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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B2201/00
Specific applications of micro-electromechanical systems
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B81B2201/014
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Patents Grants
last 30 patents
Information
Patent Grant
MEMS bridge devices and methods of manufacture thereof
Patent number
11,834,327
Issue date
Dec 5, 2023
SOFANT TECHNOLOGIES LTD
Nakul Haridas
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Use of a reactive, or reducing gas as a method to increase contact...
Patent number
11,111,136
Issue date
Sep 7, 2021
International Business Machines Corporation
John M. Cotte
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Configurable micro-electro-mechanical systems (MEMS) transfer switc...
Patent number
10,984,966
Issue date
Apr 20, 2021
Lockheed Martin Corporation
Lowell Kent Sherman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Discharge circuits, devices and methods
Patent number
10,865,101
Issue date
Dec 15, 2020
Skyworks Solutions, Inc.
Jerod F. Mason
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
Patent number
10,766,765
Issue date
Sep 8, 2020
International Business Machines Corporation
Christopher V. Jahnes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Three dimensional microstructures and fabrication process
Patent number
10,730,748
Issue date
Aug 4, 2020
The Regents of the University of Michigan
Khalil Najafi
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Methods for creating fluidic cavities by transmembrane etching thro...
Patent number
10,668,436
Issue date
Jun 2, 2020
SiMPore Inc.
Christopher C. Striemer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Active opening MEMS switch device
Patent number
10,640,363
Issue date
May 5, 2020
Analog Devices Global
Padraig Fitzgerald
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
Patent number
10,640,364
Issue date
May 5, 2020
International Business Machines Corporation
Christopher V. Jahnes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
Patent number
10,640,365
Issue date
May 5, 2020
International Business Machines Corporation
Christopher V. Jahnes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Configurable micro-electro-mechanical systems (MEMS) transfer switc...
Patent number
10,643,800
Issue date
May 5, 2020
Lockheed Martin Corporation
Lowell Kent Sherman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
Patent number
10,618,802
Issue date
Apr 14, 2020
International Business Machines Corporation
Anthony K. Stamper
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
Patent number
10,618,803
Issue date
Apr 14, 2020
International Business Machines Corporation
Christopher V. Jahnes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
Patent number
10,584,026
Issue date
Mar 10, 2020
International Business Machines Corporation
Christopher V. Jahnes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Infrared sensor design using an epoxy film as an infrared absorptio...
Patent number
10,570,006
Issue date
Feb 25, 2020
Texas Instruments Incorporated
Ricky Alan Jackson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS switch and electronic device
Patent number
10,508,025
Issue date
Dec 17, 2019
TDK Corporation
Jotaro Akiyama
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS sensor with high voltage switch
Patent number
10,427,930
Issue date
Oct 1, 2019
Invensense, Inc.
Matthew Thompson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
Patent number
10,414,646
Issue date
Sep 17, 2019
International Business Machines Corporation
Russell T. Herrin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical systems (MEMS) terminal structure of board...
Patent number
10,418,735
Issue date
Sep 17, 2019
Advanced-Connectek Inc.
Kuo-Ching Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
Patent number
10,315,913
Issue date
Jun 11, 2019
International Business Machines Corporation
Christopher V. Jahnes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Use of a reactive, or reducing gas as a method to increase contact...
Patent number
10,308,506
Issue date
Jun 4, 2019
International Business Machines Corporation
John M. Cotte
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
Patent number
10,308,501
Issue date
Jun 4, 2019
International Business Machines Corporation
Christopher V. Jahnes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
NEMS devices with series ferroelectric negative capacitor
Patent number
10,312,342
Issue date
Jun 4, 2019
Purdue Research Foundation
Muhammad Ashraful Alam
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Vanishing via for hardware IP protection from reverse engineering
Patent number
10,283,459
Issue date
May 7, 2019
University of Florida Research Foundation, Incorporated
Swarup Bhunia
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
Patent number
10,246,319
Issue date
Apr 2, 2019
International Business Machines Corporation
Christopher V. Jahnes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
Patent number
10,214,416
Issue date
Feb 26, 2019
International Business Machines Corporation
Christopher V. Jahnes
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
Patent number
10,173,889
Issue date
Jan 8, 2019
GLOBALFOUNDRIES Inc.
Russell T. Herrin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
Patent number
10,093,537
Issue date
Oct 9, 2018
International Business Machines Corporation
Russell T. Herrin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Planar cavity MEMS and related structures, methods of manufacture a...
Patent number
10,081,540
Issue date
Sep 25, 2018
International Business Machines Corporation
Anthony K. Stamper
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro normally-closed structure and method for manufacturing the same
Patent number
10,077,185
Issue date
Sep 18, 2018
National Tsing Hua University
Wei-Cheng Lai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
ELECTRONIC DEVICE AND METHOD OF FABRICATING THE SAME
Publication number
20240270566
Publication date
Aug 15, 2024
BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
Hao YAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Encapsulated MEMS Switching Element, Device and Production Method
Publication number
20240150166
Publication date
May 9, 2024
SIEMENS AKTIENGESELLSCHAFT
Oliver Raab
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING AT LEAST ONE FIRST AND ONE SECOND MICROMIRROR...
Publication number
20230066345
Publication date
Mar 2, 2023
ROBERT BOSCH GmbH
Heiko Stahl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Three Dimensional Microstructures And Fabrication Process
Publication number
20200216311
Publication date
Jul 9, 2020
The Regents of the University of Michigan
Khalil NAJAFI
B22 - CASTING POWDER METALLURGY
Information
Patent Application
MEMS DEVICES AND CIRCUITS INCLUDING SAME
Publication number
20200102213
Publication date
Apr 2, 2020
SOFANT TECHNOLOGIES LTD.
Nakul HARIDAS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
Publication number
20200024127
Publication date
Jan 23, 2020
International Business Machines Corporation
Christopher V. JAHNES
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
Publication number
20200017355
Publication date
Jan 16, 2020
International Business Machines Corporation
Anthony K. Stamper
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
Publication number
20200017356
Publication date
Jan 16, 2020
International Business Machines Corporation
Christopher V. JAHNES
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
Publication number
20190315619
Publication date
Oct 17, 2019
International Business Machines Corporation
Russell T. HERRIN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
Publication number
20190248644
Publication date
Aug 15, 2019
International Business Machines Corporation
Christopher V. JAHNES
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
Publication number
20190233277
Publication date
Aug 1, 2019
International Business Machines Corporation
Christopher V. JAHNES
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
Publication number
20190169017
Publication date
Jun 6, 2019
International Business Machines Corporation
Christopher V. JAHNES
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
Publication number
20190152767
Publication date
May 23, 2019
International Business Machines Corporation
Christopher V. JAHNES
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DISCHARGE CIRCUITS, DEVICES AND METHODS
Publication number
20190144266
Publication date
May 16, 2019
SKYWORKS SOLUTIONS, INC.
Jerod F. MASON
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SWITCH AND ELECTRONIC DEVICE
Publication number
20190077655
Publication date
Mar 14, 2019
TDK Corporation
Jotaro AKIYAMA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) TERMINAL STRUCTURE OF BOARD...
Publication number
20180309216
Publication date
Oct 25, 2018
ADVANCED CONNECTEK INC.
Kuo-Ching Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
Publication number
20180257931
Publication date
Sep 13, 2018
International Business Machines Corporation
Christopher V. JAHNES
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
Publication number
20180244514
Publication date
Aug 30, 2018
International Business Machines Corporation
Christopher V. JAHNES
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
VANISHING VIA FOR HARDWARE IP PROTECTION FROM REVERSE ENGINEERING
Publication number
20180197828
Publication date
Jul 12, 2018
University of Florida Research Foundation, Incorporated
Swarup Bhunia
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BONDLINE FOR MM-WAVE APPLICATIONS
Publication number
20180155184
Publication date
Jun 7, 2018
Innovative Micro Technology
Christopher S. GUDEMAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
Publication number
20180072568
Publication date
Mar 15, 2018
International Business Machines Corporation
Anthony K. Stamper
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
Publication number
20180072566
Publication date
Mar 15, 2018
International Business Machines Corporation
Christopher V. JAHNES
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
Publication number
20180072567
Publication date
Mar 15, 2018
International Business Machines Corporation
Christopher V. JAHNES
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
Publication number
20180057357
Publication date
Mar 1, 2018
International Business Machines Corporation
Russell T. HERRIN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
Publication number
20180050903
Publication date
Feb 22, 2018
International Business Machines Corporation
Russell T. HERRIN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
NEMS DEVICES WITH SERIES FERROELECTRIC NEGATIVE CAPACITOR
Publication number
20180012972
Publication date
Jan 11, 2018
Purdue Research Foundation
Muhammad Ashraful Alam
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
Publication number
20180009658
Publication date
Jan 11, 2018
International Business Machines Corporation
Christopher V. JAHNES
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PIEZOELECTRIC PACKAGE-INTEGRATED SWITCHING DEVICES
Publication number
20170283249
Publication date
Oct 5, 2017
Intel Corporation
Georgios C. DOGIAMIS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACTIVE OPENING MEMS SWITCH DEVICE
Publication number
20170225942
Publication date
Aug 10, 2017
ANALOG DEVICES GLOBAL
Padraig Fitzgerald
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PLANAR CAVITY MEMS AND RELATED STRUCTURES, METHODS OF MANUFACTURE A...
Publication number
20170158490
Publication date
Jun 8, 2017
International Business Machines Corporation
Christopher V. JAHNES
B81 - MICRO-STRUCTURAL TECHNOLOGY