Optical arrangements for illuminating the object; optical arrangements for collecting light from the object

Industry

CPC
H01J37/226

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/226Optical arrangements for illuminating the object; optical arrangements for collecting light from the object

Industries

Patents Grantslast 30 patents

Information Patent Grant
Joint electron-optical columns for flood-charging and image-forming...
- Patent number 12,165,838
- Issue date Dec 10, 2024
- KLA Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,869,745
- Issue date Jan 9, 2024
- HITACHI HIGH-TECH CORPORATION
- Minami Shouji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for transferring a focus ring into processing app...
- Patent number 11,869,752
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Kippei Sugita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number RE49784
- Issue date Jan 2, 2024
- ASML Netherlands B.V.
- Weiming Ren
Information Patent Grant
Optical objective lens
- Patent number 11,808,930
- Issue date Nov 7, 2023
- ASML Netherlands B.V.
- Jian Zhang
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
System and method for bare wafer inspection
- Patent number 11,791,127
- Issue date Oct 17, 2023
- ASML Netherlands B.V.
- Wei Fang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated optical and charged particle inspection apparatus
- Patent number 11,742,173
- Issue date Aug 29, 2023
- DELMIC IP B.V.
- Sander Den Hoedt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for transmission electron microscopy cathodoluminescence
- Patent number 11,688,581
- Issue date Jun 27, 2023
- Gatan, Inc.
- John Andrew Hunt
- G01 - MEASURING TESTING
Information Patent Grant
Optical system with compensation lens
- Patent number 11,682,538
- Issue date Jun 20, 2023
- ASML Netherlands B.V.
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device defect detection method using a charged particle beam
- Patent number 11,631,568
- Issue date Apr 18, 2023
- HITACHI HIGH-TECH CORPORATION
- Yasuhiro Shirasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shaped aperture set for multi-beam array configurations
- Patent number 11,615,939
- Issue date Mar 28, 2023
- KLA Corporation
- Tomas Plettner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,610,754
- Issue date Mar 21, 2023
- HITACHI HIGH-TECH CORPORATION
- Katsura Takaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method of preparing integrated circuits for backside pro...
- Patent number 11,605,525
- Issue date Mar 14, 2023
- FEI Company
- James Vickers
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus and setting assisting method
- Patent number 11,587,761
- Issue date Feb 21, 2023
- Jeol Ltd.
- Kazutaka Watakabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and sample observation method using the same
- Patent number 11,551,907
- Issue date Jan 10, 2023
- Riken
- Ken Harada
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam device
- Patent number 11,515,121
- Issue date Nov 29, 2022
- HITACHI HIGH-TECH CORPORATION
- Tomohiko Ogata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam device
- Patent number 11,393,657
- Issue date Jul 19, 2022
- HITACHI HIGH-TECH CORPORATION
- Minami Shouji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection device
- Patent number 11,393,656
- Issue date Jul 19, 2022
- Kioxia Corporation
- Motoki Kadowaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for spatially resolved optical metrology of an io...
- Patent number 11,380,517
- Issue date Jul 5, 2022
- Applied Materials, Inc.
- Gang Shu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,355,308
- Issue date Jun 7, 2022
- HITACHI HIGH-TECH CORPORATION
- Yasuhiro Shirasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,348,757
- Issue date May 31, 2022
- HITACHI HIGH-TECH CORPORATION
- Shuhei Yabu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light guide assembly for an electron microscope
- Patent number 11,335,536
- Issue date May 17, 2022
- FEI Company
- Marek Uncovsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,328,897
- Issue date May 10, 2022
- HITACHI HIGH-TECH CORPORATION
- Minami Shouji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 11,322,331
- Issue date May 3, 2022
- Jeol Ltd.
- Yuta Murakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas flow control for millisecond anneal system
- Patent number 11,255,606
- Issue date Feb 22, 2022
- Mattson Technology, Inc.
- Christian Pfahler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arrayed column detector
- Patent number 11,239,048
- Issue date Feb 1, 2022
- KLA Corporation
- Alan D. Brodie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,239,051
- Issue date Feb 1, 2022
- HITACHI HIGH-TECH CORPORATION
- Mai Yoshihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope, and method for observing measurement sample
- Patent number 11,237,121
- Issue date Feb 1, 2022
- The University of Tokyo
- Shik Shin
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam system and method of measuring sample using s...
- Patent number 11,217,422
- Issue date Jan 4, 2022
- Jeol Ltd.
- Yoshikazu Nemoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical system with compensation lens
- Patent number 11,183,360
- Issue date Nov 23, 2021
- ASML Netherlands B.V.
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DISCHARGING A REGION OF A SAMPLE
- Publication number 20240420917
- Publication date Dec 19, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Roey Levy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20240363306
- Publication date Oct 31, 2024
- HITACHI HIGH-TECH CORPORATION
- Minami SHOUJI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEIGHT SENSING SYSTEM FOR ELECTRON BEAM METROLOGY TOOL
- Publication number 20240355579
- Publication date Oct 24, 2024
- KLA Corporation
- Yeishin Tung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE OPTICAL APPARATUS AND PROJECTION METHOD
- Publication number 20240339294
- Publication date Oct 10, 2024
- ASML NETHERLANDS B.V.
- Marijke SCOTUZZI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED-PARTICLE OPTICAL DEVICE
- Publication number 20240321547
- Publication date Sep 26, 2024
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA MONITORING SYSTEM
- Publication number 20240290590
- Publication date Aug 29, 2024
- SAMSUNG DISPLAY CO., LTD.
- YOUNGGIL PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Processor System, Correction Method, and Correction Program
- Publication number 20240222064
- Publication date Jul 4, 2024
- HITACHI HIGH-TECH CORPORATION
- Mayuka OSAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fiber Fabry-Perot Cavity Laser Phase Plate For Charged Particle Mic...
- Publication number 20240222066
- Publication date Jul 4, 2024
- FEI Company
- Afric Meijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser Thermal Epitaxy in a Charged Particle Microscope
- Publication number 20240161999
- Publication date May 16, 2024
- FEI Company
- Rudolf Geurink
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE PIECE RELOCATING DEVICE
- Publication number 20240087841
- Publication date Mar 14, 2024
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Tatsuya ASAHATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR NON-INVASIVE SEMICONDUCTOR TECHNIQUE FOR M...
- Publication number 20240071710
- Publication date Feb 29, 2024
- FemtoMetrix, Inc.
- Timothy M. Wong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD
- Publication number 20240071716
- Publication date Feb 29, 2024
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Inspection System
- Publication number 20240029994
- Publication date Jan 25, 2024
- Hitachi High-Tech Corporation
- Natsuki TSUNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DETERMINING THE VIRTUAL SOURCE LOCATION OF A LIQUID MET...
- Publication number 20230411109
- Publication date Dec 21, 2023
- FEI Company
- Sean M. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SPECTROMETER CALIBRATION METHOD
- Publication number 20230402250
- Publication date Dec 14, 2023
- ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
- Paolo CATTANEO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20230377837
- Publication date Nov 23, 2023
- HITACHI HIGH-TECH CORPORATION
- Yohei NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL PATTERN INSPECTION METHOD AND FOCUSED ION BEAM APPARATUS
- Publication number 20230326714
- Publication date Oct 12, 2023
- V Technology Co., LTD.
- Michinobu MIZUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSMISSION CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF ALIGNIN...
- Publication number 20230282443
- Publication date Sep 7, 2023
- Shânêl Ondrej
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20230274909
- Publication date Aug 31, 2023
- Hitachi High-Tech Corporation
- Minami SHOUJI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Open type RPS block device
- Publication number 20230260742
- Publication date Aug 17, 2023
- Hea Keun YUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PRODUCING A SAMPLE ON AN OBJECT, COMPUTER PROGRAM PRODUC...
- Publication number 20230260744
- Publication date Aug 17, 2023
- CARL ZEISS MICROSCOPY GMBH
- Heiko Stegmann
- G01 - MEASURING TESTING
Information Patent Application
INTERFERENCE SCANNING TRANSMISSION ELECTRON MICROSCOPE
- Publication number 20230207258
- Publication date Jun 29, 2023
- Hitachi, Ltd
- Toshiaki TANIGAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EMITTER FOR EMITTING CHARGED PARTICLES
- Publication number 20230154725
- Publication date May 18, 2023
- ASML NETHERLANDS B.V.
- Jurgen VAN SOEST
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF OPERATING SCANNING ELECTRON MICROSCOPE (SEM) AND METHOD O...
- Publication number 20230140892
- Publication date May 11, 2023
- Samsung Electronics Co., Ltd.
- Jaehyung AHN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM APPLICATION APPARATUS AND INSPECTION METHOD
- Publication number 20230071801
- Publication date Mar 9, 2023
- HITACHI HIGH-TECH CORPORATION
- Momoyo ENYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Specimen Machining Device and Specimen Machining Method
- Publication number 20220392739
- Publication date Dec 8, 2022
- JEOL Ltd.
- Munehiro Kozuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE INSPECTION SYSTEM AND METHOD USING MULTI-WAVELENGT...
- Publication number 20220375715
- Publication date Nov 24, 2022
- ASML NETHERLANDS B.V.
- Jian ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHAPED APERTURE SET FOR MULTI-BEAM ARRAY CONFIGURATIONS
- Publication number 20220310355
- Publication date Sep 29, 2022
- KLA Corporation
- Tomas Plettner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR DETECTING ONE OR MORE SCANNING CHARGED PAR...
- Publication number 20220238297
- Publication date Jul 28, 2022
- DELMIC IP B.V.
- Lenard Maarten VOORTMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20220216032
- Publication date Jul 7, 2022
- HITACHI HIGH-TECH CORPORATION
- Minami SHOUJI
- H01 - BASIC ELECTRIC ELEMENTS

Optical arrangements for illuminating the object; optical arrangements for collecting light from the object

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Joint electron-optical columns for flood-charging and image-forming...

Charged particle beam device

System and method for transferring a focus ring into processing app...

Apparatus of plural charged-particle beams

Optical objective lens

System and method for bare wafer inspection

Integrated optical and charged particle inspection apparatus

Apparatus for transmission electron microscopy cathodoluminescence

Optical system with compensation lens

Device defect detection method using a charged particle beam

Shaped aperture set for multi-beam array configurations

Charged particle beam device

System and method of preparing integrated circuits for backside pro...

Charged particle beam apparatus and setting assisting method

Electron microscope and sample observation method using the same

Electron beam device

Electron beam device

Inspection device

System and method for spatially resolved optical metrology of an io...

Charged particle beam device

Charged particle beam device

Light guide assembly for an electron microscope

Charged particle beam device

Charged particle beam apparatus

Gas flow control for millisecond anneal system

Arrayed column detector

Charged particle beam device

Electron microscope, and method for observing measurement sample

Charged particle beam system and method of measuring sample using s...

Optical system with compensation lens

Patents Applicationslast 30 patents

DISCHARGING A REGION OF A SAMPLE

CHARGED PARTICLE BEAM DEVICE

HEIGHT SENSING SYSTEM FOR ELECTRON BEAM METROLOGY TOOL

CHARGED-PARTICLE OPTICAL APPARATUS AND PROJECTION METHOD

CHARGED-PARTICLE OPTICAL DEVICE

PLASMA MONITORING SYSTEM

Processor System, Correction Method, and Correction Program

Fiber Fabry-Perot Cavity Laser Phase Plate For Charged Particle Mic...

Laser Thermal Epitaxy in a Charged Particle Microscope

SAMPLE PIECE RELOCATING DEVICE

METHOD AND APPARATUS FOR NON-INVASIVE SEMICONDUCTOR TECHNIQUE FOR M...

CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD

Inspection System

METHODS FOR DETERMINING THE VIRTUAL SOURCE LOCATION OF A LIQUID MET...

ELECTRON SPECTROMETER CALIBRATION METHOD

CHARGED PARTICLE BEAM APPARATUS

METAL PATTERN INSPECTION METHOD AND FOCUSED ION BEAM APPARATUS

TRANSMISSION CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF ALIGNIN...

Charged Particle Beam Device

Open type RPS block device

METHOD FOR PRODUCING A SAMPLE ON AN OBJECT, COMPUTER PROGRAM PRODUC...

INTERFERENCE SCANNING TRANSMISSION ELECTRON MICROSCOPE

EMITTER FOR EMITTING CHARGED PARTICLES

METHOD OF OPERATING SCANNING ELECTRON MICROSCOPE (SEM) AND METHOD O...

ELECTRON BEAM APPLICATION APPARATUS AND INSPECTION METHOD

Specimen Machining Device and Specimen Machining Method

CHARGED PARTICLE INSPECTION SYSTEM AND METHOD USING MULTI-WAVELENGT...

SHAPED APERTURE SET FOR MULTI-BEAM ARRAY CONFIGURATIONS

APPARATUS AND METHOD FOR DETECTING ONE OR MORE SCANNING CHARGED PAR...

CHARGED PARTICLE BEAM DEVICE