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ELECTRICITY
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Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/08
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Patents Grants
last 30 patents
Information
Patent Grant
Method for manufacturing sputtering target, method for forming oxid...
Patent number
11,967,505
Issue date
Apr 23, 2024
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Automatic adjustment method and automatic adjustment device of beam...
Patent number
11,955,309
Issue date
Apr 9, 2024
United Microelectronics Corp.
Zheng-Yang Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for the surface treatment of substrates
Patent number
11,901,172
Issue date
Feb 13, 2024
EV Group E. Thallner GmbH
Nasser Razek
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for structuring a decorative of technical pattern in an obje...
Patent number
11,894,215
Issue date
Feb 6, 2024
Comadur S.A.
Alexis Boulmay
G04 - HOROLOGY
Information
Patent Grant
Composite ion source based upon heterogeneous metal-metal fluoride...
Patent number
11,887,806
Issue date
Jan 30, 2024
Applied Materials, Inc.
Graham Wright
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ion generator and ion implanter
Patent number
11,848,170
Issue date
Dec 19, 2023
SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO, LTD.
Syuta Ochi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid metal ion source and focused ion beam apparatus
Patent number
11,749,493
Issue date
Sep 5, 2023
Hitachi High-Tech Science Corporation
Yoshihiro Koyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Partial spray refurbishment of sputtering targets
Patent number
11,739,416
Issue date
Aug 29, 2023
H.C. Starck Solutions Euclid, LLC
Steven A. Miller
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for forming substrate surfaces with exposed cr...
Patent number
11,735,432
Issue date
Aug 22, 2023
Exogenesis Corporation
Sean R. Kirkpatrick
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method, device and system for the treatment of biological cryogenic...
Patent number
11,735,404
Issue date
Aug 22, 2023
FEI Company
Alex De Marco
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanned angled etching apparatus and techniques providing separate...
Patent number
11,715,621
Issue date
Aug 1, 2023
Applied Materials, Inc.
Peter F. Kurunczi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for modifying the wettability and/or other biocompatibility...
Patent number
11,698,582
Issue date
Jul 11, 2023
Exogenesis Corporation
Joseph B. Khoury
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching aluminum nitride or aluminum oxide to generate an aluminum...
Patent number
11,699,563
Issue date
Jul 11, 2023
Axcelis Technologies, Inc.
Neil K. Colvin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus of plural charged-particle beams
Patent number
11,688,580
Issue date
Jun 27, 2023
ASML Netherlands B.V.
Xuedong Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modular microwave source with embedded ground surface
Patent number
11,670,489
Issue date
Jun 6, 2023
Applied Materials, Inc.
Joseph F. AuBuchon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Time-dependent defect inspection apparatus
Patent number
11,651,935
Issue date
May 16, 2023
ASML Netherlands B.V.
Chih-Yu Jen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing sputtering target, method for forming oxid...
Patent number
11,637,015
Issue date
Apr 25, 2023
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
B82 - NANO-TECHNOLOGY
Information
Patent Grant
System and method for aligning electron beams in multi-beam inspect...
Patent number
11,614,416
Issue date
Mar 28, 2023
ASML Netherlands B.V.
Xuerang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gratings with variable depths formed using planarization for wavegu...
Patent number
11,579,364
Issue date
Feb 14, 2023
Meta Platforms Technologies, LLC
Matthew E. Colburn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal plating of grids for ion beam sputtering
Patent number
11,581,164
Issue date
Feb 14, 2023
Excelitas Technologies Corp.
Eric Baltz
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ion beam lithography method based on ion beam lithography system
Patent number
11,538,653
Issue date
Dec 27, 2022
Beijing Normal University
Bin Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ionization for tandem ion mobility spectrometry
Patent number
11,525,803
Issue date
Dec 13, 2022
Hamilton Sundstrand Corporation
Benjamin D. Gardner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam generator with nanowires
Patent number
11,495,429
Issue date
Nov 8, 2022
Centre National de la Recherche Scientifique
Jacques Gierak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High output ion source, ion implanter, and method of operation
Patent number
11,482,397
Issue date
Oct 25, 2022
Applied Materials, Inc.
Craig Richard Chaney
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
GeH4/Ar plasma chemistry for ion implant productivity enhancement
Patent number
11,450,504
Issue date
Sep 20, 2022
Applied Materials, Inc.
Bon-Woong Koo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion source with tubular cathode
Patent number
11,424,097
Issue date
Aug 23, 2022
Applied Materials, Inc.
Bon-Woong Koo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gratings with variable depths formed using planarization for wavegu...
Patent number
11,402,578
Issue date
Aug 2, 2022
Meta Platforms Technologies, LLC
Matthew E. Colburn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion generator and ion implanter
Patent number
11,380,512
Issue date
Jul 5, 2022
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Syuta Ochi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam processing apparatus, electrode assembly, and method of cl...
Patent number
11,355,314
Issue date
Jun 7, 2022
Canon Anelva Corporation
Yasushi Yasumatsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for structuring a decorative of technical pattern in an obje...
Patent number
11,302,515
Issue date
Apr 12, 2022
Comadur S.A.
Alexis Boulmay
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ION GENERATOR AND ION IMPLANTER
Publication number
20240079199
Publication date
Mar 7, 2024
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Syuta Ochi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION MICROSCOPE
Publication number
20240006146
Publication date
Jan 4, 2024
National University of Singapore
Jeroen Anton VAN KAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHODS FOR AUTOMATED PROCESSING OF MULTIPLE SAMPLES IN...
Publication number
20230377833
Publication date
Nov 23, 2023
FEI Company
Michal HROUZEK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HYBRID ION SOURCE FOR ALUMINUM ION GENERATION USING A TARGET HOLDER...
Publication number
20230369006
Publication date
Nov 16, 2023
Applied Materials, Inc.
Graham Wright
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HYBRID ION SOURCE FOR ALUMINUM ION GENERATION USING A TARGET HOLDER...
Publication number
20230369008
Publication date
Nov 16, 2023
Applied Materials, Inc.
Graham Wright
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITION TOOL AND METHOD FOR FILLING DEEP TRENCHES
Publication number
20230360970
Publication date
Nov 9, 2023
Intel Corporation
Elijah V. KARPOV
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION MILLING DEVICE
Publication number
20230352263
Publication date
Nov 2, 2023
Hitachi High-Tech Corporation
Kengo ASAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNED ANGLED ETCHING APPARATUS AND TECHNIQUES PROVIDING SEPARATE...
Publication number
20230335375
Publication date
Oct 19, 2023
Applied Materials, Inc.
Peter F. Kurunczi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMPOSITE ION SOURCE BASED UPON HETEROGENEOUS METAL-METAL FLUORIDE...
Publication number
20230326703
Publication date
Oct 12, 2023
Applied Materials, Inc.
Graham Wright
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
A GAS ION GUN
Publication number
20230307204
Publication date
Sep 28, 2023
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE
Evelyne Salançon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR ALIGNING ELECTRON BEAMS IN MULTI-BEAM INSPECT...
Publication number
20230280293
Publication date
Sep 7, 2023
ASML NETHERLANDS B.V.
Xuerang HU
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR MANUFACTURING SPUTTERING TARGET, METHOD FOR FORMING OXID...
Publication number
20230260785
Publication date
Aug 17, 2023
Semiconductor Energy Laboratory Co., Ltd.
Shunpei YAMAZAKI
B82 - NANO-TECHNOLOGY
Information
Patent Application
OPTICAL SYSTEM ADJUSTMENT METHOD FOR MULTI CHARGED PARTICLE BEAM AP...
Publication number
20230260749
Publication date
Aug 17, 2023
NuFlare Technology, Inc.
Hirofumi MORITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and Method for Milling Sample
Publication number
20230197401
Publication date
Jun 22, 2023
JEOL Ltd.
Munehiro Kozuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SURFACE ANALYSIS SYSTEM COMPRISING A PULSED ELECTRON SOURCE
Publication number
20230170176
Publication date
Jun 1, 2023
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Daniel COMPARAT
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION EXTRACTION ASSEMBLY HAVING VARIABLE ELECTRODE THICKNESS FOR BEA...
Publication number
20230125435
Publication date
Apr 27, 2023
Applied Materials, Inc.
Alexandre Likhanskii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE BEAM SYSTEM WITH MULTI-SOURCE SYSTEM AND MULTI-BEAM PARTIC...
Publication number
20230065475
Publication date
Mar 2, 2023
Carl Zeiss MultiSEM GmbH
Dirk Zeidler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGE CARRIER GENERATION SOURCE
Publication number
20220406559
Publication date
Dec 22, 2022
SCIA SYSTEMS GMBH
Enrico Loos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
AUTOMATIC ADJUSTMENT METHOD AND AUTOMATIC ADJUSTMENT DEVICE OF BEAM...
Publication number
20220384139
Publication date
Dec 1, 2022
United Microelectronics Corp.
Zheng-Yang LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION PROPULSION DEVICE
Publication number
20220348361
Publication date
Nov 3, 2022
Centre National de la Recherche Scientifique
Jacques GIERAK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION GENERATOR AND ION IMPLANTER
Publication number
20220301808
Publication date
Sep 22, 2022
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Syuta Ochi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION GUN AND ION MILLING MACHINE
Publication number
20220285123
Publication date
Sep 8, 2022
Hitachi High-Tech Corporation
Kengo Asai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF MANUFACTURI...
Publication number
20220285170
Publication date
Sep 8, 2022
KIOXIA Corporation
Junichi HASHIMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...
Publication number
20220262598
Publication date
Aug 18, 2022
Canon ANELVA Corporation
Yasushi Yasumatsu
B08 - CLEANING
Information
Patent Application
APPARATUS FOR MULTIPLE CHARGED-PARTICLE BEAMS
Publication number
20220246395
Publication date
Aug 4, 2022
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND SYSTEMS FOR RECLAMATION OF LI-ION CATHODE MATERIALS USI...
Publication number
20220223379
Publication date
Jul 14, 2022
6K Inc.
Richard K. Holman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM SOURCE, SURFACE PROCESSING APPARATUS AND SURF...
Publication number
20220216027
Publication date
Jul 7, 2022
Oxford Instruments Nanotechnology Tools Limited
David PEARSON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA JET SOLID ABLATION-BASED DIRECT ANALYSIS APPARATUS
Publication number
20220208522
Publication date
Jun 30, 2022
CHENGDU ALIEBN SCIENCE AND TECHNOLOGY CO., LTD
Yanting YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MIXED GAS CLUSTER ION BEAM GENERATOR AND MASS SPECTROMETER INCLUDIN...
Publication number
20220157554
Publication date
May 19, 2022
KOREA BASIC SCIENCE INSTITUTE
Sang Ju LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
Publication number
20220148851
Publication date
May 12, 2022
ASML NETHERLANDS B.V.
Weiming REN
H01 - BASIC ELECTRIC ELEMENTS