Micro-pumps

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B81B2201/036

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2201/00Specific applications of micro-electromechanical systems

Current Industry

B81B2201/036Micro-pumps

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Mems actuator and manufacturing process thereof
- Patent number 12,187,600
- Issue date Jan 7, 2025
- STMicroelectronics S.r.l.
- Domenico Giusti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Miniature gas detection system
- Patent number 12,174,165
- Issue date Dec 24, 2024
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Processors and integrated circuits including a microelectromechanic...
- Patent number 12,154,843
- Issue date Nov 26, 2024
- Honeywell International Inc.
- Sridhar Vanka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Filtration and purification device
- Patent number 12,044,235
- Issue date Jul 23, 2024
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Heterogeneous integration chip of micro fluid actuator
- Patent number 12,010,919
- Issue date Jun 11, 2024
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multiaxis sensing system for detection of airborne molecules and ra...
- Patent number 11,940,576
- Issue date Mar 26, 2024
- National Technology & Engineering Solutions of Sandia, LLC
- Mark D. Allendorf
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Filtration and purification processing method
- Patent number 11,898,554
- Issue date Feb 13, 2024
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing process for at least one diaphragm unit of a MEMS tra...
- Patent number 11,565,935
- Issue date Jan 31, 2023
- USOUND GMBH
- Andrea Rusconi Clerici Beltrami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS transducer for interacting with a volume flow of a fluid, and...
- Patent number 11,554,950
- Issue date Jan 17, 2023
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Harald Schenk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wearable display device
- Patent number 11,537,184
- Issue date Dec 27, 2022
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Combined pump-sensor arrangement
- Patent number 11,486,381
- Issue date Nov 1, 2022
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Christoph Kutter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for manufacturing micromechanical components and method for...
- Patent number 11,434,131
- Issue date Sep 6, 2022
- CSEM Centre Suisse d'Electronique et de Microtechnique S.A. Recherche et Deve...
- Nicolas Blondiaux
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuating and sensing module
- Patent number 11,125,224
- Issue date Sep 21, 2021
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Monolithic, biocompatible feedthrough for hermetically sealed elect...
- Patent number 11,107,703
- Issue date Aug 31, 2021
- NEURALINK CORP.
- Vanessa M. Tolosa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for manufacturing micromechanical components and method for...
- Patent number 10,954,123
- Issue date Mar 23, 2021
- CSEM Centre Suisse d'Electronique et de Microtechnique S.A. Recherche et Deve...
- Nicolas Blondiaux
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Portable gas detecting device
- Patent number 10,775,276
- Issue date Sep 15, 2020
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS package
- Patent number 10,745,269
- Issue date Aug 18, 2020
- AT&S Austria Technologie & Systemtechnik Aktiengesellschaft
- Nick Renaud-Bezot
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system (MEMS) devices
- Patent number 10,640,369
- Issue date May 5, 2020
- Hewlett-Packard Development Company, L.P.
- Chien-Hua Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS transducer for interacting with a volume flow of a fluid and m...
- Patent number 10,457,544
- Issue date Oct 29, 2019
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Harald Schenk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor with high voltage switch
- Patent number 10,427,930
- Issue date Oct 1, 2019
- Invensense, Inc.
- Matthew Thompson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Conformable patch pump
- Patent number 10,398,832
- Issue date Sep 3, 2019
- Cam Med Ltd.
- Yanzhe Qin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator, shutter device, fluid control device, switch, and two-dim...
- Patent number 10,340,818
- Issue date Jul 2, 2019
- National University Corporation Shizuoka University
- Masato Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electroosmotic devices for fluid handling
- Patent number 10,188,989
- Issue date Jan 29, 2019
- OHIO STATE INNOVATION FOUNDATION
- Derek James Hansford
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfabricated elastomeric valve and pump systems
- Patent number 10,155,250
- Issue date Dec 18, 2018
- California Institute of Technology
- Hou-Pu Chou
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Microfluidic pump and valve structures and fabrication methods
- Patent number 10,119,619
- Issue date Nov 6, 2018
- Rheonix, Inc.
- Peng Zhou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing at least one deformable membrane micropump and...
- Patent number 10,082,135
- Issue date Sep 25, 2018
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Yves Fouillet
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
CMOS-MEMS structures with out-of-plane MEMS sensing gap
- Patent number 9,896,327
- Issue date Feb 20, 2018
- Invensense, Inc.
- Matthew Julian Thompson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of making a system-in-package device, and a system-in-packag...
- Patent number 9,828,239
- Issue date Nov 28, 2017
- Murata Electronics Oy
- Heikki Kuisma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor with high voltage switch
- Patent number 9,708,176
- Issue date Jul 18, 2017
- Invensense, Inc.
- Matthew Thompson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic pump and valve structures and fabrication methods
- Patent number 9,638,338
- Issue date May 2, 2017
- Rheonix, Inc.
- Peng Zhou
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
MEMS DEVICE AND METHOD FOR OPERATING A MEMS DEVICE
- Publication number 20240425361
- Publication date Dec 26, 2024
- INFINEON TECHNOLOGIES AG
- Björn Oliver Eversmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
System And Method For Generating Fluid Flow
- Publication number 20240409399
- Publication date Dec 12, 2024
- Sonicedge Ltd.
- Mordehai Margalit
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DOORBELL CAMERA HAVING ACTIVE COOLING
- Publication number 20240336475
- Publication date Oct 10, 2024
- Frore Systems Inc.
- Prabhu Sathyamurthy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MINI PC HAVING ACTIVE COOLING
- Publication number 20240338062
- Publication date Oct 10, 2024
- Frore Systems Inc.
- Prabhu Sathyamurthy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device for Interaction with Fluids
- Publication number 20240158221
- Publication date May 16, 2024
- ROBERT BOSCH GmbH
- Christoph Schelling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device and Apparatus Having Such a MEMS Device
- Publication number 20230406694
- Publication date Dec 21, 2023
- INFINEON TECHNOLOGIES AG
- Christian Bretthauer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE, NEARFIELD LOUDSPEAKER, HEARABLE, MEMS PUMP, LOUDSPEAKE...
- Publication number 20230212002
- Publication date Jul 6, 2023
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Anton MELNIKOV
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS FOR HIGHLY EFFICIENT INTERACTION WITH A VOLUME FLOW
- Publication number 20230091340
- Publication date Mar 23, 2023
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Anton MELNIKOV
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MINIATURE GAS DETECTION SYSTEM
- Publication number 20230079257
- Publication date Mar 16, 2023
- MICROJET TECHNOLOGY CO., LTD.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM PUMP
- Publication number 20220397110
- Publication date Dec 15, 2022
- Microjet Technology Co., Ltd.
- Hao-Jan MOU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FILTRATION AND PURIFICATION DEVICE
- Publication number 20220065244
- Publication date Mar 3, 2022
- MICROJET TECHNOLOGY CO., LTD.
- Hao-Jan MOU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FILTRATION AND PURIFICATION PROCESSING METHOD
- Publication number 20220065243
- Publication date Mar 3, 2022
- MICROJET TECHNOLOGY CO., LTD.
- Hao-Jan MOU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS HAVING A LARGE FLUIDICALLY EFFECTIVE SURFACE
- Publication number 20220002143
- Publication date Jan 6, 2022
- Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.
- Sergiu LANGA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
WEARABLE DISPLAY DEVICE
- Publication number 20210397010
- Publication date Dec 23, 2021
- MICROJET TECHNOLOGY CO., LTD.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HETEROGENEOUS INTEGRATION CHIP OF MICRO FLUID ACTUATOR
- Publication number 20210343924
- Publication date Nov 4, 2021
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR MANUFACTURING MICROMECHANICAL COMPONENTS AND METHOD FOR...
- Publication number 20210171340
- Publication date Jun 10, 2021
- CSEM CENTRE SUISSE D'ELECTRONIQUE ET DE MICROTECHNIQUE SA RECHERCHE ET DEVELO...
- Nicolas BLONDIAUX
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Monolithic, Biocompatible Feedthrough for Hermetically Sealed Elect...
- Publication number 20210013051
- Publication date Jan 14, 2021
- Neuralink Corp.
- Vanessa M. Tolosa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Combined Pump-Sensor Arrangement
- Publication number 20200277948
- Publication date Sep 3, 2020
- FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
- Christoph KUTTER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM PUMP MODULE
- Publication number 20200240400
- Publication date Jul 30, 2020
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM PUMP MODULE
- Publication number 20200182233
- Publication date Jun 11, 2020
- Microjet Technology Co., Ltd.
- Hao-Jan Mou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING PROCESS FOR AT LEAST ONE DIAPHRAGM UNIT OF A MEMS TRA...
- Publication number 20200148533
- Publication date May 14, 2020
- USound GmbH
- Andrea Rusconi Clerici Beltrami
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Transducer for Interacting with a Volume Flow of a Fluid, and...
- Publication number 20200087138
- Publication date Mar 19, 2020
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Harald SCHENK
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PORTABLE GAS DETECTING DEVICE
- Publication number 20190376877
- Publication date Dec 12, 2019
- Microjet Technology Co., Ltd.
- Hao-Jan MOU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Package
- Publication number 20180297834
- Publication date Oct 18, 2018
- AT&S Austria Technologies & Systemtechnik Aktiengesellschaft
- Nick Renaud-Bezot
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS TRANSDUCER FOR INTERACTING WITH A VOLUME FLOW OF A FLUID AND M...
- Publication number 20180179048
- Publication date Jun 28, 2018
- FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
- Harald SCHENK
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR WITH HIGH VOLTAGE SWITCH
- Publication number 20180002162
- Publication date Jan 4, 2018
- InvenSense, Inc.
- Matthew Thompson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CMOS-MEMS STRUCTURES WITH OUT-OF-PLANE MEMS SENSING GAP
- Publication number 20170334709
- Publication date Nov 23, 2017
- InvenSense, Inc.
- Matthew Julian Thompson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Sensor with High Voltage Switch
- Publication number 20160347605
- Publication date Dec 1, 2016
- InvenSense, Inc.
- Matthew Thompson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Actuator, Shutter Device, Fluid Control Device, Switch, and Two-Dim...
- Publication number 20160204716
- Publication date Jul 14, 2016
- NATIONAL UNIVERSITY CORPORATION SHIZUOKA UNIVERSITY
- Masato SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MAKING A SYSTEM-IN-PACKAGE DEVICE, AND A SYSTEM-IN-PACKAG...
- Publication number 20150375996
- Publication date Dec 31, 2015
- MURATA ELECTRONICS OY
- Heikki KUISMA
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Micro-pumps

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Mems actuator and manufacturing process thereof

Miniature gas detection system

Processors and integrated circuits including a microelectromechanic...

Filtration and purification device

Heterogeneous integration chip of micro fluid actuator

Multiaxis sensing system for detection of airborne molecules and ra...

Filtration and purification processing method

Manufacturing process for at least one diaphragm unit of a MEMS tra...

MEMS transducer for interacting with a volume flow of a fluid, and...

Wearable display device

Combined pump-sensor arrangement

Methods for manufacturing micromechanical components and method for...

Actuating and sensing module

Monolithic, biocompatible feedthrough for hermetically sealed elect...

Methods for manufacturing micromechanical components and method for...

Portable gas detecting device

MEMS package

Microelectromechanical system (MEMS) devices

MEMS transducer for interacting with a volume flow of a fluid and m...

MEMS sensor with high voltage switch

Conformable patch pump

Actuator, shutter device, fluid control device, switch, and two-dim...

Electroosmotic devices for fluid handling

Microfabricated elastomeric valve and pump systems

Microfluidic pump and valve structures and fabrication methods

Method for producing at least one deformable membrane micropump and...

CMOS-MEMS structures with out-of-plane MEMS sensing gap

Method of making a system-in-package device, and a system-in-packag...

MEMS sensor with high voltage switch

Microfluidic pump and valve structures and fabrication methods

Patents Applicationslast 30 patents

MEMS DEVICE AND METHOD FOR OPERATING A MEMS DEVICE

System And Method For Generating Fluid Flow

DOORBELL CAMERA HAVING ACTIVE COOLING

MINI PC HAVING ACTIVE COOLING

MEMS Device for Interaction with Fluids

MEMS Device and Apparatus Having Such a MEMS Device

MEMS DEVICE, NEARFIELD LOUDSPEAKER, HEARABLE, MEMS PUMP, LOUDSPEAKE...

MEMS FOR HIGHLY EFFICIENT INTERACTION WITH A VOLUME FLOW

MINIATURE GAS DETECTION SYSTEM

MICRO-ELECTROMECHANICAL SYSTEM PUMP

FILTRATION AND PURIFICATION DEVICE

FILTRATION AND PURIFICATION PROCESSING METHOD

MEMS HAVING A LARGE FLUIDICALLY EFFECTIVE SURFACE

WEARABLE DISPLAY DEVICE

HETEROGENEOUS INTEGRATION CHIP OF MICRO FLUID ACTUATOR

METHODS FOR MANUFACTURING MICROMECHANICAL COMPONENTS AND METHOD FOR...

Monolithic, Biocompatible Feedthrough for Hermetically Sealed Elect...

Combined Pump-Sensor Arrangement

MICRO-ELECTROMECHANICAL SYSTEM PUMP MODULE

MICRO-ELECTROMECHANICAL SYSTEM PUMP MODULE

MANUFACTURING PROCESS FOR AT LEAST ONE DIAPHRAGM UNIT OF A MEMS TRA...

MEMS Transducer for Interacting with a Volume Flow of a Fluid, and...

PORTABLE GAS DETECTING DEVICE

MEMS Package

MEMS TRANSDUCER FOR INTERACTING WITH A VOLUME FLOW OF A FLUID AND M...

MEMS SENSOR WITH HIGH VOLTAGE SWITCH

CMOS-MEMS STRUCTURES WITH OUT-OF-PLANE MEMS SENSING GAP

MEMS Sensor with High Voltage Switch

Actuator, Shutter Device, Fluid Control Device, Switch, and Two-Dim...

METHOD OF MAKING A SYSTEM-IN-PACKAGE DEVICE, AND A SYSTEM-IN-PACKAG...