Methods for controlling internal stress of deposited layers not provided for in B81C2201/0164 - B81C2201/0169

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B81C2201/017

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/017Methods for controlling internal stress of deposited layers not provided for in B81C2201/0164 - B81C2201/0169

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Optical device production method
- Patent number 12,189,114
- Issue date Jan 7, 2025
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Curved cantilever design to reduce stress in MEMS actuator
- Patent number 12,180,064
- Issue date Dec 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for producing a base of an analysis cell for analyzing a bi...
- Patent number 12,157,665
- Issue date Dec 3, 2024
- Robert Bosch GmbH
- Franz Laermer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sharp, vertically aligned nanowire electrode arrays, high-yield fab...
- Patent number 12,157,666
- Issue date Dec 3, 2024
- The Regents of the University of California
- Shadi Dayeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMUT transducer with motion-stopping structure and CMUT transducer...
- Patent number 12,145,838
- Issue date Nov 19, 2024
- Vermon S.A.
- Cyril Meynier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Conductive bond structure to increase membrane sensitivity in MEMS...
- Patent number 12,139,399
- Issue date Nov 12, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hung-Hua Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
- Patent number 12,134,555
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming monocrystalline nickel-titanium films on single c...
- Patent number 12,116,271
- Issue date Oct 15, 2024
- Arizona Board of Regents on behalf of Arizona State University
- Jagannathan Rajagopalan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator with colocated temperature sensor
- Patent number 12,095,447
- Issue date Sep 17, 2024
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Adaptive cavity thickness control for micromachined ultrasonic tran...
- Patent number 12,070,773
- Issue date Aug 27, 2024
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator
- Patent number 11,975,965
- Issue date May 7, 2024
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bipolar transistor type MEMS pressure sensor and preparation method...
- Patent number 11,965,797
- Issue date Apr 23, 2024
- Wuxi Sencoch Semiconductor Co., Ltd.
- Tongqing Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for controlling stress variation in a material...
- Patent number 11,961,722
- Issue date Apr 16, 2024
- SPTS Technologies Limited
- Anthony Wilby
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device production method
- Patent number 11,953,675
- Issue date Apr 9, 2024
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Engineered substrates, free-standing semiconductor microstructures,...
- Patent number 11,952,268
- Issue date Apr 9, 2024
- Lawrence Semiconductor Research Laboratory, Inc.
- Chantal Arena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micromachined ultrasonic transducer and method of fabric...
- Patent number 11,944,998
- Issue date Apr 2, 2024
- Korea Institute of Science and Technology
- Byung Chul Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device manufacturing method, MEMS device, and shutter apparatu...
- Patent number 11,932,535
- Issue date Mar 19, 2024
- Sumitomo Precision Products Co., LTD
- Gen Matsuoka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Curved cantilever design to reduce stress in MEMS actuator
- Patent number 11,932,531
- Issue date Mar 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Signal processing circuit for triple-membrane MEMS device
- Patent number 11,932,533
- Issue date Mar 19, 2024
- Infineon Technologies AG
- Marc Fueldner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device production method
- Patent number 11,906,727
- Issue date Feb 20, 2024
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction bottom cavity surface for micromachined ultrasonic tr...
- Patent number 11,883,845
- Issue date Jan 30, 2024
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bi-layer metal electrode for micromachined ultrasonic transducer de...
- Patent number 11,766,696
- Issue date Sep 26, 2023
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pulse train excitation for capacitive micromachined ultrasonic tran...
- Patent number 11,731,164
- Issue date Aug 22, 2023
- The Board of Trustees of the Leland Stanford Junior University
- Bo Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator
- Patent number 11,724,934
- Issue date Aug 15, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS process power
- Patent number 11,716,906
- Issue date Aug 1, 2023
- QUALCOMM Technologies, Inc.
- Robert J. Littrell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of semiconductor structure
- Patent number 11,708,262
- Issue date Jul 25, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for coating microstructured components
- Patent number 11,701,478
- Issue date Jul 18, 2023
- Boehringer Ingelheim International GmbH
- Daniel Frache
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,693,230
- Issue date Jul 4, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical structure with bonded cover
- Patent number 11,685,650
- Issue date Jun 27, 2023
- SiTime Corporation
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic devices with electrodes formed as physically separated...
- Patent number 11,673,798
- Issue date Jun 13, 2023
- International Business Machines Corporation
- Gabriel Fernando Puebla Hellmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
PROTECTIVE COATING FOR COPPER SURFACE IN SENSOR
- Publication number 20250042723
- Publication date Feb 6, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Jeffrey S. Solas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANCHOR STRUCTURE
- Publication number 20250033951
- Publication date Jan 30, 2025
- Bishnu Prasanna Gogoi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
APPARATUS FOR MASK-FREE MATERIAL DEPOSITION ON ARBITRARY SUBSTRATE...
- Publication number 20250033141
- Publication date Jan 30, 2025
- THE HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Sen YANG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
MEMS Array Structures for Gyroscopes with High Resonant Frequencies
- Publication number 20250026629
- Publication date Jan 23, 2025
- NXP USA, Inc.
- Jun Tang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT AND PIEZOELECTRIC ACOUSTIC DEVICE
- Publication number 20250026631
- Publication date Jan 23, 2025
- Murata Manufacturing Co., Ltd.
- Hiroshi MATSUBARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FOUNDRY-COMPATIBLE PROCESS FOR INTEGRATED MICRO-SPEAKER AND MICROPHONE
- Publication number 20250030998
- Publication date Jan 23, 2025
- Vibrant Microsystems Inc.
- Joseph Doll
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS
- Publication number 20250019224
- Publication date Jan 16, 2025
- BOE TECHNOLOGY GROUP CO., LTD.
- Jianxing LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MONOCRYSTALLINE NICKEL-TITANIUM FILMS ON SINGLE CRYSTAL SILICON SUB...
- Publication number 20250019230
- Publication date Jan 16, 2025
- Jagannathan Rajagopalan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF
- Publication number 20250011165
- Publication date Jan 9, 2025
- Vanguard International Semiconductor Corporation
- JIA JIE XIA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORMING A PASSIVATION COATING FOR MEMS DEVICES
- Publication number 20250002334
- Publication date Jan 2, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS RESONATOR AND METHOD FOR PRODUCING THE SAME
- Publication number 20240425360
- Publication date Dec 26, 2024
- Rohm Co., Ltd.
- Toma FUJITA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...
- Publication number 20240425365
- Publication date Dec 26, 2024
- SENSONICS TRANSDUCERS PRIVATE LIMITED
- Brishbhan Singh PANWAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ADAPTIVE CAVITY THICKNESS CONTROL FOR MICROMACHINED ULTRASONIC TRAN...
- Publication number 20240416385
- Publication date Dec 19, 2024
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
System And Method For Generating Fluid Flow
- Publication number 20240409399
- Publication date Dec 12, 2024
- Sonicedge Ltd.
- Mordehai Margalit
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MAKING
- Publication number 20240409395
- Publication date Dec 12, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Chih-Chung LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRICAL CONTACTS USING AN ARRAY OF MICROMACHINED FLEXURES
- Publication number 20240405454
- Publication date Dec 5, 2024
- Atomic Machines, Inc.
- Fabian Goericke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD
- Publication number 20240375940
- Publication date Nov 14, 2024
- Murata Manufacturing Co., Ltd.
- Masakazu FUKUMITSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DOUBLE NOTCH ETCH TO REDUCE UNDER CUT OF MICRO ELECTRO-MECHANICAL S...
- Publication number 20240375942
- Publication date Nov 14, 2024
- Calient Technologies, Inc.
- Paul WALDROP
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CONDUCTIVE BOND STRUCTURE TO INCREASE MEMBRANE SENSITIVTY IN MEMS D...
- Publication number 20240367965
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hung-Hua Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT, OPTICAL SCANNING DEVICE, AND DISTANCE MEASURING DEVICE
- Publication number 20240317577
- Publication date Sep 26, 2024
- Mitsubishi Electric Corporation
- Yusuke SHIRAYANAGI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR, AND METHOD FOR MANUFACTURING MEMS SENSOR
- Publication number 20240317579
- Publication date Sep 26, 2024
- Rohm Co., Ltd.
- Daisuke KAMINISHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ULTRATHIN FREE-STANDING SOLID STATE MEMBRANE CHIPS AND METHODS OF M...
- Publication number 20240246812
- Publication date Jul 25, 2024
- University of Washington
- Bo Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...
- Publication number 20240208805
- Publication date Jun 27, 2024
- Lawrence Semiconductor Research Laboratory, Inc.
- Chantal Arena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS BUMP STOPPER SURFACE FEATURES
- Publication number 20240208800
- Publication date Jun 27, 2024
- KNOWLES ELECTRONICS, LLC
- Ken Deng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
EMBEDDED PERMEABLE POLYSILICON LAYER IN MEMS DEVICE FOR MULTIPLE CA...
- Publication number 20240199415
- Publication date Jun 20, 2024
- STMicroelectronics International N.V.
- Federico VERCESI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR COMPONENT AND METHOD FOR MANUFACTURING A SEMICONDUCTO...
- Publication number 20240190702
- Publication date Jun 13, 2024
- ROBERT BOSCH GmbH
- Gregor Schuermann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL DEVICE PRODUCTION METHOD
- Publication number 20240192483
- Publication date Jun 13, 2024
- HAMAMATSU PHOTONICS K. K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR
- Publication number 20240182292
- Publication date Jun 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FAILURE DETECTION METHOD, FAILURE DETECTION SYSTEM, AND ELECTROSPRA...
- Publication number 20240182291
- Publication date Jun 6, 2024
- Hitachi, Ltd
- Shun Kumano
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SIGNAL PROCESSING CIRCUIT FOR TRIPLE-MEMBRANE MEMS DEVICE
- Publication number 20240174514
- Publication date May 30, 2024
- INFINEON TECHNOLOGIES AG
- Marc Fueldner
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Methods for controlling internal stress of deposited layers not provided for in B81C2201/0164 - B81C2201/0169

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Optical device production method

Curved cantilever design to reduce stress in MEMS actuator

Process for producing a base of an analysis cell for analyzing a bi...

Sharp, vertically aligned nanowire electrode arrays, high-yield fab...

CMUT transducer with motion-stopping structure and CMUT transducer...

Conductive bond structure to increase membrane sensitivity in MEMS...

Method and structure for CMOS-MEMS thin film encapsulation

Method of forming monocrystalline nickel-titanium films on single c...

MEMS resonator with colocated temperature sensor

Adaptive cavity thickness control for micromachined ultrasonic tran...

MEMS resonator

Bipolar transistor type MEMS pressure sensor and preparation method...

Method and apparatus for controlling stress variation in a material...

Optical device production method

Engineered substrates, free-standing semiconductor microstructures,...

Capacitive micromachined ultrasonic transducer and method of fabric...

MEMS device manufacturing method, MEMS device, and shutter apparatu...

Curved cantilever design to reduce stress in MEMS actuator

Signal processing circuit for triple-membrane MEMS device

Optical device production method

Anti-stiction bottom cavity surface for micromachined ultrasonic tr...

Bi-layer metal electrode for micromachined ultrasonic transducer de...

Pulse train excitation for capacitive micromachined ultrasonic tran...

MEMS resonator

MEMS process power

Manufacturing method of semiconductor structure

Method for coating microstructured components

Optical device

Microelectromechanical structure with bonded cover

Microfluidic devices with electrodes formed as physically separated...

Patents Applicationslast 30 patents

PROTECTIVE COATING FOR COPPER SURFACE IN SENSOR

ANCHOR STRUCTURE

APPARATUS FOR MASK-FREE MATERIAL DEPOSITION ON ARBITRARY SUBSTRATE...

MEMS Array Structures for Gyroscopes with High Resonant Frequencies

MEMS ELEMENT AND PIEZOELECTRIC ACOUSTIC DEVICE

FOUNDRY-COMPATIBLE PROCESS FOR INTEGRATED MICRO-SPEAKER AND MICROPHONE

MEMS DEVICE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC APPARATUS

MONOCRYSTALLINE NICKEL-TITANIUM FILMS ON SINGLE CRYSTAL SILICON SUB...

MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF

FORMING A PASSIVATION COATING FOR MEMS DEVICES

MEMS RESONATOR AND METHOD FOR PRODUCING THE SAME

LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER (CMUT) D...

ADAPTIVE CAVITY THICKNESS CONTROL FOR MICROMACHINED ULTRASONIC TRAN...

System And Method For Generating Fluid Flow

SEMICONDUCTOR DEVICE AND METHOD OF MAKING

ELECTRICAL CONTACTS USING AN ARRAY OF MICROMACHINED FLEXURES

RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD

DOUBLE NOTCH ETCH TO REDUCE UNDER CUT OF MICRO ELECTRO-MECHANICAL S...

CONDUCTIVE BOND STRUCTURE TO INCREASE MEMBRANE SENSITIVTY IN MEMS D...

MEMS ELEMENT, OPTICAL SCANNING DEVICE, AND DISTANCE MEASURING DEVICE

MEMS SENSOR, AND METHOD FOR MANUFACTURING MEMS SENSOR

ULTRATHIN FREE-STANDING SOLID STATE MEMBRANE CHIPS AND METHODS OF M...

ENGINEERED SUBSTRATES, FREE-STANDING SEMICONDUCTOR MICROSTRUCTURES,...

MEMS BUMP STOPPER SURFACE FEATURES

EMBEDDED PERMEABLE POLYSILICON LAYER IN MEMS DEVICE FOR MULTIPLE CA...

SEMICONDUCTOR COMPONENT AND METHOD FOR MANUFACTURING A SEMICONDUCTO...

OPTICAL DEVICE PRODUCTION METHOD

CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR

FAILURE DETECTION METHOD, FAILURE DETECTION SYSTEM, AND ELECTROSPRA...

SIGNAL PROCESSING CIRCUIT FOR TRIPLE-MEMBRANE MEMS DEVICE