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G03F9/7076
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Parent Industries
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PHYSICS
G03
Photography
G03F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
G03F9/00
Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces
Current Industry
G03F9/7076
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer alignment using form birefringence of targets or product
Patent number
11,971,665
Issue date
Apr 30, 2024
ASML Holding N.V.
Joshua Adams
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Overlay alignment mark and method for measuring overlay error
Patent number
11,934,109
Issue date
Mar 19, 2024
Zhongke Jingyuan Electron Limited, Beijing (CN)
Weimin Ma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Alignment method and associated alignment and lithographic apparatuses
Patent number
11,927,892
Issue date
Mar 12, 2024
ASML Netherlands B.V.
Franciscus Godefridus Casper Bijnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Embedded high-Z marker material and process for alignment of multil...
Patent number
11,823,864
Issue date
Nov 21, 2023
HRL Laboratories, LLC
Christopher Bohn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for disposing substrate and method for manufacturing article
Patent number
11,774,850
Issue date
Oct 3, 2023
Canon Kabushiki Kaisha
Naoki Funabashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor structure
Patent number
11,768,443
Issue date
Sep 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Ching Lee
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Processing system, processing method, measurement apparatus, substr...
Patent number
11,726,412
Issue date
Aug 15, 2023
Canon Kabushiki Kaisha
Shinichi Egashira
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Overlay marks for reducing effect of bottom layer asymmetry
Patent number
11,726,413
Issue date
Aug 15, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Hung-Chih Hsieh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Variable diffraction grating
Patent number
11,703,771
Issue date
Jul 18, 2023
ASML Holding N.V.
Ali Alsaqqa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Measurement apparatus, lithography apparatus and article manufactur...
Patent number
11,693,328
Issue date
Jul 4, 2023
Canon Kabushiki Kaisha
Wataru Yamaguchi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Selecting a set of locations associated with a measurement or featu...
Patent number
11,681,231
Issue date
Jun 20, 2023
ASML Netherlands B.V.
Pierluigi Frisco
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods of alignment, overlay, configuration of marks, manufacturin...
Patent number
11,675,281
Issue date
Jun 13, 2023
ASML Netherlands B.V.
Jin Dai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Self-referencing and self-calibrating interference pattern overlay...
Patent number
11,675,277
Issue date
Jun 13, 2023
KLA Corporation
Dongyue Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for measuring a position of a mark
Patent number
11,650,513
Issue date
May 16, 2023
ASML Netherlands B.V.
Sebastianus Adrianus Goorden
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
3D semiconductor devices and structures with metal layers
Patent number
11,646,309
Issue date
May 9, 2023
Monolithic 3D Inc.
Zvi Or-Bach
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
3D integrated circuit device and structure with hybrid bonding
Patent number
11,605,630
Issue date
Mar 14, 2023
Monolithic 3D Inc.
Zvi Or-Bach
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Compact alignment sensor arrangements
Patent number
11,531,280
Issue date
Dec 20, 2022
ASML Holding N.V.
Tamer Mohamed Tawfik Ahmed Mohamed Elazhary
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pattern forming method and template manufacturing method
Patent number
11,493,846
Issue date
Nov 8, 2022
Kioxia Corporation
Takeharu Motokawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imprint apparatus, imprinting method, and manufacturing method of a...
Patent number
11,454,896
Issue date
Sep 27, 2022
Canon Kabushiki Kaisha
Hiroyuki Koide
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for illumination adjustment
Patent number
11,429,029
Issue date
Aug 30, 2022
ASML Netherlands B.V.
Maurits Van Der Schaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Non-orthogonal target and method for using the same in measuring mi...
Patent number
11,409,205
Issue date
Aug 9, 2022
KLA Corporation
Itay Gdor
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology method, patterning device, apparatus and computer program
Patent number
11,385,553
Issue date
Jul 12, 2022
ASML Netherlands B.V.
Zili Zhou
G01 - MEASURING TESTING
Information
Patent Grant
Overlay-shift measurement system
Patent number
11,378,892
Issue date
Jul 5, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Ching Lee
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Scan signal characterization diagnostics
Patent number
11,347,152
Issue date
May 31, 2022
ASML Netherlands B.V.
Cornelis Melchior Brouwer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and system for manufacturing integrated circuit
Patent number
11,320,746
Issue date
May 3, 2022
Haifeng Pu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Measuring a process parameter for a manufacturing process involving...
Patent number
11,320,745
Issue date
May 3, 2022
ASML Netherlands B.V.
Maurits Van Der Schaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mark pattern in semiconductor device
Patent number
11,296,036
Issue date
Apr 5, 2022
United Microelectronics Corp.
Chih-Kai Kang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selecting a set of locations associated with a measurement or featu...
Patent number
11,294,289
Issue date
Apr 5, 2022
ASML Netherlands B.V.
Pierluigi Frisco
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Overlay marks for reducing effect of bottom layer asymmetry
Patent number
11,294,293
Issue date
Apr 5, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Hung-Chih Hsieh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithography apparatus, determination method, and method of manufact...
Patent number
11,275,319
Issue date
Mar 15, 2022
Canon Kabushiki Kaisha
Koshiro Arahara
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METROLOGY TARGET SIMULATION
Publication number
20240118625
Publication date
Apr 11, 2024
ASML NETHERLANDS B.V.
Markus Gerardus Martinus Maria VAN KRAAIJ
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
3D SEMICONDUCTOR DEVICES AND STRUCTURES WITH METAL LAYERS
Publication number
20240120332
Publication date
Apr 11, 2024
Monolithic 3D Inc.
Zvi Or-Bach
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ALIGNMENT-OVERLAY MARK AND METHOD USING THE SAME
Publication number
20240096813
Publication date
Mar 21, 2024
Micron Technology, Inc.
KAZUKO YAMASHITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
A SUBSTRATE COMPRISING A TARGET ARRANGEMENT, AND ASSOCIATED AT LEAS...
Publication number
20240036480
Publication date
Feb 1, 2024
ASML NETHERLANDS B.V.
Armand Eugene Albert KOOLEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK PLATE, ALIGNMENT MARK AND PHOTOLITHOGRAPHY SYSTEM
Publication number
20240004320
Publication date
Jan 4, 2024
Semiconductor Manufacturing International (Shanghai) Corporation
Wei Hua SANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
TECHNOLOGIES FOR OVERLAY METROLOGY MARKS
Publication number
20230420381
Publication date
Dec 28, 2023
Intel Corporation
Martin N. Weiss
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE BODY AND METHOD FOR MANUFACTURING SEMICONDU...
Publication number
20230408936
Publication date
Dec 21, 2023
KIOXIA Corporation
Manabu TAKAKUWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OVERLAY MARKS FOR REDUCING EFFECT OF BOTTOM LAYER ASYMMETRY
Publication number
20230359135
Publication date
Nov 9, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Hung-Chih Hsieh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSING SYSTEM, PROCESSING METHOD, MEASUREMENT APPARATUS, SUBSTR...
Publication number
20230359134
Publication date
Nov 9, 2023
Canon Kabushiki Kaisha
Shinichi Egashira
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SELF-ALIGNED MULTIPLE PATTERNING MARK
Publication number
20230307377
Publication date
Sep 28, 2023
WINBOND ELECTRONICS CORP.
Chiao-Ling Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTUR...
Publication number
20230288823
Publication date
Sep 14, 2023
Canon Kabushiki Kaisha
Wataru Yamaguchi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Photomask, Optical-Waveguide, Optical Circuit and Method of Manufac...
Publication number
20230259017
Publication date
Aug 17, 2023
Nippon Telegraph and Telephone Corporation
Takashi Go
G02 - OPTICS
Information
Patent Application
SUBSTRATE, PATTERNING DEVICE AND METROLOGY APPARATUSES
Publication number
20230205097
Publication date
Jun 29, 2023
ASML NETHERLANDS B.V.
Mattia MARELLI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MULTIPLE TARGETS ON SUBSTRATE LAYERS FOR LAYER ALIGNMENT
Publication number
20230205104
Publication date
Jun 29, 2023
Shakul TANDON
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ALIGNMENT METHOD AND ASSOCIATED ALIGNMENT AND LITHOGRAPHIC APPARATUSES
Publication number
20230168595
Publication date
Jun 1, 2023
ASML NETHERLANDS B.V.
Edo Maria HULSEBOS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METAL MASK, EVAPORATION METHOD, DISPLAY PANEL AND DISPLAY DEVICE
Publication number
20230167537
Publication date
Jun 1, 2023
MIANYANG BOE OPTOELECTRONICS TECHNOLOGY CO.,LTD.
Hsinju HO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method for Avoiding Damage to Overlay Metrology Mark
Publication number
20230161268
Publication date
May 25, 2023
Shanghai Huali Integrated Circuit Corporation
Chengchang Wei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR MARKS AND FORMING METHODS THEREOF
Publication number
20230122820
Publication date
Apr 20, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC.
Shengan Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHY MEASUREMENT MACHINE AND OPERATING METHOD THEREOF
Publication number
20230114246
Publication date
Apr 13, 2023
HON HAI PRECISION INDUSTRY CO., LTD.
Kuo-Kuei Fu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method for Improving Overlay Metrology Accuracy of Self-Aligned Mul...
Publication number
20230096180
Publication date
Mar 30, 2023
Shanghai Huali Integrated Circuit Corporation
Yuyang Bian
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MARK, TEMPLATE, AND SEMICONDCTOR DEVICE MANUFACTURING METHOD
Publication number
20230092256
Publication date
Mar 23, 2023
KIOXIA Corporation
Sachiko Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE, METHOD FOR MANUFACTURING SAME AND MEMORY
Publication number
20230071603
Publication date
Mar 9, 2023
CHANGXIN MEMORIAL TECHNOLOGIES, INC.
Shaowen QIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE, ELECTRONIC APPARATUS, AND METHOD FOR MANUFACT...
Publication number
20230024469
Publication date
Jan 26, 2023
Sony Semiconductor Solutions Corporation
MASAKI IWAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ALIGNMENT METHOD AND ASSOCIATED ALIGNMENT AND LITHOGRAPHIC APPARATUSES
Publication number
20230004097
Publication date
Jan 5, 2023
ASML NETHERLANDS B.V.
Franciscus Godefridus Casper BIJNEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
VARIABLE DIFFRACTION GRATING
Publication number
20220390861
Publication date
Dec 8, 2022
ASML Holding N.V.
Ali ALSAQQA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ALIGNMENT MARK, MASK AND DISPLAY SUBSTRATE MOTHERBOARD
Publication number
20220373900
Publication date
Nov 24, 2022
BOE TECHNOLOGY GROUP CO., LTD.
Li XIAO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMAGE DEVICE AND MOTHERBOARD FOR IMAGE DEVICE
Publication number
20220350267
Publication date
Nov 3, 2022
SEIKO EPSON CORPORATION
Tomoki YOKOTA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METROLOGY MARK STRUCTURE AND METHOD OF DETERMINING METROLOGY MARK S...
Publication number
20220350268
Publication date
Nov 3, 2022
ASML Holding N.V.
Tamer Mohamed Tawfik Ahmed Mohamed ELAZHARY
G01 - MEASURING TESTING
Information
Patent Application
PROCESSING SYSTEM, PROCESSING METHOD, MEASUREMENT APPARATUS, SUBSTR...
Publication number
20220342324
Publication date
Oct 27, 2022
Canon Kabushiki Kaisha
Shinichi Egashira
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SELF-REFERENCING AND SELF-CALIBRATING INTERFERENCE PATTERN OVERLAY...
Publication number
20220334502
Publication date
Oct 20, 2022
Dongyue Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY