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Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C2201/00
Manufacture or treatment of micro-structural devices or systems
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B81C2201/0121
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Patents Grants
last 30 patents
Information
Patent Grant
Method for manufacturing semiconductor structure and planarization...
Patent number
11,377,347
Issue date
Jul 5, 2022
United Microelectronics Corporation
Xiang Li
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
Patent number
11,167,980
Issue date
Nov 9, 2021
International Business Machines Corporation
Michael T. Brigham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for forming inkjet nozzle devices
Patent number
10,822,228
Issue date
Nov 3, 2020
Memjet Technology Limited
Angus North
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for forming a planarization structure
Patent number
10,804,112
Issue date
Oct 13, 2020
STMicroelectronics (Crolles 2) SAS
Loic Gaben
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for filling etched holes using first and second polymers
Patent number
10,597,290
Issue date
Mar 24, 2020
Memjet Technology Limited
Angus North
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
Patent number
10,589,991
Issue date
Mar 17, 2020
International Business Machines Corporation
Michael T. Brigham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
Patent number
10,589,992
Issue date
Mar 17, 2020
International Business Machines Corporation
Michael T. Brigham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
Patent number
10,549,987
Issue date
Feb 4, 2020
International Business Machines Corporation
Michael T. Brigham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of processing surface of polysilicon and method of processin...
Patent number
10,446,410
Issue date
Oct 15, 2019
BOE Technology Group Co., Ltd.
Xiaoyong Lu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for filling etched holes using photoimageable thermoplastic...
Patent number
10,329,146
Issue date
Jun 25, 2019
Memjet Technology Limited
Angus North
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of reverse tone patterning
Patent number
10,211,051
Issue date
Feb 19, 2019
Canon Kabushiki Kaisha
Niyaz Khusnatdinov
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-Electro-Mechanical System (MEMS) structures and design struct...
Patent number
9,981,842
Issue date
May 29, 2018
International Business Machines Corporation
Michael T. Brigham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor arrangement and formation thereof
Patent number
9,976,983
Issue date
May 22, 2018
Taiwan Semiconductor Manufacturing Company Limited
Yi-Hsien Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for forming micro-electro-mechanical system (MEMS) beam stru...
Patent number
9,969,613
Issue date
May 15, 2018
International Business Machines Corporation
Michael T. Brigham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
Patent number
9,938,137
Issue date
Apr 10, 2018
International Business Machines Corporation
Michael T. Brigham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical system (MEMS) structures and design struct...
Patent number
9,932,222
Issue date
Apr 3, 2018
International Business Machines Corporation
Michael T. Brigham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for filling etched holes
Patent number
9,708,183
Issue date
Jul 18, 2017
Memjet Technology Limited
Angus North
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for the manufacture of semiconductor devices comprising the...
Patent number
9,416,298
Issue date
Aug 16, 2016
BASF SE
Yuzhuo Li
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for reconditioning semiconductor surface to facilitate bonding
Patent number
8,956,884
Issue date
Feb 17, 2015
DunAn Microstaq, Inc.
Parthiban Arunasalam
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical device having a common ground plane layer an...
Patent number
7,545,234
Issue date
Jun 9, 2009
Wireless MEMS, Inc.
Chia-Shing Chou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of producing a device with a movable portion
Patent number
7,396,740
Issue date
Jul 8, 2008
Frauhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.
Thor Bakke
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Head electrode region for a reliable metal-to-metal contact micro-r...
Patent number
7,352,266
Issue date
Apr 1, 2008
Wireless MEMS, Inc.
Chia-Shing Chou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of fabricating semiconductor devices employing at least one...
Patent number
7,101,724
Issue date
Sep 5, 2006
Wireless MEMS, Inc.
Chia-Shing Chou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for registering a deposited material with channel plate chan...
Patent number
6,911,611
Issue date
Jun 28, 2005
Agilent Technologies, Inc.
Marvin Glenn Wong
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for registering a deposited material with channel plate chan...
Patent number
6,809,277
Issue date
Oct 26, 2004
Agilent Technologies, Inc.
Marvin Glenn Wong
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing optically planar surfaces for micro-electromec...
Patent number
6,426,237
Issue date
Jul 30, 2002
Eastman Kodak Company
Joseph Jech
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing co-planar surface structures
Patent number
6,284,560
Issue date
Sep 4, 2001
Eastman Kodak Company
Joseph Jech
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
STRAIN SENSOR SWITCH FOR TIMING BASED SENSING
Publication number
20240400375
Publication date
Dec 5, 2024
Carnegie Mellon University
Regan Kubicek
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND PLANARIZATION...
Publication number
20210354983
Publication date
Nov 18, 2021
UNITED MICROELECTRONICS CORPORATION
Xiang Li
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR FORMING INKJET NOZZLE DEVICES
Publication number
20200180949
Publication date
Jun 11, 2020
MEMJET TECHNOLOGY LIMITED
Angus North
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR FILLING ETCHED HOLES USING FIRST AND SECOND POLYMERS
Publication number
20190263657
Publication date
Aug 29, 2019
MEMJET TECHNOLOGY LIMITED
Angus North
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...
Publication number
20180201503
Publication date
Jul 19, 2018
International Business Machines Corporation
Michael T. Brigham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...
Publication number
20180201502
Publication date
Jul 19, 2018
International Business Machines Corporation
Michael T. Brigham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...
Publication number
20180179052
Publication date
Jun 28, 2018
International Business Machines Corporation
Michael T. Brigham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR FILLING ETCHED HOLES USING PHOTOIMAGEABLE THERMOPLASTIC...
Publication number
20170349431
Publication date
Dec 7, 2017
Memjet Technology Ltd.
Angus North
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...
Publication number
20160264405
Publication date
Sep 15, 2016
International Business Machines Corporation
Michael T. Brigham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCT...
Publication number
20160264410
Publication date
Sep 15, 2016
International Business Machines Corporation
Michael T. Brigham
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND METHOD FOR FABRICATING MEMS DEVICES
Publication number
20140374851
Publication date
Dec 25, 2014
FREESCALE SEMICONDUCTOR, INC.
Lianjun Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Process for Reconditioning Semiconductor Surface to Facilitate Bonding
Publication number
20120295371
Publication date
Nov 22, 2012
DunAn Microstaq, Inc.
Parthiban Arunasalam
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Microelectromechanical device having a common ground plane and meth...
Publication number
20090215213
Publication date
Aug 27, 2009
Chia-Shing Chou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method of producing a device with a movable portion
Publication number
20060166463
Publication date
Jul 27, 2006
Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung, e.V.
Thor Bakke
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Microelectromechanical device having a common ground plane layer an...
Publication number
20060125031
Publication date
Jun 15, 2006
Chia-Shing Chou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Microelectromechanical device having a common ground plane layer an...
Publication number
20050184836
Publication date
Aug 25, 2005
Chia-Shing Chou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Head electrode region for a reliable metal-to-metal contact micro-r...
Publication number
20050183938
Publication date
Aug 25, 2005
Chia-Shing Chou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for registering a deposited material with channel plate chan...
Publication number
20050032379
Publication date
Feb 10, 2005
Marvin Glenn Wong
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for registering a deposited material with channel plate chan...
Publication number
20040140187
Publication date
Jul 22, 2004
Marvin Glenn Wong
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Planarizing recess etch
Publication number
20030129843
Publication date
Jul 10, 2003
Yongming Cai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for producing optically planar surfaces for micro-electromec...
Publication number
20010029058
Publication date
Oct 11, 2001
Eastman Kodak Company
Joseph Jech
B81 - MICRO-STRUCTURAL TECHNOLOGY