Methods for controlling internal stress of deposited layers not provided for in B81C2201/0164 - B81C2201/0169

Industry

CPC
B81C2201/017

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/017Methods for controlling internal stress of deposited layers not provided for in B81C2201/0164 - B81C2201/0169

Industries

Patents Grantslast 30 patents

Information Patent Grant
MEMS resonator
- Patent number 11,975,965
- Issue date May 7, 2024
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bipolar transistor type MEMS pressure sensor and preparation method...
- Patent number 11,965,797
- Issue date Apr 23, 2024
- Wuxi Sencoch Semiconductor Co., Ltd.
- Tongqing Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for controlling stress variation in a material...
- Patent number 11,961,722
- Issue date Apr 16, 2024
- SPTS Technologies Limited
- Anthony Wilby
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Engineered substrates, free-standing semiconductor microstructures,...
- Patent number 11,952,268
- Issue date Apr 9, 2024
- Lawrence Semiconductor Research Laboratory, Inc.
- Chantal Arena
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device production method
- Patent number 11,953,675
- Issue date Apr 9, 2024
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micromachined ultrasonic transducer and method of fabric...
- Patent number 11,944,998
- Issue date Apr 2, 2024
- Korea Institute of Science and Technology
- Byung Chul Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device manufacturing method, MEMS device, and shutter apparatu...
- Patent number 11,932,535
- Issue date Mar 19, 2024
- Sumitomo Precision Products Co., LTD
- Gen Matsuoka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Curved cantilever design to reduce stress in MEMS actuator
- Patent number 11,932,531
- Issue date Mar 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Signal processing circuit for triple-membrane MEMS device
- Patent number 11,932,533
- Issue date Mar 19, 2024
- Infineon Technologies AG
- Marc Fueldner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device production method
- Patent number 11,906,727
- Issue date Feb 20, 2024
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction bottom cavity surface for micromachined ultrasonic tr...
- Patent number 11,883,845
- Issue date Jan 30, 2024
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bi-layer metal electrode for micromachined ultrasonic transducer de...
- Patent number 11,766,696
- Issue date Sep 26, 2023
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pulse train excitation for capacitive micromachined ultrasonic tran...
- Patent number 11,731,164
- Issue date Aug 22, 2023
- The Board of Trustees of the Leland Stanford Junior University
- Bo Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator
- Patent number 11,724,934
- Issue date Aug 15, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS process power
- Patent number 11,716,906
- Issue date Aug 1, 2023
- QUALCOMM Technologies, Inc.
- Robert J. Littrell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of semiconductor structure
- Patent number 11,708,262
- Issue date Jul 25, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yi-Hsien Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for coating microstructured components
- Patent number 11,701,478
- Issue date Jul 18, 2023
- Boehringer Ingelheim International GmbH
- Daniel Frache
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,693,230
- Issue date Jul 4, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical structure with bonded cover
- Patent number 11,685,650
- Issue date Jun 27, 2023
- SiTime Corporation
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic devices with electrodes formed as physically separated...
- Patent number 11,673,798
- Issue date Jun 13, 2023
- International Business Machines Corporation
- Gabriel Fernando Puebla Hellmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
- Patent number 11,667,517
- Issue date Jun 6, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating semiconductor device
- Patent number 11,667,524
- Issue date Jun 6, 2023
- HYUNDAI KEFICO CORPORATION
- Jun Hwan Choi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,650,411
- Issue date May 16, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vertical nanopore coupled with a pair of transverse electrodes havi...
- Patent number 11,644,435
- Issue date May 9, 2023
- Seagate Technology LLC
- ShuaiGang Xiao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabricating calcite nanofluidic channels
- Patent number 11,628,406
- Issue date Apr 18, 2023
- Saudi Arabian Oil Company
- Dong Kyu Cha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS element with increased density
- Patent number 11,603,312
- Issue date Mar 14, 2023
- Murata Manufacturing Co., Ltd.
- Marko Peussa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS resonator
- Patent number 11,584,642
- Issue date Feb 21, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Adaptive cavity thickness control for micromachined ultrasonic tran...
- Patent number 11,583,894
- Issue date Feb 21, 2023
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction bottom cavity surface for micromachined ultrasonic tr...
- Patent number 11,571,711
- Issue date Feb 7, 2023
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micro structure
- Patent number 11,548,779
- Issue date Jan 10, 2023
- Teknologian tutkimuskeskus VTT Oy
- Hannu Kattelus
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20240158225
- Publication date May 16, 2024
- UNITED MICROELECTRONICS CORP.
- Jung-Hao Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Spring Supported and Sealed MEMS Diaphragm Assembly
- Publication number 20240109770
- Publication date Apr 4, 2024
- KNOWLES ELECTRONICS, LLC
- Peter V. Loeppert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...
- Publication number 20240100566
- Publication date Mar 28, 2024
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND APPARATUS FOR MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) D...
- Publication number 20240067519
- Publication date Feb 29, 2024
- TEXAS INSTRUMENTS INCORPORATED
- John Wesley Hamlin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENCAPSULATED MEMS DEVICE AND METHOD FOR MANUFACTURING THE MEMS DEVICE
- Publication number 20240067520
- Publication date Feb 29, 2024
- INFINEON TECHNOLOGIES AG
- Fabian Streb
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device and Method for Manufacturing a MEMS Device
- Publication number 20240017986
- Publication date Jan 18, 2024
- INFINEON TECHNOLOGIES AG
- Stefan Barzen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE
- Publication number 20240017989
- Publication date Jan 18, 2024
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL STRUCTURE WITH BONDED COVER
- Publication number 20240002218
- Publication date Jan 4, 2024
- SiTime Corporation
- Aaron Partridge
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS RESONATOR
- Publication number 20230416081
- Publication date Dec 28, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS PROCESS POWER
- Publication number 20230422623
- Publication date Dec 28, 2023
- QUALCOMM TECHNOLOGIES INC.
- Robert John LITTRELL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM (MEMS) MICROPHONE AND FABRICATION MET...
- Publication number 20230406692
- Publication date Dec 21, 2023
- UNITED MICROELECTRONICS CORP.
- Jung-Hao Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Self-Aligned Acoustic Hole Formation in Piezoelectrical MEMS Microp...
- Publication number 20230357000
- Publication date Nov 9, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE and fabrication metho...
- Publication number 20230348259
- Publication date Nov 2, 2023
- Vanguard International Semiconductor Corporation
- WAI MUN CHONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURE INCLUDING A BURIED CAVITY WITH ANTISTICTION PROTUBER...
- Publication number 20230348258
- Publication date Nov 2, 2023
- STMicroelectronics S.r.l.
- Mikel AZPEITIA URQUIA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR WITH A THIN REGION
- Publication number 20230312334
- Publication date Oct 5, 2023
- Skyworks Solutions, Inc.
- Siarhei Dmitrievich Barsukou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MECHANICALLY COUPLED PIEZOELECTRIC MEMS MICROPHONE
- Publication number 20230303387
- Publication date Sep 28, 2023
- Skyworks Solutions, Inc.
- Siarhei Dmitrievich Barsukou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICES AND FABRICATION METH...
- Publication number 20230294980
- Publication date Sep 21, 2023
- Vanguard International Semiconductor Corporation
- RAKESH CHAND
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Structure for CMOS-MEMS Thin Film Encapsulation
- Publication number 20230278856
- Publication date Sep 7, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR
- Publication number 20230219806
- Publication date Jul 13, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR STRUCTURAL LAYER FABRICATION IN MICROMECHANICAL DEVICES
- Publication number 20230192480
- Publication date Jun 22, 2023
- Murata Manufacturing Co., Ltd.
- Altti TORKKELI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS RESONATOR
- Publication number 20230183060
- Publication date Jun 15, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...
- Publication number 20230149976
- Publication date May 18, 2023
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ADAPTIVE CAVITY THICKNESS CONTROL FOR MICROMACHINED ULTRASONIC TRAN...
- Publication number 20230149977
- Publication date May 18, 2023
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL DEVICE PRODUCTION METHOD
- Publication number 20230138044
- Publication date May 4, 2023
- HAMAMATSU PHOTONICS K. K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-LEVEL MICROELECTROMECHANICAL SYSTEM STRUCTURE WITH NON-PHOTOD...
- Publication number 20230127477
- Publication date Apr 27, 2023
- TEXAS INSTRUMENTS INCORPORATED
- Christopher Murray BEARD
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL MICROPHONE WITH MEMBRANE TRENCH REINFORCEMEN...
- Publication number 20230118429
- Publication date Apr 20, 2023
- TDK Electronics AG
- Pirmin Rombach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE FROM A...
- Publication number 20230107094
- Publication date Apr 6, 2023
- STMicroelectronics S.r.l.
- Gianluca LONGONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC MEMS MICROPHONE WITH SPRING REGION
- Publication number 20230105699
- Publication date Apr 6, 2023
- Skyworks Solutions, Inc.
- Guofeng Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Apparatus for Controlling Stress Variation in a Material...
- Publication number 20230094699
- Publication date Mar 30, 2023
- SPTS Technologies Ltd.
- Anthony WILBY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING AN INTEGRATED SYSTEM INCLUDING A CAPACITIV...
- Publication number 20230061430
- Publication date Mar 2, 2023
- STMicroelectronics S.r.l.
- Paolo FERRARI
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Methods for controlling internal stress of deposited layers not provided for in B81C2201/0164 - B81C2201/0169

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS resonator

Bipolar transistor type MEMS pressure sensor and preparation method...

Method and apparatus for controlling stress variation in a material...

Engineered substrates, free-standing semiconductor microstructures,...

Optical device production method

Capacitive micromachined ultrasonic transducer and method of fabric...

MEMS device manufacturing method, MEMS device, and shutter apparatu...

Curved cantilever design to reduce stress in MEMS actuator

Signal processing circuit for triple-membrane MEMS device

Optical device production method

Anti-stiction bottom cavity surface for micromachined ultrasonic tr...

Bi-layer metal electrode for micromachined ultrasonic transducer de...

Pulse train excitation for capacitive micromachined ultrasonic tran...

MEMS resonator

MEMS process power

Manufacturing method of semiconductor structure

Method for coating microstructured components

Optical device

Microelectromechanical structure with bonded cover

Microfluidic devices with electrodes formed as physically separated...

Method and structure for CMOS-MEMS thin film encapsulation

Method for fabricating semiconductor device

Optical device

Vertical nanopore coupled with a pair of transverse electrodes havi...

Fabricating calcite nanofluidic channels

MEMS element with increased density

MEMS resonator

Adaptive cavity thickness control for micromachined ultrasonic tran...

Anti-stiction bottom cavity surface for micromachined ultrasonic tr...

Capacitive micro structure

Patents Applicationslast 30 patents

MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME

Spring Supported and Sealed MEMS Diaphragm Assembly

ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...

METHODS AND APPARATUS FOR MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) D...

ENCAPSULATED MEMS DEVICE AND METHOD FOR MANUFACTURING THE MEMS DEVICE

MEMS Device and Method for Manufacturing a MEMS Device

MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE

MICROMECHANICAL STRUCTURE WITH BONDED COVER

MEMS RESONATOR

MEMS PROCESS POWER

MICROELECTROMECHANICAL SYSTEM (MEMS) MICROPHONE AND FABRICATION MET...

Self-Aligned Acoustic Hole Formation in Piezoelectrical MEMS Microp...

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE and fabrication metho...

MEMS STRUCTURE INCLUDING A BURIED CAVITY WITH ANTISTICTION PROTUBER...

MEMS SENSOR WITH A THIN REGION

MECHANICALLY COUPLED PIEZOELECTRIC MEMS MICROPHONE

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICES AND FABRICATION METH...

Method and Structure for CMOS-MEMS Thin Film Encapsulation

CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR

METHOD FOR STRUCTURAL LAYER FABRICATION IN MICROMECHANICAL DEVICES

MEMS RESONATOR

ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...

ADAPTIVE CAVITY THICKNESS CONTROL FOR MICROMACHINED ULTRASONIC TRAN...

OPTICAL DEVICE PRODUCTION METHOD

MULTI-LEVEL MICROELECTROMECHANICAL SYSTEM STRUCTURE WITH NON-PHOTOD...

MICROELECTROMECHANICAL MICROPHONE WITH MEMBRANE TRENCH REINFORCEMEN...

PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE FROM A...

PIEZOELECTRIC MEMS MICROPHONE WITH SPRING REGION

Method and Apparatus for Controlling Stress Variation in a Material...

METHOD FOR MANUFACTURING AN INTEGRATED SYSTEM INCLUDING A CAPACITIV...