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Multistep processes for the separation of wafers into individual elements
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CPC
B81C1/00865
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C1/00
Manufacture or treatment of devices or systems in or on a substrate
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B81C1/00865
Multistep processes for the separation of wafers into individual elements
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Patents Grants
last 30 patents
Information
Patent Grant
Manufacturing method for multiple MEMS sound transducers
Patent number
11,375,317
Issue date
Jun 28, 2022
USOUND GMBH
Andrea Rusconi Clerici Beltrami
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
LED transfer device and micro LED transferring method using the same
Patent number
11,264,531
Issue date
Mar 1, 2022
Samsung Electronics Co., Ltd.
Sangmoo Park
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of strain gauge fabrication using a transfer substrate
Patent number
10,183,862
Issue date
Jan 22, 2019
GM Global Technology Operations LLC
Stephen A. Berggren
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS sensor with side port and method of fabricating same
Patent number
9,790,089
Issue date
Oct 17, 2017
NXP USA, INC.
Chad S. Dawson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Shielding MEMS structures during wafer dicing
Patent number
9,346,671
Issue date
May 24, 2016
FREESCALE SEMICONDUCTOR, INC.
Alan J. Magnus
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromirror device package fabrication method
Patent number
6,624,921
Issue date
Sep 23, 2003
Amkor Technology, Inc.
Thomas P. Glenn
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a semiconductor acceleration sensor device
Patent number
5,668,033
Issue date
Sep 16, 1997
Nippondenso Co., Ltd.
Fumio Ohara
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Patents Applications
last 30 patents
Information
Patent Application
SENSOR CHIP WITH A PLURALITY OF INTEGRATED SENSOR CIRCUITS
Publication number
20230035123
Publication date
Feb 2, 2023
INFINEON TECHNOLOGIES AG
Stephan LEISENHEIMER
B81 - MICRO-STRUCTURAL TECHNOLOGY