MICRO-STRUCTURAL TECHNOLOGY

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Current Industry

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B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacture and assembly of XY flexure mechanism assembly
- Patent number 12,258,263
- Issue date Mar 25, 2025
- The Regents of the University of Michigan
- Shorya Awtar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromirror arrays
- Patent number 12,259,546
- Issue date Mar 25, 2025
- ASML Netherlands B.V.
- Alexandre Halbach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device having microelectromechanical systems devices...
- Patent number 12,257,602
- Issue date Mar 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- I-Hsuan Chiu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Low hysteresis and flexible pressure sensitive composite
- Patent number 12,259,287
- Issue date Mar 25, 2025
- National University of Singapore
- Chee Keong Tee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system (MEMS) interconnect including spring...
- Patent number 12,258,264
- Issue date Mar 25, 2025
- International Business Machines Corporation
- Muir Kumph
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bonding process for forming semiconductor device structure
- Patent number 12,258,265
- Issue date Mar 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Hang Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for fabricating a MEMS device
- Patent number 12,258,266
- Issue date Mar 25, 2025
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating structured membranes
- Patent number 12,259,656
- Issue date Mar 25, 2025
- UNITED STATES OF AMERICA AS REPRESENTED BY THE ADMINISTRATOR OF NASA.
- Elissa Williams
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate and microphone unit
- Patent number 12,258,262
- Issue date Mar 25, 2025
- Hosiden Corporation
- Shingo Okano
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric micromachined ultrasonic transducer comprising a lobe...
- Patent number 12,251,729
- Issue date Mar 18, 2025
- STMicroelectronics S.r.l.
- Domenico Giusti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device, liquid ejecting head, and liquid ejecting apparatus
- Patent number 12,251,936
- Issue date Mar 18, 2025
- Seiko Epson Corporation
- Motoki Takabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonance device and resonance device manufacturing method
- Patent number 12,252,393
- Issue date Mar 18, 2025
- Murata Manufacturing Co., Ltd.
- Masakazu Fukumitsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Circuits and methods to calibrate mirror displacement
- Patent number 12,253,356
- Issue date Mar 18, 2025
- Texas Instruments Incorporated
- Robert Floyd Payne
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-level microelectromechanical system structure with non-photod...
- Patent number 12,252,396
- Issue date Mar 18, 2025
- Texas Instruments Incorporated
- Christopher Murray Beard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Parasitic insensitive sampling in sensors
- Patent number 12,253,426
- Issue date Mar 18, 2025
- Murata Manufacturing Co., Ltd.
- Vishnu Srinivasan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS-driven optical package with micro-LED array
- Patent number 12,253,715
- Issue date Mar 18, 2025
- Matthew E. Ward
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and system for sensor configuration
- Patent number 12,252,395
- Issue date Mar 18, 2025
- Vamshi Gangumalla
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component for a sensor device
- Patent number 12,252,394
- Issue date Mar 18, 2025
- Robert Bosch GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Temperature dependent calibration of movement detection devices
- Patent number 12,247,846
- Issue date Mar 11, 2025
- Magic Leap, Inc.
- Cuthbert Martindale Allen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing variable radio frequency micro-electromech...
- Patent number 12,249,468
- Issue date Mar 11, 2025
- Universite de Limoges
- Romain Stefanini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon carbide nanoneedles and fabrication thereof
- Patent number 12,246,155
- Issue date Mar 11, 2025
- Lawrence Livermore National Security, LLC
- Clint D. Frye
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS capacitance microphone and manufacturing method thereof
- Patent number 12,250,519
- Issue date Mar 11, 2025
- Qsensing Microelectronics Co., Ltd
- Chien-Hsing Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Managing trench depth in integrated systems
- Patent number 12,249,540
- Issue date Mar 11, 2025
- Ciena Corporation
- Benoît Filion
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and systems for transmission and detection of free radicals
- Patent number 12,247,920
- Issue date Mar 11, 2025
- Wisconsin Alumni Research Foundation
- J. Leon Shohet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Particle extraction apparatus and particle extraction method
- Patent number 12,240,747
- Issue date Mar 4, 2025
- Sony Group Corporation
- Tatsuo Shimizu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device, assembly comprising the MEMS device, and methods for o...
- Patent number 12,240,749
- Issue date Mar 4, 2025
- Bert Kaiser
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor package substrate, sensor module having the same, and sensor...
- Patent number 12,240,751
- Issue date Mar 4, 2025
- TDK Corporation
- Kazutoshi Tsuyutani
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a sequencing unit for sequencing a biochemical...
- Patent number 12,240,752
- Issue date Mar 4, 2025
- Robert Bosch GmbH
- Franz Laermer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical device having a soft magnetic material elec...
- Patent number 12,240,753
- Issue date Mar 4, 2025
- International Business Machines Corporation
- William J. Gallagher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS die and MEMS-based sensor
- Patent number 12,240,748
- Issue date Mar 4, 2025
- Knowles Electronics, LLC
- Peter V. Loeppert
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
PROBE AND METHOD OF FABRICATING ULTRASONIC TRANSDUCER UNIT
- Publication number 20250100869
- Publication date Mar 27, 2025
- Qisda Corporation
- Fu-Sheng Jiang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Controller for sound producing device with dynamic vent function
- Publication number 20250100870
- Publication date Mar 27, 2025
- xMEMS Labs, Inc.
- Ming-Hung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRODES FOR MICROELECTROMECHANICAL SYSTEM MICROPHONES
- Publication number 20250100871
- Publication date Mar 27, 2025
- InvenSense, Inc.
- Joseph Seeger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
AIRFLOW SENSOR AND AIRFLOW SENSOR PACKAGING STRUCTURE
- Publication number 20250100872
- Publication date Mar 27, 2025
- MEMSensing Microsystems (Suzhou, China) Co., Ltd.
- Yanzi MENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR PROVIDING A RELIABLE ISOLATION STACK IN CAPAC...
- Publication number 20250100014
- Publication date Mar 27, 2025
- GE Precision Healthcare LLC
- Rupak Bardhan Roy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM MEMBRANE
- Publication number 20250106561
- Publication date Mar 27, 2025
- AAC TECHNOLOGIES PTE. LTD
- Yannick Pierre Kervran
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
EXTREMAL MICROSTRUCTURED SURFACES
- Publication number 20250091856
- Publication date Mar 20, 2025
- Lukas Bluecher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMORY DEVICES INCLUDING PAD STRUCTURES
- Publication number 20250098159
- Publication date Mar 20, 2025
- Micron Technology, Inc.
- Erwin E. Yu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE FOR NANOSCALE THERMAL MEASUREMENTS AND ASSOCIATED METHOD FOR...
- Publication number 20250093212
- Publication date Mar 20, 2025
- Centre National de la Recherche Scientifique
- Olivier BOURGEOIS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
REDUCTION OF RINGING AND INTERMODULATION DISTORTION IN A MEMS DEVICE
- Publication number 20250091857
- Publication date Mar 20, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Adam Joseph Fruehling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR PACKAGE WITH HOLLOW STRUCTURE AND METHOD FOR ASSEMBLING SENS...
- Publication number 20250091859
- Publication date Mar 20, 2025
- Carrier Corporation
- Jacob Kerling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FLUIDIC FLOW CHANNEL OVER ACTIVE SURFACE OF A DIE
- Publication number 20250096050
- Publication date Mar 20, 2025
- Illumina, Inc.
- Arvin Emadi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUBSTRATES COMPRISING NANO-PATTERNING SURFACES AND METHODS OF PREPA...
- Publication number 20250091313
- Publication date Mar 20, 2025
- Illumina, Inc.
- M. Shane Bowen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SANDWICH STRUCTURES FOR MICROELECTROMECHANICAL SYSTEM MICRO-MIRRORS
- Publication number 20250091858
- Publication date Mar 20, 2025
- INFINEON TECHNOLOGIES AG
- Theresa LUTZ
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPOUND SENSOR AND MANUFACTURING METHOD
- Publication number 20250091860
- Publication date Mar 20, 2025
- Panasonic Intellectual Property Management Co., Ltd.
- Hiroki SAKAMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LASER MICROMACHINING OF MEMS RESONATORS FROM BULK OPTICALLY TRANSPA...
- Publication number 20250091861
- Publication date Mar 20, 2025
- The Regents of the University of California
- Daryosh VATANPARVAR
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE SENSOR AND METHOD FOR MANUFACTURING SAME, AND ELECTRONIC D...
- Publication number 20250085175
- Publication date Mar 13, 2025
- Beijing BOE Technology Development Co., Ltd.
- Kui LIANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
IMAGE CAPTURE AT VARYING OPTICAL POWERS
- Publication number 20250085514
- Publication date Mar 13, 2025
- Meta Platforms Technologies, LLC
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR
- Publication number 20250083950
- Publication date Mar 13, 2025
- Kabushiki Kaisha Toshiba
- Hiroaki YAMAZAKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL LOUDSPEAKER WITH A LARGE-AREA FORCE FIELD
- Publication number 20250083948
- Publication date Mar 13, 2025
- ROBERT BOSCH GmbH
- Andreas Winden
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE
- Publication number 20250083947
- Publication date Mar 13, 2025
- ROBERT BOSCH GmbH
- Jochen REINMUTH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VARIABLE INDUCTOR AND INDUCTOR MODULE
- Publication number 20250087401
- Publication date Mar 13, 2025
- DB HiTek Co., Ltd.
- Jung Ah KIM
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELECTRICALLY CONNECTED PRECISION MOTION STAGE WITH POSITION SE...
- Publication number 20250083949
- Publication date Mar 13, 2025
- MEMS DRIVE (NANJING) CO., LTD.
- Matthew Ng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING MICROELECTROMECHANICAL DEVICES WITH REDUC...
- Publication number 20250083951
- Publication date Mar 13, 2025
- STMicroelectronics International N.V.
- Andrea NOMELLINI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE SENSOR WITH INTEGRATED FLUID CAVITY
- Publication number 20250085179
- Publication date Mar 13, 2025
- Apple Inc.
- Michael J. GLICKMAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR
- Publication number 20250074763
- Publication date Mar 6, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE
- Publication number 20250074766
- Publication date Mar 6, 2025
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Humidity Sensor, Manufacturing Method Therefor and Electronic Device
- Publication number 20250076241
- Publication date Mar 6, 2025
- BOE TECHNOLOGY GROUP CO., LTD.
- Jianxing LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DIFFERENTIAL MEASUREMENT OF IR ABSORPTION IN PLASMONIC MEMS SENSORS
- Publication number 20250076190
- Publication date Mar 6, 2025
- TEXAS INSTRUMENTS INCORPORATED
- Jeronimo Segovia Fernandez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20250074764
- Publication date Mar 6, 2025
- Beijing BOE Technology Development Co., Ltd.
- Wenbo LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY

MICRO-STRUCTURAL TECHNOLOGY

Industry

Parent Industries

Current Industry

Sub Industries

Patents Grantslast 30 patents

Method of manufacture and assembly of XY flexure mechanism assembly

Micromirror arrays

Semiconductor device having microelectromechanical systems devices...

Low hysteresis and flexible pressure sensitive composite

Microelectromechanical system (MEMS) interconnect including spring...

Bonding process for forming semiconductor device structure

Method and system for fabricating a MEMS device

Method of fabricating structured membranes

Substrate and microphone unit

Piezoelectric micromachined ultrasonic transducer comprising a lobe...

MEMS device, liquid ejecting head, and liquid ejecting apparatus

Resonance device and resonance device manufacturing method

Circuits and methods to calibrate mirror displacement

Multi-level microelectromechanical system structure with non-photod...

Parasitic insensitive sampling in sensors

MEMS-driven optical package with micro-LED array

Method and system for sensor configuration

Micromechanical component for a sensor device

Temperature dependent calibration of movement detection devices

Method for manufacturing variable radio frequency micro-electromech...

Silicon carbide nanoneedles and fabrication thereof

MEMS capacitance microphone and manufacturing method thereof

Managing trench depth in integrated systems

Methods and systems for transmission and detection of free radicals

Particle extraction apparatus and particle extraction method

MEMS device, assembly comprising the MEMS device, and methods for o...

Sensor package substrate, sensor module having the same, and sensor...

Method for producing a sequencing unit for sequencing a biochemical...

Micro-electromechanical device having a soft magnetic material elec...

MEMS die and MEMS-based sensor

Patents Applicationslast 30 patents

PROBE AND METHOD OF FABRICATING ULTRASONIC TRANSDUCER UNIT

Controller for sound producing device with dynamic vent function

ELECTRODES FOR MICROELECTROMECHANICAL SYSTEM MICROPHONES

AIRFLOW SENSOR AND AIRFLOW SENSOR PACKAGING STRUCTURE

METHOD AND SYSTEM FOR PROVIDING A RELIABLE ISOLATION STACK IN CAPAC...

MICROELECTROMECHANICAL SYSTEM MEMBRANE

EXTREMAL MICROSTRUCTURED SURFACES

MEMORY DEVICES INCLUDING PAD STRUCTURES

DEVICE FOR NANOSCALE THERMAL MEASUREMENTS AND ASSOCIATED METHOD FOR...

REDUCTION OF RINGING AND INTERMODULATION DISTORTION IN A MEMS DEVICE

SENSOR PACKAGE WITH HOLLOW STRUCTURE AND METHOD FOR ASSEMBLING SENS...

FLUIDIC FLOW CHANNEL OVER ACTIVE SURFACE OF A DIE

SUBSTRATES COMPRISING NANO-PATTERNING SURFACES AND METHODS OF PREPA...

SANDWICH STRUCTURES FOR MICROELECTROMECHANICAL SYSTEM MICRO-MIRRORS

COMPOUND SENSOR AND MANUFACTURING METHOD

LASER MICROMACHINING OF MEMS RESONATORS FROM BULK OPTICALLY TRANSPA...

PRESSURE SENSOR AND METHOD FOR MANUFACTURING SAME, AND ELECTRONIC D...

IMAGE CAPTURE AT VARYING OPTICAL POWERS

SENSOR

MICROELECTROMECHANICAL LOUDSPEAKER WITH A LARGE-AREA FORCE FIELD

MEMS MICROPHONE

VARIABLE INDUCTOR AND INDUCTOR MODULE

MEMS ELECTRICALLY CONNECTED PRECISION MOTION STAGE WITH POSITION SE...

PROCESS FOR MANUFACTURING MICROELECTROMECHANICAL DEVICES WITH REDUC...

PRESSURE SENSOR WITH INTEGRATED FLUID CAVITY

CURVED CANTILEVER DESIGN TO REDUCE STRESS IN MEMS ACTUATOR

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE

Humidity Sensor, Manufacturing Method Therefor and Electronic Device

DIFFERENTIAL MEASUREMENT OF IR ABSORPTION IN PLASMONIC MEMS SENSORS

MICRO-ELECTRO-MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF