Lithographic techniques not provided for in B81C2201/0157

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B81C2201/0159

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

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B81C2201/0159Lithographic techniques not provided for in B81C2201/0157

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method for producing multi-layered type microchannel device using p...
- Patent number 12,032,286
- Issue date Jul 9, 2024
- Asahi Kasei Kabushiki Kaisha
- Hidenori Nagai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High-density soft-matter electronics
- Patent number 11,903,139
- Issue date Feb 13, 2024
- Carnegie Mellon University
- Carmel Majidi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Calcite channel structures with heterogeneous wettability
- Patent number 11,774,437
- Issue date Oct 3, 2023
- Saudi Arabian Oil Company
- Dong Kyu Cha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic devices with electrodes formed as physically separated...
- Patent number 11,673,798
- Issue date Jun 13, 2023
- International Business Machines Corporation
- Gabriel Fernando Puebla Hellmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method to achieve tilted patterning with a through resist thickness...
- Patent number 11,644,757
- Issue date May 9, 2023
- Intel Corporation
- Changhua Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for forming a biological microdevice
- Patent number 11,351,537
- Issue date Jun 7, 2022
- University of Central Florida Research Foundation, Inc.
- Swaminathan Rajaraman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Calcite channel structures with heterogeneous wettability
- Patent number 11,300,554
- Issue date Apr 12, 2022
- Saudi Arabian Oil Company
- Dong Kyu Cha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of providing a plurality of through-holes in a layer of stru...
- Patent number 11,174,155
- Issue date Nov 16, 2021
- Cytosurge AG
- Edin Sarajlic
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated package structure for MEMS element and ASIC chip and met...
- Patent number 11,130,674
- Issue date Sep 28, 2021
- J-METRICS TECHNOLOGY CO., LTD.
- Sheng-Lin Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of enclosed nanochannels using silica nanoparticles
- Patent number 10,976,299
- Issue date Apr 13, 2021
- UNM Rainforest Innovations
- Steven R. J. Brueck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High-density soft-matter electronics
- Patent number 10,945,339
- Issue date Mar 9, 2021
- Carnegie Mellon University
- Carmel Majidi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical-systems processing method, and micro-elect...
- Patent number 10,662,059
- Issue date May 26, 2020
- Hitachi, Ltd.
- Keiji Watanabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS anti-phase vibratory gyroscope
- Patent number 10,612,926
- Issue date Apr 7, 2020
- INSTITUTE OF GEOLOGY AND GEOPHYSICS, CHINESE ACADEMY OF SCIENCES
- Lian Zhong Yu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Gradient structures interfacing microfluidics and nanofluidics, met...
- Patent number 10,551,319
- Issue date Feb 4, 2020
- Princeton University
- Han Cao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microstructured substrate
- Patent number 10,355,302
- Issue date Jul 16, 2019
- Centre National de la Recherche Scientifique
- Christophe Lethien
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated capacitive humidity sensor
- Patent number 10,336,606
- Issue date Jul 2, 2019
- NXP USA, INC.
- Qing Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for forming micro-electro-mechanical system (MEMS) device st...
- Patent number 10,131,539
- Issue date Nov 20, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chin-Han Meng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of enclosed nanochannels using silica nanoparticles
- Patent number 10,060,904
- Issue date Aug 28, 2018
- STC.UNM
- Steven R. J. Brueck
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a plurality of through-holes in a layer of...
- Patent number 9,975,761
- Issue date May 22, 2018
- SmartTip B.V.
- Edin Sarajlic
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Manufacture of microneedles
- Patent number 9,919,916
- Issue date Mar 20, 2018
- Semitechnologies Llimited
- Yufei Lui
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Manufacturing method of micro-electro-mechanical system sensor capa...
- Patent number 9,828,241
- Issue date Nov 28, 2017
- Hyundai Motor Company
- Ilseon Yoo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Gradient structures interfacing microfluidics and nanofluidics, met...
- Patent number 9,733,185
- Issue date Aug 15, 2017
- Princeton University
- Han Cao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with polymer layer, system of a MEMS device with a poly...
- Patent number 9,708,180
- Issue date Jul 18, 2017
- Infineon Technologies AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Open cavity package using chip-embedding technology
- Patent number 9,663,357
- Issue date May 30, 2017
- Texas Instruments Incorporated
- Jie Mao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating suspended MEMS structures
- Patent number 9,656,859
- Issue date May 23, 2017
- The United States of America, as represented by the Secretary of the Navy
- David J. Meyer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for making patterns on the surface of a substrate using bloc...
- Patent number 9,566,610
- Issue date Feb 14, 2017
- Centre National de la Recherche Scientifique (Cnrs)
- Raluca Tiron
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Photostructured magnetic devices and methods for making same
- Patent number 9,433,115
- Issue date Aug 30, 2016
- The Aerospace Corporation
- Henry Helvajian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Massively parallel assembly of composite structures using depletion...
- Patent number 9,051,176
- Issue date Jun 9, 2015
- The Regents of the University of California
- Thomas G. Mason
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electron beam processing with condensed ice
- Patent number 8,790,863
- Issue date Jul 29, 2014
- President and Fellows of Harvard College
- Daniel Branton
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method to fabricate a mould for lithography by nano-imprinting
- Patent number 8,778,195
- Issue date Jul 15, 2014
- Commissariat a l'Energie Atomique
- Stefan Landis
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MANUFACTURING METHOD OF MEMS DEVICE
- Publication number 20240351865
- Publication date Oct 24, 2024
- XINTEC INC.
- Jiun-Yen LAI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR, AND METHOD FOR MANUFACTURING MEMS SENSOR
- Publication number 20240317579
- Publication date Sep 26, 2024
- Rohm Co., Ltd.
- Daisuke KAMINISHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VIBRATION SENSOR AND FABRICA...
- Publication number 20240208801
- Publication date Jun 27, 2024
- UPBEAT TECHNOLOGY Co., Ltd
- Hsi-Wen TUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO ELECTRO MECHANICAL SYSTEM PROBE AND MANUFACTURING METHOD THEREOF
- Publication number 20240174512
- Publication date May 30, 2024
- TAIWAN MASK CORPORATION
- SHANG-KUANG WU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR PACKAGE AND ITS MANUFACTURING METHOD
- Publication number 20230365396
- Publication date Nov 16, 2023
- TDK Corporation
- Toyotaka KOBAYASHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD TO ACHIEVE TILTED PATTERNING WITH A THROUGH RESIST THICKNESS...
- Publication number 20230236517
- Publication date Jul 27, 2023
- Intel Corporation
- Changhua LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Gradient Structures Interfacing Microfluidics and Nanofluidics, Met...
- Publication number 20230110246
- Publication date Apr 13, 2023
- Princeton University
- Han Cao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING MULTI-LAYERED TYPE MICROCHANNEL DEVICE USING P...
- Publication number 20230053900
- Publication date Feb 23, 2023
- Asahi Kasei Kabushiki Kaisha
- Hidenori Nagai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
- Publication number 20230045563
- Publication date Feb 9, 2023
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM PUMP
- Publication number 20220397110
- Publication date Dec 15, 2022
- Microjet Technology Co., Ltd.
- Hao-Jan MOU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS AND PREPARATION METHOD THEREOF
- Publication number 20220324699
- Publication date Oct 13, 2022
- Huawei Technologies Co., Ltd
- Fengpei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUIDIC DEVICES WITH ELECTRODES FORMED AS PHYSICALLY SEPARATED...
- Publication number 20220135399
- Publication date May 5, 2022
- International Business Machines Corporation
- Gabriel Fernando Puebla Hellmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CALCITE CHANNEL STRUCTURES WITH HETEROGENEOUS WETTABILITY
- Publication number 20220107302
- Publication date Apr 7, 2022
- Saudi Arabian Oil Company
- Dong Kyu CHA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Fabricating a Microfluidic Device
- Publication number 20210300752
- Publication date Sep 30, 2021
- IMEC vzw
- Giuseppe Fiorentino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CALCITE CHANNEL STRUCTURES WITH HETEROGENEOUS WETTABILITY
- Publication number 20210215658
- Publication date Jul 15, 2021
- Saudi Arabian Oil Company
- Dong Kyu CHA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD TO ACHIEVE TILTED PATTERNING WITH A THROUGH RESIST THICKNESS...
- Publication number 20210191282
- Publication date Jun 24, 2021
- Intel Corporation
- Changhua LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING MULTI-LAYERED TYPE MICROCHANNEL DEVICE USING P...
- Publication number 20200393754
- Publication date Dec 17, 2020
- Asahi Kasei Kabushiki Kaisha
- Hidenori Nagai
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
INTEGRATED PACKAGE STRUCTURE FOR MEMS ELEMENT AND ASIC CHIP AND MET...
- Publication number 20200262700
- Publication date Aug 20, 2020
- J-METRICS TECHNOLOGY Co., Ltd.
- Sheng-Lin Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of Providing a Plurality of Through-Holes in a Layer of Stru...
- Publication number 20200165125
- Publication date May 28, 2020
- Cytosurge AG
- Edin Sarajlic
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Gradient Structures Interfacing Microfluidics and Nanofluidics, Met...
- Publication number 20200158644
- Publication date May 21, 2020
- Princeton University
- Han Cao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND APPARATUS FOR ETCHING A SUBSTRATE
- Publication number 20190359482
- Publication date Nov 28, 2019
- Institut National de la Sante et de la Recherche Medicale (INSERM)
- Jérôme BELOUGNE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR FORMING A BIOLOGICAL MICRODEVICE
- Publication number 20190240658
- Publication date Aug 8, 2019
- University of Central Florida Research Foundation, Inc.
- Swaminathan RAJARAMAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL-SYSTEMS PROCESSING METHOD, AND MICRO-ELECT...
- Publication number 20190062157
- Publication date Feb 28, 2019
- Hitachi, Ltd
- Keiji WATANABE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FORMING MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE ST...
- Publication number 20180148324
- Publication date May 31, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chin-Han MENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
GRADIENT STRUCTURES INTERFACING MICROFLUIDICS AND NANOFLUIDICS, MET...
- Publication number 20170328835
- Publication date Nov 16, 2017
- Princeton University
- Han Cao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Integrated Capacitive Humidity Sensor
- Publication number 20170247247
- Publication date Aug 31, 2017
- FREESCALE SEMICONDUCTOR, INC.
- Qing Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF ADDRESSING FILM LIFTOFF IN MEMS FABRICATION
- Publication number 20170174510
- Publication date Jun 22, 2017
- TEXAS INSTRUMENTS INCORPORATED
- Earl Vedere Atnip
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ANTI-PHASE VIBRATORY GYROSCOPE
- Publication number 20170167878
- Publication date Jun 15, 2017
- Lian Zhong Yu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF MICRO-ELECTRO-MECHANICAL SYSTEM SENSOR
- Publication number 20170166443
- Publication date Jun 15, 2017
- Hyundai Motor Company
- Ilseon YOO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPEN CAVITY PACKAGE USING CHIP-EMBEDDING TECHNOLOGY
- Publication number 20170015548
- Publication date Jan 19, 2017
- TEXAS INSTRUMENTS INCORPORATED
- Jie Mao
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Lithographic techniques not provided for in B81C2201/0157

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for producing multi-layered type microchannel device using p...

High-density soft-matter electronics

Calcite channel structures with heterogeneous wettability

Microfluidic devices with electrodes formed as physically separated...

Method to achieve tilted patterning with a through resist thickness...

System and method for forming a biological microdevice

Calcite channel structures with heterogeneous wettability

Method of providing a plurality of through-holes in a layer of stru...

Integrated package structure for MEMS element and ASIC chip and met...

Fabrication of enclosed nanochannels using silica nanoparticles

High-density soft-matter electronics

Micro-electro-mechanical-systems processing method, and micro-elect...

MEMS anti-phase vibratory gyroscope

Gradient structures interfacing microfluidics and nanofluidics, met...

Microstructured substrate

Integrated capacitive humidity sensor

Method for forming micro-electro-mechanical system (MEMS) device st...

Fabrication of enclosed nanochannels using silica nanoparticles

Method of manufacturing a plurality of through-holes in a layer of...

Manufacture of microneedles

Manufacturing method of micro-electro-mechanical system sensor capa...

Gradient structures interfacing microfluidics and nanofluidics, met...

MEMS device with polymer layer, system of a MEMS device with a poly...

Open cavity package using chip-embedding technology

Method for fabricating suspended MEMS structures

Method for making patterns on the surface of a substrate using bloc...

Photostructured magnetic devices and methods for making same

Massively parallel assembly of composite structures using depletion...

Electron beam processing with condensed ice

Method to fabricate a mould for lithography by nano-imprinting

Patents Applicationslast 30 patents

MANUFACTURING METHOD OF MEMS DEVICE

MEMS SENSOR, AND METHOD FOR MANUFACTURING MEMS SENSOR

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) VIBRATION SENSOR AND FABRICA...

MICRO ELECTRO MECHANICAL SYSTEM PROBE AND MANUFACTURING METHOD THEREOF

MEMS SENSOR PACKAGE AND ITS MANUFACTURING METHOD

METHOD TO ACHIEVE TILTED PATTERNING WITH A THROUGH RESIST THICKNESS...

Gradient Structures Interfacing Microfluidics and Nanofluidics, Met...

METHOD FOR PRODUCING MULTI-LAYERED TYPE MICROCHANNEL DEVICE USING P...

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP

MICRO-ELECTROMECHANICAL SYSTEM PUMP

MICRO-ELECTRO-MECHANICAL SYSTEMS AND PREPARATION METHOD THEREOF

MICROFLUIDIC DEVICES WITH ELECTRODES FORMED AS PHYSICALLY SEPARATED...

CALCITE CHANNEL STRUCTURES WITH HETEROGENEOUS WETTABILITY

Method for Fabricating a Microfluidic Device

CALCITE CHANNEL STRUCTURES WITH HETEROGENEOUS WETTABILITY

METHOD TO ACHIEVE TILTED PATTERNING WITH A THROUGH RESIST THICKNESS...

METHOD FOR PRODUCING MULTI-LAYERED TYPE MICROCHANNEL DEVICE USING P...

INTEGRATED PACKAGE STRUCTURE FOR MEMS ELEMENT AND ASIC CHIP AND MET...

Method of Providing a Plurality of Through-Holes in a Layer of Stru...

Gradient Structures Interfacing Microfluidics and Nanofluidics, Met...

METHOD AND APPARATUS FOR ETCHING A SUBSTRATE

SYSTEM AND METHOD FOR FORMING A BIOLOGICAL MICRODEVICE

MICRO-ELECTRO-MECHANICAL-SYSTEMS PROCESSING METHOD, AND MICRO-ELECT...

METHOD FOR FORMING MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE ST...

GRADIENT STRUCTURES INTERFACING MICROFLUIDICS AND NANOFLUIDICS, MET...

Integrated Capacitive Humidity Sensor

METHOD OF ADDRESSING FILM LIFTOFF IN MEMS FABRICATION

MEMS ANTI-PHASE VIBRATORY GYROSCOPE

MANUFACTURING METHOD OF MICRO-ELECTRO-MECHANICAL SYSTEM SENSOR

OPEN CAVITY PACKAGE USING CHIP-EMBEDDING TECHNOLOGY