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PHYSICS
G03
Photography
G03F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
G03F7/00
Photomechanical
Current Industry
G03F7/7095
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Patents Grants
last 30 patents
Information
Patent Grant
Method for manufacturing a membrane assembly
Patent number
11,971,656
Issue date
Apr 30, 2024
ASML Netherlands B.V.
Johan Hendrik Klootwijk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Simultaneous double-side coating of multilayer graphene pellicle by...
Patent number
11,947,256
Issue date
Apr 2, 2024
ASML Netherlands B.V.
Evgenia Kurganova
C01 - INORGANIC CHEMISTRY
Information
Patent Grant
Intermediate layer for mechanical interface
Patent number
11,927,889
Issue date
Mar 12, 2024
ASML Holding N.V.
Kushal Sandeep Doshi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical system in particular for microlithography
Patent number
11,906,753
Issue date
Feb 20, 2024
Carl Zeiss SMT GmbH
Johannes Kraus
G02 - OPTICS
Information
Patent Grant
Optical element and lithography system
Patent number
11,874,525
Issue date
Jan 16, 2024
Carl Zeiss SMT GmbH
Eric Eva
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Electrodeposition compatible anti-reflection coatings for laser int...
Patent number
11,815,822
Issue date
Nov 14, 2023
Toyota Motor Engineering & Manufacturing North America, Inc.
Shailesh N. Joshi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Membrane for EUV lithography
Patent number
11,762,281
Issue date
Sep 19, 2023
ASML Netherlands B.V.
Maxim Aleksandrovich Nasalevich
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography apparatus
Patent number
11,740,566
Issue date
Aug 29, 2023
ASML Netherlands B.V.
Paulus Albertus Van Hal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for generating extreme ultraviolet (EUV), method of manuf...
Patent number
11,729,896
Issue date
Aug 15, 2023
Samsung Electronics Co., Ltd.
Jihoon Na
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for in-situ dynamic protection of a surface and optical asse...
Patent number
11,681,236
Issue date
Jun 20, 2023
Carl Zeiss SMT GmbH
Vitaliy Shklover
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Object in a lithographic apparatus
Patent number
11,550,234
Issue date
Jan 10, 2023
ASML Netherlands B.V.
Andrey Nikipelov
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wide field of view hybrid holographic display
Patent number
11,543,773
Issue date
Jan 3, 2023
Real View Imaging Ltd.
Shaul Alexander Gelman
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Method for in situ protection of an aluminum layer and optical arra...
Patent number
11,525,946
Issue date
Dec 13, 2022
Carl Zeiss SMT GmbH
Vitaliy Shklover
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multilayer mirror for reflecting EUV radiation and method for produ...
Patent number
11,500,137
Issue date
Nov 15, 2022
Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
Philipp Naujok
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Anti-reflection coating
Patent number
11,422,289
Issue date
Aug 23, 2022
ASML Holding N.V.
Parag Vinayak Kelkar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for producing a reflecting optical element of a projection e...
Patent number
11,415,892
Issue date
Aug 16, 2022
Carl Zeiss SMT GmbH
Matthias Kaes
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical device, and method for preventing contamination of optical...
Patent number
11,353,802
Issue date
Jun 7, 2022
Lasertec Corporation
Haruhiko Kusunose
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for treating a reflective optical element for the EUV wavele...
Patent number
11,328,831
Issue date
May 10, 2022
Carl Zeiss SMT GmbH
Christian Grasse
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Illumination optical system for projection lithography
Patent number
11,327,403
Issue date
May 10, 2022
Carl Zeiss SMT GmbH
Tian Gang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
In-situ light detection methods and apparatus for ultraviolet semic...
Patent number
11,215,934
Issue date
Jan 4, 2022
Applied Materials, Inc.
Ralph Peter Antonio
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photomask design for generating plasmonic effect
Patent number
11,211,374
Issue date
Dec 28, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Minfeng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reflective optical element for EUV lithography and method for adapt...
Patent number
11,199,780
Issue date
Dec 14, 2021
Carl Zeiss SMT GmbH
Udo Dinger
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical assembly having a thermally conductive component
Patent number
11,194,119
Issue date
Dec 7, 2021
Carl Zeiss SMT GmbH
Julian Kaller
G02 - OPTICS
Information
Patent Grant
Method for figure correction of optical element by reactive ion etc...
Patent number
11,163,237
Issue date
Nov 2, 2021
The Institute of Optics and Electronics, The Chinese Academy of Science
Zhiwei Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Positioning system for a lithographic apparatus
Patent number
11,156,925
Issue date
Oct 26, 2021
ASML Netherlands B.V.
Maarten Hartger Kimman
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Grant
Optical lithography system for patterning semiconductor devices and...
Patent number
11,143,965
Issue date
Oct 12, 2021
Taiwan Semiconductor Manufacturing Company, Ltd
Hung-Jui Kuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Component for a mirror array for EUV lithography
Patent number
11,126,087
Issue date
Sep 21, 2021
Carl Zeiss SMT GmbH
Eric Eva
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Extreme ultraviolet light condensation mirror, extreme ultraviolet...
Patent number
11,119,421
Issue date
Sep 14, 2021
Gigaphoton Inc.
Tomoyoshi Toida
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical element having a coating for influencing heating radiation...
Patent number
11,112,543
Issue date
Sep 7, 2021
Carl Zeiss SMT GmbH
Boris Bittner
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Mirror, in particular for a microlithographic projection exposure a...
Patent number
11,086,055
Issue date
Aug 10, 2021
Carl Zeiss SMT GmbH
Peter Huber
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
EUV MIRROR WITH IMPROVED OPTICAL STABILITY
Publication number
20240019786
Publication date
Jan 18, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Yung-Yao Lee
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
MEMBRANE FOR EUV LITHOGRAPHY
Publication number
20240004283
Publication date
Jan 4, 2024
ASML NETHERLANDS B.V.
Maxim Aleksandrovich Nasalevich
G02 - OPTICS
Information
Patent Application
PROCESS FOR PRODUCING A REFLECTIVE OPTICAL ELEMENT FOR THE EXTREME...
Publication number
20230417961
Publication date
Dec 28, 2023
Carl Zeiss SMT GMBH
Thomas SCHICKETANZ
B24 - GRINDING POLISHING
Information
Patent Application
IMPRINT APPARATUS, IMPRINT METHOD AND ARTICLE MANUFACTURING METHOD
Publication number
20230400761
Publication date
Dec 14, 2023
Canon Kabushiki Kaisha
Toshihiko Nishida
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
VACUUM SHEET BOND FIXTURING AND FLEXIBLE BURL APPLICATIONS FOR SUBS...
Publication number
20230384694
Publication date
Nov 30, 2023
ASML NETHERLANDS B.V.
Abdullah ALIKHAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLUID PURGING SYSTEM
Publication number
20230314964
Publication date
Oct 5, 2023
ASML NETHERLANDS B.V.
José Nilton FONSECA JUNIOR
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ELECTRODEPOSITION COMPATIBLE ANTI-REFLECTION COATINGS FOR LASER INT...
Publication number
20230314965
Publication date
Oct 5, 2023
Toyota Motor Engineering & Manufacturing North America, Inc.
Shailesh N. Joshi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FO...
Publication number
20230257866
Publication date
Aug 17, 2023
Carl Zeiss SMT GMBH
Anastasia GONCHAR
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
METHOD FOR MANUFACTURING A MEMBRANE ASSEMBLY
Publication number
20230213851
Publication date
Jul 6, 2023
ASML NETHERLANDS B.V.
Johan Hendrik KLOOTWIJK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
REFLECTIVE OPTICAL ELEMENT, ILLUMINATION OPTICAL UNIT, PROJECTION E...
Publication number
20230205090
Publication date
Jun 29, 2023
Carl Zeiss SMT GMBH
Sandro HOFFMANN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL ELEMENT, OPTICAL SYSTEM, LITHOGRAPHY SYSTEM, AND METHOD FOR...
Publication number
20230138850
Publication date
May 4, 2023
Carl Zeiss SMT GMBH
Johannes Kimling
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE HOLDING BOARD, MANUFACTURING METHOD OF DEVICE, AND EXPOSU...
Publication number
20230125632
Publication date
Apr 27, 2023
Canon Kabushiki Kaisha
Shinji Fukui
B32 - LAYERED PRODUCTS
Information
Patent Application
COLORING COMPOSITION, FILM, OPTICAL FILTER, SOLID-STATE IMAGING ELE...
Publication number
20230126240
Publication date
Apr 27, 2023
FUJIFILM CORPORATION
Yushi Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL SYSTEM WITH AN APERTURE STOP
Publication number
20230123115
Publication date
Apr 20, 2023
Carl Zeiss SMT GMBH
Tanja Mueller
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOMASK INCLUDING PELLICLE
Publication number
20230111608
Publication date
Apr 13, 2023
SK HYNIX INC.
Tae Joong HA
C01 - INORGANIC CHEMISTRY
Information
Patent Application
EXTREME ULTRAVIOLET MASK WITH CAPPING LAYER
Publication number
20230116213
Publication date
Apr 13, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Wei-Hao LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MITIGATING LONG-TERM ENERGY DECAY OF LASER DEVICES
Publication number
20230069707
Publication date
Mar 2, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Ping YEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR GENERATING EUV RADIATION
Publication number
20230064760
Publication date
Mar 2, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Sheng-Min WANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMPROVED LITHOGRAPHY APPARATUS
Publication number
20230068088
Publication date
Mar 2, 2023
ASML NETHERLANDS B.V.
Paulus Albertus VAN HAL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR OPERATING AN EUV LITHOGRAPHTY APPARATUS, AND EUV LITHOGR...
Publication number
20230041588
Publication date
Feb 9, 2023
Carl Zeiss SMT GMBH
Moritz BECKER
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
LITHOGRAPHY APPARATUS WITH IMPROVED STABILITY
Publication number
20230024490
Publication date
Jan 26, 2023
ASML NETHERLANDS B.V.
Paulus Albertus VAN HAL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CONDUCTIVE COMPOSITE, RESIST COATING MATERIAL, RESIST, AND METHOD F...
Publication number
20220382155
Publication date
Dec 1, 2022
MITSUBISHI CHEMICAL CORPORATION
Saki NAKANO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PELLICLE FOR EXTREME ULTRAVIOLET LITHOGRAPHY BASED ON YTTRIUM
Publication number
20220326601
Publication date
Oct 13, 2022
Korea Electronics Technology Institute
Hyeong Keun KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HYDROPHOBIC MEMBRANE STRUCTURES, HYDROPHOBIC MEMBRANE STRUCTURE DET...
Publication number
20220317580
Publication date
Oct 6, 2022
CHANGXIN MEMORY TECHNOLOGIES, INC.
ChengKai HO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL ELEMENT AND LITHOGRAPHY SYSTEM
Publication number
20220299731
Publication date
Sep 22, 2022
Carl Zeiss SMT GMBH
Eric Eva
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
OXYGEN-LOSS RESISTANT TOP COATING FOR OPTICAL ELEMENTS
Publication number
20220260756
Publication date
Aug 18, 2022
ASML NETHERLANDS B.V.
Yue Ma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL ELEMENT AND EUV LITHOGRAPHIC SYSTEM
Publication number
20220179329
Publication date
Jun 9, 2022
Carl Zeiss SMT GMBH
Anastasia Gonchar
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
ENHANCED GRATING ALIGNED PATTERNING FOR EUV DIRECT PRINT PROCESSES
Publication number
20220172857
Publication date
Jun 2, 2022
Intel Corporation
Seyedhamed M BARGHI
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
APPARATUS FOR GENERATING EXTREME ULTRAVIOLET (EUV), METHOD OF MANUF...
Publication number
20220167492
Publication date
May 26, 2022
Research & Business Foundation Sungkyunkwan University
JIHOON NA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
INTERMEDIATE LAYER FOR MECHANICAL INTERFACE
Publication number
20220113639
Publication date
Apr 14, 2022
ASML Holding N.V.
Kushal Sandeep DOSHI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY