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Modelling and simulation from physical phenomena up to complete wafer process or whole workflow in wafer fabrication
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CPC
G03F7/705
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Parent Industries
G
PHYSICS
G03
Photography
G03F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
G03F7/00
Photomechanical
Current Industry
G03F7/705
Modelling and simulation from physical phenomena up to complete wafer process or whole workflow in wafer fabrication
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