Membership
Tour
Register
Log in
Masks having proximity correction features Preparation thereof
Follow
Industry
CPC
G03F1/36
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
G
PHYSICS
G03
Photography
G03F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
G03F1/00
Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles Mask blanks or pellicles therefor Containers specially adapted therefor Preparation thereof
Current Industry
G03F1/36
Masks having proximity correction features Preparation thereof
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Modifying segments and vertices of mask shapes for mask synthesis
Patent number
11,977,324
Issue date
May 7, 2024
Synopsys, Inc.
Yung-Yu Chen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pattern decomposition method
Patent number
11,977,335
Issue date
May 7, 2024
United Microelectronics Corp.
Min Cheng Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Enforcing mask synthesis consistency across random areas of integra...
Patent number
11,977,327
Issue date
May 7, 2024
Synopsys, Inc.
Thomas Christopher Cecil
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Methods for modeling of a design in reticle enhancement technology
Patent number
11,972,187
Issue date
Apr 30, 2024
D2S, Inc.
P. Jeffrey Ungar
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Measurement method and apparatus
Patent number
11,953,823
Issue date
Apr 9, 2024
ASML Netherlands B.V.
Christopher Alan Spence
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for reticle enhancement technology of a design pattern to be...
Patent number
11,953,824
Issue date
Apr 9, 2024
D2S, Inc.
Akira Fujimura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of mask data synthesis and mask making
Patent number
11,947,254
Issue date
Apr 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Hsu-Ting Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical proximity correction device and method
Patent number
11,934,106
Issue date
Mar 19, 2024
United Microelectronics Corp.
Shu-Yen Liu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical proximity correction method and method of fabricating a sem...
Patent number
11,921,419
Issue date
Mar 5, 2024
Samsung Electronics Co., Ltd.
Sooyong Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for reticle enhancement technology
Patent number
11,921,420
Issue date
Mar 5, 2024
D2S, Inc.
Akira Fujimura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Integrated circuit layout generation method
Patent number
11,907,636
Issue date
Feb 20, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Ke-Ying Su
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Dummy insertion for improving throughput of electron beam lithography
Patent number
11,899,367
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Shih-Ming Chang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Stochastic-aware lithographic models for mask synthesis
Patent number
11,900,042
Issue date
Feb 13, 2024
Synopsys, Inc.
Kevin Dean Lucas
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Reticle constructions and photo-processing methods
Patent number
11,874,595
Issue date
Jan 16, 2024
Micron Technology, Inc.
Chung-Yi Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Thick photo resist layer metrology target
Patent number
11,874,102
Issue date
Jan 16, 2024
KLA Corporation
Lingyi Guo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for continuous passwordless authentication across...
Patent number
11,868,039
Issue date
Jan 9, 2024
SecureAuth Corporation
Shahrokh Shahidzadeh
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Semiconductor devices, methods of designing layouts of semiconducto...
Patent number
11,869,884
Issue date
Jan 9, 2024
Samsung Electronics Co., Ltd.
Jong-Kyu Ryu
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Skeleton representation of layouts for the development of lithograp...
Patent number
11,860,531
Issue date
Jan 2, 2024
Synopsys, Inc.
Thomas C. Cecil
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask defect prevention
Patent number
11,860,530
Issue date
Jan 2, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chi-Ta Lu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Semiconductor device with reduced resistance and method for manufac...
Patent number
11,854,973
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Fei Fan Duan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Methods for making semiconductor-based integrated circuits
Patent number
11,852,967
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Yu-Hao Chen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Integrated circuit with asymmetric mirrored layout analog cells
Patent number
11,847,399
Issue date
Dec 19, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Tao Yang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Mask and method for manufacturing the same, exposure system, method...
Patent number
11,841,615
Issue date
Dec 12, 2023
CHONGQING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD.
Shouqiang Zhang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Dose information generation and communication for lithography manuf...
Patent number
11,822,232
Issue date
Nov 21, 2023
Synopsys, Inc.
Thomas Cecil
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pattern layout and the forming method thereof
Patent number
11,825,641
Issue date
Nov 21, 2023
Fujian Jinhua Integrated Circuit Co., Ltd.
Yifei Yan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for high numerical aperture thru-slit source mask optimization
Patent number
11,815,808
Issue date
Nov 14, 2023
ASML Netherlands B.V.
Kars Zeger Troost
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of manufacturing semiconductor devices
Patent number
11,796,922
Issue date
Oct 24, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Ru-Gun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for generating patterning device pattern at patch boundary
Patent number
11,797,748
Issue date
Oct 24, 2023
ASML Netherlands B.V.
Quan Zhang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Optical proximity correction and photomasks
Patent number
11,789,370
Issue date
Oct 17, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Dong-Yo Jheng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods of determining scattering of radiation by structures of fin...
Patent number
11,789,371
Issue date
Oct 17, 2023
ASML Netherlands B.V.
Yu Cao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
ENHANCED MASK PATTERN-AWARE HEURISTICS FOR OPTICAL PROXIMITY CORREC...
Publication number
20240134269
Publication date
Apr 25, 2024
Intel Corporation
Timothy C. Johnston
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL IMAGING METHOD, DEVICE AND SYSTEM FOR PHOTOLITHOGRAPHY SYSTEM
Publication number
20240126179
Publication date
Apr 18, 2024
Wuhan Yuwei Optical Software Co., Ltd.
Haiqing Wei
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Reticle Constructions and Photo-Processing Methods
Publication number
20240126164
Publication date
Apr 18, 2024
Micron Technology, Inc.
Chung-Yi Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR FORMING PHOTOMASK
Publication number
20240118605
Publication date
Apr 11, 2024
Powerchip Semiconductor Manufacturing Corporation
Chun-Liang Lin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
A MACHINE LEARNING MODEL USING TARGET PATTERN AND REFERENCE LAYER P...
Publication number
20240119582
Publication date
Apr 11, 2024
ASML NETHERLANDS B.V.
Quan ZHANG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
USING A MACHINE TRAINED NETWORK DURING ROUTING TO ACCOUNT FOR OPC COST
Publication number
20240119214
Publication date
Apr 11, 2024
D2S, INC.
Donald Oriordan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
LAYOUT DESIGN METHOD AND METHOD OF MANUFACTURING INTEGRATED CIRCUIT...
Publication number
20240104287
Publication date
Mar 28, 2024
Samsung Electronics Co., Ltd.
Dawoon Choi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DEVICES WITH TRACK-BASED FILL (TBF) METAL PATTERNING
Publication number
20240095439
Publication date
Mar 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Wei-Yi HU
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD OF MAKING INTEGRATED CIRCUIT WITH ASYMMETRIC MIRRORED LAYOUT...
Publication number
20240095438
Publication date
Mar 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Tao YANG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR GENERATING PATTERNING DEVICE PATTERN AT PATCH BOUNDARY
Publication number
20240095437
Publication date
Mar 21, 2024
ASML NETHERLANDS B.V.
Quan ZHANG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PHOTOMASK INCLUDING LINE PATTERN MONITORING MARK AND METHOD OF MANU...
Publication number
20240085778
Publication date
Mar 14, 2024
Samsung Electronics Co., Ltd.
Byungje Jung
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MODELING OF A DESIGN IN RETICLE ENHANCEMENT TECHNOLOGY
Publication number
20240086607
Publication date
Mar 14, 2024
D2S, INC.
P. Jeffrey Ungar
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PROCESS PROXIMITY EFFECT CORRECTION METHOD AND PROCESS PROXIMITY EF...
Publication number
20240085777
Publication date
Mar 14, 2024
Samsung Electronics Co., Ltd.
Dae Young PARK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOMASK STRUCTURE
Publication number
20240085780
Publication date
Mar 14, 2024
United Microelectronics Corp.
Chia-Chen Sun
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOLITHOGRAPHIC MASK OPTIMIZATION METHOD AND SYSTEM WITHOUT BORDE...
Publication number
20240069432
Publication date
Feb 29, 2024
Wuhan Yuwei Optical Software Co., Ltd.
Haiqing Wei
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHODS FOR MAKING SEMICONDUCTOR-BASED INTEGRATED CIRCUITS
Publication number
20240045322
Publication date
Feb 8, 2024
METHODS FOR MAKING SEMICONDUCTOR-BASED INTEGRATED CIRCUITS
YU-HAO CHEN
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
OPTICAL PROXIMITY CORRECTION METHOD USING NEURAL JACOBIAN MATRIX AN...
Publication number
20240045321
Publication date
Feb 8, 2024
Samsung Electronics Co., Ltd.
Moojoon Shin
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Pattern layout and the forming method thereof
Publication number
20240040764
Publication date
Feb 1, 2024
Fujian Jinhua Integrated Circuit Co., Ltd.
Yifei Yan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
Publication number
20240019787
Publication date
Jan 18, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ru-Gun LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LARGE SCALE MASK OPTIMIZATION WITH CONVOLUTIONAL FOURIER NEURAL OPE...
Publication number
20240013033
Publication date
Jan 11, 2024
NVIDIA Corp.
Haoyu Yang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR DETERMINING MASK PATTERN AND TRAINING MACHINE LEARNING M...
Publication number
20240004305
Publication date
Jan 4, 2024
ASML NETHERLANDS B.V.
Jun TAO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF MANUFACTURING PHOTO MASKS AND SEMICONDUCTOR DEVICES
Publication number
20230418151
Publication date
Dec 28, 2023
Taiwan Semiconductor Manufacturing Company,Ltd.
Wen-Hao CHENG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHIP DEVIATION CORRECTION METHOD FOR MASKLESS EXPOSURE MACHINE
Publication number
20230408899
Publication date
Dec 21, 2023
Skybull Technology Co., Ltd.
TA YU LIU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR FORMING PHOTOMASK
Publication number
20230408900
Publication date
Dec 21, 2023
United Microelectronics Corp.
Pin Han Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL PROXIMITY CORRECTION FOR FREE FORM SHAPES
Publication number
20230408901
Publication date
Dec 21, 2023
Siemens Industry Software Inc.
George P. Lippincott
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PIN ACCESS HYBRID CELL HEIGHT DESIGN AND SYSTEM
Publication number
20230401373
Publication date
Dec 14, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Kam-Tou SIO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PHOTOMASK DESIGN CORRECTION METHOD
Publication number
20230400759
Publication date
Dec 14, 2023
United Microelectronics Corp.
Min Cheng Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR GENERATING MASK PATTERN
Publication number
20230393458
Publication date
Dec 7, 2023
ASML NETHERLANDS B.V.
Jaiin MOON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD AND SYSTEM FOR DETERMINING A CHARGED PARTICLE BEAM EXPOSURE...
Publication number
20230386784
Publication date
Nov 30, 2023
D2S, INC.
Akira Fujimura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
INTEGRATED CIRCUIT AND METHOD OF FORMING THE SAME
Publication number
20230385518
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
John LIN
G06 - COMPUTING CALCULATING COUNTING