Optical arrangements for illuminating the object; optical arrangements for collecting light from the object

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CPC
H01J37/226

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/226Optical arrangements for illuminating the object; optical arrangements for collecting light from the object

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method of operating scanning electron microscope (SEM) and method o...
- Patent number 12,362,138
- Issue date Jul 15, 2025
- Samsung Electronics Co., Ltd.
- Jaehyung Ahn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nanofluidic cell and loading platform
- Patent number 12,283,459
- Issue date Apr 22, 2025
- Germán Sciaini
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for determining the virtual source location of a liquid met...
- Patent number 12,237,142
- Issue date Feb 25, 2025
- FEI Company
- Sean M. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Joint electron-optical columns for flood-charging and image-forming...
- Patent number 12,165,838
- Issue date Dec 10, 2024
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,869,745
- Issue date Jan 9, 2024
- HITACHI HIGH-TECH CORPORATION
- Minami Shouji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for transferring a focus ring into processing app...
- Patent number 11,869,752
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Kippei Sugita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number RE49784
- Issue date Jan 2, 2024
- ASML Netherlands B.V.
- Weiming Ren
Information Patent Grant
Optical objective lens
- Patent number 11,808,930
- Issue date Nov 7, 2023
- ASML Netherlands B.V.
- Jian Zhang
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
System and method for bare wafer inspection
- Patent number 11,791,127
- Issue date Oct 17, 2023
- ASML Netherlands B.V.
- Wei Fang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated optical and charged particle inspection apparatus
- Patent number 11,742,173
- Issue date Aug 29, 2023
- DELMIC IP B.V.
- Sander Den Hoedt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for transmission electron microscopy cathodoluminescence
- Patent number 11,688,581
- Issue date Jun 27, 2023
- Gatan, Inc.
- John Andrew Hunt
- G01 - MEASURING TESTING
Information Patent Grant
Optical system with compensation lens
- Patent number 11,682,538
- Issue date Jun 20, 2023
- ASML Netherlands B.V.
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device defect detection method using a charged particle beam
- Patent number 11,631,568
- Issue date Apr 18, 2023
- HITACHI HIGH-TECH CORPORATION
- Yasuhiro Shirasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shaped aperture set for multi-beam array configurations
- Patent number 11,615,939
- Issue date Mar 28, 2023
- KLA Corporation
- Tomas Plettner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,610,754
- Issue date Mar 21, 2023
- HITACHI HIGH-TECH CORPORATION
- Katsura Takaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method of preparing integrated circuits for backside pro...
- Patent number 11,605,525
- Issue date Mar 14, 2023
- FEI Company
- James Vickers
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus and setting assisting method
- Patent number 11,587,761
- Issue date Feb 21, 2023
- Jeol Ltd.
- Kazutaka Watakabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and sample observation method using the same
- Patent number 11,551,907
- Issue date Jan 10, 2023
- Riken
- Ken Harada
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam device
- Patent number 11,515,121
- Issue date Nov 29, 2022
- HITACHI HIGH-TECH CORPORATION
- Tomohiko Ogata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam device
- Patent number 11,393,657
- Issue date Jul 19, 2022
- HITACHI HIGH-TECH CORPORATION
- Minami Shouji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection device
- Patent number 11,393,656
- Issue date Jul 19, 2022
- Kioxia Corporation
- Motoki Kadowaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for spatially resolved optical metrology of an io...
- Patent number 11,380,517
- Issue date Jul 5, 2022
- Applied Materials, Inc.
- Gang Shu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,355,308
- Issue date Jun 7, 2022
- HITACHI HIGH-TECH CORPORATION
- Yasuhiro Shirasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,348,757
- Issue date May 31, 2022
- HITACHI HIGH-TECH CORPORATION
- Shuhei Yabu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light guide assembly for an electron microscope
- Patent number 11,335,536
- Issue date May 17, 2022
- FEI Company
- Marek Uncovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,328,897
- Issue date May 10, 2022
- HITACHI HIGH-TECH CORPORATION
- Minami Shouji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 11,322,331
- Issue date May 3, 2022
- Jeol Ltd.
- Yuta Murakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas flow control for millisecond anneal system
- Patent number 11,255,606
- Issue date Feb 22, 2022
- Mattson Technology, Inc.
- Christian Pfahler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arrayed column detector
- Patent number 11,239,048
- Issue date Feb 1, 2022
- KLA Corporation
- Alan D. Brodie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,239,051
- Issue date Feb 1, 2022
- HITACHI HIGH-TECH CORPORATION
- Mai Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM DEVICE, AND MEASUREMENT METHOD
- Publication number 20250232946
- Publication date Jul 17, 2025
- Hitachi High-Tech Corporation
- Minami UCHIHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Radiation Heating to Clean Deposits from Air Bearing Shaft
- Publication number 20250201514
- Publication date Jun 19, 2025
- Applied Materials, Inc.
- Roger B. Fish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE ADJUSTMENT METHOD AND CHARGED PARTICLE...
- Publication number 20250157785
- Publication date May 15, 2025
- HITACHI HIGH-TECH CORPORATION
- Hidenori MACHIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DETERMINING THE VIRTUAL SOURCE LOCATION OF A LIQUID MET...
- Publication number 20250157780
- Publication date May 15, 2025
- FEI Company
- Sean M. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM CHARGED PARTICLE MICROSCOPE DESIGN WITH MIRROR FOR FIELD...
- Publication number 20250132124
- Publication date Apr 24, 2025
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONOSCOPIC WAFER ORIENTATION APPARATUS AND ION IMPLANTER INCLUDING...
- Publication number 20250095952
- Publication date Mar 20, 2025
- Applied Materials, Inc.
- Ori Noked
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONOSCOPIC WAFER ORIENTATION FOR ION IMPLANTATION
- Publication number 20250095958
- Publication date Mar 20, 2025
- Applied Materials, Inc.
- Frank SINCLAIR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE-OPTICAL APPARATUS
- Publication number 20250087445
- Publication date Mar 13, 2025
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER-BASED CONTRAST CONTROL IN TRANSMISSION ELECTRON MICROSCOPY
- Publication number 20250062099
- Publication date Feb 20, 2025
- Yeda Research and Development Co. Ltd.
- Osip SCHWARTZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optical Apparatus and Charged Particle Beam Apparatus
- Publication number 20250046566
- Publication date Feb 6, 2025
- HITACHI HIGH-TECH CORPORATION
- Masao YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION DEVICE AND FILM QUALITY INSPECTION METHOD
- Publication number 20250046569
- Publication date Feb 6, 2025
- Hitachi High-Tech Corporation
- Yasuhiro SHIRASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus and Camera Image Displaying Method
- Publication number 20250029812
- Publication date Jan 23, 2025
- JEOL Ltd.
- Akira Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISCHARGING A REGION OF A SAMPLE
- Publication number 20240420917
- Publication date Dec 19, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Roey Levy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20240363306
- Publication date Oct 31, 2024
- HITACHI HIGH-TECH CORPORATION
- Minami SHOUJI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEIGHT SENSING SYSTEM FOR ELECTRON BEAM METROLOGY TOOL
- Publication number 20240355579
- Publication date Oct 24, 2024
- KLA Corporation
- Yeishin Tung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE OPTICAL APPARATUS AND PROJECTION METHOD
- Publication number 20240339294
- Publication date Oct 10, 2024
- ASML NETHERLANDS B.V.
- Marijke SCOTUZZI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE OPTICAL DEVICE
- Publication number 20240321547
- Publication date Sep 26, 2024
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA MONITORING SYSTEM
- Publication number 20240290590
- Publication date Aug 29, 2024
- SAMSUNG DISPLAY CO., LTD.
- YOUNGGIL PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processor System, Correction Method, and Correction Program
- Publication number 20240222064
- Publication date Jul 4, 2024
- HITACHI HIGH-TECH CORPORATION
- Mayuka OSAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fiber Fabry-Perot Cavity Laser Phase Plate For Charged Particle Mic...
- Publication number 20240222066
- Publication date Jul 4, 2024
- FEI Company
- Afric Meijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser Thermal Epitaxy in a Charged Particle Microscope
- Publication number 20240161999
- Publication date May 16, 2024
- FEI Company
- Rudolf Geurink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE PIECE RELOCATING DEVICE
- Publication number 20240087841
- Publication date Mar 14, 2024
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Tatsuya ASAHATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR NON-INVASIVE SEMICONDUCTOR TECHNIQUE FOR M...
- Publication number 20240071710
- Publication date Feb 29, 2024
- FemtoMetrix, Inc.
- Timothy M. Wong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD
- Publication number 20240071716
- Publication date Feb 29, 2024
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inspection System
- Publication number 20240029994
- Publication date Jan 25, 2024
- Hitachi High-Tech Corporation
- Natsuki TSUNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DETERMINING THE VIRTUAL SOURCE LOCATION OF A LIQUID MET...
- Publication number 20230411109
- Publication date Dec 21, 2023
- FEI Company
- Sean M. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SPECTROMETER CALIBRATION METHOD
- Publication number 20230402250
- Publication date Dec 14, 2023
- ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
- Paolo CATTANEO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20230377837
- Publication date Nov 23, 2023
- HITACHI HIGH-TECH CORPORATION
- Yohei NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL PATTERN INSPECTION METHOD AND FOCUSED ION BEAM APPARATUS
- Publication number 20230326714
- Publication date Oct 12, 2023
- V Technology Co., LTD.
- Michinobu MIZUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSMISSION CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF ALIGNIN...
- Publication number 20230282443
- Publication date Sep 7, 2023
- Shânêl Ondrej
- H01 - BASIC ELECTRIC ELEMENTS

Optical arrangements for illuminating the object; optical arrangements for collecting light from the object

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of operating scanning electron microscope (SEM) and method o...

Nanofluidic cell and loading platform

Methods for determining the virtual source location of a liquid met...

Joint electron-optical columns for flood-charging and image-forming...

Charged particle beam device

System and method for transferring a focus ring into processing app...

Apparatus of plural charged-particle beams

Optical objective lens

System and method for bare wafer inspection

Integrated optical and charged particle inspection apparatus

Apparatus for transmission electron microscopy cathodoluminescence

Optical system with compensation lens

Device defect detection method using a charged particle beam

Shaped aperture set for multi-beam array configurations

Charged particle beam device

System and method of preparing integrated circuits for backside pro...

Charged particle beam apparatus and setting assisting method

Electron microscope and sample observation method using the same

Electron beam device

Electron beam device

Inspection device

System and method for spatially resolved optical metrology of an io...

Charged particle beam device

Charged particle beam device

Light guide assembly for an electron microscope

Charged particle beam device

Charged particle beam apparatus

Gas flow control for millisecond anneal system

Arrayed column detector

Charged particle beam device

Patents Applicationslast 30 patents

CHARGED PARTICLE BEAM DEVICE, AND MEASUREMENT METHOD

Radiation Heating to Clean Deposits from Air Bearing Shaft

CHARGED PARTICLE BEAM DEVICE ADJUSTMENT METHOD AND CHARGED PARTICLE...

METHODS FOR DETERMINING THE VIRTUAL SOURCE LOCATION OF A LIQUID MET...

MULTI-BEAM CHARGED PARTICLE MICROSCOPE DESIGN WITH MIRROR FOR FIELD...

CONOSCOPIC WAFER ORIENTATION APPARATUS AND ION IMPLANTER INCLUDING...

CONOSCOPIC WAFER ORIENTATION FOR ION IMPLANTATION

CHARGED PARTICLE-OPTICAL APPARATUS

LASER-BASED CONTRAST CONTROL IN TRANSMISSION ELECTRON MICROSCOPY

Optical Apparatus and Charged Particle Beam Apparatus

INSPECTION DEVICE AND FILM QUALITY INSPECTION METHOD

Charged Particle Beam Apparatus and Camera Image Displaying Method

DISCHARGING A REGION OF A SAMPLE

CHARGED PARTICLE BEAM DEVICE

HEIGHT SENSING SYSTEM FOR ELECTRON BEAM METROLOGY TOOL

CHARGED-PARTICLE OPTICAL APPARATUS AND PROJECTION METHOD

CHARGED-PARTICLE OPTICAL DEVICE

PLASMA MONITORING SYSTEM

Processor System, Correction Method, and Correction Program

Fiber Fabry-Perot Cavity Laser Phase Plate For Charged Particle Mic...

Laser Thermal Epitaxy in a Charged Particle Microscope

SAMPLE PIECE RELOCATING DEVICE

METHOD AND APPARATUS FOR NON-INVASIVE SEMICONDUCTOR TECHNIQUE FOR M...

CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD

Inspection System

METHODS FOR DETERMINING THE VIRTUAL SOURCE LOCATION OF A LIQUID MET...

ELECTRON SPECTROMETER CALIBRATION METHOD

CHARGED PARTICLE BEAM APPARATUS

METAL PATTERN INSPECTION METHOD AND FOCUSED ION BEAM APPARATUS

TRANSMISSION CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF ALIGNIN...