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Photography
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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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Photomechanical
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G03F7/167
from the gas phase, by plasma deposition
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last 30 patents
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Patent Grant
Hardmask composition and method of forming patterns
Patent number
11,932,715
Issue date
Mar 19, 2024
Samsung SDI Co., Ltd.
Donghoon Won
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Manufacturing method of semiconductor chip, and kit
Patent number
11,914,300
Issue date
Feb 27, 2024
FUJIFILM Corporation
Tetsuya Kamimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deposition of semiconductor integration films
Patent number
11,886,120
Issue date
Jan 30, 2024
Applied Materials, Inc.
Lakmal Charidu Kalutarage
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Imprint compositions with passivated nanoparticles and materials an...
Patent number
11,868,043
Issue date
Jan 9, 2024
Applied Materials, Inc.
Amita Joshi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Organotin oxide hydroxide patterning compositions, precursors, and...
Patent number
11,809,081
Issue date
Nov 7, 2023
Inpria Corporation
Stephen T. Meyers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Organotin oxide hydroxide patterning compositions, precursors, and...
Patent number
11,754,924
Issue date
Sep 12, 2023
Inpria Corporation
Stephen T. Meyers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photoresist and method of formation and use
Patent number
11,650,500
Issue date
May 16, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Keng-Chu Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Organometallic compounds and purification of such organometallic co...
Patent number
11,643,422
Issue date
May 9, 2023
SEASTAR CHEMICALS ULC
Rajesh Odedra
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
High-resolution shadow masks
Patent number
11,638,388
Issue date
Apr 25, 2023
The Hong Kong University of Science and Technology
Shoucheng Dong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing metal wire and metal wire grid, wire grid p...
Patent number
11,619,773
Issue date
Apr 4, 2023
BOE Technology Group Co., Ltd.
Shuilang Dong
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Low-noise biomolecular sensors
Patent number
11,604,183
Issue date
Mar 14, 2023
Roche Sequencing Solutions, Inc.
Chao Wang
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Organotin oxide hydroxide patterning compositions, precursors, and...
Patent number
11,537,048
Issue date
Dec 27, 2022
Inpria Corporation
Stephen T. Meyers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing method using multiline patterning
Patent number
11,515,160
Issue date
Nov 29, 2022
Tokyo Electron Limited
Akiteru Ko
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process for plasmonic-based high resolution color printing
Patent number
11,513,438
Issue date
Nov 29, 2022
Agency for Science, Technology and Research
Joel Kwang Wei Yang
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method and precursors for producing oxostannate rich films
Patent number
11,459,656
Issue date
Oct 4, 2022
Gelest, Inc.
Barry C. Arkles
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-level substrate coating film-forming composition containing p...
Patent number
11,385,546
Issue date
Jul 12, 2022
NISSAN CHEMICAL CORPORATION
Takafumi Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Underlayer for photoresist adhesion and dose reduction
Patent number
11,314,168
Issue date
Apr 26, 2022
Lam Research Corporation
Samantha S. H. Tan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing semiconductor device and semiconductor manu...
Patent number
11,217,431
Issue date
Jan 4, 2022
Kioxia Corporation
Ryuichi Saito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum-integrated hardmask processes and apparatus
Patent number
11,209,729
Issue date
Dec 28, 2021
Lam Research Corporation
Jeffrey Marks
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment apparatus, substrate treatment method, and comp...
Patent number
11,126,086
Issue date
Sep 21, 2021
Tokyo Electron Limited
Teruhiko Kodama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method of semiconductor chip, and kit
Patent number
10,942,455
Issue date
Mar 9, 2021
FUJIFILM Corporation
Tetsuya Kamimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of sequential infiltration synthesis treatment of infiltrate...
Patent number
10,928,731
Issue date
Feb 23, 2021
ASM IP Holding B.V.
Krzysztof Kachel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imprinting method and apparatus
Patent number
10,895,806
Issue date
Jan 19, 2021
Canon Kabushiki Kaisha
Mehul N. Patel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing lithography template
Patent number
10,883,172
Issue date
Jan 5, 2021
Kokusai Electric Corporation
Naofumi Ohashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum-integrated hardmask processes and apparatus
Patent number
10,831,096
Issue date
Nov 10, 2020
Lam Research Corporation
Jeffrey Marks
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Process for plasmonic-based high resolution color printing
Patent number
10,831,097
Issue date
Nov 10, 2020
Agency for Science, Technology and Research
Joel Kwang Wei Yang
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Back-side friction reduction of a substrate
Patent number
10,784,100
Issue date
Sep 22, 2020
Tokyo Electron Limited
Hoyoung Kang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Organotin oxide hydroxide patterning compositions, precursors, and...
Patent number
10,775,696
Issue date
Sep 15, 2020
Inpria Corporation
Stephen T. Meyers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Photoresist and method of formation and use
Patent number
10,761,427
Issue date
Sep 1, 2020
Taiwan Semiconductor Manufacturing Company, Ltd.
Keng-Chu Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Organotin oxide hydroxide patterning compositions, precursors, and...
Patent number
10,732,505
Issue date
Aug 4, 2020
Inpria Corporation
Stephen T. Meyers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
INTEGRATED SOLUTION WITH LOW TEMPERATURE DRY DEVELOP FOR EUV PHOTOR...
Publication number
20240160100
Publication date
May 16, 2024
Applied Materials, Inc.
Tzu Shun Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR CHIP, AND KIT
Publication number
20240152055
Publication date
May 9, 2024
FUJIFILM CORPORATION
Tetsuya KAMIMURA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...
Publication number
20240145272
Publication date
May 2, 2024
LAM RESEARCH CORPORATION
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HALOGEN-AND ALIPHATIC-CONTAINING ORGANOTIN PHOTORESISTS AND METHODS...
Publication number
20240134274
Publication date
Apr 25, 2024
LAM RESEARCH CORPORATION
Timothy William Weidman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FORMING GRATING DEVICE
Publication number
20240111078
Publication date
Apr 4, 2024
VisEra Technologies Company Limited
Chun-Wei HUANG
G02 - OPTICS
Information
Patent Application
PHOTO TREATMENT DEVICE
Publication number
20240103371
Publication date
Mar 28, 2024
Ushio Denki Kabushiki Kaisha
Akihiro Shimamoto
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMPRINT COMPOSITIONS WITH PASSIVATED NANOPARTICLES AND MATERIALS AN...
Publication number
20240094630
Publication date
Mar 21, 2024
Applied Materials, Inc.
Amita JOSHI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF FORMING A MOISTURE BARRIER ON PHOTOSENSITIVE ORGANOMETALL...
Publication number
20240085793
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Kandabara Tapily
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR SUBSTRATE AND COMPOSITION
Publication number
20240021429
Publication date
Jan 18, 2024
JSR Corporation
Ken MARUYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DE...
Publication number
20230418156
Publication date
Dec 28, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Hui-Chun LEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND APPARATUS FOR FORMING A PATTERNED LAYER OF MATERIAL
Publication number
20230350301
Publication date
Nov 2, 2023
ASML NETHERLANDS B.V.
Evgenia KURGANOVA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
GAS-PHASE METHOD OF FORMING RADIATION-SENSITIVE PATTERNABLE MATERIAL
Publication number
20230324803
Publication date
Oct 12, 2023
ASM IP HOLDING, B.V.
Jan Deckers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF FORMING PHOTO-SENSITIVE HYBRID FILMS
Publication number
20230314946
Publication date
Oct 5, 2023
LAM RESEARCH CORPORATION
Eric Calvin Hansen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASK PROCESSING METHOD AND APPARATUS
Publication number
20230314966
Publication date
Oct 5, 2023
TES CO., LTD.
Hong-Jae LEE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...
Publication number
20230290657
Publication date
Sep 14, 2023
LAM RESEARCH CORPORATION
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTORESISTS CONTAINING TANTALUM
Publication number
20230288798
Publication date
Sep 14, 2023
LAM RESEARCH CORPORATION
Eric Calvin Hansen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING A STRUCTURE COMPRISING A PHOTORESIST UNDERLAYER
Publication number
20230288810
Publication date
Sep 14, 2023
ASM IP HOLDING B.V.
Fanyong Ran
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS AND METHOD FOR TREATING SUBSTRATE
Publication number
20230288811
Publication date
Sep 14, 2023
SEMES CO, LTD.
Moon Hyung BAE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FLUOROALKYL TRIS(DIALKYLAMINO) TIN COMPOUNDS AND METHODS FOR PREPAR...
Publication number
20230279546
Publication date
Sep 7, 2023
Gelest, Inc.
Barry C. ARKLES
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COMPOSITION FOR FORMING ORGANIC FILM, PATTERNING PROCESS, AND COMPOUND
Publication number
20230280655
Publication date
Sep 7, 2023
Shin-Etsu Chemical Co., Ltd.
Daisuke KORI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
Publication number
20230273516
Publication date
Aug 31, 2023
LAM RESEARCH CORPORATION
Jeffrey Marks
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
Publication number
20230266662
Publication date
Aug 24, 2023
LAM RESEARCH CORPORATION
Jeffrey Marks
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PHOTORESISTS FROM SN(II) PRECURSORS
Publication number
20230266664
Publication date
Aug 24, 2023
LAM RESEARCH CORPORATION
Eric Calvin Hansen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHARACTERIZATION OF PHOTOSENSITIVE MATERIALS
Publication number
20230259035
Publication date
Aug 17, 2023
Applied Materials, Inc.
Paola DE CECCO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DRY DEPOSITED PHOTORESISTS WITH ORGANIC CO-REACTANTS
Publication number
20230259025
Publication date
Aug 17, 2023
LAM RESEARCH CORPORATION
Eric Calvin Hansen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Photoresist and Method of Formation and Use
Publication number
20230251571
Publication date
Aug 10, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Keng-Chu Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SURFACE MODIFICATION FOR METAL-CONTAINING PHOTORESIST DEPOSITION
Publication number
20230230811
Publication date
Jul 20, 2023
LAM RESEARCH CORPORATION
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROCESSING PHOTORESIST LAYER, AND PHOTORESIST LAYER
Publication number
20230185194
Publication date
Jun 15, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC
Kanyu CAO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR DECORATING A SUBSTRATE
Publication number
20230126038
Publication date
Apr 27, 2023
COMADUR S.A.
Jan LINTYMER
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND PRECURSORS FOR PRODUCING OXOSTANNATE RICH FILMS
Publication number
20230095666
Publication date
Mar 30, 2023
Gelest, Inc.
Barry C. ARKLES
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...