Growing or depositing of a covering layer

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B81C2203/0136

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2203/00Forming micro-structural systems

Current Industry

B81C2203/0136Growing or depositing of a covering layer

Industries

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Patents Grantslast 30 patents

Information Patent Grant
MEMS encapsulation employing lower pressure and higher pressure dep...
- Patent number 11,834,331
- Issue date Dec 5, 2023
- Texas Instruments Incorporated
- Scott Robert Summerfelt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Outgassing material coated cavity for a micro-electro mechanical sy...
- Patent number 11,827,513
- Issue date Nov 28, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device including a microelectromechanical structure a...
- Patent number 11,691,870
- Issue date Jul 4, 2023
- STMicroelectronics S.r.l.
- Alessandro Tocchio
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device including a microelectromechanical structure a...
- Patent number 11,667,519
- Issue date Jun 6, 2023
- STMicroelectronics S.r.l.
- Alessandro Tocchio
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing micromechanical diaphragm sensors
- Patent number 11,519,803
- Issue date Dec 6, 2022
- Robert Bosch GmbH
- Arne Dannenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Structures for packaging stress-sensitive micro-electro-mechanical...
- Patent number 11,498,831
- Issue date Nov 15, 2022
- Texas Instruments Incorporated
- Kurt Peter Wachtler
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Water proofing and water detection schemes for MEMS-based environme...
- Patent number 11,305,984
- Issue date Apr 19, 2022
- Apple Inc.
- Krishna Prasad Vummidi Murali
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Component with a thin-layer covering and method for its production
- Patent number 11,296,673
- Issue date Apr 5, 2022
- Snaptrack, Inc.
- Thomas Metzger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system cavity packaging
- Patent number 11,203,524
- Issue date Dec 21, 2021
- Texas Instruments Incorporated
- Jose Antonio Martinez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Outgassing material coated cavity for a micro-electro mechanical sy...
- Patent number 11,180,363
- Issue date Nov 23, 2021
- Taiwan Semiconductor Manufacturing Company Limited
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Covering for a component and method for producing a covering for a...
- Patent number 11,180,364
- Issue date Nov 23, 2021
- Snaptrack, Inc.
- Ansgar Schäufele
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,174,160
- Issue date Nov 16, 2021
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nano-electromechanical system (NEMS) device structure and method fo...
- Patent number 11,167,984
- Issue date Nov 9, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsin-Ping Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronic component and module including the same
- Patent number 11,139,795
- Issue date Oct 5, 2021
- Murata Manufacturing Co., Ltd.
- Koichiro Kawasaki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method for a micromechanical window structure and cor...
- Patent number 11,124,412
- Issue date Sep 21, 2021
- Robert Bosch GmbH
- Joerg Muchow
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity mems and related structures, methods of manufacture a...
- Patent number 11,111,138
- Issue date Sep 7, 2021
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,111,139
- Issue date Sep 7, 2021
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,104,572
- Issue date Aug 31, 2021
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Through-substrate conductor support
- Patent number 11,084,717
- Issue date Aug 10, 2021
- Texas Instruments Incorporated
- Virgil Cotoco Ararao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 11,021,364
- Issue date Jun 1, 2021
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for fabricating a device for detecting electromagnetic radi...
- Patent number 10,981,782
- Issue date Apr 20, 2021
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Jean-Jacques Yon
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wafer-level fan-out package with enhanced performance
- Patent number 10,964,554
- Issue date Mar 30, 2021
- Qorvo US, Inc.
- Jonathan Hale Hammond
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device including a microelectromechanical structure a...
- Patent number 10,934,158
- Issue date Mar 2, 2021
- STMicroelectronics S.r.l.
- Alessandro Tocchio
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing doubly re-entrant microstructures
- Patent number 10,927,005
- Issue date Feb 23, 2021
- The Regents of the University of California
- Muchen Xu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,906,803
- Issue date Feb 2, 2021
- International Business Machines Corporation
- Russell T. Herrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a micromechanical element
- Patent number 10,889,491
- Issue date Jan 12, 2021
- Robert Bosch GmbH
- Markus Kuhnke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor structures provided within a cavity and related desig...
- Patent number 10,882,736
- Issue date Jan 5, 2021
- International Business Machines Corporation
- Jeffrey C. Maling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Forming an offset in an interdigitated capacitor of a microelectrom...
- Patent number 10,843,915
- Issue date Nov 24, 2020
- Infineon Dresdon GmbH & Co. KG
- Sebastian Pregl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
- Patent number 10,766,765
- Issue date Sep 8, 2020
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing planar thin packages
- Patent number 10,752,499
- Issue date Aug 25, 2020
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Christof Landesberger
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR STRUCTURE AND FORMATION THEREOF
- Publication number 20240391761
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Kai-Lan CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Packaging of microelectromechanical system devices
- Publication number 20240391762
- Publication date Nov 28, 2024
- Teknologian Tutkimuskeskus VTT Oy
- Jae-Wung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OUTGASSING MATERIAL COATED CAVITY FOR A MICRO-ELECTRO MECHANICAL SY...
- Publication number 20240367964
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OUTGASSING MATERIAL COATED CAVITY FOR A MICRO-ELECTRO MECHANICAL SY...
- Publication number 20230365398
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ATOMIC-SMOOTH DEVICE WITH MICROSTRUCTURE, AND METHOD FOR PREPARING...
- Publication number 20230271825
- Publication date Aug 31, 2023
- RESEARCH INSTITUTE OF TSINGHUA UNIVERSITY IN SHENZHEN
- Quanshui ZHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPACT, EASY-TO-PRODUCE MEMS PACKAGE WITH IMPROVED PROTECTIVE PROP...
- Publication number 20230242394
- Publication date Aug 3, 2023
- HAHN-SCHICKARD-GESELLSCHAFT FUR ANGEWANDTE FORSCHUNG E.V.
- Achim Bittner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND FORMATION THEREOF
- Publication number 20230067539
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Kai-Lan CHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ENCAPSULATION EMPLOYING LOWER PRESSURE AND HIGHER PRESSURE DEP...
- Publication number 20220324702
- Publication date Oct 13, 2022
- TEXAS INSTRUMENTS INCORPORATED
- Scott Robert SUMMERFELT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OUTGASSING MATERIAL COATED CAVITY FOR A MICRO-ELECTRO MECHANICAL SY...
- Publication number 20220024756
- Publication date Jan 27, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THROUGH-SUBSTRATE CONDUCTOR SUPPORT
- Publication number 20210323816
- Publication date Oct 21, 2021
- TEXAS INSTRUMENTS INCORPORATED
- Virgil Cotoco Ararao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OUTGASSING MATERIAL COATED CAVITY FOR A MICRO-ELECTRO MECHANICAL SY...
- Publication number 20210246014
- Publication date Aug 12, 2021
- Taiwan Semiconductor Manufacturing Company Limited
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE INCLUDING A MICROELECTROMECHANICAL STRUCTURE A...
- Publication number 20210155472
- Publication date May 27, 2021
- STMicroelectronics S.r.l.
- Alessandro Tocchio
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NANO-ELECTROMECHANICAL SYSTEM (NEMS) DEVICE STRUCTURE AND METHOD FO...
- Publication number 20200299129
- Publication date Sep 24, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsin-Ping CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WATER PROOFING AND WATER DETECTION SCHEMES FOR MEMS-BASED ENVIRONME...
- Publication number 20200223686
- Publication date Jul 16, 2020
- Apple Inc.
- Krishna Prasad VUMMIDI MURALI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MICROMECHANICAL DIAPHRAGM SENSORS
- Publication number 20200209089
- Publication date Jul 2, 2020
- ROBERT BOSCH GmbH
- Arne Dannenberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM CAVITY PACKAGING
- Publication number 20200189910
- Publication date Jun 18, 2020
- TEXAS INSTRUMENTS INCORPORATED
- Jose Antonio Martinez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR FABRICATING A DEVICE FOR DETECTING ELECTROMAGNETIC RADI...
- Publication number 20200115225
- Publication date Apr 16, 2020
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Jean-Jacques YON
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WAFER-LEVEL FAN-OUT PACKAGE WITH ENHANCED PERFORMANCE
- Publication number 20200118838
- Publication date Apr 16, 2020
- Qorvo US, Inc.
- Jonathan Hale Hammond
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC COMPONENT AND MODULE INCLUDING THE SAME
- Publication number 20200052676
- Publication date Feb 13, 2020
- Murata Manufacturing Co., Ltd.
- Koichiro KAWASAKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20200024127
- Publication date Jan 23, 2020
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20200017355
- Publication date Jan 16, 2020
- International Business Machines Corporation
- Anthony K. Stamper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20200017356
- Publication date Jan 16, 2020
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THROUGH-SUBSTRATE CONDUCTOR SUPPORT
- Publication number 20190382262
- Publication date Dec 19, 2019
- TEXAS INSTRUMENTS INCORPORATED
- Virgil Cotoco Ararao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20190315619
- Publication date Oct 17, 2019
- International Business Machines Corporation
- Russell T. HERRIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20190248644
- Publication date Aug 15, 2019
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORMING AN OFFSET IN AN INTERDIGITATED CAPACITOR OF A MICROELECTROM...
- Publication number 20190233276
- Publication date Aug 1, 2019
- Infineon Dresden GmbH & Co. KG
- Sebastian PREGL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20190233277
- Publication date Aug 1, 2019
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPONENT WITH A THIN-LAYER COVERING AND METHOD FOR ITS PRODUCTION
- Publication number 20190238113
- Publication date Aug 1, 2019
- SnapTrack, Inc.
- Roland ROSEZIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPONENT WITH A THIN-LAYER COVERING AND METHOD FOR ITS PRODUCTION
- Publication number 20190229703
- Publication date Jul 25, 2019
- SnapTrack, Inc.
- Thomas METZGER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
- Publication number 20190169017
- Publication date Jun 6, 2019
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Growing or depositing of a covering layer

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS encapsulation employing lower pressure and higher pressure dep...

Outgassing material coated cavity for a micro-electro mechanical sy...

Semiconductor device including a microelectromechanical structure a...

Semiconductor device including a microelectromechanical structure a...

Method for manufacturing micromechanical diaphragm sensors

Structures for packaging stress-sensitive micro-electro-mechanical...

Water proofing and water detection schemes for MEMS-based environme...

Component with a thin-layer covering and method for its production

Microelectromechanical system cavity packaging

Outgassing material coated cavity for a micro-electro mechanical sy...

Covering for a component and method for producing a covering for a...

Planar cavity MEMS and related structures, methods of manufacture a...

Nano-electromechanical system (NEMS) device structure and method fo...

Electronic component and module including the same

Manufacturing method for a micromechanical window structure and cor...

Planar cavity mems and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Planar cavity MEMS and related structures, methods of manufacture a...

Through-substrate conductor support

Planar cavity MEMS and related structures, methods of manufacture a...

Process for fabricating a device for detecting electromagnetic radi...

Wafer-level fan-out package with enhanced performance

Semiconductor device including a microelectromechanical structure a...

Method for manufacturing doubly re-entrant microstructures

Planar cavity MEMS and related structures, methods of manufacture a...

Method for producing a micromechanical element

Semiconductor structures provided within a cavity and related desig...

Forming an offset in an interdigitated capacitor of a microelectrom...

Planar cavity MEMS and related structures, methods of manufacture a...

Method for manufacturing planar thin packages

Patents Applicationslast 30 patents

SEMICONDUCTOR STRUCTURE AND FORMATION THEREOF

Packaging of microelectromechanical system devices

OUTGASSING MATERIAL COATED CAVITY FOR A MICRO-ELECTRO MECHANICAL SY...

OUTGASSING MATERIAL COATED CAVITY FOR A MICRO-ELECTRO MECHANICAL SY...

ATOMIC-SMOOTH DEVICE WITH MICROSTRUCTURE, AND METHOD FOR PREPARING...

COMPACT, EASY-TO-PRODUCE MEMS PACKAGE WITH IMPROVED PROTECTIVE PROP...

SEMICONDUCTOR STRUCTURE AND FORMATION THEREOF

MEMS ENCAPSULATION EMPLOYING LOWER PRESSURE AND HIGHER PRESSURE DEP...

OUTGASSING MATERIAL COATED CAVITY FOR A MICRO-ELECTRO MECHANICAL SY...

THROUGH-SUBSTRATE CONDUCTOR SUPPORT

OUTGASSING MATERIAL COATED CAVITY FOR A MICRO-ELECTRO MECHANICAL SY...

SEMICONDUCTOR DEVICE INCLUDING A MICROELECTROMECHANICAL STRUCTURE A...

NANO-ELECTROMECHANICAL SYSTEM (NEMS) DEVICE STRUCTURE AND METHOD FO...

WATER PROOFING AND WATER DETECTION SCHEMES FOR MEMS-BASED ENVIRONME...

METHOD FOR MANUFACTURING MICROMECHANICAL DIAPHRAGM SENSORS

MICROELECTROMECHANICAL SYSTEM CAVITY PACKAGING

PROCESS FOR FABRICATING A DEVICE FOR DETECTING ELECTROMAGNETIC RADI...

WAFER-LEVEL FAN-OUT PACKAGE WITH ENHANCED PERFORMANCE

ELECTRONIC COMPONENT AND MODULE INCLUDING THE SAME

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

THROUGH-SUBSTRATE CONDUCTOR SUPPORT

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

FORMING AN OFFSET IN AN INTERDIGITATED CAPACITOR OF A MICROELECTROM...

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...

COMPONENT WITH A THIN-LAYER COVERING AND METHOD FOR ITS PRODUCTION

COMPONENT WITH A THIN-LAYER COVERING AND METHOD FOR ITS PRODUCTION

PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...