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Maintaining a constant temperature by heating or cooling
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B81B7/009
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B7/00
Micro-structural systems; Auxiliary parts of micro-structural devices or systems
Current Industry
B81B7/009
Maintaining a constant temperature by heating or cooling
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Patents Grants
last 30 patents
Information
Patent Grant
Method for determining at least one temperature compensation parame...
Patent number
11,945,715
Issue date
Apr 2, 2024
Robert Bosch GmbH
Hans-Peter Brueckner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Ovenized MEMS
Patent number
11,909,354
Issue date
Feb 20, 2024
SiTime Corporation
Carl Arft
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Packaged device with die wrapped by a substrate
Patent number
11,887,906
Issue date
Jan 30, 2024
Texas Instruments Incorporated
Sreenivasan K. Koduri
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Apparatus and method for dissipating heat with microelectromechanic...
Patent number
11,760,626
Issue date
Sep 19, 2023
Cisco Technology, Inc.
Joel Richard Goergen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for detecting contamination of a MEMS sensor element
Patent number
11,629,047
Issue date
Apr 18, 2023
Robert Bosch GmbH
Robert Kuells
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wearable display device
Patent number
11,537,184
Issue date
Dec 27, 2022
Microjet Technology Co., Ltd.
Hao-Jan Mou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Centrally anchored MEMS-based active cooling systems
Patent number
11,464,140
Issue date
Oct 4, 2022
Frore Systems Inc.
Ananth Saran Yalamarthy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Centrally anchored MEMS-based active cooling systems
Patent number
11,432,433
Issue date
Aug 30, 2022
Frore Systems Inc.
Ananth Saran Yalamarthy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Gas detector and gas detection method
Patent number
11,385,195
Issue date
Jul 12, 2022
Figaro Engineering Inc.
Kenichi Yoshioka
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Apparatus and method for dissipating heat with microelectromechanic...
Patent number
11,358,860
Issue date
Jun 14, 2022
Cisco Technology, Inc.
Joel Richard Goergen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Packaged device with die wrapped by a substrate
Patent number
11,201,096
Issue date
Dec 14, 2021
Texas Instruments Incorporated
Sreenivasan K. Koduri
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
System with oven control and compensation for detecting motion and/...
Patent number
11,125,772
Issue date
Sep 21, 2021
BLILEY TECHNOLOGIES, INC.
Jay Mitchell
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor structure and manufacturing method thereof
Patent number
10,961,115
Issue date
Mar 30, 2021
Taiwan Semiconductor Manufacturing Company Ltd.
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for operating an integrated MEMS microphone device and integ...
Patent number
10,959,002
Issue date
Mar 23, 2021
ams AG
Naoaki Nishimura
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS cryocooler systems and methods
Patent number
10,927,001
Issue date
Feb 23, 2021
FLIR Systems, Inc.
Andreas Fiedler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical system apparatus with heater
Patent number
10,843,919
Issue date
Nov 24, 2020
Industrial Technology Research Institute
Peng-Jen Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device and method for sensor calibration
Patent number
10,794,728
Issue date
Oct 6, 2020
Invensense, Inc.
Wesley James Emmanouel Teskey
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Temperature stabilized MEMS device
Patent number
10,676,345
Issue date
Jun 9, 2020
Y-SENSORS LTD.
Yishay Netzer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Monolithic phase change heat sink
Patent number
10,597,286
Issue date
Mar 24, 2020
Analog Devices Global
Baoxing Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electromechanical apparatus for thermal energy control
Patent number
10,393,718
Issue date
Aug 27, 2019
Industrial Technology Research Institute
Yu-Wen Hsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
System with oven control and compensation for detecting motion and/...
Patent number
10,386,385
Issue date
Aug 20, 2019
EPACK, INC.
Jay Mitchell
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Gas detector with a thermally uniform MEMS die
Patent number
10,273,149
Issue date
Apr 30, 2019
Carrier Corporation
David P. Potasek
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electronic power device with improved cooling
Patent number
9,711,432
Issue date
Jul 18, 2017
SAFRAN ELECTRONICS & DEFENSE
Jean-Christophe Riou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Vibration device including support portion
Patent number
9,650,238
Issue date
May 16, 2017
Electronics and Telecommunications Research Institute
In Bok Baek
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor structure and manufacturing method thereof
Patent number
9,567,209
Issue date
Feb 14, 2017
Taiwan Semiconductor Manufacturing Company Ltd.
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device with integrated temperature stabilization
Patent number
9,409,768
Issue date
Aug 9, 2016
Teledyne Scientific & Imaging, LLC
Jeffrey F. DeNatale
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical-microwave-quantum transducer
Patent number
9,260,289
Issue date
Feb 16, 2016
Northrop Grumman Systems Corporation
Jae I. Park
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
System and method for miniaturization of synthetic jets
Patent number
9,233,838
Issue date
Jan 12, 2016
General Electric Company
Mehmet Arik
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
System and method for miniaturization of synthetic jets
Patent number
9,233,837
Issue date
Jan 12, 2016
General Electric Company
Mehmet Arik
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
System and method for miniaturization of synthetic jets
Patent number
9,216,899
Issue date
Dec 22, 2015
General Electric Company
Mehmet Arik
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS AND METHOD FOR DISSIPATING HEAT WITH MICROELECTROMECHANIC...
Publication number
20230331545
Publication date
Oct 19, 2023
Cisco Technology, Inc.
Joel Richard Goergen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
HEATING DEVICE AND MICROFLUIDIC APPARATUS COMPRISING THE SAME
Publication number
20230191406
Publication date
Jun 22, 2023
CYTESI, INC.
Tung-Yu WU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20230159322
Publication date
May 25, 2023
Hyundai Motor Company
Dae Sung Kwon
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGING STRUCTURES AND PACKAGING METHODS FOR ULTRASOUND-ON-CHIP D...
Publication number
20230034707
Publication date
Feb 2, 2023
BFLY Operations, Inc
Jianwei Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DRIVING OF PIEZOELECTRICS FOR MEMS-BASED COOLING SYSTEMS
Publication number
20230012794
Publication date
Jan 19, 2023
Frore Systems Inc.
Suryaprakash Ganti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CENTRALLY ANCHORED MEMS-BASED ACTIVE COOLING SYSTEMS
Publication number
20220354021
Publication date
Nov 3, 2022
Frore Systems Inc.
Ananth Saran Yalamarthy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL HEATING DEVICE
Publication number
20220267143
Publication date
Aug 25, 2022
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
Ming-Fa CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
APPARATUS AND METHOD FOR DISSIPATING HEAT WITH MICROELECTROMECHANIC...
Publication number
20220259036
Publication date
Aug 18, 2022
Cisco Technology, Inc.
Joel Richard Goergen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CMOS-MEMS HUMIDITY SENSOR
Publication number
20220244207
Publication date
Aug 4, 2022
HANGZHOU WEIMING XINKE TECHNOLOGY CO., LTD
Han XIAO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TILES HAVING MULTIPLE COOLING CELLS FOR MEMS-BASED COOLING
Publication number
20220081284
Publication date
Mar 17, 2022
Frore Systems Inc.
Suryaprakash Ganti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGED DEVICE WITH DIE WRAPPED BY A SUBSTRATE
Publication number
20220077014
Publication date
Mar 10, 2022
TEXAS INSTRUMENTS INCORPORATED
Sreenivasan K. Koduri
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SENSOR AS WELL AS METHOD FOR OPERATING A MEMS SENSOR
Publication number
20220009769
Publication date
Jan 13, 2022
ROBERT BOSCH GmbH
Arne Dannenberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
WEARABLE DISPLAY DEVICE
Publication number
20210397010
Publication date
Dec 23, 2021
MICROJET TECHNOLOGY CO., LTD.
Hao-Jan Mou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CENTRALLY ANCHORED MEMS-BASED ACTIVE COOLING SYSTEMS
Publication number
20210392788
Publication date
Dec 16, 2021
Frore Systems Inc.
Ananth Saran Yalamarthy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
APPARATUS AND METHOD FOR DISSIPATING HEAT WITH MICROELECTROMECHANIC...
Publication number
20210323811
Publication date
Oct 21, 2021
Cisco Technology, Inc.
Joel Richard Goergen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR DETECTING CONTAMINATION OF A MEMS SENSOR ELEMENT
Publication number
20210300751
Publication date
Sep 30, 2021
ROBERT BOSCH GmbH
Robert Kuells
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CENTRALLY ANCHORED MEMS-BASED ACTIVE COOLING SYSTEMS
Publication number
20210176894
Publication date
Jun 10, 2021
Frore Systems Inc.
Ananth Saran Yalamarthy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR DETERMINING AT LEAST ONE TEMPERATURE COMPENSATION PARAME...
Publication number
20210139318
Publication date
May 13, 2021
ROBERT BOSCH GmbH
Hans-Peter Brueckner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGED DEVICE WITH DIE WRAPPED BY A SUBSTRATE
Publication number
20210013116
Publication date
Jan 14, 2021
TEXAS INSTRUMENTS INCORPORATED
Sreenivasan K. Koduri
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR OPERATING AN INTEGRATED MEMS MICROPHONE DEVICE AND INTEG...
Publication number
20200275178
Publication date
Aug 27, 2020
ams AG
Naoaki NISHIMURA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGING STRUCTURES AND PACKAGING METHODS FOR ULTRASOUND-ON-CHIP D...
Publication number
20200239299
Publication date
Jul 30, 2020
Butterfly Network, Inc.
Jianwei Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
Publication number
20200223688
Publication date
Jul 16, 2020
Taiwan Semiconductor Manufacturing company Ltd.
KUEI-SUNG CHANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS CRYOCOOLER SYSTEMS AND METHODS
Publication number
20200102216
Publication date
Apr 2, 2020
FLIR SYSTEMS, INC.
Andreas Fiedler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEM WITH OVEN CONTROL AND COMPENSATION FOR DETECTING MOTION AND/...
Publication number
20200025795
Publication date
Jan 23, 2020
EPACK, INC.
Jay MITCHELL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Gas Detector and Gas Detection Method
Publication number
20190302046
Publication date
Oct 3, 2019
FIGARO ENGINEERING INC.
Kenichi Yoshioka
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MONOLITHIC PHASE CHANGE HEAT SINK
Publication number
20190039883
Publication date
Feb 7, 2019
ANALOG DEVICES GLOBAL
Baoxing Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEVICE INTEGRATION OF ACTIVE COOLING SYSTEMS
Publication number
20180151468
Publication date
May 31, 2018
Ekaterina AXELROD
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TEMPERATURE STABILIZED MEMS DEVICE
Publication number
20180044173
Publication date
Feb 15, 2018
Y-SENSORS LTD.
Yishay NETZER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
Publication number
20170066646
Publication date
Mar 9, 2017
Taiwan Semiconductor Manufacturing company Ltd.
CHUN-WEN CHENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
GAS DETECTOR WITH A THERMALLY UNIFORM MEMS DIE
Publication number
20170029270
Publication date
Feb 2, 2017
Carrier Corporation
David P. Potasek
B81 - MICRO-STRUCTURAL TECHNOLOGY