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Method of nanometer lithography
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Patent number 5,110,760
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Issue date May 5, 1992
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The United States of America as represented by the Secretary of the Navy
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David S. Y. Hsu
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H01 - BASIC ELECTRIC ELEMENTS
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Device fabrication
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Patent number 5,106,764
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Issue date Apr 21, 1992
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AT&T Bell Laboratories
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Lloyd R. Harriott
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H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor device
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Patent number 4,967,254
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Issue date Oct 30, 1990
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Mitsubishi Denki Kabushiki Kaisha
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Teruyuki Shimura
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H01 - BASIC ELECTRIC ELEMENTS
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Self-aligned sidewall gate IGFET
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Patent number 4,729,002
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Issue date Mar 1, 1988
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Semiconductor Energy Laboratory Co., Ltd.
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Shunpei Yamazaki
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H01 - BASIC ELECTRIC ELEMENTS
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Depletion mode short channel IGFET
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Patent number 4,725,871
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Issue date Feb 16, 1988
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Semiconductor Energy Laboratory Co., Ltd.
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Shunpei Yamazaki
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H01 - BASIC ELECTRIC ELEMENTS
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Sidewall multiple-gate IGFET
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Patent number 4,717,941
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Issue date Jan 5, 1988
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Semiconductor Energy Laboratory Co., Ltd.
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Shunpei Yamazaki
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H01 - BASIC ELECTRIC ELEMENTS
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Sidewall gate IGFET
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Patent number 4,654,680
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Issue date Mar 31, 1987
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Semiconductor Energy Laboratory Co., Ltd.
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Shunpei Yamazaki
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H01 - BASIC ELECTRIC ELEMENTS