Mechanisms for moving either the charge or heater

Industry

CPC
C30B31/103

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Parent Industries

CCHEMISTRY METALLURGY C30Crystal growth C30BSINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL REFINING BY ZONE-MELTING OF MATERIAL PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH D... C30B31/00Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure Apparatus therefor

Current Industry

C30B31/103Mechanisms for moving either the charge or heater

Industries

Patents Grantslast 30 patents

Information Patent Grant
Transport system, in particular for transporting silicon monocrysta...
- Patent number 5,324,331
- Issue date Jun 28, 1994
- Florian Fischer
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heated plate rapid thermal processor
- Patent number 5,252,807
- Issue date Oct 12, 1993
- George Chizinsky
- C30 - CRYSTAL GROWTH
Information Patent Grant
Vertical heat treatment apparatus
- Patent number 5,221,201
- Issue date Jun 22, 1993
- Tokyo Electron Sagami Limited
- Kenichi Yamaga
- C30 - CRYSTAL GROWTH
Information Patent Grant
Semiconductor processing furnace door alignment apparatus and method
- Patent number 5,208,961
- Issue date May 11, 1993
- National Semiconductor Corporation
- Marc S. Lajoie
- C30 - CRYSTAL GROWTH
Information Patent Grant
Semiconductor wafer-processing apparatus
- Patent number 5,069,591
- Issue date Dec 3, 1991
- Tel Sagami Limited
- Kenichi Kinoshita
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heated plate rapid thermal processor
- Patent number 5,060,354
- Issue date Oct 29, 1991
- George Chizinsky
- C30 - CRYSTAL GROWTH
Information Patent Grant
Purge tube with floating end cap for loading silicon wafers into a...
- Patent number 4,976,612
- Issue date Dec 11, 1990
- Automated Wafer Systems
- Kenneth H. Adams
- C30 - CRYSTAL GROWTH
Information Patent Grant
Semiconductor wafer treating apparatus
- Patent number 4,955,775
- Issue date Sep 11, 1990
- Tel Sagami Limited
- Wataru Ohkase
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heat-treating apparatus and a method for the same
- Patent number 4,954,079
- Issue date Sep 4, 1990
- Tel Sagami Limited
- Kenichi Yamaga
- C30 - CRYSTAL GROWTH
Information Patent Grant
Heat-treating apparatus
- Patent number 4,938,691
- Issue date Jul 3, 1990
- Tel Sagami Limited
- Wataru Ohkase
- C30 - CRYSTAL GROWTH
Information Patent Grant
Processing apparatus and method
- Patent number 4,911,103
- Issue date Mar 27, 1990
- Texas Instruments Incorporated
- Cecil J. Davis
- C30 - CRYSTAL GROWTH
Information Patent Grant
Cantilever and cold zone assembly for loading and unloading an oven
- Patent number 4,909,185
- Issue date Mar 20, 1990
- Weiss Scientific Glass Blowing Co.
- Robert E. Aldridge
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of carrying objects into and from a furnace, and apparatus f...
- Patent number 4,888,994
- Issue date Dec 26, 1989
- Tel Sagami Limited
- Shin Nakamaki
- C30 - CRYSTAL GROWTH
Information Patent Grant
Cantilevered diffusion chamber atmospheric loading system and method
- Patent number 4,876,225
- Issue date Oct 24, 1989
- Berkeley Quartz Lab, Inc.
- Edward A. Wagner
- C30 - CRYSTAL GROWTH
Information Patent Grant
Cantilever apparatus and method for loading wafer boats into cantil...
- Patent number 4,767,251
- Issue date Aug 30, 1988
- Amtech Systems, Inc.
- J. S. Whang
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus for automatically loading a furnace with semiconductor wa...
- Patent number 4,669,938
- Issue date Jun 2, 1987
- Heraeus Quarzschmelze GmbH
- Geoffrey Hayward
- C30 - CRYSTAL GROWTH
Information Patent Grant
Furnace loading system
- Patent number 4,620,832
- Issue date Nov 4, 1986
- Motion Manufacturing, Inc.
- Norman S. Cay
- C30 - CRYSTAL GROWTH
Information Patent Grant
Modular V-CVD diffusion furnace
- Patent number 4,573,431
- Issue date Mar 4, 1986
- BTU Engineering Corporation
- Robert F. Sarkozy
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus for loading magazines into furnaces
- Patent number 4,523,885
- Issue date Jun 18, 1985
- Heraeus Quarzschmelze GmbH
- Christopher J. Bayne
- C30 - CRYSTAL GROWTH
Information Patent Grant
Diffusion equipment
- Patent number 4,493,287
- Issue date Jan 15, 1985
- Northern Telecom Limited
- Anthony J. Springthorpe
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus for loading and unloading a furnace
- Patent number 4,440,538
- Issue date Apr 3, 1984
- Atomel Products Corporation
- Gerald M. Bowers
- C30 - CRYSTAL GROWTH
Information Patent Grant
Tiltable support bracket for slidably supporting quartz support tub...
- Patent number 4,394,123
- Issue date Jul 19, 1983
- Northern Telecom, Inc.
- Robert S. Higuera
- C30 - CRYSTAL GROWTH
Information Patent Grant
Boat for carrying semiconductor substrates
- Patent number 4,389,967
- Issue date Jun 28, 1983
- Fujitsu Limited
- Haruo Shimoda
- C30 - CRYSTAL GROWTH
Information Patent Grant
Wafer boat
- Patent number 4,355,974
- Issue date Oct 26, 1982
- ASQ Boats, Inc.
- Eui-Wan Lee
- C30 - CRYSTAL GROWTH
Information Patent Grant
Guide wing for a furnace paddle
- Patent number 4,218,214
- Issue date Aug 19, 1980
- RCA Corporation
- Howard T. Nelson
- C30 - CRYSTAL GROWTH
Information Patent Grant
Carrier for processing semiconductor materials
- Patent number 3,998,333
- Issue date Dec 21, 1976
- Iwatsu Electric Co., Ltd.
- Hiroshi Kamada
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for high temperature semiconductor processing
- Patent number 3,943,015
- Issue date Mar 9, 1976
- International Business Machines Corporation
- Paul W. Ing
- C30 - CRYSTAL GROWTH
Information Patent Grant
3842794
- Patent number 3,842,794
- Issue date Oct 22, 1974
- C30 - CRYSTAL GROWTH
Information Patent Grant
3819067
- Patent number 3,819,067
- Issue date Jun 25, 1974
- C30 - CRYSTAL GROWTH
Information Patent Grant
3744650
- Patent number 3,744,650
- Issue date Jul 10, 1973
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
WAFER BOAT STRUCTURE, AS WELL AS WAFER BOAT ASSEMBLY AND DIFFUSION...
- Publication number 20220148899
- Publication date May 12, 2022
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Pengfei GAO
- C30 - CRYSTAL GROWTH

Mechanisms for moving either the charge or heater

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Transport system, in particular for transporting silicon monocrysta...

Heated plate rapid thermal processor

Vertical heat treatment apparatus

Semiconductor processing furnace door alignment apparatus and method

Semiconductor wafer-processing apparatus

Heated plate rapid thermal processor

Purge tube with floating end cap for loading silicon wafers into a...

Semiconductor wafer treating apparatus

Heat-treating apparatus and a method for the same

Heat-treating apparatus

Processing apparatus and method

Cantilever and cold zone assembly for loading and unloading an oven

Method of carrying objects into and from a furnace, and apparatus f...

Cantilevered diffusion chamber atmospheric loading system and method

Cantilever apparatus and method for loading wafer boats into cantil...

Apparatus for automatically loading a furnace with semiconductor wa...

Furnace loading system

Modular V-CVD diffusion furnace

Apparatus for loading magazines into furnaces

Diffusion equipment

Apparatus for loading and unloading a furnace

Tiltable support bracket for slidably supporting quartz support tub...

Boat for carrying semiconductor substrates

Wafer boat

Guide wing for a furnace paddle

Carrier for processing semiconductor materials

Method for high temperature semiconductor processing

3842794

3819067

3744650

Patents Applicationslast 30 patents

WAFER BOAT STRUCTURE, AS WELL AS WAFER BOAT ASSEMBLY AND DIFFUSION...