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B81C1/00087
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C1/00
Manufacture or treatment of devices or systems in or on a substrate
Current Industry
B81C1/00087
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Patents Grants
last 30 patents
Information
Patent Grant
Microfluidic valve and method of making same
Patent number
12,128,405
Issue date
Oct 29, 2024
HandyLab, Inc.
Kalyan Handique
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfluidic cartridge and method of making same
Patent number
12,030,050
Issue date
Jul 9, 2024
HandyLab, Inc.
Kalyan Handique
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Deep reactive ion etching process for fluid ejection heads
Patent number
11,746,005
Issue date
Sep 5, 2023
FUNAI ELECTRIC CO. LTD
David L. Bernard
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Pore formation in a substrate
Patent number
11,691,872
Issue date
Jul 4, 2023
Applied Materials, Inc.
Philip Allan Kraus
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electronic package including cavity formed by removal of sacrificia...
Patent number
11,545,952
Issue date
Jan 3, 2023
SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.
Atsushi Takano
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a fluid-ejection device with improved reso...
Patent number
11,498,335
Issue date
Nov 15, 2022
STMicroelectronics S.r.l.
Domenico Giusti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Nanopore-forming method, nanopore-forming device and biomolecule me...
Patent number
11,499,959
Issue date
Nov 15, 2022
HITACHI HIGH-TECH CORPORATION
Yoshimitsu Yanagawa
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for producing at least one recess in a material by means of...
Patent number
11,478,880
Issue date
Oct 25, 2022
LPKF Laser & Electronics AG
Roman Ostholt
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
DNA sequencing with stacked nanopores
Patent number
11,453,911
Issue date
Sep 27, 2022
International Business Machines Corporation
Zhenxing Bi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Pore formation in a substrate
Patent number
11,325,827
Issue date
May 10, 2022
Applied Materials, Inc.
Philip Allan Kraus
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Use of an uncoupling structure for assembling a component having a...
Patent number
11,267,697
Issue date
Mar 8, 2022
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Philippe Robert
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS microphone and method of manufacturing the same
Patent number
11,259,105
Issue date
Feb 22, 2022
DB HITEK CO., LTD.
Jong Won Sun
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Scroll type micro-compressor, and method for machining fixed scroll...
Patent number
11,078,907
Issue date
Aug 3, 2021
Beijing University of Chemical Technology
Duli Yu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method to reduce pore diameter using atomic layer deposition and et...
Patent number
10,994,991
Issue date
May 4, 2021
Applied Materials, Inc.
Joseph R. Johnson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a fluid-ejection device with improved reso...
Patent number
10,875,307
Issue date
Dec 29, 2020
STMicroelectronics S.r.l.
Domenico Giusti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method to create a free-standing membrane for biological applications
Patent number
10,830,756
Issue date
Nov 10, 2020
Applied Materials, Inc.
Ankit Vora
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Controlled fabrication of nanopores in nanometric solid state mater...
Patent number
10,766,762
Issue date
Sep 8, 2020
President and Fellows of Harvard College
Christopher John Russo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Pore formation in a substrate
Patent number
10,752,496
Issue date
Aug 25, 2020
Applied Materials, Inc.
Philip Allan Kraus
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing microelectromechanical system structure ha...
Patent number
10,654,713
Issue date
May 19, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Chin-Han Meng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method to reduce pore diameter using atomic layer deposition and et...
Patent number
10,618,805
Issue date
Apr 14, 2020
Applied Materials, Inc.
Joseph R. Johnson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electronic package including cavity formed by removal of sacrificia...
Patent number
10,574,202
Issue date
Feb 25, 2020
SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.
Atsushi Takano
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of forming semiconductor device
Patent number
10,562,762
Issue date
Feb 18, 2020
United Microelectronics Corp.
Feng-Yi Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Substrate structure, semiconductor structure and method for fabrica...
Patent number
10,508,020
Issue date
Dec 17, 2019
Taiwan Semiconductor Manufacturing Co., Ltd
Tsai-Hao Hung
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Nozzle substrate, ink-jet print head, and method for producing nozz...
Patent number
10,500,857
Issue date
Dec 10, 2019
Rohm Co., Ltd.
Nobufumi Matsuo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing membrane device, membrane device, and nanop...
Patent number
10,416,147
Issue date
Sep 17, 2019
Hitachi, Ltd.
Itaru Yanagi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for forming film and method for manufacturing inkjet print head
Patent number
10,343,403
Issue date
Jul 9, 2019
Canon Kabushiki Kaisha
Atsushi Teranishi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device and method for forming same
Patent number
10,338,057
Issue date
Jul 2, 2019
Hitachi, Ltd.
Itaru Yanagi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing microelectromechanical system structure ha...
Patent number
10,273,152
Issue date
Apr 30, 2019
Taiwan Semiconductor Manufacturing Co., Ltd
Chin-Han Meng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing a plurality of through-holes in a layer of...
Patent number
10,207,244
Issue date
Feb 19, 2019
SmartTip B.V.
Edin Sarajlic
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Nanopore structure, ionic device using nanopore structure and metho...
Patent number
10,175,222
Issue date
Jan 8, 2019
Seoul National University R&DB Foundation
Ki-Bum Kim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
Method for Manufacturing a Microfluidic Device
Publication number
20230127645
Publication date
Apr 27, 2023
IMEC vzw
Simone Severi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LARGE-SCALE PLASMONIC HYBRID FRAMEWORK WITH BUILT-IN NANOHOLE ARRAY...
Publication number
20230047636
Publication date
Feb 16, 2023
Purdue Research Foundation
Haiyan Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTROSTATICALLY GATED NANOFLUIDIC MEMBRANES FOR CONTROL OF MOLECU...
Publication number
20230043407
Publication date
Feb 9, 2023
The Methodist Hospital System
Alessandro Grattoni
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEEP REACTIVE ION ETCHING PROCESS FOR FLUID EJECTION HEADS
Publication number
20220281740
Publication date
Sep 8, 2022
Funai Electric Co., Ltd.
David L. BERNARD
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MANUFACTURING METHODS FOR DUAL PORE SENSORS
Publication number
20220242725
Publication date
Aug 4, 2022
Applied Materials, Inc.
Joseph R. JOHNSON
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PORE FORMATION IN A SUBSTRATE
Publication number
20220227622
Publication date
Jul 21, 2022
Applied Materials, Inc.
Philip Allan KRAUS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STABLE LIPID BILAYERS ON NANOPORE ARRAYS
Publication number
20220106187
Publication date
Apr 7, 2022
Quantapore, Inc.
Ossama Assad
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Stable Nanopores And Nanopore Arrays For Ionic And Other Measurements
Publication number
20210318288
Publication date
Oct 14, 2021
The Trustees of the University of Pennsylvania
Marija Drndic
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for Producing a Sequencing Unit for Sequencing a Biochemical...
Publication number
20210229982
Publication date
Jul 29, 2021
ROBERT BOSCH GmbH
Franz Laermer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A FLUID-EJECTION DEVICE WITH IMPROVED RESO...
Publication number
20210078331
Publication date
Mar 18, 2021
STMicroelectronics S.r.l.
Domenico GIUSTI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PORE FORMATION IN A SUBSTRATE
Publication number
20200361766
Publication date
Nov 19, 2020
Applied Materials, Inc.
Philip Allan KRAUS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STABLE LIPID BILAYERS ON NANOPORE ARRAYS
Publication number
20200198965
Publication date
Jun 25, 2020
Quantapore, Inc.
Ossama ASSAD
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD TO REDUCE PORE DIAMETER USING ATOMIC LAYER DEPOSITION AND ET...
Publication number
20200180950
Publication date
Jun 11, 2020
Applied Materials, Inc.
Joseph R. JOHNSON
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SCROLL TYPE MICRO-COMPRESSOR, AND METHOD FOR MACHINING FIXED SCROLL...
Publication number
20200149530
Publication date
May 14, 2020
Beijing University of Chemical Technology
Duli YU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTRONIC PACKAGE INCLUDING CAVITY FORMED BY REMOVAL OF SACRIFICIA...
Publication number
20200153407
Publication date
May 14, 2020
SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.
Atsushi Takano
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING AT LEAST ONE RECESS IN A MATERIAL BY MEANS OF...
Publication number
20200009691
Publication date
Jan 9, 2020
LPKF Laser & Electronics AG
Roman OSTHOLT
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
Publication number
20200014994
Publication date
Jan 9, 2020
DB HITEK CO., LTD.
Jong Won SUN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING MICROELECTROMECHANICAL SYSTEM STRUCTURE
Publication number
20190256350
Publication date
Aug 22, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Chin-Han MENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PROCESSING SILICON WAFER WITH THROUGH CAVITY STRUCTURE
Publication number
20190233280
Publication date
Aug 1, 2019
Shenyang Silicon Technology Co., Ltd.
Xiang LI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A FLUID-EJECTION DEVICE WITH IMPROVED RESO...
Publication number
20190217618
Publication date
Jul 18, 2019
STMicroelectronics S.r.l.
Domenico GIUSTI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF FORMING SEMICONDUCTOR DEVICE
Publication number
20190100430
Publication date
Apr 4, 2019
UNITED MICROELECTRONICS CORP.
Feng-Yi Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING MICROELECTROMECHANICAL SYSTEM STRUCTURE
Publication number
20190092625
Publication date
Mar 28, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Chin-Han MENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PORE FORMATION IN A SUBSTRATE
Publication number
20190092626
Publication date
Mar 28, 2019
Applied Materials, Inc.
Philip Allan KRAUS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF MANUFACTURING MEMBRANE DEVICE, MEMBRANE DEVICE, AND NANOP...
Publication number
20190004030
Publication date
Jan 3, 2019
Hitachi, Ltd.
Itaru YANAGI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A MICROMECHANICAL COMPONENT
Publication number
20180339900
Publication date
Nov 29, 2018
ROBERT BOSCH GmbH
Achim Breitling
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR FORMING FILM AND METHOD FOR MANUFACTURING INKJET PRINT HEAD
Publication number
20180147848
Publication date
May 31, 2018
Canon Kabushiki Kaisha
Atsushi Teranishi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SILICON SUBSTRATE PROCESSING METHOD, ELEMENT EMBEDDED SUBSTRATE, AN...
Publication number
20180130728
Publication date
May 10, 2018
SEIKO EPSON CORPORATION
Kazuhiro GOMI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
NOZZLE SUBSTRATE, INK-JET PRINT HEAD, AND METHOD FOR PRODUCING NOZZ...
Publication number
20180117910
Publication date
May 3, 2018
Rohm Co., Ltd.
Nobufumi MATSUO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTRONIC PACKAGE INCLUDING CAVITY FORMED BY REMOVAL OF SACRIFICIA...
Publication number
20170288627
Publication date
Oct 5, 2017
SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.
Atsushi Takano
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATION OF LAMINATE MEMS IN BBUL CORELESS PACKAGE
Publication number
20170225946
Publication date
Aug 10, 2017
Intel Corporation
Weng Hong TEH
B81 - MICRO-STRUCTURAL TECHNOLOGY