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H01J2237/2001
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ELECTRICITY
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Electric elements
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ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/2001
Maintaining constant desired temperature
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Patents Grants
last 30 patents
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Patent Grant
Systems and methods for thermally conditioning a wafer in a charged...
Patent number
12,217,930
Issue date
Feb 4, 2025
ASML Netherlands B.V.
Martijn Petrus Christianus Van Heumen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pedestal thermal profile tuning using multiple heated zones and the...
Patent number
12,215,420
Issue date
Feb 4, 2025
Lam Research Corporation
Gary B. Lind
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High power cable for heated components in RF environment
Patent number
12,217,944
Issue date
Feb 4, 2025
Lam Research Corporation
Seyed Jafar Jafarian-Tehrani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for increasing the surface roughness of a metal layer
Patent number
12,215,430
Issue date
Feb 4, 2025
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Nicolas Posseme
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for plasma etching
Patent number
12,211,672
Issue date
Jan 28, 2025
Samsung Electronics Co., Ltd.
Jongwoo Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Atomic layer etch process using plasma in conjunction with a rapid...
Patent number
12,159,789
Issue date
Dec 3, 2024
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Shawming Ma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum apparatus
Patent number
12,142,512
Issue date
Nov 12, 2024
NuFlare Technology, Inc.
Yoshiaki Shinohara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vibration-free cryogenic cooling
Patent number
12,123,816
Issue date
Oct 22, 2024
FEI Company
Ronald Lamers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for temperature monitoring in cryo-electron microscopy
Patent number
12,070,753
Issue date
Aug 27, 2024
FEI Company
Jakub Drahotsky
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Temperature adjustment method
Patent number
12,068,143
Issue date
Aug 20, 2024
Tokyo Electron Limited
Shin Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Nitriding apparatus and nitriding method
Patent number
12,033,836
Issue date
Jul 9, 2024
Kobe Steel, Ltd.
Maiko Abe
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for etching an etch layer
Patent number
12,020,944
Issue date
Jun 25, 2024
Lam Research Corporation
Nikhil Dole
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Thermal management hardware for uniform temperature control for enh...
Patent number
12,002,668
Issue date
Jun 4, 2024
Applied Materials, Inc.
Srinivasa Rao Yedla
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Fluid transfer system in a charged particle system
Patent number
11,996,262
Issue date
May 28, 2024
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Vacuum transfer assembly
Patent number
11,994,663
Issue date
May 28, 2024
HennyZ B.V.
Hendrik Willem Zandbergen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for plasma etching
Patent number
11,984,304
Issue date
May 14, 2024
Samsung Electronics Co., Ltd.
Jongwoo Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Correction data creating method, substrate processing method, and s...
Patent number
11,923,211
Issue date
Mar 5, 2024
Tokyo Electron Limited
Hiroki Endo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing method
Patent number
11,915,951
Issue date
Feb 27, 2024
HITACHI HIGH-TECH CORPORATION
Hiroyuki Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cryotransfer holder and workstation
Patent number
11,908,655
Issue date
Feb 20, 2024
Gatan, Inc.
Alexander Jozef Gubbens
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching processing method and etching processing apparatus
Patent number
11,901,192
Issue date
Feb 13, 2024
HITACHI HIGH-TECH CORPORATION
Hiroto Otake
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and plasma processing apparatus
Patent number
11,881,410
Issue date
Jan 23, 2024
Tokyo Electron Limited
Yasutaka Hama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High power cable for heated components in RF environment
Patent number
11,837,446
Issue date
Dec 5, 2023
Lam Research Corporation
Seyed Jafar Jafarian-Tehrani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature controlling apparatus, temperature controlling method,...
Patent number
11,837,480
Issue date
Dec 5, 2023
Tokyo Electron Limited
Katsuyuki Koizumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Rotatable stage
Patent number
11,810,750
Issue date
Nov 7, 2023
Quorum Technologies Ltd.
Robert Morrison
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature and bias control of edge ring
Patent number
11,810,768
Issue date
Nov 7, 2023
Applied Materials, Inc.
James Rogers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and methods for thermally conditioning a wafer in a charged...
Patent number
11,804,358
Issue date
Oct 31, 2023
ASML Netherlands B.V.
Martijn Petrus Christianus Van Heumen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of and apparatus for preparing samples for imaging or diffra...
Patent number
11,796,432
Issue date
Oct 24, 2023
Universiteit Maastricht
Franciscus Johannes Theresia Nijpels
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for atomic layer etching
Patent number
11,784,029
Issue date
Oct 10, 2023
Wonik IPS Co., Ltd.
Kwang Seon Jin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,735,392
Issue date
Aug 22, 2023
Tokyo Electron Limited
Daisuke Hayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process kit with adjustable tuning ring for edge uniformity control
Patent number
11,728,143
Issue date
Aug 15, 2023
Applied Materials, Inc.
Yogananda Sarode Vishwanath
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
DIRECTIONAL SELECTIVE FILL OF SILICON OXIDE MATERIALS
Publication number
20250022704
Publication date
Jan 16, 2025
Applied Materials, Inc.
Qiang Ma
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VIBRATION-FREE CRYOGENIC COOLING
Publication number
20250003845
Publication date
Jan 2, 2025
FEI Company
Ronald Lamers
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SAMPLE HOLDER, ELECTRON MICROSCOPE SYSTEM AND SAMPLE OBSERVATION ME...
Publication number
20240429020
Publication date
Dec 26, 2024
Hitachi, Ltd
Akira SUGAWARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESISTIVITY-CONTROLLED DIELECTRIC MATERIALS FOR SUBSTRATE SUPPORTS...
Publication number
20240420933
Publication date
Dec 19, 2024
Applied Materials, Inc.
Amir H. Tavakoli
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240414919
Publication date
Dec 12, 2024
SEMES CO., LTD.
Sung Min CHOI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THERMAL PROCESSING APPARATUS, THERMAL PROCESSING METHOD, AND SUBSTR...
Publication number
20240412989
Publication date
Dec 12, 2024
SEMES CO., LTD.
Young Eun JEON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COOLANT TUBE BLOCK ASSEMBLY AND SEMICONDUCTOR PROCESSING DEVICE INC...
Publication number
20240379334
Publication date
Nov 14, 2024
Samsung Electronics Co., Ltd.
Woojin Jang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA BASED FILM MODIFICATION FOR SEMICONDUCTOR DEVICES
Publication number
20240352575
Publication date
Oct 24, 2024
Applied Materials, Inc.
Timothy J. Miller
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Sample Holder and Sample Processing Apparatus
Publication number
20240331970
Publication date
Oct 3, 2024
JEOL Ltd.
Jun Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD
Publication number
20240331971
Publication date
Oct 3, 2024
ASML NETHERLANDS B.V.
Jurgen VAN SOEST
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DENSIFIED SEAM-FREE SILICON GAP FILL PROCESSES
Publication number
20240331975
Publication date
Oct 3, 2024
Applied Materials, Inc.
Shuchi Sunil Ojha
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHODS FOR CONTROLLING SUBSTRATE TEMPERATURE DURING...
Publication number
20240312770
Publication date
Sep 19, 2024
Applied Materials, Inc.
Jian LI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR ETCHING AN ETCH LAYER
Publication number
20240297050
Publication date
Sep 5, 2024
LAM RESEARCH CORPORATION
Nikhil Dole
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
IMPROVED TEMPERATURE CONTROL IN LIQUID PHASE TRANSMISSION ELECTRON...
Publication number
20240290573
Publication date
Aug 29, 2024
Danmarks Tekniske Universitet
Murat Nulati YESIBOLATI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Air Gap Formation by Physical Vapor Deposition
Publication number
20240271266
Publication date
Aug 15, 2024
Applied Materials, Inc.
Chengyu LIU
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FLUID TRANSFER SYSTEM IN A CHARGED PARTICLE SYSTEM
Publication number
20240274400
Publication date
Aug 15, 2024
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
MAGNETIZATION DEVICE FOR AN ELECTRON MICROSCOPE AND METHOD
Publication number
20240258064
Publication date
Aug 1, 2024
FORSCHUNGSZENTRUM JULICH GmbH
Amir Hossein TAVABI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR PLASMA ETCHING
Publication number
20240258084
Publication date
Aug 1, 2024
Jongwoo Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONDENSATE PRECURSORS AND CONTAMINANT PURGE APPARATUS AND METHODS
Publication number
20240222068
Publication date
Jul 4, 2024
FEI Company
Jing Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA-ENHANCED METHOD OF DEPOSITING MOLYBDENUM
Publication number
20240213027
Publication date
Jun 27, 2024
ASM IP HOLDING B.V.
YoungChol Byun
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240203702
Publication date
Jun 20, 2024
SEMES CO., LTD.
SUNGIK PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ALD PROCESS WITH PLASMA TREATMENT
Publication number
20240203706
Publication date
Jun 20, 2024
TOKYO ELECTRON LIMITED
Jianping Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Charged Particle Beam Apparatus
Publication number
20240177963
Publication date
May 30, 2024
HITACHI HIGH-TECH CORPORATION
Yuki UCHIOKE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LINER STRUCTURE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
Publication number
20240177976
Publication date
May 30, 2024
SEMES CO., LTD.
Hyoungkyu SON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITION METHOD AND DEPOSITION APPARATUS
Publication number
20240170281
Publication date
May 23, 2024
TOKYO ELECTRON LIMITED
Yuya TAKAMURA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SAMPLE HOLDER FOR TRANSMISSION ELECTRON MICROSCOPE, SAMPLE ANALYSIS...
Publication number
20240153734
Publication date
May 9, 2024
Samsung Electronics Co., Ltd.
Yeoseon Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING HIGHLY UNIFORM DIELECTRIC FILM
Publication number
20240145217
Publication date
May 2, 2024
Applied Materials, Inc.
Qintao Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROSTATIC CHUCK ASSEMBLY
Publication number
20240145220
Publication date
May 2, 2024
Applied Materials, Inc.
Jaeyong CHO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
In-Situ Adsorbate Formation for Dielectric Etch
Publication number
20240112888
Publication date
Apr 4, 2024
TOKYO ELECTRON LIMITED
Du Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
In-Situ Adsorbate Formation for Plasma Etch Process
Publication number
20240112887
Publication date
Apr 4, 2024
TOKYO ELECTRON LIMITED
Du Zhang
H01 - BASIC ELECTRIC ELEMENTS