Lapping plates for working plane surfaces

Industry

CPC
B24B37/12

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BPERFORMING OPERATIONS TRANSPORTING B24Grinding technology B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS B24B37/00Lapping machines or devices Accessories

Current Industry

B24B37/12Lapping plates for working plane surfaces

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing control system, substrate processing control m...
- Patent number 12,036,634
- Issue date Jul 16, 2024
- Ebara Corporation
- Koichi Takeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical mechanical planarization tool
- Patent number 12,030,159
- Issue date Jul 9, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tung-Kai Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing apparatus with contact extension or adjustable...
- Patent number 11,904,429
- Issue date Feb 20, 2024
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
One or more conformal members used in the manufacture of a lapping...
- Patent number 11,826,881
- Issue date Nov 28, 2023
- Seagate Technology LLC
- Mihaela Ruxandra Baurceanu
- B24 - GRINDING POLISHING
Information Patent Grant
Barrier device used in the manufacture of a lapping plate, and rela...
- Patent number 11,780,048
- Issue date Oct 10, 2023
- Seagate Technology LLC
- Chea Phann
- B24 - GRINDING POLISHING
Information Patent Grant
Platen shield cleaning system
- Patent number 11,756,804
- Issue date Sep 12, 2023
- Applied Materials, Inc.
- Shantanu Rajiv Gadgil
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical mechanical planarization tool
- Patent number 11,712,778
- Issue date Aug 1, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tung-Kai Chen
- G01 - MEASURING TESTING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 11,667,007
- Issue date Jun 6, 2023
- Ebara Corporation
- Mitsunori Sugiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Platen shield cleaning system
- Patent number 11,545,371
- Issue date Jan 3, 2023
- Applied Materials, Inc.
- Shantanu Rajiv Gadgil
- B08 - CLEANING
Information Patent Grant
Dual-surface polishing device and dual-surface polishing method
- Patent number 11,440,157
- Issue date Sep 13, 2022
- Sumco Corporation
- Keisuke Esaki
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing device and polishing method
- Patent number 11,331,766
- Issue date May 17, 2022
- Ebara Corporation
- Masayuki Nakanishi
- B24 - GRINDING POLISHING
Information Patent Grant
One or more conformal members used in the manufacture of a lapping...
- Patent number 11,020,838
- Issue date Jun 1, 2021
- Seagate Technology LLC
- Mihaela Ruxandra Baurceanu
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus with a waste liquid receiver
- Patent number 10,850,365
- Issue date Dec 1, 2020
- Shin-Etsu Handotai Co., Ltd.
- Michito Sato
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Chemical mechanical polishing apparatus
- Patent number 10,784,113
- Issue date Sep 22, 2020
- KCTECH CO., LTD.
- Kyunam Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Barrier device used in the manufacture of a lapping plate, and rela...
- Patent number 10,682,737
- Issue date Jun 16, 2020
- Seagate Technology LLC
- Chea Phann
- B24 - GRINDING POLISHING
Information Patent Grant
Platen stopper
- Patent number 10,661,408
- Issue date May 26, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Feng Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Real time profile control for chemical mechanical polishing
- Patent number 10,562,148
- Issue date Feb 18, 2020
- Applied Materials, Inc.
- Shih-Haur Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Grindstone and grinding/polishing device using same
- Patent number 10,414,020
- Issue date Sep 17, 2019
- NANO TEM CO., LTD.
- Atsushi Takada
- B24 - GRINDING POLISHING
Information Patent Grant
Method for forming an abrasive lapping plate
- Patent number 9,403,258
- Issue date Aug 2, 2016
- Seagate Technology LLC
- Raymond Leroy Moudry
- B24 - GRINDING POLISHING
Information Patent Grant
Double side polisher with platen parallelism control
- Patent number 9,180,569
- Issue date Nov 10, 2015
- Sunedison Semiconductor Limited (UEN201334164H)
- Peter D. Albrecht
- B24 - GRINDING POLISHING
Information Patent Grant
Platen for wafer polishing having diamond-ceramic composites
- Patent number 9,149,904
- Issue date Oct 6, 2015
- Seagate Technology LLC
- Raymond Leroy Moudry
- B24 - GRINDING POLISHING
Information Patent Grant
Reducing agglomeration of particles while manufacturing a lapping p...
- Patent number 8,801,496
- Issue date Aug 12, 2014
- HGST Netherlands B.V.
- Richard D. Bunch
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for grinding heated plane of cooler
- Patent number 8,328,601
- Issue date Dec 11, 2012
- Golden Sun News Techniques Co., Ltd.
- Kuo-Len Lin
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing apparatus
- Patent number 8,313,359
- Issue date Nov 20, 2012
- Elpida Memory, Inc.
- Toshiya Saito
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for electrochemical planarization of a workpiece
- Patent number 8,268,135
- Issue date Sep 18, 2012
- Novellus Systems, Inc.
- Ismail Emesh
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Minimal force air bearing for lapping tool
- Patent number 8,241,092
- Issue date Aug 14, 2012
- Veeco Instruments, Inc.
- Tracy Lytle
- B24 - GRINDING POLISHING
Information Patent Grant
Cooler with ground heated plane and grinding method and apparatus t...
- Patent number 8,235,768
- Issue date Aug 7, 2012
- Golden Sun News Techniques Co., Ltd.
- Kuo-Len Lin
- B24 - GRINDING POLISHING
Information Patent Grant
Capillary, capillary polishing method, and capillary polishing appa...
- Patent number 8,147,294
- Issue date Apr 3, 2012
- Fujitsu Limited
- Jun Sasaki
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing with multi-zone slurry delivery
- Patent number 8,128,461
- Issue date Mar 6, 2012
- Novellus Systems, Inc.
- Fergal O'Moore
- B24 - GRINDING POLISHING
Information Patent Grant
Method for the simultaneous grinding of a plurality of semiconducto...
- Patent number 8,113,913
- Issue date Feb 14, 2012
- Siltronic AG
- Georg Pietsch
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING CONTROL SYSTEM, SUBSTRATE PROCESSING CONTROL M...
- Publication number 20240316720
- Publication date Sep 26, 2024
- EBARA CORPORATION
- Koichi TAKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL OF CARRIER HEAD SWEEP AND PLATEN SHAPE
- Publication number 20240139906
- Publication date May 2, 2024
- Applied Materials, Inc.
- Jeonghoon Oh
- B24 - GRINDING POLISHING
Information Patent Application
BARRIER DEVICE USED IN THE MANUFACTURE OF A LAPPING PLATE, AND RELA...
- Publication number 20230405757
- Publication date Dec 21, 2023
- SEAGATE TECHNOLOGY LLC
- Chea Phann
- B24 - GRINDING POLISHING
Information Patent Application
Chemical Mechanical Planarization Tool
- Publication number 20230321789
- Publication date Oct 12, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tung-Kai Chen
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS AND METHOD FOR SELECTIVE MATERIAL REMOVAL DURING POLISHING
- Publication number 20230219189
- Publication date Jul 13, 2023
- Applied Materials, Inc.
- Ashwin CHOCKALINGAM
- B24 - GRINDING POLISHING
Information Patent Application
Platen Shield Cleaning System
- Publication number 20230146929
- Publication date May 11, 2023
- Applied Materials, Inc.
- Shantanu Rajiv Gadgil
- B08 - CLEANING
Information Patent Application
SYSTEM AND METHOD FOR EXCHANGING POLISH PLATE
- Publication number 20220297259
- Publication date Sep 22, 2022
- HERMES TESTING SOLUTIONS INC.
- Tzu-Chien WANG
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHING APPARATUS WITH CONTACT EXTENSION OR ADJUSTABLE...
- Publication number 20220111482
- Publication date Apr 14, 2022
- Applied Materials, Inc.
- Steven M. ZUNIGA
- B24 - GRINDING POLISHING
Information Patent Application
ONE OR MORE CONFORMAL MEMBERS USED IN THE MANUFACTURE OF A LAPPING...
- Publication number 20210268625
- Publication date Sep 2, 2021
- SEAGATE TECHNOLOGY LLC
- Mihaela Ruxandra Baurceanu
- B24 - GRINDING POLISHING
Information Patent Application
CHEMICAL MECHANICAL PLANARIZATION TOOL
- Publication number 20210053184
- Publication date Feb 25, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Tung-Kai Chen
- G01 - MEASURING TESTING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20200298365
- Publication date Sep 24, 2020
- Kabushiki Kaisha Toshiba
- Ken Inazumi
- B24 - GRINDING POLISHING
Information Patent Application
BARRIER DEVICE USED IN THE MANUFACTURE OF A LAPPING PLATE, AND RELA...
- Publication number 20200262025
- Publication date Aug 20, 2020
- SEAGATE TECHNOLOGY LLC
- Chea Phann
- B24 - GRINDING POLISHING
Information Patent Application
PLATEN ASSEMBLY AND METHOD OF ASSEMBLING A PLATEN ASSEMBLY
- Publication number 20200101576
- Publication date Apr 2, 2020
- Applied Materials, Inc.
- Jay GURUSAMY
- B24 - GRINDING POLISHING
Information Patent Application
DUAL-SURFACE POLISHING DEVICE
- Publication number 20190224807
- Publication date Jul 25, 2019
- SUMCO CORPORATION
- Keisuke ESAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20190118332
- Publication date Apr 25, 2019
- EBARA CORPORATION
- Mitsunori SUGIYAMA
- B24 - GRINDING POLISHING
Information Patent Application
REAL TIME PROFILE CONTROL FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20180099374
- Publication date Apr 12, 2018
- Shih-Haur Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BARRIER DEVICE USED IN THE MANUFACTURE OF A LAPPING PLATE, AND RELA...
- Publication number 20180001439
- Publication date Jan 4, 2018
- SEAGATE TECHNOLOGY LLC
- Chea Phann
- B24 - GRINDING POLISHING
Information Patent Application
GRINDSTONE AND GRINDING/POLISHING DEVICE USING SAME
- Publication number 20150258656
- Publication date Sep 17, 2015
- NANO TEM CO., LTD.
- Atsushi Takada
- B24 - GRINDING POLISHING
Information Patent Application
DOUBLE SIDE POLISHER WITH PLATEN PARALLELISM CONTROL
- Publication number 20140170781
- Publication date Jun 19, 2014
- Peter D. Albrecht
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR GRINDING HEATED PLANE OF COOLER
- Publication number 20120276822
- Publication date Nov 1, 2012
- Kuo-Len Lin
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
PRESSURE CONTROLLED POLISHING PLATEN
- Publication number 20120171933
- Publication date Jul 5, 2012
- Applied Materials, Inc.
- Hung Chih Chen
- B24 - GRINDING POLISHING
Information Patent Application
COOLER HAVING GROUND HEATED PLANE FOR COOLING HEATING ELECTRONIC CO...
- Publication number 20120160458
- Publication date Jun 28, 2012
- Kuo-Len Lin
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
METHOD FOR MANUFACTURING GLASS SUBSTRATE FOR MAGNETIC RECORDING MEDIUM
- Publication number 20110189505
- Publication date Aug 4, 2011
- Asahi Glass Company, Limited
- Takeaki ONO
- B24 - GRINDING POLISHING
Information Patent Application
Cutting tool for lapping plate
- Publication number 20100329799
- Publication date Dec 30, 2010
- SAE Magnetic (H.K.) Ltd.
- Yaoliang Pan
- B24 - GRINDING POLISHING
Information Patent Application
COOLER WITH GROUND HEATED PLANE AND GRINDING METHOD AND APPARATUS T...
- Publication number 20100314078
- Publication date Dec 16, 2010
- Kuo-Len LIN
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
System and Method for Polishing Glass
- Publication number 20100227535
- Publication date Sep 9, 2010
- Won-Jae MOON
- B24 - GRINDING POLISHING
Information Patent Application
CHEMICAL MECHANICAL POLISHING APPARATUS
- Publication number 20100197207
- Publication date Aug 5, 2010
- Elpida Memory, Inc.
- Toshiya Saito
- B24 - GRINDING POLISHING
Information Patent Application
METHODS AND APPARATUS FOR SELECTIVELY REMOVING CONDUCTIVE MATERIAL...
- Publication number 20100032314
- Publication date Feb 11, 2010
- Micron Technology, Inc.
- Whonchee Lee
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
POLISHING ARTICLE WITH INTEGRATED WINDOW STRIPE
- Publication number 20090253358
- Publication date Oct 8, 2009
- Applied Materials, Inc.
- Gregory E. Menk
- B24 - GRINDING POLISHING
Information Patent Application
TEMPERATURE CONTROL FOR ECMP PROCESS
- Publication number 20090036032
- Publication date Feb 5, 2009
- Yongqi Hu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Lapping plates for working plane surfaces

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing control system, substrate processing control m...

Chemical mechanical planarization tool

Substrate polishing apparatus with contact extension or adjustable...

One or more conformal members used in the manufacture of a lapping...

Barrier device used in the manufacture of a lapping plate, and rela...

Platen shield cleaning system

Chemical mechanical planarization tool

Polishing apparatus and polishing method

Platen shield cleaning system

Dual-surface polishing device and dual-surface polishing method

Substrate polishing device and polishing method

One or more conformal members used in the manufacture of a lapping...

Polishing apparatus with a waste liquid receiver

Chemical mechanical polishing apparatus

Barrier device used in the manufacture of a lapping plate, and rela...

Platen stopper

Real time profile control for chemical mechanical polishing

Grindstone and grinding/polishing device using same

Method for forming an abrasive lapping plate

Double side polisher with platen parallelism control

Platen for wafer polishing having diamond-ceramic composites

Reducing agglomeration of particles while manufacturing a lapping p...

Apparatus for grinding heated plane of cooler

Chemical mechanical polishing apparatus

Method and apparatus for electrochemical planarization of a workpiece

Minimal force air bearing for lapping tool

Cooler with ground heated plane and grinding method and apparatus t...

Capillary, capillary polishing method, and capillary polishing appa...

Chemical mechanical polishing with multi-zone slurry delivery

Method for the simultaneous grinding of a plurality of semiconducto...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING CONTROL SYSTEM, SUBSTRATE PROCESSING CONTROL M...

CONTROL OF CARRIER HEAD SWEEP AND PLATEN SHAPE

BARRIER DEVICE USED IN THE MANUFACTURE OF A LAPPING PLATE, AND RELA...

Chemical Mechanical Planarization Tool

APPARATUS AND METHOD FOR SELECTIVE MATERIAL REMOVAL DURING POLISHING

Platen Shield Cleaning System

SYSTEM AND METHOD FOR EXCHANGING POLISH PLATE

SUBSTRATE POLISHING APPARATUS WITH CONTACT EXTENSION OR ADJUSTABLE...

ONE OR MORE CONFORMAL MEMBERS USED IN THE MANUFACTURE OF A LAPPING...

CHEMICAL MECHANICAL PLANARIZATION TOOL

POLISHING APPARATUS AND POLISHING METHOD

BARRIER DEVICE USED IN THE MANUFACTURE OF A LAPPING PLATE, AND RELA...

PLATEN ASSEMBLY AND METHOD OF ASSEMBLING A PLATEN ASSEMBLY

DUAL-SURFACE POLISHING DEVICE

POLISHING APPARATUS AND POLISHING METHOD

REAL TIME PROFILE CONTROL FOR CHEMICAL MECHANICAL POLISHING

BARRIER DEVICE USED IN THE MANUFACTURE OF A LAPPING PLATE, AND RELA...

GRINDSTONE AND GRINDING/POLISHING DEVICE USING SAME

DOUBLE SIDE POLISHER WITH PLATEN PARALLELISM CONTROL

APPARATUS FOR GRINDING HEATED PLANE OF COOLER

PRESSURE CONTROLLED POLISHING PLATEN

COOLER HAVING GROUND HEATED PLANE FOR COOLING HEATING ELECTRONIC CO...

METHOD FOR MANUFACTURING GLASS SUBSTRATE FOR MAGNETIC RECORDING MEDIUM

Cutting tool for lapping plate

COOLER WITH GROUND HEATED PLANE AND GRINDING METHOD AND APPARATUS T...

System and Method for Polishing Glass

CHEMICAL MECHANICAL POLISHING APPARATUS

METHODS AND APPARATUS FOR SELECTIVELY REMOVING CONDUCTIVE MATERIAL...

POLISHING ARTICLE WITH INTEGRATED WINDOW STRIPE

TEMPERATURE CONTROL FOR ECMP PROCESS