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CAPACITIVE MICRO STRUCTURE
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Publication number 20200180943
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Publication date Jun 11, 2020
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Teknologian Tutkimuskeskus VTT Oy
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Hannu KATTELUS
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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IMPROVED CONTACT IN RF-SWITCH
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Publication number 20180308645
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Publication date Oct 25, 2018
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CAVENDISH KINETICS, INC.
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Robertus Petrus VAN KAMPEN
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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MEMS DEVICE ANCHORING
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Publication number 20140300249
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Publication date Oct 9, 2014
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CAVENDISH KINETICS, INC.
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Robertus Petrus Van Kampen
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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MEMS SWITCH
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Publication number 20140191616
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Publication date Jul 10, 2014
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Fujitsu Limited
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OSAMU TOYODA
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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MEMS ELECTROSTATIC ACTUATOR
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Publication number 20140076697
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Publication date Mar 20, 2014
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TEXAS INSTRUMENTS INCORPORATED
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Arun K. Gupta
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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ELECTROSTATIC ACTUATOR
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Publication number 20120235537
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Publication date Sep 20, 2012
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Kabushiki Kaisha Toshiba
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Takayuki MASUNAGA
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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MEMS DEVICES
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Publication number 20120043188
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Publication date Feb 23, 2012
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NXP B.V.
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Martijn Goossens
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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MEMS DEVICES
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Publication number 20110051312
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Publication date Mar 3, 2011
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Peter G. Steeneken
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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