Multilayer mask including nonradiation sensitive layer

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CPC
Y10S438/95

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YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10S438/00Semiconductor device manufacturing: process

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Y10S438/95Multilayer mask including nonradiation sensitive layer

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Patents Grantslast 30 patents

Information Patent Grant
Method for forming patterned mask layer
- Patent number 11,699,589
- Issue date Jul 11, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Chen Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alternating hardmasks for tight-pitch line formation
- Patent number 11,171,002
- Issue date Nov 9, 2021
- Tessera, Inc.
- John C. Arnold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Insulated gate field effect transistor having passivated schottky b...
- Patent number 11,043,571
- Issue date Jun 22, 2021
- ACORN SEMI, LLC
- Daniel E. Grupp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor element and display device using the same
- Patent number 10,854,642
- Issue date Dec 1, 2020
- Semiconductor Energy Laboratory Co., Ltd.
- Satoshi Murakami
- G02 - OPTICS
Information Patent Grant
Vertical cavity surface emitting laser, method for fabricating vert...
- Patent number 10,847,950
- Issue date Nov 24, 2020
- Sumitomo Electric Industries, Ltd.
- Yutaka Onishi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Ionizing radiation blocking in IC chip to reduce soft errors
- Patent number 10,784,200
- Issue date Sep 22, 2020
- International Business Machines Corporation
- Mukta G. Farooq
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor element and display device using the same
- Patent number 10,700,106
- Issue date Jun 30, 2020
- Semiconductor Energy Laboratory Co., Ltd.
- Satoshi Murakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical structure LEDs
- Patent number 10,600,933
- Issue date Mar 24, 2020
- LG Innotek Co., Ltd
- Jong Lam Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alternating hardmasks for tight-pitch line formation
- Patent number 10,580,652
- Issue date Mar 3, 2020
- Tessera, Inc.
- John C. Arnold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pitch multiplication using self-assembling materials
- Patent number 10,515,801
- Issue date Dec 24, 2019
- Micron Technology, Inc.
- Gurtej Sandhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical structure LEDs
- Patent number 10,461,217
- Issue date Oct 29, 2019
- LG Innotek Co., Ltd
- Jong Lam Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical structure LEDs
- Patent number 10,453,993
- Issue date Oct 22, 2019
- LG Innotek Co., Ltd
- Jong Lam Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical structure LEDs
- Patent number 10,243,101
- Issue date Mar 26, 2019
- LG Innotek Co., Ltd
- Jong Lam Lee
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Alternating hardmasks for tight-pitch line formation
- Patent number 10,103,022
- Issue date Oct 16, 2018
- International Business Machines Corporation
- John C. Arnold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor element and display device using the same
- Patent number 10,050,065
- Issue date Aug 14, 2018
- Semiconductor Energy Laboratory Co., Ltd.
- Satoshi Murakami
- G02 - OPTICS
Information Patent Grant
Vertical structure LEDs
- Patent number 9,882,084
- Issue date Jan 30, 2018
- LG Innotek Co., Ltd
- Jong Lam Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having a high-K gate dielectric above an STI r...
- Patent number 9,659,928
- Issue date May 23, 2017
- Advanced Micro Devices, Inc.
- Andy Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Insulated gate field effect transistor having passivated schottky b...
- Patent number 9,583,614
- Issue date Feb 28, 2017
- Acorn Technologies, Inc.
- Daniel E. Grupp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Packaging apparatus for deposition masks
- Patent number 9,522,764
- Issue date Dec 20, 2016
- Samsung Display Co., Ltd.
- Daewon Baek
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Vertical structure LEDs
- Patent number 9,472,727
- Issue date Oct 18, 2016
- LG Innotek Co., Ltd
- Jong Lam Lee
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Semiconductor element and display device using the same
- Patent number 9,406,806
- Issue date Aug 2, 2016
- Semiconductor Energy Laboratory Co., Ltd.
- Satoshi Murakami
- G02 - OPTICS
Information Patent Grant
Vertical structure LEDs
- Patent number 9,224,907
- Issue date Dec 29, 2015
- LG Innotek Co., Ltd
- Jong Lam Lee
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Precision high-frequency capacitor formed on semiconductor substrate
- Patent number 9,136,060
- Issue date Sep 15, 2015
- Vishay Siliconix
- Haim Goldberger
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Anti-reflective coatings using vinyl ether crosslinkers
- Patent number 9,110,372
- Issue date Aug 18, 2015
- Brewer Science Inc.
- Douglas J. Guerrero
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Triple patterning method
- Patent number 9,034,762
- Issue date May 19, 2015
- Semiconductor Manufacturing International (Shanghai) Corporation
- Zhongshan Hong
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Process variability tolerant hard mask for replacement metal gate f...
- Patent number 9,034,748
- Issue date May 19, 2015
- International Business Machines Corporation
- Christopher V. Baiocco
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for self-aligned removal of a high-K gate dielectric above a...
- Patent number 9,023,712
- Issue date May 5, 2015
- Advanced Micro Devices, Inc.
- Andy Wei
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Creating extremely thin semiconductor-on-insulator (ETSOI) having s...
- Patent number 9,018,024
- Issue date Apr 28, 2015
- International Business Machines Corporation
- Nathaniel C. Berliner
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Radiation detectors and methods of fabricating radiation detectors
- Patent number 9,006,010
- Issue date Apr 14, 2015
- General Electric Company
- Arie Shahar
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for producing silicon epitaxial wafer
- Patent number 8,999,061
- Issue date Apr 7, 2015
- Sumco Corporation
- Masayuki Ishibashi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FORMING PATTERNED MASK LAYER
- Publication number 20230352303
- Publication date Nov 2, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chen CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR ELEMENT AND DISPLAY DEVICE USING THE SAME
- Publication number 20210098508
- Publication date Apr 1, 2021
- Semiconductor Energy Laboratory Co., Ltd.
- Satoshi Murakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALTERNATING HARDMASKS FOR TIGHT-PITCH LINE FORMATION
- Publication number 20200266066
- Publication date Aug 20, 2020
- Tessera, Inc.
- John C. Arnold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL STRUCTURE LEDS
- Publication number 20200006593
- Publication date Jan 2, 2020
- LG Innotek Co., Ltd.
- Jong Lam LEE
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
SEMICONDUCTOR ELEMENT AND DISPLAY DEVICE USING THE SAME
- Publication number 20190378861
- Publication date Dec 12, 2019
- Semiconductor Energy Laboratory Co., Ltd.
- Satoshi Murakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL STRUCTURE LEDS
- Publication number 20190312177
- Publication date Oct 10, 2019
- LG Innotek Co., Ltd.
- Jong Lam LEE
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
VERTICAL STRUCTURE LEDS
- Publication number 20190172974
- Publication date Jun 6, 2019
- LG Innotek Co., Ltd.
- Jong Lam LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR ELEMENT AND DISPLAY DEVICE USING THE SAME
- Publication number 20190043896
- Publication date Feb 7, 2019
- Semiconductor Energy Laboratory Co., Ltd.
- Satoshi Murakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALTERNATING HARDMASKS FOR TIGHT-PITCH LINE FORMATION
- Publication number 20180350600
- Publication date Dec 6, 2018
- International Business Machines Corporation
- John C. Arnold
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL STRUCTURE LEDS
- Publication number 20180158986
- Publication date Jun 7, 2018
- LG Innotek Co., Ltd.
- Jong Lam LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSULATED GATE FIELD EFFECT TRANSISTOR HAVING PASSIVATED SCHOTTKY B...
- Publication number 20140284666
- Publication date Sep 25, 2014
- Daniel E. Grupp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMORY CELLS HAVING STORAGE ELEMENTS THAT SHARE MATERIAL LAYERS WIT...
- Publication number 20140284538
- Publication date Sep 25, 2014
- Yung-Tin Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MATERIAL WITH TUNABLE INDEX OF REFRACTION
- Publication number 20140191262
- Publication date Jul 10, 2014
- INTERMOLECULAR INC.
- Philip Kraus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR ELEMENT AND DISPLAY DEVICE USING THE SAME
- Publication number 20140138720
- Publication date May 22, 2014
- Semiconductor Energy Laboratory Co., Ltd.
- Satoshi Murakami
- G02 - OPTICS
Information Patent Application
PROTECTION OF LIGHT EMITTING DEVICES
- Publication number 20140110679
- Publication date Apr 24, 2014
- EMPIRE TECHNOLOGY DEVELOPMENT LLC
- William Brenden CARLSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL STRUCTURE LEDS
- Publication number 20140091353
- Publication date Apr 3, 2014
- LG Innotek Co., Ltd.
- Jong Lam LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING VERTICAL STRUCTURE LEDS
- Publication number 20140054639
- Publication date Feb 27, 2014
- LG ELECTRONICS INC.
- JongLam Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RELIABLE CONTACTS
- Publication number 20130334616
- Publication date Dec 19, 2013
- GLOBALFOUNDRIER Singapore Pte. Ltd.
- Hong YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20130320508
- Publication date Dec 5, 2013
- FUJITSU SEMICONDUCTOR LIMITED
- Tamotsu Owada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR ELEMENT AND DISPLAY DEVICE USING THE SAME
- Publication number 20130313645
- Publication date Nov 28, 2013
- Semiconductor Energy Laboratory Co., Ltd.
- Satoshi Murakami
- G02 - OPTICS
Information Patent Application
LOW LEAKAGE MIM CAPACITOR
- Publication number 20130285206
- Publication date Oct 31, 2013
- Sam Yang
- G11 - INFORMATION STORAGE
Information Patent Application
SELECT DEVICES INCLUDING AN OPEN VOLUME, AND RELATED METHODS, MEMOR...
- Publication number 20130285110
- Publication date Oct 31, 2013
- Bhaskar Srinivasan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMORY CELLS HAVING STORAGE ELEMENTS THAT SHARE MATERIAL LAYERS WIT...
- Publication number 20130175492
- Publication date Jul 11, 2013
- SanDisk 3D LLC
- Yung-Tin Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSULATED GATE FIELD EFFECT TRANSISTOR HAVING PASSIVATED SCHOTTKY B...
- Publication number 20130140629
- Publication date Jun 6, 2013
- Acorn Technologies, Inc.
- Daniel E. Grupp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADIATION DETECTORS AND METHODS OF FABRICATING RADIATION DETECTORS
- Publication number 20130126998
- Publication date May 23, 2013
- GENERAL ELECTRIC COMPANY
- Arie Shahar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-LEVELING PLANARIZATION MATERIALS FOR MICROELECTRONIC TOPOGRAPHY
- Publication number 20130113086
- Publication date May 9, 2013
- BREWER SCIENCE INC.
- Dongshun Bai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for etching substrate
- Publication number 20130109171
- Publication date May 2, 2013
- Manfred Engelhardt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO ALIGN MASK PATTERNS
- Publication number 20130105976
- Publication date May 2, 2013
- Micron Technology, Inc.
- Gurtej S. Sandhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RELIABLE CONTACTS
- Publication number 20130075823
- Publication date Mar 28, 2013
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Hong YU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR ELEMENT AND DISPLAY DEVICE USING THE SAME
- Publication number 20130049026
- Publication date Feb 28, 2013
- Semiconductor Energy Laboratory Co., Ltd.
- Satoshi Murakami
- G02 - OPTICS

Multilayer mask including nonradiation sensitive layer

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for forming patterned mask layer

Alternating hardmasks for tight-pitch line formation

Insulated gate field effect transistor having passivated schottky b...

Semiconductor element and display device using the same

Vertical cavity surface emitting laser, method for fabricating vert...

Ionizing radiation blocking in IC chip to reduce soft errors

Semiconductor element and display device using the same

Vertical structure LEDs

Alternating hardmasks for tight-pitch line formation

Pitch multiplication using self-assembling materials

Vertical structure LEDs

Vertical structure LEDs

Vertical structure LEDs

Alternating hardmasks for tight-pitch line formation

Semiconductor element and display device using the same

Vertical structure LEDs

Semiconductor device having a high-K gate dielectric above an STI r...

Insulated gate field effect transistor having passivated schottky b...

Packaging apparatus for deposition masks

Vertical structure LEDs

Semiconductor element and display device using the same

Vertical structure LEDs

Precision high-frequency capacitor formed on semiconductor substrate

Anti-reflective coatings using vinyl ether crosslinkers

Triple patterning method

Process variability tolerant hard mask for replacement metal gate f...

Method for self-aligned removal of a high-K gate dielectric above a...

Creating extremely thin semiconductor-on-insulator (ETSOI) having s...

Radiation detectors and methods of fabricating radiation detectors

Method for producing silicon epitaxial wafer

Patents Applicationslast 30 patents

METHOD FOR FORMING PATTERNED MASK LAYER

SEMICONDUCTOR ELEMENT AND DISPLAY DEVICE USING THE SAME

ALTERNATING HARDMASKS FOR TIGHT-PITCH LINE FORMATION

VERTICAL STRUCTURE LEDS

SEMICONDUCTOR ELEMENT AND DISPLAY DEVICE USING THE SAME

VERTICAL STRUCTURE LEDS

VERTICAL STRUCTURE LEDS

SEMICONDUCTOR ELEMENT AND DISPLAY DEVICE USING THE SAME

ALTERNATING HARDMASKS FOR TIGHT-PITCH LINE FORMATION

VERTICAL STRUCTURE LEDS

INSULATED GATE FIELD EFFECT TRANSISTOR HAVING PASSIVATED SCHOTTKY B...

MEMORY CELLS HAVING STORAGE ELEMENTS THAT SHARE MATERIAL LAYERS WIT...

MATERIAL WITH TUNABLE INDEX OF REFRACTION

SEMICONDUCTOR ELEMENT AND DISPLAY DEVICE USING THE SAME

PROTECTION OF LIGHT EMITTING DEVICES

VERTICAL STRUCTURE LEDS

METHOD OF FABRICATING VERTICAL STRUCTURE LEDS

RELIABLE CONTACTS

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

SEMICONDUCTOR ELEMENT AND DISPLAY DEVICE USING THE SAME

LOW LEAKAGE MIM CAPACITOR

SELECT DEVICES INCLUDING AN OPEN VOLUME, AND RELATED METHODS, MEMOR...

MEMORY CELLS HAVING STORAGE ELEMENTS THAT SHARE MATERIAL LAYERS WIT...

INSULATED GATE FIELD EFFECT TRANSISTOR HAVING PASSIVATED SCHOTTKY B...

RADIATION DETECTORS AND METHODS OF FABRICATING RADIATION DETECTORS

SELF-LEVELING PLANARIZATION MATERIALS FOR MICROELECTRONIC TOPOGRAPHY

Method for etching substrate

METHOD TO ALIGN MASK PATTERNS

RELIABLE CONTACTS

SEMICONDUCTOR ELEMENT AND DISPLAY DEVICE USING THE SAME