Ion sources

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CPC
H01J2237/08

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/08Ion sources

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Automated operational control of micro-tooling devices
- Patent number 12,176,182
- Issue date Dec 24, 2024
- Carl Zeiss SMT GmbH
- Ramani Pichumani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Single beam plasma source
- Patent number 12,165,829
- Issue date Dec 10, 2024
- Board of Trustees of Michigan State University
- Qi Hua Fan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and methods for automated processing of multiple samples in...
- Patent number 12,165,833
- Issue date Dec 10, 2024
- FEI Company
- Michal Hrouzek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated ion-beam alignment for dual-beam instrument
- Patent number 12,154,757
- Issue date Nov 26, 2024
- FEI Company
- Jeremy Graham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device to control uniformity of extracted ion beam
- Patent number 12,154,753
- Issue date Nov 26, 2024
- Applied Materials, Inc.
- Jay T. Scheuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam source, surface processing apparatus and surf...
- Patent number 12,125,664
- Issue date Oct 22, 2024
- Oxford Instruments Nanotechnology Tools Limited
- David Pearson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion extraction assembly having variable electrode thickness for bea...
- Patent number 12,125,680
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam processing apparatus, electrode assembly, and method of cl...
- Patent number 12,119,203
- Issue date Oct 15, 2024
- Canon Anelva Corporation
- Yasushi Yasumatsu
- B08 - CLEANING
Information Patent Grant
Scanned angled etching apparatus and techniques providing separate...
- Patent number 12,106,936
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid ion source for aluminum ion generation using a target holder...
- Patent number 12,094,681
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 12,087,541
- Issue date Sep 10, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for multiple charged-particle beams
- Patent number 12,080,515
- Issue date Sep 3, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion gun and ion milling machine
- Patent number 12,051,560
- Issue date Jul 30, 2024
- HITACHI HIGH-TECH CORPORATION
- Kengo Asai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion milling device
- Patent number 12,020,893
- Issue date Jun 25, 2024
- HITACHI HIGH-TECH CORPORATION
- Kengo Asai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion propulsion device
- Patent number 11,993,402
- Issue date May 28, 2024
- Centre National de la Recherche Scientifique
- Jacques Gierak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing sputtering target, method for forming oxid...
- Patent number 11,967,505
- Issue date Apr 23, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Automatic adjustment method and automatic adjustment device of beam...
- Patent number 11,955,309
- Issue date Apr 9, 2024
- United Microelectronics Corp.
- Zheng-Yang Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for the surface treatment of substrates
- Patent number 11,901,172
- Issue date Feb 13, 2024
- EV Group E. Thallner GmbH
- Nasser Razek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for structuring a decorative of technical pattern in an obje...
- Patent number 11,894,215
- Issue date Feb 6, 2024
- Comadur S.A.
- Alexis Boulmay
- G04 - HOROLOGY
Information Patent Grant
Composite ion source based upon heterogeneous metal-metal fluoride...
- Patent number 11,887,806
- Issue date Jan 30, 2024
- Applied Materials, Inc.
- Graham Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion generator and ion implanter
- Patent number 11,848,170
- Issue date Dec 19, 2023
- SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO, LTD.
- Syuta Ochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid metal ion source and focused ion beam apparatus
- Patent number 11,749,493
- Issue date Sep 5, 2023
- Hitachi High-Tech Science Corporation
- Yoshihiro Koyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Partial spray refurbishment of sputtering targets
- Patent number 11,739,416
- Issue date Aug 29, 2023
- H.C. Starck Solutions Euclid, LLC
- Steven A. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming substrate surfaces with exposed cr...
- Patent number 11,735,432
- Issue date Aug 22, 2023
- Exogenesis Corporation
- Sean R. Kirkpatrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method, device and system for the treatment of biological cryogenic...
- Patent number 11,735,404
- Issue date Aug 22, 2023
- FEI Company
- Alex De Marco
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanned angled etching apparatus and techniques providing separate...
- Patent number 11,715,621
- Issue date Aug 1, 2023
- Applied Materials, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for modifying the wettability and/or other biocompatibility...
- Patent number 11,698,582
- Issue date Jul 11, 2023
- Exogenesis Corporation
- Joseph B. Khoury
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching aluminum nitride or aluminum oxide to generate an aluminum...
- Patent number 11,699,563
- Issue date Jul 11, 2023
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,688,580
- Issue date Jun 27, 2023
- ASML Netherlands B.V.
- Xuedong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular microwave source with embedded ground surface
- Patent number 11,670,489
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Joseph F. AuBuchon
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTER
- Publication number 20250014860
- Publication date Jan 9, 2025
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi MATSUSHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...
- Publication number 20250014861
- Publication date Jan 9, 2025
- Canon ANELVA Corporation
- Yasushi Yasumatsu
- B08 - CLEANING
Information Patent Application
METHOD OF ASSEMBLING DRIFT TUBE ASSEMBLIES IN ION IMPLANTORS
- Publication number 20240420919
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Aaron P. WEBB
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION SYSTEM AND RELATED METHODS
- Publication number 20240379320
- Publication date Nov 14, 2024
- Entegris, Inc.
- Ying Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ION SOURCE TEMPERATURE CONTROL USING SYMMETRI...
- Publication number 20240371608
- Publication date Nov 7, 2024
- Applied Materials, Inc.
- Ryan Prager
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID METAL ION SOURCE DEVICE FOR USING BISMUTH AND ALLOY OF BISMUTH
- Publication number 20240331967
- Publication date Oct 3, 2024
- KOREA BASIC SCIENCE INSTITUTE
- Myoung Choul Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRENELLATED SAMPLE HOLDER AND SPUTTER TARGET FOR SAMPLE PREPARATION...
- Publication number 20240331969
- Publication date Oct 3, 2024
- FEI Company
- Chad Rue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTER DEPOSITION SOURCE, MAGNETRON SPUTTER CATHODE, AND METHOD OF...
- Publication number 20240301546
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Thomas Werner Zilbauer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION SOURCE HEAD AND ION SOURCE HEAD CURVED LINER, DEFLECTOR, OR REP...
- Publication number 20240249906
- Publication date Jul 25, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Po-Tang TSENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN, ELECTRON BEAM APPLICATOR, AND EMISSION METHOD OF ELEC...
- Publication number 20240212967
- Publication date Jun 27, 2024
- PHOTO ELECTRON SOUL INC.
- Tomohiro NISHITANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM DEVICE AND EMITTER TIP MILLING METHOD
- Publication number 20240203682
- Publication date Jun 20, 2024
- HITACHI HIGH-TECH CORPORATION
- Shinichi MATSUBARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION GENERATOR AND ION IMPLANTER
- Publication number 20240079199
- Publication date Mar 7, 2024
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Syuta Ochi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION MICROSCOPE
- Publication number 20240006146
- Publication date Jan 4, 2024
- National University of Singapore
- Jeroen Anton VAN KAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHODS FOR AUTOMATED PROCESSING OF MULTIPLE SAMPLES IN...
- Publication number 20230377833
- Publication date Nov 23, 2023
- FEI Company
- Michal HROUZEK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID ION SOURCE FOR ALUMINUM ION GENERATION USING A TARGET HOLDER...
- Publication number 20230369006
- Publication date Nov 16, 2023
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID ION SOURCE FOR ALUMINUM ION GENERATION USING A TARGET HOLDER...
- Publication number 20230369008
- Publication date Nov 16, 2023
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION TOOL AND METHOD FOR FILLING DEEP TRENCHES
- Publication number 20230360970
- Publication date Nov 9, 2023
- Intel Corporation
- Elijah V. KARPOV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION MILLING DEVICE
- Publication number 20230352263
- Publication date Nov 2, 2023
- Hitachi High-Tech Corporation
- Kengo ASAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNED ANGLED ETCHING APPARATUS AND TECHNIQUES PROVIDING SEPARATE...
- Publication number 20230335375
- Publication date Oct 19, 2023
- Applied Materials, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITE ION SOURCE BASED UPON HETEROGENEOUS METAL-METAL FLUORIDE...
- Publication number 20230326703
- Publication date Oct 12, 2023
- Applied Materials, Inc.
- Graham Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
A GAS ION GUN
- Publication number 20230307204
- Publication date Sep 28, 2023
- CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
- Evelyne Salançon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ALIGNING ELECTRON BEAMS IN MULTI-BEAM INSPECT...
- Publication number 20230280293
- Publication date Sep 7, 2023
- ASML NETHERLANDS B.V.
- Xuerang HU
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MANUFACTURING SPUTTERING TARGET, METHOD FOR FORMING OXID...
- Publication number 20230260785
- Publication date Aug 17, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- B82 - NANO-TECHNOLOGY
Information Patent Application
OPTICAL SYSTEM ADJUSTMENT METHOD FOR MULTI CHARGED PARTICLE BEAM AP...
- Publication number 20230260749
- Publication date Aug 17, 2023
- NuFlare Technology, Inc.
- Hirofumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Method for Milling Sample
- Publication number 20230197401
- Publication date Jun 22, 2023
- JEOL Ltd.
- Munehiro Kozuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE ANALYSIS SYSTEM COMPRISING A PULSED ELECTRON SOURCE
- Publication number 20230170176
- Publication date Jun 1, 2023
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Daniel COMPARAT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION EXTRACTION ASSEMBLY HAVING VARIABLE ELECTRODE THICKNESS FOR BEA...
- Publication number 20230125435
- Publication date Apr 27, 2023
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM WITH MULTI-SOURCE SYSTEM AND MULTI-BEAM PARTIC...
- Publication number 20230065475
- Publication date Mar 2, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGE CARRIER GENERATION SOURCE
- Publication number 20220406559
- Publication date Dec 22, 2022
- SCIA SYSTEMS GMBH
- Enrico Loos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATIC ADJUSTMENT METHOD AND AUTOMATIC ADJUSTMENT DEVICE OF BEAM...
- Publication number 20220384139
- Publication date Dec 1, 2022
- United Microelectronics Corp.
- Zheng-Yang LI
- H01 - BASIC ELECTRIC ELEMENTS

Ion sources

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Automated operational control of micro-tooling devices

Single beam plasma source

System and methods for automated processing of multiple samples in...

Automated ion-beam alignment for dual-beam instrument

Device to control uniformity of extracted ion beam

Charged particle beam source, surface processing apparatus and surf...

Ion extraction assembly having variable electrode thickness for bea...

Ion beam processing apparatus, electrode assembly, and method of cl...

Scanned angled etching apparatus and techniques providing separate...

Hybrid ion source for aluminum ion generation using a target holder...

Apparatus of plural charged-particle beams

Apparatus for multiple charged-particle beams

Ion gun and ion milling machine

Ion milling device

Ion propulsion device

Method for manufacturing sputtering target, method for forming oxid...

Automatic adjustment method and automatic adjustment device of beam...

Method and device for the surface treatment of substrates

Method for structuring a decorative of technical pattern in an obje...

Composite ion source based upon heterogeneous metal-metal fluoride...

Ion generator and ion implanter

Liquid metal ion source and focused ion beam apparatus

Partial spray refurbishment of sputtering targets

Method and apparatus for forming substrate surfaces with exposed cr...

Method, device and system for the treatment of biological cryogenic...

Scanned angled etching apparatus and techniques providing separate...

Method for modifying the wettability and/or other biocompatibility...

Etching aluminum nitride or aluminum oxide to generate an aluminum...

Apparatus of plural charged-particle beams

Modular microwave source with embedded ground surface

Patents Applicationslast 30 patents

ION IMPLANTATION METHOD AND ION IMPLANTER

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...

METHOD OF ASSEMBLING DRIFT TUBE ASSEMBLIES IN ION IMPLANTORS

ION IMPLANTATION SYSTEM AND RELATED METHODS

SYSTEM AND METHOD FOR ION SOURCE TEMPERATURE CONTROL USING SYMMETRI...

LIQUID METAL ION SOURCE DEVICE FOR USING BISMUTH AND ALLOY OF BISMUTH

CRENELLATED SAMPLE HOLDER AND SPUTTER TARGET FOR SAMPLE PREPARATION...

SPUTTER DEPOSITION SOURCE, MAGNETRON SPUTTER CATHODE, AND METHOD OF...

ION SOURCE HEAD AND ION SOURCE HEAD CURVED LINER, DEFLECTOR, OR REP...

ELECTRON GUN, ELECTRON BEAM APPLICATOR, AND EMISSION METHOD OF ELEC...

ION BEAM DEVICE AND EMITTER TIP MILLING METHOD

ION GENERATOR AND ION IMPLANTER

ION MICROSCOPE

SYSTEM AND METHODS FOR AUTOMATED PROCESSING OF MULTIPLE SAMPLES IN...

HYBRID ION SOURCE FOR ALUMINUM ION GENERATION USING A TARGET HOLDER...

HYBRID ION SOURCE FOR ALUMINUM ION GENERATION USING A TARGET HOLDER...

DEPOSITION TOOL AND METHOD FOR FILLING DEEP TRENCHES

ION MILLING DEVICE

SCANNED ANGLED ETCHING APPARATUS AND TECHNIQUES PROVIDING SEPARATE...

COMPOSITE ION SOURCE BASED UPON HETEROGENEOUS METAL-METAL FLUORIDE...

A GAS ION GUN

SYSTEM AND METHOD FOR ALIGNING ELECTRON BEAMS IN MULTI-BEAM INSPECT...

METHOD FOR MANUFACTURING SPUTTERING TARGET, METHOD FOR FORMING OXID...

OPTICAL SYSTEM ADJUSTMENT METHOD FOR MULTI CHARGED PARTICLE BEAM AP...

Apparatus and Method for Milling Sample

SURFACE ANALYSIS SYSTEM COMPRISING A PULSED ELECTRON SOURCE

ION EXTRACTION ASSEMBLY HAVING VARIABLE ELECTRODE THICKNESS FOR BEA...

PARTICLE BEAM SYSTEM WITH MULTI-SOURCE SYSTEM AND MULTI-BEAM PARTIC...

CHARGE CARRIER GENERATION SOURCE

AUTOMATIC ADJUSTMENT METHOD AND AUTOMATIC ADJUSTMENT DEVICE OF BEAM...