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B81C1/00087

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00087Holes

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Microfluidic valve and method of making same
- Patent number 12,128,405
- Issue date Oct 29, 2024
- HandyLab, Inc.
- Kalyan Handique
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic cartridge and method of making same
- Patent number 12,030,050
- Issue date Jul 9, 2024
- HandyLab, Inc.
- Kalyan Handique
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Deep reactive ion etching process for fluid ejection heads
- Patent number 11,746,005
- Issue date Sep 5, 2023
- FUNAI ELECTRIC CO. LTD
- David L. Bernard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pore formation in a substrate
- Patent number 11,691,872
- Issue date Jul 4, 2023
- Applied Materials, Inc.
- Philip Allan Kraus
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronic package including cavity formed by removal of sacrificia...
- Patent number 11,545,952
- Issue date Jan 3, 2023
- SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.
- Atsushi Takano
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a fluid-ejection device with improved reso...
- Patent number 11,498,335
- Issue date Nov 15, 2022
- STMicroelectronics S.r.l.
- Domenico Giusti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nanopore-forming method, nanopore-forming device and biomolecule me...
- Patent number 11,499,959
- Issue date Nov 15, 2022
- HITACHI HIGH-TECH CORPORATION
- Yoshimitsu Yanagawa
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for producing at least one recess in a material by means of...
- Patent number 11,478,880
- Issue date Oct 25, 2022
- LPKF Laser & Electronics AG
- Roman Ostholt
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
DNA sequencing with stacked nanopores
- Patent number 11,453,911
- Issue date Sep 27, 2022
- International Business Machines Corporation
- Zhenxing Bi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pore formation in a substrate
- Patent number 11,325,827
- Issue date May 10, 2022
- Applied Materials, Inc.
- Philip Allan Kraus
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Use of an uncoupling structure for assembling a component having a...
- Patent number 11,267,697
- Issue date Mar 8, 2022
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Philippe Robert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and method of manufacturing the same
- Patent number 11,259,105
- Issue date Feb 22, 2022
- DB HITEK CO., LTD.
- Jong Won Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Scroll type micro-compressor, and method for machining fixed scroll...
- Patent number 11,078,907
- Issue date Aug 3, 2021
- Beijing University of Chemical Technology
- Duli Yu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method to reduce pore diameter using atomic layer deposition and et...
- Patent number 10,994,991
- Issue date May 4, 2021
- Applied Materials, Inc.
- Joseph R. Johnson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a fluid-ejection device with improved reso...
- Patent number 10,875,307
- Issue date Dec 29, 2020
- STMicroelectronics S.r.l.
- Domenico Giusti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method to create a free-standing membrane for biological applications
- Patent number 10,830,756
- Issue date Nov 10, 2020
- Applied Materials, Inc.
- Ankit Vora
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Controlled fabrication of nanopores in nanometric solid state mater...
- Patent number 10,766,762
- Issue date Sep 8, 2020
- President and Fellows of Harvard College
- Christopher John Russo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pore formation in a substrate
- Patent number 10,752,496
- Issue date Aug 25, 2020
- Applied Materials, Inc.
- Philip Allan Kraus
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing microelectromechanical system structure ha...
- Patent number 10,654,713
- Issue date May 19, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chin-Han Meng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method to reduce pore diameter using atomic layer deposition and et...
- Patent number 10,618,805
- Issue date Apr 14, 2020
- Applied Materials, Inc.
- Joseph R. Johnson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronic package including cavity formed by removal of sacrificia...
- Patent number 10,574,202
- Issue date Feb 25, 2020
- SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.
- Atsushi Takano
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming semiconductor device
- Patent number 10,562,762
- Issue date Feb 18, 2020
- United Microelectronics Corp.
- Feng-Yi Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate structure, semiconductor structure and method for fabrica...
- Patent number 10,508,020
- Issue date Dec 17, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Hao Hung
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nozzle substrate, ink-jet print head, and method for producing nozz...
- Patent number 10,500,857
- Issue date Dec 10, 2019
- Rohm Co., Ltd.
- Nobufumi Matsuo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing membrane device, membrane device, and nanop...
- Patent number 10,416,147
- Issue date Sep 17, 2019
- Hitachi, Ltd.
- Itaru Yanagi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming film and method for manufacturing inkjet print head
- Patent number 10,343,403
- Issue date Jul 9, 2019
- Canon Kabushiki Kaisha
- Atsushi Teranishi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device and method for forming same
- Patent number 10,338,057
- Issue date Jul 2, 2019
- Hitachi, Ltd.
- Itaru Yanagi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing microelectromechanical system structure ha...
- Patent number 10,273,152
- Issue date Apr 30, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chin-Han Meng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a plurality of through-holes in a layer of...
- Patent number 10,207,244
- Issue date Feb 19, 2019
- SmartTip B.V.
- Edin Sarajlic
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nanopore structure, ionic device using nanopore structure and metho...
- Patent number 10,175,222
- Issue date Jan 8, 2019
- Seoul National University R&DB Foundation
- Ki-Bum Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Method for Manufacturing a Microfluidic Device
- Publication number 20230127645
- Publication date Apr 27, 2023
- IMEC vzw
- Simone Severi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LARGE-SCALE PLASMONIC HYBRID FRAMEWORK WITH BUILT-IN NANOHOLE ARRAY...
- Publication number 20230047636
- Publication date Feb 16, 2023
- Purdue Research Foundation
- Haiyan Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROSTATICALLY GATED NANOFLUIDIC MEMBRANES FOR CONTROL OF MOLECU...
- Publication number 20230043407
- Publication date Feb 9, 2023
- The Methodist Hospital System
- Alessandro Grattoni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEEP REACTIVE ION ETCHING PROCESS FOR FLUID EJECTION HEADS
- Publication number 20220281740
- Publication date Sep 8, 2022
- Funai Electric Co., Ltd.
- David L. BERNARD
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHODS FOR DUAL PORE SENSORS
- Publication number 20220242725
- Publication date Aug 4, 2022
- Applied Materials, Inc.
- Joseph R. JOHNSON
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PORE FORMATION IN A SUBSTRATE
- Publication number 20220227622
- Publication date Jul 21, 2022
- Applied Materials, Inc.
- Philip Allan KRAUS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STABLE LIPID BILAYERS ON NANOPORE ARRAYS
- Publication number 20220106187
- Publication date Apr 7, 2022
- Quantapore, Inc.
- Ossama Assad
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Stable Nanopores And Nanopore Arrays For Ionic And Other Measurements
- Publication number 20210318288
- Publication date Oct 14, 2021
- The Trustees of the University of Pennsylvania
- Marija Drndic
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Producing a Sequencing Unit for Sequencing a Biochemical...
- Publication number 20210229982
- Publication date Jul 29, 2021
- ROBERT BOSCH GmbH
- Franz Laermer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A FLUID-EJECTION DEVICE WITH IMPROVED RESO...
- Publication number 20210078331
- Publication date Mar 18, 2021
- STMicroelectronics S.r.l.
- Domenico GIUSTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PORE FORMATION IN A SUBSTRATE
- Publication number 20200361766
- Publication date Nov 19, 2020
- Applied Materials, Inc.
- Philip Allan KRAUS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STABLE LIPID BILAYERS ON NANOPORE ARRAYS
- Publication number 20200198965
- Publication date Jun 25, 2020
- Quantapore, Inc.
- Ossama ASSAD
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD TO REDUCE PORE DIAMETER USING ATOMIC LAYER DEPOSITION AND ET...
- Publication number 20200180950
- Publication date Jun 11, 2020
- Applied Materials, Inc.
- Joseph R. JOHNSON
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SCROLL TYPE MICRO-COMPRESSOR, AND METHOD FOR MACHINING FIXED SCROLL...
- Publication number 20200149530
- Publication date May 14, 2020
- Beijing University of Chemical Technology
- Duli YU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC PACKAGE INCLUDING CAVITY FORMED BY REMOVAL OF SACRIFICIA...
- Publication number 20200153407
- Publication date May 14, 2020
- SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.
- Atsushi Takano
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING AT LEAST ONE RECESS IN A MATERIAL BY MEANS OF...
- Publication number 20200009691
- Publication date Jan 9, 2020
- LPKF Laser & Electronics AG
- Roman OSTHOLT
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20200014994
- Publication date Jan 9, 2020
- DB HITEK CO., LTD.
- Jong Won SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MICROELECTROMECHANICAL SYSTEM STRUCTURE
- Publication number 20190256350
- Publication date Aug 22, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chin-Han MENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PROCESSING SILICON WAFER WITH THROUGH CAVITY STRUCTURE
- Publication number 20190233280
- Publication date Aug 1, 2019
- Shenyang Silicon Technology Co., Ltd.
- Xiang LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A FLUID-EJECTION DEVICE WITH IMPROVED RESO...
- Publication number 20190217618
- Publication date Jul 18, 2019
- STMicroelectronics S.r.l.
- Domenico GIUSTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FORMING SEMICONDUCTOR DEVICE
- Publication number 20190100430
- Publication date Apr 4, 2019
- UNITED MICROELECTRONICS CORP.
- Feng-Yi Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MICROELECTROMECHANICAL SYSTEM STRUCTURE
- Publication number 20190092625
- Publication date Mar 28, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chin-Han MENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PORE FORMATION IN A SUBSTRATE
- Publication number 20190092626
- Publication date Mar 28, 2019
- Applied Materials, Inc.
- Philip Allan KRAUS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING MEMBRANE DEVICE, MEMBRANE DEVICE, AND NANOP...
- Publication number 20190004030
- Publication date Jan 3, 2019
- Hitachi, Ltd.
- Itaru YANAGI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A MICROMECHANICAL COMPONENT
- Publication number 20180339900
- Publication date Nov 29, 2018
- ROBERT BOSCH GmbH
- Achim Breitling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FORMING FILM AND METHOD FOR MANUFACTURING INKJET PRINT HEAD
- Publication number 20180147848
- Publication date May 31, 2018
- Canon Kabushiki Kaisha
- Atsushi Teranishi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SILICON SUBSTRATE PROCESSING METHOD, ELEMENT EMBEDDED SUBSTRATE, AN...
- Publication number 20180130728
- Publication date May 10, 2018
- SEIKO EPSON CORPORATION
- Kazuhiro GOMI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NOZZLE SUBSTRATE, INK-JET PRINT HEAD, AND METHOD FOR PRODUCING NOZZ...
- Publication number 20180117910
- Publication date May 3, 2018
- Rohm Co., Ltd.
- Nobufumi MATSUO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC PACKAGE INCLUDING CAVITY FORMED BY REMOVAL OF SACRIFICIA...
- Publication number 20170288627
- Publication date Oct 5, 2017
- SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.
- Atsushi Takano
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATION OF LAMINATE MEMS IN BBUL CORELESS PACKAGE
- Publication number 20170225946
- Publication date Aug 10, 2017
- Intel Corporation
- Weng Hong TEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Microfluidic valve and method of making same

Microfluidic cartridge and method of making same

Deep reactive ion etching process for fluid ejection heads

Pore formation in a substrate

Electronic package including cavity formed by removal of sacrificia...

Method for manufacturing a fluid-ejection device with improved reso...

Nanopore-forming method, nanopore-forming device and biomolecule me...

Method for producing at least one recess in a material by means of...

DNA sequencing with stacked nanopores

Pore formation in a substrate

Use of an uncoupling structure for assembling a component having a...

MEMS microphone and method of manufacturing the same

Scroll type micro-compressor, and method for machining fixed scroll...

Method to reduce pore diameter using atomic layer deposition and et...

Method for manufacturing a fluid-ejection device with improved reso...

Method to create a free-standing membrane for biological applications

Controlled fabrication of nanopores in nanometric solid state mater...

Pore formation in a substrate

Method for manufacturing microelectromechanical system structure ha...

Method to reduce pore diameter using atomic layer deposition and et...

Electronic package including cavity formed by removal of sacrificia...

Method of forming semiconductor device

Substrate structure, semiconductor structure and method for fabrica...

Nozzle substrate, ink-jet print head, and method for producing nozz...

Method of manufacturing membrane device, membrane device, and nanop...

Method for forming film and method for manufacturing inkjet print head

Device and method for forming same

Method for manufacturing microelectromechanical system structure ha...

Method of manufacturing a plurality of through-holes in a layer of...

Nanopore structure, ionic device using nanopore structure and metho...

Patents Applicationslast 30 patents

Method for Manufacturing a Microfluidic Device

LARGE-SCALE PLASMONIC HYBRID FRAMEWORK WITH BUILT-IN NANOHOLE ARRAY...

ELECTROSTATICALLY GATED NANOFLUIDIC MEMBRANES FOR CONTROL OF MOLECU...

DEEP REACTIVE ION ETCHING PROCESS FOR FLUID EJECTION HEADS

MANUFACTURING METHODS FOR DUAL PORE SENSORS

PORE FORMATION IN A SUBSTRATE

STABLE LIPID BILAYERS ON NANOPORE ARRAYS

Stable Nanopores And Nanopore Arrays For Ionic And Other Measurements

Method for Producing a Sequencing Unit for Sequencing a Biochemical...

METHOD FOR MANUFACTURING A FLUID-EJECTION DEVICE WITH IMPROVED RESO...

PORE FORMATION IN A SUBSTRATE

STABLE LIPID BILAYERS ON NANOPORE ARRAYS

METHOD TO REDUCE PORE DIAMETER USING ATOMIC LAYER DEPOSITION AND ET...

SCROLL TYPE MICRO-COMPRESSOR, AND METHOD FOR MACHINING FIXED SCROLL...

ELECTRONIC PACKAGE INCLUDING CAVITY FORMED BY REMOVAL OF SACRIFICIA...

METHOD FOR PRODUCING AT LEAST ONE RECESS IN A MATERIAL BY MEANS OF...

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

METHOD FOR MANUFACTURING MICROELECTROMECHANICAL SYSTEM STRUCTURE

METHOD FOR PROCESSING SILICON WAFER WITH THROUGH CAVITY STRUCTURE

METHOD FOR MANUFACTURING A FLUID-EJECTION DEVICE WITH IMPROVED RESO...

METHOD OF FORMING SEMICONDUCTOR DEVICE

METHOD FOR MANUFACTURING MICROELECTROMECHANICAL SYSTEM STRUCTURE

PORE FORMATION IN A SUBSTRATE

METHOD OF MANUFACTURING MEMBRANE DEVICE, MEMBRANE DEVICE, AND NANOP...

METHOD FOR MANUFACTURING A MICROMECHANICAL COMPONENT

METHOD FOR FORMING FILM AND METHOD FOR MANUFACTURING INKJET PRINT HEAD

SILICON SUBSTRATE PROCESSING METHOD, ELEMENT EMBEDDED SUBSTRATE, AN...

NOZZLE SUBSTRATE, INK-JET PRINT HEAD, AND METHOD FOR PRODUCING NOZZ...

ELECTRONIC PACKAGE INCLUDING CAVITY FORMED BY REMOVAL OF SACRIFICIA...

INTEGRATION OF LAMINATE MEMS IN BBUL CORELESS PACKAGE