3842794

Information

• Patent Grant
• 3842794

• References
• Source

• Patent Number

  3,842,794

• Date Filed

  Not available

• Date Issued

  Tuesday, October 22, 1974
  50 years ago

• CPC

  • H01L23/291 - Oxides or nitrides or carbides
  • C30B31/10 - Reaction chambers Selection of material therefor
  • C30B31/103 - Mechanisms for moving either the charge or heater
  • C30B31/12 - Heating of the reaction chamber
  • C30B33/005 - Oxydation
  • F27D11/02 - Ohmic resistance heating
  • H01L29/00 - Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier
  • H01L2924/0002 - Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
  • Y10S118/90 - Semiconductor vapor doping

• US Classifications

  • 118 - Coating apparatus
  • 219 - Electric heating
  • 392 - Electric resistance heating devices