomechanical accelerometer

Method of forming a micro-electro-mechanical system (MEMS) structure

Detecting failure of scanning mirror

Microdevices and methods of manufacture

Semiconductor device and method for manufacturing the same

Semiconductor device and method for manufacturing the same

Methods of forming buried electromechanical structures coupled with...

Method for manufacturing a cap for a MEMS component, and hybrid int...

Methods of manufacturing a micro-electro-mechanical system (MEMS) s...

Method of fabricating MEMS device having release etch stop layer

Micromechanical component and method for the manufacture of same

Hybrid MEMS bump design to prevent in-process and in-use stiction

Microelectromechanical system devices having crack resistant membra...

Registered structure formation via the application of directed ther...

Hybrid MEMS bump design to prevent in-process and in-use stiction

Patents Applicationslast 30 patents

PIEZOELECTRIC SINGLE-CRYSTAL ELEMENT, MEMS DEVICE USING SAME, AND M...

CHARGE TRANSFER CIRCUITRY FOR MEMS DEVICES

MICRO-ELECTROMECHANICAL SYSTEM PUMP

METHOD OF MANUFACTURING A MICROSTRUCTURE

Transfer system for microelements

MEMS DEVICE, MANUFACTURING METHOD OF THE SAME, AND INTEGRATED MEMS...

METHOD FOR MANUFACTURING A MICROMECHANICAL STRUCTURE AND MICROMECHA...

TRANSFER SYSTEM AND TRANSFER METHOD FOR MICROELEMENTS, MANUFACTURIN...

HIERARCHICAL MICRO ASSEMBLER SYSTEM

HIERARCHICAL MICRO ASSEMBLER SYSTEM

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

COMBINED MAGNETOMETER ACCELEROMETER MEMS DEVICES AND METHODS

HIERARCHICAL STRUCTURED SURFACES

DETECTING FAILURE OF SCANNING MIRROR

MEMS DEVICE AND MANUFACTURING METHOD OF THE SAME

OPTOMECHANICAL ACCELEROMETER

MICRO-POSTS HAVING IMPROVED UNIFORMITY AND A METHOD OF MANUFACTURE...

METHODS OF FORMING BURIED ELECTROMECHANICAL STRUCTURES COUPLED WITH...

MICROELECTROMECHANICAL SYSTEM DEVICES HAVING CRACK RESISTANT MEMBRA...

HYBRID MEMS BUMP DESIGN TO PREVENT IN-PROCESS AND IN-USE STICTION

Method for manufacturing a cap for a mems component, and hybrid int...

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

Semiconductor Device and Method for Manufacturing the Same

SYSTEM AND METHOD FOR FORMING A BURIED LOWER ELECTRODE IN CONJUNCTI...

Microdevices and Methods of Manufacture

HYBRID MEMS BUMP DESIGN TO PREVENT IN-PROCESS AND IN-USE STICTION

Biochip and fabrication thereof

MICROELECTROMECHANICAL PRESSURE SENSOR INCLUDING REFERENCE CAPACITOR

MICROMECHANICAL COMPONENT AND METHOD FOR THE MANUFACTURE OF SAME

REGISTERED STRUCTURE FORMATION VIA THE APPLICATION OF DIRECTED THER...