for pivoting movement of the mass

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GPHYSICS G01Measuring instruments G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT

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G01P2015/0817for pivoting movement of the mass

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Patents Grantslast 30 patents

Information Patent Grant
Highly sensitive resonant force sensor with a test body and at leas...
- Patent number 12,123,792
- Issue date Oct 22, 2024
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Théo Miani
- G01 - MEASURING TESTING
Information Patent Grant
Resonantly vibrating accelerometer driven in multiple vibrational m...
- Patent number 11,965,907
- Issue date Apr 23, 2024
- Emcore Corporation
- Sergey Alexandrovich Zotov
- G01 - MEASURING TESTING
Information Patent Grant
Resonantly vibrating accelerometer with cross-coupling signal suppr...
- Patent number 11,959,935
- Issue date Apr 16, 2024
- Emcore Corporation
- Sergey Alexandrovich Zotov
- G01 - MEASURING TESTING
Information Patent Grant
Self-compensating resonantly vibrating accelerometer driven in mult...
- Patent number 11,953,514
- Issue date Apr 9, 2024
- Emcore Corporation
- Sergey Alexandrovich Zotov
- G01 - MEASURING TESTING
Information Patent Grant
Micro-electromechanical system device and method of forming the same
- Patent number 11,878,905
- Issue date Jan 23, 2024
- Vanguard International Semiconductor Corporation
- Jia Jie Xia
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor and electronic device
- Patent number 11,630,121
- Issue date Apr 18, 2023
- Kabushiki Kaisha Toshiba
- Kei Masunishi
- G01 - MEASURING TESTING
Information Patent Grant
Accelerometric sensor in mems technology having high accuracy and l...
- Patent number 11,408,904
- Issue date Aug 9, 2022
- STMicroelectronics S.r.l.
- Alessandro Tocchio
- G01 - MEASURING TESTING
Information Patent Grant
Multilayer excitation ring
- Patent number 11,169,175
- Issue date Nov 9, 2021
- Honeywell International Inc.
- Paul W. Dwyer
- G01 - MEASURING TESTING
Information Patent Grant
Piezoresistive detection resonant device in particular with large v...
- Patent number 11,125,632
- Issue date Sep 21, 2021
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Patrice Rey
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Accelerometer with strain compensation
- Patent number 10,823,754
- Issue date Nov 3, 2020
- Honeywell International Inc.
- Paul W. Dwyer
- G01 - MEASURING TESTING
Information Patent Grant
Damped linear accerelometer
- Patent number 10,371,711
- Issue date Aug 6, 2019
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Bruno Fain
- G01 - MEASURING TESTING
Information Patent Grant
Micromechanical structure for an acceleration sensor
- Patent number 10,215,772
- Issue date Feb 26, 2019
- Robert Bosch GmbH
- Johannes Classen
- G01 - MEASURING TESTING
Information Patent Grant
MEMS sensor and a semiconductor package
- Patent number 10,137,851
- Issue date Nov 27, 2018
- Murata Manufacturing Co., Ltd.
- Ville-Pekka Rytkönen
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Micro-electromechanical device comprising a mobile mass that can mo...
- Patent number 10,094,851
- Issue date Oct 9, 2018
- Tronic's Microsystems
- Francois-Xavier Boillot
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated piezoelectric sensor for detecting in-plane forces, such...
- Patent number 10,031,155
- Issue date Jul 24, 2018
- STMicroelectronics S.r.l.
- Francesco Procopio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
MEMS sensor
- Patent number 10,024,881
- Issue date Jul 17, 2018
- Murata Manufacturing Co., Ltd.
- Ville-Pekka Rytkönen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
In-plane piezoresistive detection sensor
- Patent number 9,702,893
- Issue date Jul 11, 2017
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Philippe Robert
- G01 - MEASURING TESTING
Information Patent Grant
In-plane vibrating beam accelerometer
- Patent number 9,689,888
- Issue date Jun 27, 2017
- Honeywell International Inc.
- Stephen F. Becka
- G01 - MEASURING TESTING
Information Patent Grant
In-plane piezoresistive detection sensor
- Patent number 9,146,252
- Issue date Sep 29, 2015
- Comissariat a l'Energie Atomique et aux Energies Alternatives
- Philippe Robert
- G01 - MEASURING TESTING
Information Patent Grant
Micromechanical sensor with multiple spring bars
- Patent number 9,103,850
- Issue date Aug 11, 2015
- Maxim Integrated Products, Inc.
- Hanno Hammer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure comprising a mobile part having stops for...
- Patent number 9,061,895
- Issue date Jun 23, 2015
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Philippe Robert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Acceleration measuring apparatus
- Patent number 8,919,201
- Issue date Dec 30, 2014
- Nihon Dempa Kogyo Co., Ltd.
- Mitsuaki Koyama
- G01 - MEASURING TESTING
Information Patent Grant
Micromechanical component and method for operating a micromechanica...
- Patent number 8,596,122
- Issue date Dec 3, 2013
- Robert Bosch GmbH
- Johannes Classen
- G01 - MEASURING TESTING
Information Patent Grant
Flexure assemblies and methods for manufacturing and using the same
- Patent number 8,528,405
- Issue date Sep 10, 2013
- The Charles Stark Draper Laboratory, Inc.
- Lyle J. Jenkins
- G01 - MEASURING TESTING
Information Patent Grant
Acceleration sensor
- Patent number 8,497,672
- Issue date Jul 30, 2013
- Kabushiki Kaisha Toshiba
- Takashi Kawakubo
- G01 - MEASURING TESTING
Information Patent Grant
Acceleration sensor
- Patent number 8,327,708
- Issue date Dec 11, 2012
- Panasonic Corporation
- Isao Hattori
- G01 - MEASURING TESTING
Information Patent Grant
Method of epitaxially growing piezoresistors
- Patent number 8,187,903
- Issue date May 29, 2012
- Robert Bosch GmbH
- Gary Yama
- G01 - MEASURING TESTING
Information Patent Grant
Inertia force sensor and composite sensor for detecting inertia force
- Patent number 8,117,914
- Issue date Feb 21, 2012
- Panasonic Corporation
- Satoshi Ohuchi
- G01 - MEASURING TESTING
Information Patent Grant
Device sensitive to a movement comprising at least one transistor
- Patent number 8,030,690
- Issue date Oct 4, 2011
- Commissariat a l'Energie Atomique
- Eric Ollier
- G01 - MEASURING TESTING
Information Patent Grant
Single-mask fabrication process for linear and angular piezoresisti...
- Patent number 7,939,355
- Issue date May 10, 2011
- The Regents of the University of California
- Erik J. Eklund
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
FORCE SENSOR WITH AN INCREASED OPERATING RANGE
- Publication number 20240377431
- Publication date Nov 14, 2024
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Theo MIANI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR AND ELECTRONIC DEVICE
- Publication number 20240310406
- Publication date Sep 19, 2024
- Kabushiki Kaisha Toshiba
- Kei MASUNISHI
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF FABRICATING MICRO-ELECTROMECHANICAL SYSTEM DEVICE
- Publication number 20240116749
- Publication date Apr 11, 2024
- Vanguard International Semiconductor Corporation
- Jia Jie Xia
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INERTIAL SENSOR AND INERTIAL MEASUREMENT UNIT
- Publication number 20220404389
- Publication date Dec 22, 2022
- SEIKO EPSON CORPORATION
- Shota Kigure
- G01 - MEASURING TESTING
Information Patent Application
SENSOR AND ELECTRONIC DEVICE
- Publication number 20220137085
- Publication date May 5, 2022
- Kabushiki Kaisha Toshiba
- Kei Masunishi
- G01 - MEASURING TESTING
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE AND METHOD OF FORMING THE SAME
- Publication number 20220024754
- Publication date Jan 27, 2022
- Vanguard International Semiconductor Corporation
- Jia Jie Xia
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE AND METHOD OF FORMING THE SAME
- Publication number 20220024753
- Publication date Jan 27, 2022
- Vanguard International Semiconductor Corporation
- Jia Jie Xia
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTILAYER EXCITATION RING
- Publication number 20210247418
- Publication date Aug 12, 2021
- HONEYWELL INTERNATIONAL INC.
- Paul W. Dwyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EFFECTIVE ACCELEROMETER HAVING A REDUCED SIZE
- Publication number 20210132106
- Publication date May 6, 2021
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Martial DEFOORT
- G01 - MEASURING TESTING
Information Patent Application
ACCELEROMETRIC SENSOR IN MEMS TECHNOLOGY HAVING HIGH ACCURACY AND L...
- Publication number 20200132711
- Publication date Apr 30, 2020
- STMicroelectronics S.r.l.
- Alessandro Tocchio
- G01 - MEASURING TESTING
Information Patent Application
MICROMECHANICAL STRUCTURE FOR AN ACCELERATION SENSOR
- Publication number 20170052207
- Publication date Feb 23, 2017
- ROBERT BOSCH GmbH
- Johannes CLASSEN
- G01 - MEASURING TESTING
Information Patent Application
ACCELERATION SENSOR AND METHOD FOR OPERATING AN ACCELERATION SENSOR
- Publication number 20140083190
- Publication date Mar 27, 2014
- Rolf Kaack
- G01 - MEASURING TESTING
Information Patent Application
ACCELERATION MEASURING APPARATUS
- Publication number 20120312097
- Publication date Dec 13, 2012
- NIHON DEMPA KOGYO CO., LTD.
- MITSUAKI KOYAMA
- G01 - MEASURING TESTING
Information Patent Application
IN-PLANE PIEZORESISTIVE DETECTION SENSOR
- Publication number 20120210792
- Publication date Aug 23, 2012
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Philippe Robert
- G01 - MEASURING TESTING
Information Patent Application
ACCELERATION SENSOR
- Publication number 20120125102
- Publication date May 24, 2012
- PANASONIC CORPORATION
- Isao Hattori
- G01 - MEASURING TESTING
Information Patent Application
Micromechanical Sensor
- Publication number 20120042728
- Publication date Feb 23, 2012
- Hanno Hammer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Low Cost Optical Accelerometer
- Publication number 20120024062
- Publication date Feb 2, 2012
- Simeon E. Tiefel
- G01 - MEASURING TESTING
Information Patent Application
ACCELERATION SENSOR
- Publication number 20110234206
- Publication date Sep 29, 2011
- Kabushiki Kaisha Toshiba
- Takashi KAWAKUBO
- G01 - MEASURING TESTING
Information Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR OPERATING A MICROMECHANICA...
- Publication number 20110154899
- Publication date Jun 30, 2011
- Johannes Classen
- G01 - MEASURING TESTING
Information Patent Application
MICROMECHANICAL STRUCTURE COMPRISING A MOBILE PART HAVING STOPS FOR...
- Publication number 20110147860
- Publication date Jun 23, 2011
- COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE. ALT.
- Philippe ROBERT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FLEXURE ASSEMBLIES AND METHODS FOR MANUFACTURING AND USING THE SAME
- Publication number 20110132088
- Publication date Jun 9, 2011
- The Charles Stark Draper Laboratory, Inc.
- Lyle J. Jenkins
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF EPITAXIALLY GROWING PIEZORESISTORS
- Publication number 20100176465
- Publication date Jul 15, 2010
- STANFORD UNIVERSITY
- Gary Yama
- G01 - MEASURING TESTING
Information Patent Application
INERTIA FORCE SENSOR
- Publication number 20100126270
- Publication date May 27, 2010
- PANASONIC CORPORATION
- Jirou Terada
- G01 - MEASURING TESTING
Information Patent Application
INERTIA FORCE SENSOR AND COMPOSITE SENSOR FOR DETECTING INERTIA FORCE
- Publication number 20100071468
- Publication date Mar 25, 2010
- PANASONIC CORPORATION
- Satoshi Ohuchi
- G01 - MEASURING TESTING
Information Patent Application
INERTIAL SENSOR AND INERTIAL DETECTING DEVICE
- Publication number 20090322183
- Publication date Dec 31, 2009
- Kabushiki Kaisha Toshiba
- Takashi Kawakubo
- G01 - MEASURING TESTING
Information Patent Application
DEVICE SENSITIVE TO A MOVEMENT COMPRISING AT LEAST ONE TRANSISTOR
- Publication number 20090321793
- Publication date Dec 31, 2009
- COMMISSARIAT A L'ENERGIE ATOMIQUE
- Eric Ollier
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR MECHANICAL SENSEOR
- Publication number 20090179288
- Publication date Jul 16, 2009
- DENSO CORPORATION
- Tetsuo Fujii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor mechanical sensor
- Publication number 20090014820
- Publication date Jan 15, 2009
- Tetsuo Fujii
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Accelerometer With Reducted Extraneous Vibrations Owing To Improved...
- Publication number 20080196500
- Publication date Aug 21, 2008
- Jean-Paul Menard
- G01 - MEASURING TESTING
Information Patent Application
Silicon inertial sensors formed using MEMS
- Publication number 20070193353
- Publication date Aug 23, 2007
- Eun Sok Kim
- G01 - MEASURING TESTING

for pivoting movement of the mass

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Highly sensitive resonant force sensor with a test body and at leas...

Resonantly vibrating accelerometer driven in multiple vibrational m...

Resonantly vibrating accelerometer with cross-coupling signal suppr...

Self-compensating resonantly vibrating accelerometer driven in mult...

Micro-electromechanical system device and method of forming the same

Sensor and electronic device

Accelerometric sensor in mems technology having high accuracy and l...

Multilayer excitation ring

Piezoresistive detection resonant device in particular with large v...

Accelerometer with strain compensation

Damped linear accerelometer

Micromechanical structure for an acceleration sensor

MEMS sensor and a semiconductor package

Micro-electromechanical device comprising a mobile mass that can mo...

Integrated piezoelectric sensor for detecting in-plane forces, such...

MEMS sensor

In-plane piezoresistive detection sensor

In-plane vibrating beam accelerometer

In-plane piezoresistive detection sensor

Micromechanical sensor with multiple spring bars

Micromechanical structure comprising a mobile part having stops for...

Acceleration measuring apparatus

Micromechanical component and method for operating a micromechanica...

Flexure assemblies and methods for manufacturing and using the same

Acceleration sensor

Acceleration sensor

Method of epitaxially growing piezoresistors

Inertia force sensor and composite sensor for detecting inertia force

Device sensitive to a movement comprising at least one transistor

Single-mask fabrication process for linear and angular piezoresisti...

Patents Applicationslast 30 patents

FORCE SENSOR WITH AN INCREASED OPERATING RANGE

SENSOR AND ELECTRONIC DEVICE

METHOD OF FABRICATING MICRO-ELECTROMECHANICAL SYSTEM DEVICE

INERTIAL SENSOR AND INERTIAL MEASUREMENT UNIT

SENSOR AND ELECTRONIC DEVICE

MICRO-ELECTROMECHANICAL SYSTEM DEVICE AND METHOD OF FORMING THE SAME

MICRO-ELECTROMECHANICAL SYSTEM DEVICE AND METHOD OF FORMING THE SAME

MULTILAYER EXCITATION RING

EFFECTIVE ACCELEROMETER HAVING A REDUCED SIZE

ACCELEROMETRIC SENSOR IN MEMS TECHNOLOGY HAVING HIGH ACCURACY AND L...

MICROMECHANICAL STRUCTURE FOR AN ACCELERATION SENSOR

ACCELERATION SENSOR AND METHOD FOR OPERATING AN ACCELERATION SENSOR

ACCELERATION MEASURING APPARATUS

IN-PLANE PIEZORESISTIVE DETECTION SENSOR

ACCELERATION SENSOR

Micromechanical Sensor

Low Cost Optical Accelerometer

ACCELERATION SENSOR

MICROMECHANICAL COMPONENT AND METHOD FOR OPERATING A MICROMECHANICA...

MICROMECHANICAL STRUCTURE COMPRISING A MOBILE PART HAVING STOPS FOR...

FLEXURE ASSEMBLIES AND METHODS FOR MANUFACTURING AND USING THE SAME

METHOD OF EPITAXIALLY GROWING PIEZORESISTORS

INERTIA FORCE SENSOR

INERTIA FORCE SENSOR AND COMPOSITE SENSOR FOR DETECTING INERTIA FORCE

INERTIAL SENSOR AND INERTIAL DETECTING DEVICE

DEVICE SENSITIVE TO A MOVEMENT COMPRISING AT LEAST ONE TRANSISTOR

SEMICONDUCTOR MECHANICAL SENSEOR

Semiconductor mechanical sensor

Accelerometer With Reducted Extraneous Vibrations Owing To Improved...

Silicon inertial sensors formed using MEMS