Micro-engines and actuators

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B81B2201/03

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2201/00Specific applications of micro-electromechanical systems

Current Industry

B81B2201/03Micro-engines and actuators

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method for manufacturing package structure
- Patent number 12,215,018
- Issue date Feb 4, 2025
- Winbond Electronics Corp.
- Jin-Neng Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator for in-plane movement of a mobile mass and optical mo...
- Patent number 12,209,008
- Issue date Jan 28, 2025
- STMicroelectronics S.r.l.
- Nicolo' Boni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS cavity with non-contaminating seal
- Patent number 12,187,606
- Issue date Jan 7, 2025
- SiTime Corporation
- Michael Julian Daneman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mems actuator and manufacturing process thereof
- Patent number 12,187,600
- Issue date Jan 7, 2025
- STMicroelectronics S.r.l.
- Domenico Giusti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric mems device with a suspended membrane having high mec...
- Patent number 12,185,633
- Issue date Dec 31, 2024
- STMicroelectronics S.r.l.
- Domenico Giusti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Virtual valve in a MEMS-based cooling system
- Patent number 12,181,077
- Issue date Dec 31, 2024
- Frore Systems Inc.
- Vikram Mukundan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Miniature gas detection system
- Patent number 12,174,165
- Issue date Dec 24, 2024
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Compact line scan MEMS time of flight system with actuated lens
- Patent number 12,164,103
- Issue date Dec 10, 2024
- STMicroelectronics (Research &Develoment) Limited
- Christopher Townsend
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Processors and integrated circuits including a microelectromechanic...
- Patent number 12,154,843
- Issue date Nov 26, 2024
- Honeywell International Inc.
- Sridhar Vanka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
3-axis angular accelerometer
- Patent number 12,153,065
- Issue date Nov 26, 2024
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Comb-drive device used in micro electro mechanical system
- Patent number 12,151,933
- Issue date Nov 26, 2024
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Scott Lyall Cargill
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure, micromechanical system and method of pro...
- Patent number 12,151,935
- Issue date Nov 26, 2024
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Christian Drabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Drop resistant MEMS actuator-imager assembly package
- Patent number 12,145,839
- Issue date Nov 19, 2024
- Faez Ba-Tis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator package architecture
- Patent number 12,132,420
- Issue date Oct 29, 2024
- MEMS DRIVE (NANJING) CO., LTD.
- Xiaolei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Composite timepiece and method for producing same
- Patent number 12,091,314
- Issue date Sep 17, 2024
- CSEM Centre Suisse d'Electronique et de Microtechnique S.A. Recherche et Deve...
- Sébastien Lani
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Integrated circuit packages having stress-relieving features
- Patent number 12,091,310
- Issue date Sep 17, 2024
- Apogee Semiconductor, Inc.
- David A. Grant
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure and method of providing the same
- Patent number 12,071,338
- Issue date Aug 27, 2024
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Christian Drabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS comprising a movable structural element, and MEMS array
- Patent number 12,054,384
- Issue date Aug 6, 2024
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Peter Duerr
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Filtration and purification device
- Patent number 12,044,235
- Issue date Jul 23, 2024
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing monolithic integration of piezoelectric microm...
- Patent number 12,037,239
- Issue date Jul 16, 2024
- VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical actuator on insulating substrate
- Patent number 12,030,771
- Issue date Jul 9, 2024
- MICROGLASS LLC
- John Wasserbauer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with a dual hinge structure
- Patent number 12,007,555
- Issue date Jun 11, 2024
- Lumentum Operations LLC
- Wenlin Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Self-aligned vertical comb drive assembly
- Patent number 12,007,554
- Issue date Jun 11, 2024
- Lumentum Operations LLC
- Wenlin Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Heterogeneous integration chip of micro fluid actuator
- Patent number 12,010,919
- Issue date Jun 11, 2024
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric based MEMS device with time sharing actuation and sen...
- Patent number 12,001,012
- Issue date Jun 4, 2024
- STMicroelectronics S.r.l.
- Davide Terzi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS nanotube based thermal neutron detector
- Patent number 11,994,635
- Issue date May 28, 2024
- The Government of the United States of America, as represented by the Secreta...
- Zishan Hameed
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual micro-electro mechanical system and manufacturing method thereof
- Patent number 11,993,512
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yang-Che Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator element and MEMS actuator array with a plurality of M...
- Patent number 11,987,491
- Issue date May 21, 2024
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Peter Dürr
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anchor and cavity configuration for MEMS-based cooling systems
- Patent number 11,978,690
- Issue date May 7, 2024
- Frore Systems Inc.
- Vikram Mukundan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Package structure and method for manufacturing the same
- Patent number 11,970,388
- Issue date Apr 30, 2024
- Winbond Electronics Corp.
- Jin-Neng Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATED MEMS OPTICAL SWITCH WITH PIEZOELECTRIC MEMS ACTUATORS
- Publication number 20250042720
- Publication date Feb 6, 2025
- nEYE Systems, Inc.
- Tae Joon SEOK
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORMING A PASSIVATION COATING FOR MEMS DEVICES
- Publication number 20250002334
- Publication date Jan 2, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD FOR OPERATING A MEMS DEVICE
- Publication number 20240425361
- Publication date Dec 26, 2024
- INFINEON TECHNOLOGIES AG
- Björn Oliver Eversmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
System And Method For Generating Fluid Flow
- Publication number 20240409399
- Publication date Dec 12, 2024
- Sonicedge Ltd.
- Mordehai Margalit
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Device and Method for Adapting Measuring Range and Sensitivity of M...
- Publication number 20240400379
- Publication date Dec 5, 2024
- RUHR-UNIVERSITÄT BOCHUM
- Philip SCHMITT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEMS (MEMS) ACTUATOR WITH MAGNETIC LATCHI...
- Publication number 20240351860
- Publication date Oct 24, 2024
- Atomic Machines, Inc.
- William A. Boettcher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DOORBELL CAMERA HAVING ACTIVE COOLING
- Publication number 20240336475
- Publication date Oct 10, 2024
- Frore Systems Inc.
- Prabhu Sathyamurthy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MINI PC HAVING ACTIVE COOLING
- Publication number 20240338062
- Publication date Oct 10, 2024
- Frore Systems Inc.
- Prabhu Sathyamurthy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DIES EMBEDDED IN GLASS CORES
- Publication number 20240327201
- Publication date Oct 3, 2024
- Intel Corporation
- Numair Ahmed
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELF-ALIGNED VERTICAL COMB DRIVE ASSEMBLY
- Publication number 20240295728
- Publication date Sep 5, 2024
- Lumentum Operations LLC
- Wenlin JIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION
- Publication number 20240288683
- Publication date Aug 29, 2024
- OQMENTED GMBH
- Ulrich HOFMANN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Ultrasonic Particle Reduction System for an Acoustic Micro-Valve
- Publication number 20240292139
- Publication date Aug 29, 2024
- Apple Inc.
- Scott C. Grinker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR CONTROLLING A MICROELECTROMECHANICAL SYSTEM
- Publication number 20240262680
- Publication date Aug 8, 2024
- SILMACH
- Marc Sworowski
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20240262681
- Publication date Aug 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yang-Che CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electromechanical Microsystem for Moving a Mechanical Part in Two O...
- Publication number 20240250620
- Publication date Jul 25, 2024
- SILMACH
- Thierry CÔTE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANCHOR AND CAVITY CONFIGURATION FOR MEMS-BASED COOLING SYSTEMS
- Publication number 20240243035
- Publication date Jul 18, 2024
- Frore Systems Inc.
- Vikram Mukundan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microelectromechanical System for Moving a Mechanical Part in Two O...
- Publication number 20240243672
- Publication date Jul 18, 2024
- SILMACH
- Thierry CÔTE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING PACKAGE STRUCTURE
- Publication number 20240217808
- Publication date Jul 4, 2024
- WINBOND ELECTRONICS CORP.
- Jin-Neng WU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BATTERY CELL AND BATTERY DEVICE HAVING THE SAME
- Publication number 20240195005
- Publication date Jun 13, 2024
- SK On Co., Ltd.
- John Cronin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device for Interaction with Fluids
- Publication number 20240158221
- Publication date May 16, 2024
- ROBERT BOSCH GmbH
- Christoph Schelling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Low Voltage Electrostatic MEMS Actuators for Large Angle Tip, Tilt,...
- Publication number 20240158223
- Publication date May 16, 2024
- Government of the United States, as represented by the Secretary of the Air F...
- John PK Walton
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEMS MICROMIRRORS AND MICROMIRROR ARRAYS
- Publication number 20240111148
- Publication date Apr 4, 2024
- Preciseley Microtechnology Corp.
- Tiansheng ZHOU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Element and Vibration-Driven Energy Harvesting Device
- Publication number 20240083740
- Publication date Mar 14, 2024
- Saginomiya Seisakusho, Inc.
- Hisayuki Ashizawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SOUND TRANSDUCER
- Publication number 20240048899
- Publication date Feb 8, 2024
- Fraunhofer-Gesellschaft zur foerderung der Angewandten Forschung e.V.
- Malte Florian NIEKIEL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR COMPRISING ELECTRICALLY CONDUCTIVE POROUS MATERIAL
- Publication number 20240026865
- Publication date Jan 25, 2024
- HydroGraph Clean Power Inc.
- Ranjith Divigalpitiya
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROSTATIC MEMS MICROMIRROR
- Publication number 20240019687
- Publication date Jan 18, 2024
- Huawei Technologies Co., Ltd
- Xiaoshi Dong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Haptic Device with Multiple Fluidically-Controlled Voids
- Publication number 20240019934
- Publication date Jan 18, 2024
- Meta Platforms Technologies, LLC
- Sean Jason Keller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device and Apparatus Having Such a MEMS Device
- Publication number 20230406694
- Publication date Dec 21, 2023
- INFINEON TECHNOLOGIES AG
- Christian Bretthauer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Package and Method for Encapsulating an MEMS Structure
- Publication number 20230382722
- Publication date Nov 30, 2023
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Frank SENGER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACTUATOR, IN PARTICULAR A MICROMIRROR, WITH INCREASED DEFLECTA...
- Publication number 20230373781
- Publication date Nov 23, 2023
- HAHN-SCHICKARD-GESELLSCHAFT FUR ANGEWANDTE FORSCHUNG E.V.
- Jan Rockstroh
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Micro-engines and actuators

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for manufacturing package structure

MEMS actuator for in-plane movement of a mobile mass and optical mo...

MEMS cavity with non-contaminating seal

Mems actuator and manufacturing process thereof

Piezoelectric mems device with a suspended membrane having high mec...

Virtual valve in a MEMS-based cooling system

Miniature gas detection system

Compact line scan MEMS time of flight system with actuated lens

Processors and integrated circuits including a microelectromechanic...

3-axis angular accelerometer

Comb-drive device used in micro electro mechanical system

Micromechanical structure, micromechanical system and method of pro...

Drop resistant MEMS actuator-imager assembly package

MEMS actuator package architecture

Composite timepiece and method for producing same

Integrated circuit packages having stress-relieving features

Micromechanical structure and method of providing the same

MEMS comprising a movable structural element, and MEMS array

Filtration and purification device

Method for producing monolithic integration of piezoelectric microm...

Microelectromechanical actuator on insulating substrate

MEMS device with a dual hinge structure

Self-aligned vertical comb drive assembly

Heterogeneous integration chip of micro fluid actuator

Piezoelectric based MEMS device with time sharing actuation and sen...

MEMS nanotube based thermal neutron detector

Dual micro-electro mechanical system and manufacturing method thereof

MEMS actuator element and MEMS actuator array with a plurality of M...

Anchor and cavity configuration for MEMS-based cooling systems

Package structure and method for manufacturing the same

Patents Applicationslast 30 patents

INTEGRATED MEMS OPTICAL SWITCH WITH PIEZOELECTRIC MEMS ACTUATORS

FORMING A PASSIVATION COATING FOR MEMS DEVICES

MEMS DEVICE AND METHOD FOR OPERATING A MEMS DEVICE

System And Method For Generating Fluid Flow

Device and Method for Adapting Measuring Range and Sensitivity of M...

MICROELECTROMECHANICAL SYSTEMS (MEMS) ACTUATOR WITH MAGNETIC LATCHI...

DOORBELL CAMERA HAVING ACTIVE COOLING

MINI PC HAVING ACTIVE COOLING

MEMS DIES EMBEDDED IN GLASS CORES

SELF-ALIGNED VERTICAL COMB DRIVE ASSEMBLY

MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION

Ultrasonic Particle Reduction System for an Acoustic Micro-Valve

METHOD FOR CONTROLLING A MICROELECTROMECHANICAL SYSTEM

DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

Electromechanical Microsystem for Moving a Mechanical Part in Two O...

ANCHOR AND CAVITY CONFIGURATION FOR MEMS-BASED COOLING SYSTEMS

Microelectromechanical System for Moving a Mechanical Part in Two O...

METHOD FOR MANUFACTURING PACKAGE STRUCTURE

BATTERY CELL AND BATTERY DEVICE HAVING THE SAME

MEMS Device for Interaction with Fluids

Low Voltage Electrostatic MEMS Actuators for Large Angle Tip, Tilt,...

MICRO-ELECTRO-MECHANICAL SYSTEMS MICROMIRRORS AND MICROMIRROR ARRAYS

MEMS Element and Vibration-Driven Energy Harvesting Device

MEMS SOUND TRANSDUCER

ACTUATOR COMPRISING ELECTRICALLY CONDUCTIVE POROUS MATERIAL

ELECTROSTATIC MEMS MICROMIRROR

Haptic Device with Multiple Fluidically-Controlled Voids

MEMS Device and Apparatus Having Such a MEMS Device

MEMS Package and Method for Encapsulating an MEMS Structure

MEMS ACTUATOR, IN PARTICULAR A MICROMIRROR, WITH INCREASED DEFLECTA...