Imprinting

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CPC
B81C2201/015

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/015Imprinting

Industries

Patents Grantslast 30 patents

Information Patent Grant
Undercut-free patterned aluminum nitride structure and methods for...
- Patent number 12,134,824
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
On-chip integrated silicon carbide pressure and temperature sensors
- Patent number 12,044,585
- Issue date Jul 23, 2024
- United States Government Administrator of NASA
- Robert S. Okojie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing multi-layered type microchannel device using p...
- Patent number 12,032,286
- Issue date Jul 9, 2024
- Asahi Kasei Kabushiki Kaisha
- Hidenori Nagai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Isolated protrusion/recession features in microelectromechanical sy...
- Patent number 11,932,529
- Issue date Mar 19, 2024
- Texas Instruments Incorporated
- Patrick Ian Oden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of miniature fluid actuator
- Patent number 11,905,168
- Issue date Feb 20, 2024
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High-density soft-matter electronics
- Patent number 11,903,139
- Issue date Feb 13, 2024
- Carnegie Mellon University
- Carmel Majidi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Imprinted substrates
- Patent number 11,878,299
- Issue date Jan 23, 2024
- Illumina, Inc.
- Hui Han
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing an optical microelectromechanical device...
- Patent number 11,787,685
- Issue date Oct 17, 2023
- STMicroelectronics S.r.l.
- Luca Seghizzi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Calcite channel structures with heterogeneous wettability
- Patent number 11,774,437
- Issue date Oct 3, 2023
- Saudi Arabian Oil Company
- Dong Kyu Cha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic chip and a method for the manufacture of a microfluidi...
- Patent number 11,759,782
- Issue date Sep 19, 2023
- Teknologian tutkimuskeskus VTT Oy
- Tiina Maaninen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pulse train excitation for capacitive micromachined ultrasonic tran...
- Patent number 11,731,164
- Issue date Aug 22, 2023
- The Board of Trustees of the Leland Stanford Junior University
- Bo Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic devices with electrodes formed as physically separated...
- Patent number 11,673,798
- Issue date Jun 13, 2023
- International Business Machines Corporation
- Gabriel Fernando Puebla Hellmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method to achieve tilted patterning with a through resist thickness...
- Patent number 11,644,757
- Issue date May 9, 2023
- Intel Corporation
- Changhua Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for fabricating glass-based nanostructures on lar...
- Patent number 11,579,523
- Issue date Feb 14, 2023
- Ecole Polytechnique Federale de Lausanne (EPFL)
- Fabien Sorin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Atomic-scale e-beam sculptor
- Patent number 11,518,674
- Issue date Dec 6, 2022
- UT-Battelle, LLC
- Sergei V. Kalinin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system silicon on insulator pressure senso...
- Patent number 11,401,156
- Issue date Aug 2, 2022
- Southeast University
- Xiaodong Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Undercut-free patterned aluminum nitride structure and methods for...
- Patent number 11,371,133
- Issue date Jun 28, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for forming a biological microdevice
- Patent number 11,351,537
- Issue date Jun 7, 2022
- University of Central Florida Research Foundation, Inc.
- Swaminathan Rajaraman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Calcite channel structures with heterogeneous wettability
- Patent number 11,300,554
- Issue date Apr 12, 2022
- Saudi Arabian Oil Company
- Dong Kyu Cha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Contoured electrode for capacitive micromachined ultrasonic transducer
- Patent number 11,260,424
- Issue date Mar 1, 2022
- The Board of Trustees of the Leland Stanford Junior University
- Bo Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Localized functionalization of nanotextured surfaces
- Patent number 11,247,896
- Issue date Feb 15, 2022
- UChicago Argonne, LLC
- Martyna Michalska
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of providing a plurality of through-holes in a layer of stru...
- Patent number 11,174,155
- Issue date Nov 16, 2021
- Cytosurge AG
- Edin Sarajlic
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of depositing electrodes and electrolyte on microelectromech...
- Patent number 11,169,110
- Issue date Nov 9, 2021
- Honeywell International Inc.
- Keith Francis Edwin Pratt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMOS-MEMS structure and method of forming the same
- Patent number 11,148,936
- Issue date Oct 19, 2021
- Taiwan Semiconductor Manufacturing Company Ltd.
- Jung-Huei Peng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for making three dimensional structures using photolithograp...
- Patent number 11,143,959
- Issue date Oct 12, 2021
- Mercene Labs AB
- Carl Fredrik Carlborg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated package structure for MEMS element and ASIC chip and met...
- Patent number 11,130,674
- Issue date Sep 28, 2021
- J-METRICS TECHNOLOGY CO., LTD.
- Sheng-Lin Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method for a micromechanical window structure and cor...
- Patent number 11,124,412
- Issue date Sep 21, 2021
- Robert Bosch GmbH
- Joerg Muchow
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device package and method of manufacturing the same
- Patent number 11,101,189
- Issue date Aug 24, 2021
- Advanced Semiconductor Engineering, Inc.
- Ming Yen Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method to create multilayer microfluidic chips using spin-on carbon...
- Patent number 11,084,032
- Issue date Aug 10, 2021
- International Business Machines Corporation
- Chi-Chun Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Imprinted substrates
- Patent number 11,020,739
- Issue date Jun 1, 2021
- Illumina, Inc.
- Hui Han
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
UNDERCUT-FREE PATTERNED ALUMINUM NITRIDE STRUCTURE AND METHODS FOR...
- Publication number 20240368746
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF MEMS DEVICE
- Publication number 20240351865
- Publication date Oct 24, 2024
- XINTEC INC.
- Jiun-Yen LAI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR, AND METHOD FOR MANUFACTURING MEMS SENSOR
- Publication number 20240317579
- Publication date Sep 26, 2024
- Rohm Co., Ltd.
- Daisuke KAMINISHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH MEMBRANE COMPRISING LASER STRUCTURED NANOSTRUCTURE...
- Publication number 20240253977
- Publication date Aug 1, 2024
- INFINEON TECHNOLOGIES AG
- Hutomo Suryo Wasisto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VIBRATION SENSOR AND FABRICA...
- Publication number 20240208801
- Publication date Jun 27, 2024
- UPBEAT TECHNOLOGY Co., Ltd
- Hsi-Wen TUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO ELECTRO MECHANICAL SYSTEM PROBE AND MANUFACTURING METHOD THEREOF
- Publication number 20240174512
- Publication date May 30, 2024
- TAIWAN MASK CORPORATION
- SHANG-KUANG WU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PULSE TRAIN EXCITATION FOR CAPACITIVE MICROMACHINED ULTRASONIC TRAN...
- Publication number 20240165663
- Publication date May 23, 2024
- The Board of Trustees of the Leland Stanford Junior University
- Bo Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING AN OPTICAL MICROELECTROMECHANICAL DEVICE...
- Publication number 20240043263
- Publication date Feb 8, 2024
- STMicroelectronics S.r.l
- Luca SEGHIZZI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM (MEMS) MICROPHONE AND FABRICATION MET...
- Publication number 20230406692
- Publication date Dec 21, 2023
- UNITED MICROELECTRONICS CORP.
- Jung-Hao Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL ELEMENT AND A METHOD FOR MANUFACTURING IT
- Publication number 20230406698
- Publication date Dec 21, 2023
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20230382714
- Publication date Nov 30, 2023
- DB HITEK CO., LTD.
- Min Hyun JUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR PACKAGE AND ITS MANUFACTURING METHOD
- Publication number 20230365396
- Publication date Nov 16, 2023
- TDK Corporation
- Toyotaka KOBAYASHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURE INCLUDING A BURIED CAVITY WITH ANTISTICTION PROTUBER...
- Publication number 20230348258
- Publication date Nov 2, 2023
- STMicroelectronics S.r.l.
- Mikel AZPEITIA URQUIA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD TO ACHIEVE TILTED PATTERNING WITH A THROUGH RESIST THICKNESS...
- Publication number 20230236517
- Publication date Jul 27, 2023
- Intel Corporation
- Changhua LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPACT ENHANCED SENSITIVITY TEMPERATURE SENSOR USING AN ENCAPSULAT...
- Publication number 20230219804
- Publication date Jul 13, 2023
- KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS
- Xuecui ZOU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Gradient Structures Interfacing Microfluidics and Nanofluidics, Met...
- Publication number 20230110246
- Publication date Apr 13, 2023
- Princeton University
- Han Cao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROELECTRONIC DEVICE
- Publication number 20230065179
- Publication date Mar 2, 2023
- ROBERT BOSCH GmbH
- Jochen Tomaschko
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CHARGE TRANSFER CIRCUITRY FOR MEMS DEVICES
- Publication number 20230061174
- Publication date Mar 2, 2023
- Obsidian Sensors, Inc.
- John HONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING MULTI-LAYERED TYPE MICROCHANNEL DEVICE USING P...
- Publication number 20230053900
- Publication date Feb 23, 2023
- Asahi Kasei Kabushiki Kaisha
- Hidenori Nagai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
- Publication number 20230045563
- Publication date Feb 9, 2023
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM PUMP
- Publication number 20220397110
- Publication date Dec 15, 2022
- Microjet Technology Co., Ltd.
- Hao-Jan MOU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VIBRATION SENSOR AND FABRICA...
- Publication number 20220371881
- Publication date Nov 24, 2022
- UPBEAT TECHNOLOGY Co., Ltd
- Hsien-Lung HO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
UNDERCUT-FREE PATTERNED ALUMINUM NITRIDE STRUCTURE AND METHODS FOR...
- Publication number 20220325396
- Publication date Oct 13, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS AND PREPARATION METHOD THEREOF
- Publication number 20220324699
- Publication date Oct 13, 2022
- Huawei Technologies Co., Ltd
- Fengpei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
A METHOD FOR IMPRINTING MICROPATTERNS ON A SUBSTRATE OF A CHALCOGEN...
- Publication number 20220244635
- Publication date Aug 4, 2022
- B.G. NEGEV TECHNOLOGIES AND APPLICATIONS LTD., at BEN-GURION UNIVERSITY
- Mark SCHVARTZMAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUIDIC DEVICES WITH ELECTRODES FORMED AS PHYSICALLY SEPARATED...
- Publication number 20220135399
- Publication date May 5, 2022
- International Business Machines Corporation
- Gabriel Fernando Puebla Hellmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CALCITE CHANNEL STRUCTURES WITH HETEROGENEOUS WETTABILITY
- Publication number 20220107302
- Publication date Apr 7, 2022
- Saudi Arabian Oil Company
- Dong Kyu CHA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM SILICON ON INSULATOR PRESSURE SENSO...
- Publication number 20220033247
- Publication date Feb 3, 2022
- SOUTHEAST UNIVERSITY
- Xiaodong Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
UNDERCUT-FREE PATTERNED ALUMINUM NITRIDE STRUCTURE AND METHODS FOR...
- Publication number 20220018009
- Publication date Jan 20, 2022
- Taiwan Semiconductor Manufacturing Company Limited
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Fabricating a Microfluidic Device
- Publication number 20210300752
- Publication date Sep 30, 2021
- IMEC vzw
- Giuseppe Fiorentino
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Undercut-free patterned aluminum nitride structure and methods for...

On-chip integrated silicon carbide pressure and temperature sensors

Method for producing multi-layered type microchannel device using p...

Isolated protrusion/recession features in microelectromechanical sy...

Manufacturing method of miniature fluid actuator

High-density soft-matter electronics

Imprinted substrates

Process for manufacturing an optical microelectromechanical device...

Calcite channel structures with heterogeneous wettability

Microfluidic chip and a method for the manufacture of a microfluidi...

Pulse train excitation for capacitive micromachined ultrasonic tran...

Microfluidic devices with electrodes formed as physically separated...

Method to achieve tilted patterning with a through resist thickness...

Method and system for fabricating glass-based nanostructures on lar...

Atomic-scale e-beam sculptor

Micro-electro-mechanical system silicon on insulator pressure senso...

Undercut-free patterned aluminum nitride structure and methods for...

System and method for forming a biological microdevice

Calcite channel structures with heterogeneous wettability

Contoured electrode for capacitive micromachined ultrasonic transducer

Localized functionalization of nanotextured surfaces

Method of providing a plurality of through-holes in a layer of stru...

Method of depositing electrodes and electrolyte on microelectromech...

CMOS-MEMS structure and method of forming the same

Method for making three dimensional structures using photolithograp...

Integrated package structure for MEMS element and ASIC chip and met...

Manufacturing method for a micromechanical window structure and cor...

Semiconductor device package and method of manufacturing the same

Method to create multilayer microfluidic chips using spin-on carbon...

Imprinted substrates

Patents Applicationslast 30 patents

UNDERCUT-FREE PATTERNED ALUMINUM NITRIDE STRUCTURE AND METHODS FOR...

MANUFACTURING METHOD OF MEMS DEVICE

MEMS SENSOR, AND METHOD FOR MANUFACTURING MEMS SENSOR

MEMS DEVICE WITH MEMBRANE COMPRISING LASER STRUCTURED NANOSTRUCTURE...

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VIBRATION SENSOR AND FABRICA...

MICRO ELECTRO MECHANICAL SYSTEM PROBE AND MANUFACTURING METHOD THEREOF

PULSE TRAIN EXCITATION FOR CAPACITIVE MICROMACHINED ULTRASONIC TRAN...

PROCESS FOR MANUFACTURING AN OPTICAL MICROELECTROMECHANICAL DEVICE...

MICROELECTROMECHANICAL SYSTEM (MEMS) MICROPHONE AND FABRICATION MET...

MICROELECTROMECHANICAL ELEMENT AND A METHOD FOR MANUFACTURING IT

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

MEMS SENSOR PACKAGE AND ITS MANUFACTURING METHOD

MEMS STRUCTURE INCLUDING A BURIED CAVITY WITH ANTISTICTION PROTUBER...

METHOD TO ACHIEVE TILTED PATTERNING WITH A THROUGH RESIST THICKNESS...

COMPACT ENHANCED SENSITIVITY TEMPERATURE SENSOR USING AN ENCAPSULAT...

Gradient Structures Interfacing Microfluidics and Nanofluidics, Met...

METHOD FOR PRODUCING A MICROELECTRONIC DEVICE

CHARGE TRANSFER CIRCUITRY FOR MEMS DEVICES

METHOD FOR PRODUCING MULTI-LAYERED TYPE MICROCHANNEL DEVICE USING P...

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP

MICRO-ELECTROMECHANICAL SYSTEM PUMP

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VIBRATION SENSOR AND FABRICA...

UNDERCUT-FREE PATTERNED ALUMINUM NITRIDE STRUCTURE AND METHODS FOR...

MICRO-ELECTRO-MECHANICAL SYSTEMS AND PREPARATION METHOD THEREOF

A METHOD FOR IMPRINTING MICROPATTERNS ON A SUBSTRATE OF A CHALCOGEN...

MICROFLUIDIC DEVICES WITH ELECTRODES FORMED AS PHYSICALLY SEPARATED...

CALCITE CHANNEL STRUCTURES WITH HETEROGENEOUS WETTABILITY

MICRO-ELECTRO-MECHANICAL SYSTEM SILICON ON INSULATOR PRESSURE SENSO...

UNDERCUT-FREE PATTERNED ALUMINUM NITRIDE STRUCTURE AND METHODS FOR...

Method for Fabricating a Microfluidic Device