Lithographic processes using patterning methods other than those involving the exposure to radiation

Industry

CPC
G03F7/0002

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/0002Lithographic processes using patterning methods other than those involving the exposure to radiation

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method of forming patterns on substrate by double nanoimprint litho...
- Patent number 11,960,203
- Issue date Apr 16, 2024
- United Microelectronics Corp.
- Yi-Chieh Lai
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Photocurable composition, method for producing concave-convex struc...
- Patent number 11,958,971
- Issue date Apr 16, 2024
- Mitsui Chemicals, Inc.
- Takashi Oda
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Microlithographic fabrication of structures
- Patent number 11,960,204
- Issue date Apr 16, 2024
- Molecular Imprints, Inc.
- Vikramjit Singh
- G02 - OPTICS
Information Patent Grant
Imprint apparatus, imprint method, and manufacturing method of semi...
- Patent number 11,953,825
- Issue date Apr 9, 2024
- Kioxia Corporation
- Masayuki Hatano
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lined photobucket structure for back end of line (BEOL) interconnec...
- Patent number 11,953,826
- Issue date Apr 9, 2024
- Intel Corporation
- James M. Blackwell
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods of manufacturing at least a portion of a magnetic layer of...
- Patent number 11,948,614
- Issue date Apr 2, 2024
- Seagate Technology LLC
- Xiaomin Yang
- G11 - INFORMATION STORAGE
Information Patent Grant
Method of manufacturing template and method of forming pattern
- Patent number 11,931,923
- Issue date Mar 19, 2024
- Kioxia Corporation
- Takeharu Motokawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection apparatus, lithography apparatus, and article manufacturi...
- Patent number 11,934,098
- Issue date Mar 19, 2024
- Canon Kabushiki Kaisha
- Tomokazu Taki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprinting method using a solvent to remove a mold and the related...
- Patent number 11,934,097
- Issue date Mar 19, 2024
- EVER RADIANT INCORPORATION
- Sung-Wen Tsai
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Method and apparatus to reduce variation of physical attribute of d...
- Patent number 11,927,883
- Issue date Mar 12, 2024
- Canon Kabushiki Kaisha
- Steven Wayne Burns
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Resin molded article production method and optical component produc...
- Patent number 11,927,884
- Issue date Mar 12, 2024
- Daicel Corporation
- Takeshi Fujikawa
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Fluoropolymer stamp fabrication method
- Patent number 11,927,885
- Issue date Mar 12, 2024
- Applied Materials, Inc.
- Roman Gouk
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint apparatus and product manufacturing method
- Patent number 11,921,423
- Issue date Mar 5, 2024
- Canon Kabushiki Kaisha
- Kenichi Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for producing an array of planar microparticles with surface...
- Patent number 11,921,110
- Issue date Mar 5, 2024
- Consejo Superior de Investigaciones Cientificas (CSIC)
- Jaume Esteve Tintó
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and apparatus for an imaging system
- Patent number 11,915,909
- Issue date Feb 27, 2024
- Frederick A. Flitsch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rectangular substrate for imprint lithography and making method
- Patent number 11,904,521
- Issue date Feb 20, 2024
- Shin-Etsu Chemical Co., Ltd.
- Daiyu Okafuji
- B24 - GRINDING POLISHING
Information Patent Grant
Colored film, manufacturing method of same, and solid-state imaging...
- Patent number 11,908,877
- Issue date Feb 20, 2024
- FUJIFILM Corporation
- Daisuke Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Kit, composition for forming underlayer film for imprinting, lamina...
- Patent number 11,899,361
- Issue date Feb 13, 2024
- FUJIFILM Corporation
- Naoya Shimoju
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
High-density soft-matter electronics
- Patent number 11,903,139
- Issue date Feb 13, 2024
- Carnegie Mellon University
- Carmel Majidi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Imprinting method and imprinting apparatus
- Patent number 11,899,360
- Issue date Feb 13, 2024
- Kioxia Corporation
- Masaki Mitsuyasu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imprint apparatus, imprint method, and article manufacturing method
- Patent number 11,899,362
- Issue date Feb 13, 2024
- Canon Kabushiki Kaisha
- Yosuke Murakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Control method, storage medium, imprint method, and article manufac...
- Patent number 11,890,791
- Issue date Feb 6, 2024
- Canon Kabushiki Kaisha
- Shingo Ishida
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprint system, replica mold manufacturing apparatus, and article m...
- Patent number 11,892,770
- Issue date Feb 6, 2024
- Canon Kabushiki Kaisha
- Yosuke Murakami
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Methods for increasing the density of high-index nanoimprint lithog...
- Patent number 11,892,771
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- Andrew Ceballos
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imprinting apparatus
- Patent number 11,886,110
- Issue date Jan 30, 2024
- Illumina, Inc.
- Timothy J. Merkel
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Process for transfer imprinting
- Patent number 11,880,131
- Issue date Jan 23, 2024
- Arkema France
- Christophe Navarro
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprinted substrates
- Patent number 11,878,299
- Issue date Jan 23, 2024
- Illumina, Inc.
- Hui Han
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming a film or a curable composition, apparatus, and...
- Patent number 11,880,638
- Issue date Jan 23, 2024
- Canon Kabushiki Kaisha
- Shintaro Narioka
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Imprint apparatus and method of manufacturing article
- Patent number 11,880,132
- Issue date Jan 23, 2024
- Canon Kabushiki Kaisha
- Tadao Nakamura
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Imprinted method and patterned layer
- Patent number 11,874,599
- Issue date Jan 16, 2024
- Koninklijke Philips N.V.
- Marcus Antonius Verschuuren
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
IMPRINT APPARATUS AND PRODUCT MANUFACTURING METHOD
- Publication number 20240126165
- Publication date Apr 18, 2024
- Canon Kabushiki Kaisha
- Kenichi Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Nanoparticle Ink Based Patterning Of Inorganic Materials
- Publication number 20240124726
- Publication date Apr 18, 2024
- The Trustees of the University of Pennsylvania
- Akhila Mallavarapu
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD FOR DIRECTED SELF-ASSEMBLY LITHOGRAPHY
- Publication number 20240111217
- Publication date Apr 4, 2024
- Arkema France
- Xavier Chevalier
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PRINTING NANOSTRUCTURE
- Publication number 20240103362
- Publication date Mar 28, 2024
- Korea Institute of Science and Technology
- Jong Min KIM
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMPRINTED METHOD AND PATTERNED LAYER
- Publication number 20240103363
- Publication date Mar 28, 2024
- Koninklijke Philips N.V.
- MARCUS ANTONIUS VERSCHUUREN
- B82 - NANO-TECHNOLOGY
Information Patent Application
PROCESS FOR TRANSFER IMPRINTING
- Publication number 20240103361
- Publication date Mar 28, 2024
- Arkema France
- Christophe Navarro
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
PATTERN FORMING METHOD, MANUFACTURING METHOD OF SEMICONDUCTOR DEVIC...
- Publication number 20240096644
- Publication date Mar 21, 2024
- KIOXIA Corporation
- Koki UEHA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPRINT COMPOSITIONS WITH PASSIVATED NANOPARTICLES AND MATERIALS AN...
- Publication number 20240094630
- Publication date Mar 21, 2024
- Applied Materials, Inc.
- Amita JOSHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR INTEGRATION OF OPTICAL DEVICE FABRICATION WITH SUBSTRATE...
- Publication number 20240094440
- Publication date Mar 21, 2024
- Applied Materials, Inc.
- Andrew CEBALLOS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CLEANING APPARATUS, CLEANING METHOD, IMPRINT APPARATUS, AND METHOD...
- Publication number 20240091825
- Publication date Mar 21, 2024
- Canon Kabushiki Kaisha
- HIROYUKI MARUYAMA
- B08 - CLEANING
Information Patent Application
PATTERN FORMATION METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD...
- Publication number 20240094624
- Publication date Mar 21, 2024
- KIOXIA Corporation
- Masaki MITSUYASU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESIDUAL LAYER THICKNESS MODULATION IN NANOIMPRINT LITHOGRAPHY
- Publication number 20240085782
- Publication date Mar 14, 2024
- Google LLC
- Wei Jin
- G02 - OPTICS
Information Patent Application
METHOD FOR FORMING A FILM OR A CURABLE COMPOSITION, APPARATUS, AND...
- Publication number 20240078365
- Publication date Mar 7, 2024
- Canon Kabushiki Kaisha
- Shintaro Narioka
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR DUAL WAVELENGTH OVERLAY MEASUREMENT WITH FOCUS AT A PHOT...
- Publication number 20240079341
- Publication date Mar 7, 2024
- SANDISK TECHNOLOGIES LLC
- Katsuya KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS, FILM FORMING METHOD, MANUFACTURING METHOD O...
- Publication number 20240069435
- Publication date Feb 29, 2024
- Canon Kabushiki Kaisha
- SHINTARO NARIOKA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
PHOTO-CURABLE COMPOSITION AND METHODS FOR PREPARING CURED FILM, OPT...
- Publication number 20240069438
- Publication date Feb 29, 2024
- Canon Kabushiki Kaisha
- Toshiki Ito
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
DETECTION DEVICE, DETECTION METHOD, LITHOGRAPHY APPARATUS, AND ARTI...
- Publication number 20240069455
- Publication date Feb 29, 2024
- Canon Kabushiki Kaisha
- KOHEI SENSHU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MICRO-TRANSFER PRINTING STAMPS AND COMPONENTS
- Publication number 20240066905
- Publication date Feb 29, 2024
- X Display Company Technology Limited
- Tanya Yvette Moore
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
PATTERNING PROCESS
- Publication number 20240063023
- Publication date Feb 22, 2024
- United Microelectronics Corp.
- Teng Yao Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Method for Structured Replication and Transfer
- Publication number 20240053677
- Publication date Feb 15, 2024
- 3M Innovative Properties Company
- Ashley R. Sonnier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE AND METHOD FOR EMBOSSING MICRO- AND/OR NANOSTRUCTURES
- Publication number 20240053682
- Publication date Feb 15, 2024
- EV GROUP E. THALLNER GMBH
- Jonas Khan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20240045325
- Publication date Feb 8, 2024
- Canon Kabushiki Kaisha
- TOMOHIRO HARAYAMA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
IMPRINTING METHOD, IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20240045347
- Publication date Feb 8, 2024
- Canon Kabushiki Kaisha
- YUJI SAKATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Arrayed Structured Replication Articles and Methods
- Publication number 20240045324
- Publication date Feb 8, 2024
- 3M Innovative Properties Company
- Lucas J. Hunt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR GENERATING CONTROL VALUES FOR OVERLAY CONTROL...
- Publication number 20240036464
- Publication date Feb 1, 2024
- Canon Kabushiki Kaisha
- Nilabh K. Roy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONTROL OF METALLIC CONTAMINATION FROM METAL-CONTAINING PHOTORESIST
- Publication number 20240036474
- Publication date Feb 1, 2024
- LAM RESEARCH CORPORATION
- Daniel PETER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Magnification Ramp Scheme to Mitigate Template Slippage
- Publication number 20240036465
- Publication date Feb 1, 2024
- Canon Kabushiki Kaisha
- Jeffrey Dean KLEIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ADVANCED-PACKAGING HIGH-VOLUME-MODE DIGITAL-LITHOGRAPHY-TOOL
- Publication number 20240027896
- Publication date Jan 25, 2024
- Applied Materials, Inc.
- Shih-Hao Kuo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20240017476
- Publication date Jan 18, 2024
- Canon Kabushiki Kaisha
- SATOSHI IINO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GENERATING EDGE ADJUSTED DROP PATTERNS
- Publication number 20240006209
- Publication date Jan 4, 2024
- Canon Kabushiki Kaisha
- Mehul N. Patel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Lithographic processes using patterning methods other than those involving the exposure to radiation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of forming patterns on substrate by double nanoimprint litho...

Photocurable composition, method for producing concave-convex struc...

Microlithographic fabrication of structures

Imprint apparatus, imprint method, and manufacturing method of semi...

Lined photobucket structure for back end of line (BEOL) interconnec...

Methods of manufacturing at least a portion of a magnetic layer of...

Method of manufacturing template and method of forming pattern

Detection apparatus, lithography apparatus, and article manufacturi...

Imprinting method using a solvent to remove a mold and the related...

Method and apparatus to reduce variation of physical attribute of d...

Resin molded article production method and optical component produc...

Fluoropolymer stamp fabrication method

Imprint apparatus and product manufacturing method

Method for producing an array of planar microparticles with surface...

Method and apparatus for an imaging system

Rectangular substrate for imprint lithography and making method

Colored film, manufacturing method of same, and solid-state imaging...

Kit, composition for forming underlayer film for imprinting, lamina...

High-density soft-matter electronics

Imprinting method and imprinting apparatus

Imprint apparatus, imprint method, and article manufacturing method

Control method, storage medium, imprint method, and article manufac...

Imprint system, replica mold manufacturing apparatus, and article m...

Methods for increasing the density of high-index nanoimprint lithog...

Imprinting apparatus

Process for transfer imprinting

Imprinted substrates

Method for forming a film or a curable composition, apparatus, and...

Imprint apparatus and method of manufacturing article

Imprinted method and patterned layer

Patents Applicationslast 30 patents

IMPRINT APPARATUS AND PRODUCT MANUFACTURING METHOD

Nanoparticle Ink Based Patterning Of Inorganic Materials

METHOD FOR DIRECTED SELF-ASSEMBLY LITHOGRAPHY

METHOD OF PRINTING NANOSTRUCTURE

IMPRINTED METHOD AND PATTERNED LAYER

PROCESS FOR TRANSFER IMPRINTING

PATTERN FORMING METHOD, MANUFACTURING METHOD OF SEMICONDUCTOR DEVIC...

IMPRINT COMPOSITIONS WITH PASSIVATED NANOPARTICLES AND MATERIALS AN...

METHOD FOR INTEGRATION OF OPTICAL DEVICE FABRICATION WITH SUBSTRATE...

CLEANING APPARATUS, CLEANING METHOD, IMPRINT APPARATUS, AND METHOD...

PATTERN FORMATION METHOD, SEMICONDUCTOR DEVICE MANUFACTURING METHOD...

RESIDUAL LAYER THICKNESS MODULATION IN NANOIMPRINT LITHOGRAPHY

METHOD FOR FORMING A FILM OR A CURABLE COMPOSITION, APPARATUS, AND...

METHOD FOR DUAL WAVELENGTH OVERLAY MEASUREMENT WITH FOCUS AT A PHOT...

FILM FORMING APPARATUS, FILM FORMING METHOD, MANUFACTURING METHOD O...

PHOTO-CURABLE COMPOSITION AND METHODS FOR PREPARING CURED FILM, OPT...

DETECTION DEVICE, DETECTION METHOD, LITHOGRAPHY APPARATUS, AND ARTI...

MICRO-TRANSFER PRINTING STAMPS AND COMPONENTS

PATTERNING PROCESS

Apparatus and Method for Structured Replication and Transfer

DEVICE AND METHOD FOR EMBOSSING MICRO- AND/OR NANOSTRUCTURES

IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

IMPRINTING METHOD, IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD

Arrayed Structured Replication Articles and Methods

SYSTEM AND METHOD FOR GENERATING CONTROL VALUES FOR OVERLAY CONTROL...

CONTROL OF METALLIC CONTAMINATION FROM METAL-CONTAINING PHOTORESIST

Magnification Ramp Scheme to Mitigate Template Slippage

ADVANCED-PACKAGING HIGH-VOLUME-MODE DIGITAL-LITHOGRAPHY-TOOL

IMPRINT APPARATUS, IMPRINT METHOD, AND METHOD OF MANUFACTURING ARTICLE

GENERATING EDGE ADJUSTED DROP PATTERNS