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PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
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Patents Grants
last 30 patents
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Patent Grant
MEMS device built on substrate with ruthenium based contact surface...
Patent number
12,148,580
Issue date
Nov 19, 2024
Menlo Microsystems, Inc.
Andrew Minnick
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS sensor as well as method for operating a mems sensor
Patent number
12,145,840
Issue date
Nov 19, 2024
Robert Bosch GmbH
Arne Dannenberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Light ranging device having an electronically scanned emitter array
Patent number
12,146,954
Issue date
Nov 19, 2024
Ouster, Inc.
Angus Pacala
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
CMUT transducer with motion-stopping structure and CMUT transducer...
Patent number
12,145,838
Issue date
Nov 19, 2024
Vermon S.A.
Cyril Meynier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Drop resistant MEMS actuator-imager assembly package
Patent number
12,145,839
Issue date
Nov 19, 2024
Faez Ba-Tis
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Light deflector, deflecting device, distance measurement device, im...
Patent number
12,140,698
Issue date
Nov 12, 2024
Ricoh Company, Ltd.
Goichi Akanuma
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Multiple layer electrode transducers
Patent number
12,139,394
Issue date
Nov 12, 2024
Soundskrit Inc.
Wan-Thai Hsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Low-impact motion limiter
Patent number
12,139,395
Issue date
Nov 12, 2024
Murata Manufacturing Co., Ltd.
Mikko Partanen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Selective self-assembled monolayer patterning with sacrificial laye...
Patent number
12,139,397
Issue date
Nov 12, 2024
Invensense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wafer stencil for controlling die attach material thickness on die
Patent number
12,142,549
Issue date
Nov 12, 2024
Texas Instruments Incorporated
Mario Alfonso Eduardo Magana
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Thermal control of MEMS mirrors to limit resonant frequency shift
Patent number
12,140,752
Issue date
Nov 12, 2024
BEIJING VOYAGER TECHNOLOGY CO., LTD.
Sae Won Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical sensor device with improved stability to stress
Patent number
12,139,396
Issue date
Nov 12, 2024
STMicroelectronics S.r.l.
Francesco Rizzini
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Pressure sensor with high stability
Patent number
12,139,398
Issue date
Nov 12, 2024
Invensense, Inc.
Weng Shen Su
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Conductive bond structure to increase membrane sensitivity in MEMS...
Patent number
12,139,399
Issue date
Nov 12, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Hung-Hua Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Polyamic acid composition for packaging electronic components, and...
Patent number
12,139,581
Issue date
Nov 12, 2024
PI Advanced Materials Co., Ltd.
Ik Sang Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor device and sensor
Patent number
12,140,430
Issue date
Nov 12, 2024
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Hideki Ueda
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device and method for manufacturing a semiconductor d...
Patent number
12,134,556
Issue date
Nov 5, 2024
STMicroelectronics S.r.l.
Enri Duqi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Centrally anchored MEMS-based active cooling systems
Patent number
12,137,540
Issue date
Nov 5, 2024
Frore Systems Inc.
Ananth Saran Yalamarthy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
Patent number
12,134,555
Issue date
Nov 5, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Yu-Chia Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfluidic chip and fabrication method
Patent number
12,134,097
Issue date
Nov 5, 2024
Shanghai Tianma Micro-Electronics Co., Ltd.
Wei Li
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS actuator system
Patent number
12,135,437
Issue date
Nov 5, 2024
MEMS DRIVE (NANJING) CO., LTD.
Matthew Ng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Optical systems fabricated by printing-based assembly
Patent number
12,136,620
Issue date
Nov 5, 2024
The Board of Trustees of the University of Illinois
John A. Rogers
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Arched membrane structure for MEMS device
Patent number
12,134,557
Issue date
Nov 5, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Jhao-Yi Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Undercut-free patterned aluminum nitride structure and methods for...
Patent number
12,134,824
Issue date
Nov 5, 2024
Taiwan Semiconductor Manufacturing Company Limited
Yuan-Chih Hsieh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfluidic valve and method of making same
Patent number
12,128,405
Issue date
Oct 29, 2024
HandyLab, Inc.
Kalyan Handique
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Triple-membrane MEMS device
Patent number
12,133,060
Issue date
Oct 29, 2024
Infineon Technologies AG
Marc Fueldner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Mems device, electronic apparatus, and vehicle
Patent number
12,130,303
Issue date
Oct 29, 2024
Seiko Epson Corporation
Fumiya Ito
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Systems and apparatus for micromirror designs with electrode contact
Patent number
12,130,425
Issue date
Oct 29, 2024
Texas Instruments Incorporated
William Craig McDonald
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semi-finished product of electronic device and electronic device
Patent number
12,129,169
Issue date
Oct 29, 2024
Merry Electronics Co., Ltd.
Jen-Yi Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfluidic module and method of fabricating the microfluidic module
Patent number
12,128,401
Issue date
Oct 29, 2024
UNIST(ULSAN NATIONAL INSTITUTE OF SCIENCE AND TECHNOLOGY)
Taesung Kim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MICROELECTROMECHANICAL DEVICE AND METHOD FOR MAKING THE SAME
Publication number
20240383743
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Shih-Yu LIAO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE
Publication number
20240383744
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Jhao-Yi Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE
Publication number
20240383742
Publication date
Nov 21, 2024
Zhunmao (Hangzhou) Technology Co.
Haitao Ding
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SAME
Publication number
20240383005
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Kang-Yi Lien
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMPUTATIONAL METHODS FOR PREDICTING ADHESION CHARACTERISTICS OF MO...
Publication number
20240387002
Publication date
Nov 21, 2024
ROBERT BOSCH GmbH
Georgy SAMSONIDZE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL COMPONENT
Publication number
20240383745
Publication date
Nov 21, 2024
ROBERT BOSCH GmbH
Heribert Weber
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COVALENTLY MODIFIED SURFACES, KITS, AND METHODS OF PREPARATION AND USE
Publication number
20240375097
Publication date
Nov 14, 2024
Bruker Cellular Analysis, Inc.
Randall D. LOWE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MULTILAYER FLUIDIC DEVICES AND METHODS FOR THEIR FABRICATION
Publication number
20240375099
Publication date
Nov 14, 2024
Illumina, Inc.
Jeffrey S. FISHER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL SYSTEMS DEVICE HAVING IMPROVED SIGNAL DISTOR...
Publication number
20240375938
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Jung Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD
Publication number
20240375940
Publication date
Nov 14, 2024
Murata Manufacturing Co., Ltd.
Masakazu FUKUMITSU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DOUBLE NOTCH ETCH TO REDUCE UNDER CUT OF MICRO ELECTRO-MECHANICAL S...
Publication number
20240375942
Publication date
Nov 14, 2024
Calient Technologies, Inc.
Paul WALDROP
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS PROBE MODULE STRUCTURE
Publication number
20240377434
Publication date
Nov 14, 2024
TAIWAN MASK CORPORATION
SHANG-KUANG WU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DIELECTRIC PROTECTION LAYER CONFIGURED TO INCREASE PERFORMANCE OF M...
Publication number
20240375943
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Wen-Chuan Tai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TOP NOTCH SLIT PROFILE FOR MEMS DEVICE
Publication number
20240381034
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Jung Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FORCE SENSOR WITH AN INCREASED OPERATING RANGE
Publication number
20240377431
Publication date
Nov 14, 2024
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Theo MIANI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Device and Fabrication Process with Reduced Z-Axis Stiction
Publication number
20240375937
Publication date
Nov 14, 2024
NXP USA, Inc.
Lianjun Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STOPPER BUMP STRUCTURES FOR MEMS DEVICE
Publication number
20240375939
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Wei-Jhih Mao
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TEMPERATURE-CONTROL ARRANGEMENT FOR A MICROELECTRIC SYSTEM
Publication number
20240375941
Publication date
Nov 14, 2024
ROBERT BOSCH GmbH
Udo Schulz
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
OUTGASSING MATERIAL COATED CAVITY FOR A MICRO-ELECTRO MECHANICAL SY...
Publication number
20240367964
Publication date
Nov 7, 2024
Taiwan Semiconductor Manufacturing Company Limited
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
UNDERCUT-FREE PATTERNED ALUMINUM NITRIDE STRUCTURE AND METHODS FOR...
Publication number
20240368746
Publication date
Nov 7, 2024
Taiwan Semiconductor Manufacturing Company Limited
Yuan-Chih Hsieh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CONDUCTIVE BOND STRUCTURE TO INCREASE MEMBRANE SENSITIVTY IN MEMS D...
Publication number
20240367965
Publication date
Nov 7, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Hung-Hua Lin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
HYDROGEN SENSOR, HYDROGEN DETECTING METHOD, AND NON-TRANSITORY COMP...
Publication number
20240369506
Publication date
Nov 7, 2024
Kabushiki Kaisha Toshiba
Hiroaki Yamazaki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Enhanced microelectromechanical system mirror apparatus
Publication number
20240369826
Publication date
Nov 7, 2024
Teknologian Tutkimuskeskus VTT Oy
Dmitry Morits
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART...
Publication number
20240359969
Publication date
Oct 31, 2024
Taiwan Semiconductor Manufacturing Company Limited
Tao-Cheng LIU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SOUND PRODUCING PACKAGE AND COVERING STRUCTURE
Publication number
20240365048
Publication date
Oct 31, 2024
xMEMS Labs, Inc.
Chao-Yu Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
VIBRATION DEVICE, SPEAKER UNIT, AND METHOD FOR MANUFACTURING VIBRAT...
Publication number
20240359970
Publication date
Oct 31, 2024
MITSUMI ELECTRIC CO., LTD.
Hisanori AGA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DIFFERENTIAL DRIVE OF A SOUND TRANSDUCER SYSTEM
Publication number
20240359971
Publication date
Oct 31, 2024
ROBERT BOSCH GmbH
Raik Fiedler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Switch, Preparation Method thereof, and Electronic Apparatus
Publication number
20240359973
Publication date
Oct 31, 2024
Beijing BOE Technology Development Co., Ltd.
Yingli SHI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACTIVE MATRIX PROGRAMMABLE MIRROR
Publication number
20240359974
Publication date
Oct 31, 2024
Obsidian Sensors, Inc.
John HONG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING A PARTICLE PROTECTION ELEMENT, IN PARTICULAR A...
Publication number
20240359975
Publication date
Oct 31, 2024
ROBERT BOSCH GmbH
Heribert Weber
B81 - MICRO-STRUCTURAL TECHNOLOGY