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B81C1/00404

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00404Mask characterised by its size, orientation or shape

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Surface micromachined structures
- Patent number 11,713,243
- Issue date Aug 1, 2023
- Texas Instruments Incorporated
- Patrick Ian Oden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Copper-alloy capping layers for metallization in touch-panel displays
- Patent number 11,640,222
- Issue date May 2, 2023
- Materion Newton, Inc.
- Shuwei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Selective step coverage for micro-fabricated structures
- Patent number 11,499,218
- Issue date Nov 15, 2022
- Si-Ware Systems
- Mostafa Medhat
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Surface micromachined structures
- Patent number 11,434,130
- Issue date Sep 6, 2022
- Texas Instruments Incorporated
- Patrick Ian Oden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Copper-alloy capping layers for metallization in touch-panel displays
- Patent number 11,392,257
- Issue date Jul 19, 2022
- MATERION NEWTON INC.
- Shuwei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 11,261,083
- Issue date Mar 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachined mirror assembly having reflective layers on both sides
- Patent number 11,209,641
- Issue date Dec 28, 2021
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Sae Won Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Superhydrophobic and superoleophobic nanosurfaces
- Patent number 11,090,903
- Issue date Aug 17, 2021
- The Regents of the University of California
- Sungho Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for multiple-patterning nanosphere lithography for fabricat...
- Patent number 11,037,794
- Issue date Jun 15, 2021
- The Regents of the University of California
- Xiaobin Xu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thin-film transistor and method of forming an electrode of a thin-f...
- Patent number 10,916,569
- Issue date Feb 9, 2021
- H.C. Starck Inc.
- Shuwei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Superhydrophobic and superoleophobic nanosurfaces
- Patent number 10,569,506
- Issue date Feb 25, 2020
- The Regents of the University of California
- Sungho Jin
- A01 - AGRICULTURE FORESTRY ANIMAL HUSBANDRY HUNTING TRAPPING FISHING
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 10,562,763
- Issue date Feb 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device
- Patent number 10,513,430
- Issue date Dec 24, 2019
- Sumitomo Precision Products Co., LTD
- Ryohei Uchino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Field emission devices and methods of making thereof
- Patent number 10,504,772
- Issue date Dec 10, 2019
- Infineon Technologies AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and apparatus to control grayscale photolithography
- Patent number 10,466,597
- Issue date Nov 5, 2019
- Texas Instruments Incorporated
- Lucius M. Sherwin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system device and method for manufacturing t...
- Patent number 10,131,533
- Issue date Nov 20, 2018
- Taiwan Semiconductor Manufacturing Company Ltd.
- Shang-Ying Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of etching semiconductor structures with etch gas
- Patent number 10,115,600
- Issue date Oct 30, 2018
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Rahul Gupta
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Polarizer, method of manufacturing the polarizer and display panel...
- Patent number 10,048,418
- Issue date Aug 14, 2018
- Samsung Display Co., Ltd.
- Sung-Won Cho
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for processing photoresist materials and structures
- Patent number 10,049,892
- Issue date Aug 14, 2018
- Tokyo Electron Limited
- Nihar Mohanty
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Protective coating on trench features of a wafer and method of fabr...
- Patent number 10,017,377
- Issue date Jul 10, 2018
- Robert Bosch GmbH
- Mikko VA Suvanto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Superhydrophobic films
- Patent number 9,993,948
- Issue date Jun 12, 2018
- 3M Innovative Properties Company
- Jun-Ying Zhang
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Superhydrophobic and superoleophobic nanosurfaces
- Patent number 9,956,743
- Issue date May 1, 2018
- The Regents of the University of California
- Sungho Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Copper-alloy capping layers for metallization in touch-panel displays
- Patent number 9,929,187
- Issue date Mar 27, 2018
- H.C. Starck Inc.
- Shuwei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wire grid polarizer and method of fabricating the same
- Patent number 9,903,991
- Issue date Feb 27, 2018
- Samsung Display Co., Ltd.
- Eun Ae Kwak
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Self-organization material and pattern formation method
- Patent number 9,859,119
- Issue date Jan 2, 2018
- TOSHIBA MEMORY CORPORATION
- Takeshi Okino
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for modifying spacer profile
- Patent number 9,812,325
- Issue date Nov 7, 2017
- Nihar Mohanty
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Rigid mask for protecting selective portions of a chip, and use of...
- Patent number 9,802,195
- Issue date Oct 31, 2017
- STMicroelectronics S.r.l.
- Alessandro Paolo Bramanti
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Method for manufacturing electronic component
- Patent number 9,611,142
- Issue date Apr 4, 2017
- Sumitomo Precision Products Co., LTD
- Yasuyuki Hirata
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing nanoimprint mold
- Patent number 9,586,343
- Issue date Mar 7, 2017
- Dai Nippon Printing Co., Ltd.
- Takeshi Sakamoto
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Method of manufacturing a MEMS structure and use of the method
- Patent number 9,556,021
- Issue date Jan 31, 2017
- Murata Manufacturing Co., Ltd.
- Altti Torkkeli
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR PRODUCING AT LEAST ONE FIRST AND ONE SECOND MICROMIRROR...
- Publication number 20230066345
- Publication date Mar 2, 2023
- ROBERT BOSCH GmbH
- Heiko Stahl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SURFACE MICROMACHINED STRUCTURES
- Publication number 20220411262
- Publication date Dec 29, 2022
- TEXAS INSTRUMENTS INCORPORATED
- Patrick Ian Oden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COPPER-ALLOY CAPPING LAYERS FOR METALLIZATION IN TOUCH-PANEL DISPLAYS
- Publication number 20220308705
- Publication date Sep 29, 2022
- Shuwei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMACHINED MIRROR ASSEMBLY HAVING REFLECTIVE LAYERS ON BOTH SIDES
- Publication number 20210405347
- Publication date Dec 30, 2021
- Beijing Voyager Technology Co., Ltd.
- Sae Won Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEEP CAVITY ETCHING METHOD
- Publication number 20210371274
- Publication date Dec 2, 2021
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Xiaohui Zhong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COPPER-ALLOY CAPPING LAYERS FOR METALLIZATION IN TOUCH-PANEL DISPLAYS
- Publication number 20210208738
- Publication date Jul 8, 2021
- Shuwei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SURFACE MICROMACHINED STRUCTURES
- Publication number 20210198103
- Publication date Jul 1, 2021
- TEXAS INSTRUMENTS INCORPORATED
- Patrick Ian Oden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMACHINED MIRROR ASSEMBLY HAVING REFLECTIVE LAYERS ON BOTH SIDES
- Publication number 20200209615
- Publication date Jul 2, 2020
- DiDi Research America, LLC
- Sae Won Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FENCE STRUCTURE TO PREVENT STICTION IN A MEMS MOTION SENSOR
- Publication number 20200140265
- Publication date May 7, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND APPARATUS TO CONTROL GRAYSCALE PHOTOLITHOGRAPHY
- Publication number 20200064745
- Publication date Feb 27, 2020
- TEXAS INSTRUMENTS INCORPORATED
- Lucius M. Sherwin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND APPARATUS TO CONTROL GRAYSCALE PHOTOLITHOGRAPHY
- Publication number 20190129298
- Publication date May 2, 2019
- TEXAS INSTRUMENTS INCORPORATED
- Lucius M. Sherwin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM DEVICE AND METHOD FOR MANUFACTURING T...
- Publication number 20180334378
- Publication date Nov 22, 2018
- Taiwan Semiconductor Manufacturing company Ltd.
- SHANG-YING TSAI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUPERHYDROPHOBIC AND SUPEROLEOPHOBIC NANOSURFACES
- Publication number 20180297321
- Publication date Oct 18, 2018
- The Regents of the University of California
- Sungho Jin
- A01 - AGRICULTURE FORESTRY ANIMAL HUSBANDRY HUNTING TRAPPING FISHING
Information Patent Application
COPPER-ALLOY CAPPING LAYERS FOR METALLIZATION IN TOUCH-PANEL DISPLAYS
- Publication number 20180175075
- Publication date Jun 21, 2018
- Shuwei Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WIRE GRID POLARIZER AND METHOD OF FABRICATING THE SAME
- Publication number 20180136382
- Publication date May 17, 2018
- SAMSUNG DISPLAY CO., LTD.
- Eun Ae KWAK
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Protective Coating on Trench Features of a Wafer and Method of Fabr...
- Publication number 20180002165
- Publication date Jan 4, 2018
- Akustica, Inc.
- Mikko VA Suvanto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR ELEMENT AND METHOD OF MANUFACTURING THE SAME
- Publication number 20170001857
- Publication date Jan 5, 2017
- Samsung Electro-Mechanics Co., Ltd.
- Dae Hun JEONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH NON-PLANAR FEATURES
- Publication number 20150266727
- Publication date Sep 24, 2015
- TEXAS INSTRUMENTS INCORPORATED
- James C. Baker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND DEVICES FOR IMMOBILIZATION OF SINGLE PARTICLES IN A VIR...
- Publication number 20140329722
- Publication date Nov 6, 2014
- SANDIA CORPORATION
- Thomas D. Perroud
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Devices and Methods of Forming Thereof
- Publication number 20140264651
- Publication date Sep 18, 2014
- INFINEON TECHNOLOGIES AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Novel Micropores and Methods of Making and Using Thereof
- Publication number 20140099241
- Publication date Apr 10, 2014
- SANDIA CORPORATION
- Thomas D. Perroud
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS lithography mask with improved tungsten deposition topography...
- Publication number 20110236805
- Publication date Sep 29, 2011
- PixArt Imaging Company
- Hsin-Hui Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FORMING TRENCHES IN A SEMICONDUCTOR COMPONENT
- Publication number 20110169125
- Publication date Jul 14, 2011
- Jochen REINMUTH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR TRANSFERRING NANOSTRUCTURES INTO A SUBSTRATE
- Publication number 20110135881
- Publication date Jun 9, 2011
- NMI Naturwissenschaftliches und Medizinisches Institut an der Universitaet Tu...
- Claus Burkhardt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods and Devices for Immobilization of Single Particles
- Publication number 20110028351
- Publication date Feb 3, 2011
- Thomas D. Perroud
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Novel Micropores and Methods of Making and Using Thereof
- Publication number 20110024368
- Publication date Feb 3, 2011
- Thomas D. Perroud
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Directed self-assembly of block copolymers using segmented prepatterns
- Publication number 20100294740
- Publication date Nov 25, 2010
- International Business Machines Corporation
- Joy Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR, AND MEMS SENSOR MANUFACTURING METHOD
- Publication number 20100193886
- Publication date Aug 5, 2010
- Rohm Co., Ltd.
- Goro Nakatani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SILICON PROCESSING METHOD AND SILICON SUBSTRATE WITH ETCHING MASK
- Publication number 20100051944
- Publication date Mar 4, 2010
- Canon Kabushiki Kaisha
- Takahisa Kato
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING A STRUCTURE BASED ON ANISOTROPIC ETCHING, A...
- Publication number 20090161189
- Publication date Jun 25, 2009
- Canon Kabushiki Kaisha
- Kaoru Noguchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Mask characterised by its size, orientation or shape

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Surface micromachined structures

Copper-alloy capping layers for metallization in touch-panel displays

Selective step coverage for micro-fabricated structures

Surface micromachined structures

Copper-alloy capping layers for metallization in touch-panel displays

Fence structure to prevent stiction in a MEMS motion sensor

Micromachined mirror assembly having reflective layers on both sides

Superhydrophobic and superoleophobic nanosurfaces

Methods for multiple-patterning nanosphere lithography for fabricat...

Thin-film transistor and method of forming an electrode of a thin-f...

Superhydrophobic and superoleophobic nanosurfaces

Fence structure to prevent stiction in a MEMS motion sensor

Semiconductor device

Field emission devices and methods of making thereof

Methods and apparatus to control grayscale photolithography

Microelectromechanical system device and method for manufacturing t...

Method of etching semiconductor structures with etch gas

Polarizer, method of manufacturing the polarizer and display panel...

Method for processing photoresist materials and structures

Protective coating on trench features of a wafer and method of fabr...

Superhydrophobic films

Superhydrophobic and superoleophobic nanosurfaces

Copper-alloy capping layers for metallization in touch-panel displays

Wire grid polarizer and method of fabricating the same

Self-organization material and pattern formation method

Method for modifying spacer profile

Rigid mask for protecting selective portions of a chip, and use of...

Method for manufacturing electronic component

Method for producing nanoimprint mold

Method of manufacturing a MEMS structure and use of the method

Patents Applicationslast 30 patents

METHOD FOR PRODUCING AT LEAST ONE FIRST AND ONE SECOND MICROMIRROR...

SURFACE MICROMACHINED STRUCTURES

COPPER-ALLOY CAPPING LAYERS FOR METALLIZATION IN TOUCH-PANEL DISPLAYS

MICROMACHINED MIRROR ASSEMBLY HAVING REFLECTIVE LAYERS ON BOTH SIDES

DEEP CAVITY ETCHING METHOD

COPPER-ALLOY CAPPING LAYERS FOR METALLIZATION IN TOUCH-PANEL DISPLAYS

SURFACE MICROMACHINED STRUCTURES

MICROMACHINED MIRROR ASSEMBLY HAVING REFLECTIVE LAYERS ON BOTH SIDES

FENCE STRUCTURE TO PREVENT STICTION IN A MEMS MOTION SENSOR

METHODS AND APPARATUS TO CONTROL GRAYSCALE PHOTOLITHOGRAPHY

METHODS AND APPARATUS TO CONTROL GRAYSCALE PHOTOLITHOGRAPHY

MICROELECTROMECHANICAL SYSTEM DEVICE AND METHOD FOR MANUFACTURING T...

SUPERHYDROPHOBIC AND SUPEROLEOPHOBIC NANOSURFACES

COPPER-ALLOY CAPPING LAYERS FOR METALLIZATION IN TOUCH-PANEL DISPLAYS

WIRE GRID POLARIZER AND METHOD OF FABRICATING THE SAME

Protective Coating on Trench Features of a Wafer and Method of Fabr...

SENSOR ELEMENT AND METHOD OF MANUFACTURING THE SAME

MEMS DEVICE WITH NON-PLANAR FEATURES

METHODS AND DEVICES FOR IMMOBILIZATION OF SINGLE PARTICLES IN A VIR...

Semiconductor Devices and Methods of Forming Thereof

Novel Micropores and Methods of Making and Using Thereof

MEMS lithography mask with improved tungsten deposition topography...

METHOD FOR FORMING TRENCHES IN A SEMICONDUCTOR COMPONENT

METHOD FOR TRANSFERRING NANOSTRUCTURES INTO A SUBSTRATE

Methods and Devices for Immobilization of Single Particles

Novel Micropores and Methods of Making and Using Thereof

Directed self-assembly of block copolymers using segmented prepatterns

MEMS SENSOR, AND MEMS SENSOR MANUFACTURING METHOD

SILICON PROCESSING METHOD AND SILICON SUBSTRATE WITH ETCHING MASK

METHOD OF MANUFACTURING A STRUCTURE BASED ON ANISOTROPIC ETCHING, A...