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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
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Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/67075
for wet etching
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last 30 patents
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Patent Grant
Chemical-resistant protective film forming composition containing h...
Patent number
11,965,059
Issue date
Apr 23, 2024
NISSAN CHEMICAL CORPORATION
Shigetaka Otagiri
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method for integrating gate dielectric layers of diff...
Patent number
11,961,740
Issue date
Apr 16, 2024
Shanghai Huali Integrated Circuit Corporation
Lian Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,948,804
Issue date
Apr 2, 2024
Tokyo Electron Limited
Takumi Honda
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Monolithic platen
Patent number
11,919,126
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsung-Lung Lai
B24 - GRINDING POLISHING
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,921,428
Issue date
Mar 5, 2024
Kioxia Corporation
Yoshihiro Uozumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dynamically adjusted purge timing in wet atomic layer etching
Patent number
11,915,941
Issue date
Feb 27, 2024
Tokyo Electron Limited
Jacques Faguet
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor devices and methods of manufacturing
Patent number
11,915,946
Issue date
Feb 27, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Jhon Jhy Liaw
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and system for filtrating liquid
Patent number
11,839,839
Issue date
Dec 12, 2023
XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
Sangyong Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Slurry distribution device for chemical mechanical polishing
Patent number
11,806,835
Issue date
Nov 7, 2023
Applied Materials, Inc.
Yen-Chu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer cleaning method and apparatus therefore
Patent number
11,810,796
Issue date
Nov 7, 2023
Lam Research AG
Christoph Semmelrock
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device having an air gap and method for fabricating t...
Patent number
11,791,390
Issue date
Oct 17, 2023
SK Hynix Inc.
Se-Han Kwon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment apparatus and manufacturing method of semicondu...
Patent number
11,784,064
Issue date
Oct 10, 2023
Kioxia Corporation
Yasuhito Yoshimizu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method fabricating the same
Patent number
11,751,377
Issue date
Sep 5, 2023
XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
Hyunyoung Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for forming memory devices, and associated devices and systems
Patent number
11,735,473
Issue date
Aug 22, 2023
Micron Technology, Inc.
Jukuan Zheng
G11 - INFORMATION STORAGE
Information
Patent Grant
Implantation enabled precisely controlled source and drain etch depth
Patent number
11,721,743
Issue date
Aug 8, 2023
Applied Materials, Inc.
Qintao Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Endpoint detection for chemical mechanical polishing based on spect...
Patent number
11,715,672
Issue date
Aug 1, 2023
Applied Materials, Inc.
Dominic J. Benvegnu
B24 - GRINDING POLISHING
Information
Patent Grant
Contact conductive feature formation and structure
Patent number
11,676,859
Issue date
Jun 13, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Ken-Yu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processing liquid generator and substrate processing apparatus usin...
Patent number
11,670,522
Issue date
Jun 6, 2023
Shibaura Mechatronics Corporation
Konosuke Hayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Wafer cleaning apparatus and wafer cleaning method using the same
Patent number
11,648,594
Issue date
May 16, 2023
Samsung Electronics Co., Ltd.
Seung Min Shin
B08 - CLEANING
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Patent Grant
Method for analyzing a semiconductor device
Patent number
11,626,306
Issue date
Apr 11, 2023
SK hynix Inc.
Jin Hee Han
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silicon carbide semiconductor device with a contact region having e...
Patent number
11,615,953
Issue date
Mar 28, 2023
Microchip Technology Inc.
Amaury Gendron-Hansen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor manufacturing apparatus and method of manufacturing s...
Patent number
11,610,789
Issue date
Mar 21, 2023
Kioxia Corporation
Katsuhiro Sato
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electro-oxidative metal removal in through mask interconnect fabric...
Patent number
11,610,782
Issue date
Mar 21, 2023
Lam Research Corporation
Kari Thorkelsson
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Semiconductor wafer dicing process
Patent number
11,545,394
Issue date
Jan 3, 2023
SPTS Technologies Limited
Matthew Michael Day
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and method of manufacturing display...
Patent number
11,508,762
Issue date
Nov 22, 2022
Samsung Display Co., Ltd.
Youngdae Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for etching thin layer
Patent number
11,495,467
Issue date
Nov 8, 2022
Semes Co., Ltd.
Jung Suk Goh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment apparatus
Patent number
11,469,119
Issue date
Oct 11, 2022
Kioxia Corporation
Satoshi Nakaoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Planarization method, method for polishing wafer, and CMP system
Patent number
11,458,586
Issue date
Oct 4, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Chung-Liang Cheng
B24 - GRINDING POLISHING
Information
Patent Grant
Semiconductor memory device and manufacturing method thereof
Patent number
11,456,309
Issue date
Sep 27, 2022
Kioxia Corporation
Yusuke Shima
G11 - INFORMATION STORAGE
Information
Patent Grant
Chemical mechanical polishing apparatus and methods
Patent number
11,453,097
Issue date
Sep 27, 2022
Applied Materials, Inc.
Rajeev Bajaj
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANUFACTURING METHOD THEREOF
Publication number
20240136199
Publication date
Apr 25, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yung-Chi LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING METHODS AND CLUSTER TOOLS FOR FORMING SEMICONDUCTOR DEVICES
Publication number
20240038553
Publication date
Feb 1, 2024
Applied Materials, Inc.
Benjamin Colombeau
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE FOR ETCHING THE PERIPHERY EDGE OF A SUBSTRATE
Publication number
20230268221
Publication date
Aug 24, 2023
DEVICEENG CO., LTD
Taek Youb LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Contact Conductive Feature Formation and Structure
Publication number
20230268228
Publication date
Aug 24, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Ken-Yu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER CLEANING APPARATUS AND WAFER CLEANING METHOD USING THE SAME
Publication number
20230249230
Publication date
Aug 10, 2023
Samsung Electronics Co., Ltd.
Seung Min SHIN
B08 - CLEANING
Information
Patent Application
CHEMICAL PLANARIZATION
Publication number
20230143013
Publication date
May 11, 2023
CHEMPOWER CORPORATION
Sudhanshu Misra
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
SEMICONDUCTOR EDGE PROCESSING APPARATUS AND METHODS
Publication number
20230135250
Publication date
May 4, 2023
Huaying Research Co., Ltd.
Sophia Ziying WEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TWO-STEP DECAPSULATION TECHNIQUE FOR SEMICONDUCTOR PACKAGE HAVING S...
Publication number
20230138508
Publication date
May 4, 2023
Silicon Laboratories Inc.
Erwin Hendarto
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20230094318
Publication date
Mar 30, 2023
SCREEN Holdings Co., Ltd.
Yosuke YASUTAKE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING APPARATUS AND ETCHING METHOD
Publication number
20230091900
Publication date
Mar 23, 2023
Kabushiki Kaisha Toshiba
Takayuki TAJIMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF PROCESSING OBJECT
Publication number
20230092336
Publication date
Mar 23, 2023
KIOXIA Corporation
Shinsuke MURAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR STRUCTURE
Publication number
20230079234
Publication date
Mar 16, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC
Jinghao WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING CONDITION SPECIFYING METHOD, SUBSTRATE PROCESSING METHOD...
Publication number
20230053059
Publication date
Feb 16, 2023
SCREEN Holdings Co., Ltd.
Dai INAGI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE
Publication number
20230039663
Publication date
Feb 9, 2023
SEMES CO., LTD.
JEE YOUNG LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING SAME
Publication number
20230019366
Publication date
Jan 19, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Haibo CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING APPARATUS AND METHOD OF CONTROLLING SAME
Publication number
20230011890
Publication date
Jan 12, 2023
ZEUS CO., LTD.
Seung Hoon LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SLURRY DISTRIBUTION DEVICE FOR CHEMICAL MECHANICAL POLISHING
Publication number
20220402096
Publication date
Dec 22, 2022
Applied Materials, Inc.
Yen-Chu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20220384471
Publication date
Dec 1, 2022
KIOXIA Corporation
Yusuke Shima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHEMICAL LIQUID PREPARATION DEVICE, AND SUBSTRATE PROCESSING DEVICE
Publication number
20220347641
Publication date
Nov 3, 2022
SCREEN Holdings Co., Ltd.
Hajime NISHIDE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Devices and Methods of Manufacturing
Publication number
20220301897
Publication date
Sep 22, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Jhon Jhy Liaw
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR ANALYZING A SEMICONDUCTOR DEVICE
Publication number
20220277975
Publication date
Sep 1, 2022
SK HYNIX INC.
Jin Hee HAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dynamically Adjusted Purge Timing In Wet Atomic Layer Etching
Publication number
20220254646
Publication date
Aug 11, 2022
TOKYO ELECTRON LIMITED
Jacques Faguet
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF CONTROLLING OXYGEN VACANCY CONCENTRATION IN A SEMICONDUCT...
Publication number
20220231171
Publication date
Jul 21, 2022
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
Edmund G. Seebauer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CHEMICAL-RESISTANT PROTECTIVE FILM FORMING COMPOSITION CONTAINING H...
Publication number
20220204686
Publication date
Jun 30, 2022
NISSAN CHEMICAL CORPORATION
Shigetaka OTAGIRI
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
Implantation Enabled Precisely Controlled Source And Drain Etch Depth
Publication number
20220199802
Publication date
Jun 23, 2022
Applied Materials, Inc.
Qintao Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING DEVICE AND ETCHING METHOD THEREOF
Publication number
20220189796
Publication date
Jun 16, 2022
ZEUS CO., LTD.
Seung Hoon LEE
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20220181171
Publication date
Jun 9, 2022
KIOXIA Corporation
Yoshihiro UOZUMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20220139733
Publication date
May 5, 2022
SCREEN Holdings Co., Ltd.
Tomohiro TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LARGE AREA METROLOGY AND PROCESS CONTROL FOR ANISOTROPIC CHEMICAL E...
Publication number
20220139717
Publication date
May 5, 2022
Board of Regents, The University of Texas System
Sidlgata V. Sreenivasan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD FOR INTEGRATING GATE DIELECTRIC LAYERS OF DIFF...
Publication number
20220139711
Publication date
May 5, 2022
Shanghai Huali Integrated Circuit Corporation
Lian LU
H01 - BASIC ELECTRIC ELEMENTS